KR20010101706A - Cleaning sponge roller - Google Patents

Abstract

The present invention is a PVAt cleaning sponge roller capable of improving durability without impairing cleaning performance, wherein the cleaning sponge roller 1 is made of a polyvinyl acetal porous material having elasticity in a wet state. It has a substantially cylindrical roller body 3 and the some processus | protrusion 5 integrally formed on the outer peripheral surface 3a of the roller body 3, and the top part 5a of the processus | protrusion 5 is rotationally contacted with the to-be-cleaned body. To be cleaned, and the projection 5 extends from the outer circumferential surface 3a of the roller body 3 so that the tip is tapered and the top of the tip surface 11b of the protrusion 11 is extended. It is characterized by including the protruding end portion 13 having almost the same cross-sectional shape up to (5a).

Description

Sponge Roller for Cleaning {CLEANING SPONGE ROLLER}

In the manufacturing process of semiconductor device, photomask, liquid crystal glass substrate, etc. during hard disk, glass disk, silicon wafer, CMP processing process, various abrasive particles such as silicon oxide, alumina, ceria etc. to finish the surface with extremely high precision High-precision polishing, so-called polishing processing is performed using. Since the surface of the polished hard disk, the silicon wafer, or the like to be polished is contaminated by the abrasive particles or the abrasive layer, it is necessary to sufficiently clean the surface before carrying out the following process.

As a method for cleaning a silicon wafer, RCA cleaning using a mixture of ammonia water and hydrogen peroxide, dilute fluoric acid, and a mixture of hydrochloric acid and hydrogen peroxide in this order is known. Moreover, in the cleaning after a polishing process such as a hard disk or a silicon wafer, a method of using a cleaning sponge roller made of a polyvinyl acetal-based (hereinafter abbreviated as PVAt-based) porous material as a material and having a plurality of protrusions on its outer surface is known. . Specifically, the top of the projection of the sponge roller is brought into rotational contact with the cleaning surface of the object to be cleaned. As a result, the cleaning surface is brushed by the projections, and the object to be cleaned is washed well.

The projection of the sponge roller during cleaning frequently repeats the deformed state pressed horizontally by the object to be cleaned and the deformed release state away from the object to be cleaned, thereby brushing the cleaning surface. At this time, the tensile force acting on the protrusion concentrates on the base of the protrusion, and the vicinity of the base of the protrusion is greatly deformed. As a result, the proximal end of the protrusion is easily cut. In addition, since the whole sponge roller is integrally formed, when a large number of projections are cut | disconnected, the sponge roller needs to be replaced.

This problem can also be solved by forming the whole protrusion large and increasing its strength. By the way, when the whole processus | protrusion is formed large, a desired brushing effect cannot be acquired and there exists a possibility of causing the fall of a washing | cleaning effect.

Then, an object of this invention is to provide the PVAt type cleaning sponge roller which can aim at the improvement of durability, without impairing cleaning performance.

In the manufacturing process of substrates such as magnetic discs, magnetic discs, semiconductor wafers, etc., the present invention extremely efficiently removes fine particles adhering to the surface of the object to be cleaned such as abrasive particles, cutting layers, and polishing layers after processing such as polishing. The present invention also relates to a cleaning sponge roller which can be removed without damaging the surface of the object to be cleaned.

(A) is a partial sectional drawing which shows the sponge roller for cleaning which concerns on 1st Embodiment of this invention,

(B) is an enlarged perspective view showing the projection of the sponge roller of (a) of FIG.

(C) is a cross-sectional view of FIG.

2 is a perspective view showing a part of the mold for shaping the sponge roller of FIG. 1 by breaking;

3 is a cross-sectional view showing a manufacturing method of the sponge roller of FIG. 1;

4 is a side view schematically showing a state of use of the sponge roller of FIG. 1;

5 is an enlarged view of a main part of FIG. 4;

6 is an enlarged view of a main part showing a state of use of the projections to be compared;

7 is a cross-sectional view showing a projection of a sponge roller according to a second embodiment of the present invention, and

8 is a graph showing the results of the comparison.

In order to achieve the above object, the present invention is made of a polyvinyl acetal porous material having elasticity in a wet state, and has a substantially cylindrical roller body and a plurality of protrusions integrally formed on the outer circumferential surface of the roller body, A cleaning sponge roller for cleaning the object to be cleaned by rotationally contacting the top of the protrusion with the object to be cleaned, wherein the protrusion extends from an outer circumferential surface of the roller body and has a tapered tip, and a tip of the protrusion. And a protruding end having substantially the same cross-sectional shape from the top to the top.

The protruding portion may have a substantially truncated cone shape, and the protruding end may have a substantially cylindrical shape.

In the above configuration, the protruding portion of the protrusion has an outer surface formed in a shape that gradually ends toward the outer peripheral surface of the roller body, and the cross-sectional area of the protruding portion has a maximum at the base end (the boundary between the outer peripheral surface of the roller body and the protruding portion). And gradually decreases toward the protruding end. For this reason, when the projection is pressed in the lateral direction, the stress concentration is relaxed in the vicinity of the proximal end of the protrusion where the tension force is concentrated, so that the deformation is dispersed throughout the protrusion and the durability of the protrusion is improved.

In addition, since the durability of the protrusion can be improved without affecting the shape of the protruding end, the protruding end in contact with the object to be cleaned can be freely set to the size shape optimal for brushing.

In addition, the cleaning sponge roller comprised of the polyvinyl acetal porous sponge is obtained by reacting the mixed liquid containing a raw material and having viscosity in a mold. The mold corresponding to the sponge roller of the said structure has a 1st space for forming a roller body, and several 2nd space for forming a processus | protrusion. Each second space has a base forming space that communicates with the first space and forms a protruding portion, and an end forming space that communicates with the base forming space and forms a protruding end portion. The base forming space has an inclined surface that widens toward the first space in the end forming space. At the time of manufacture of the sponge roller, the mixed liquid is injected into the first space and flows into the second space from the first space. At this time, since the base forming space of the second space has an inclined surface widening toward the first space, the mixed liquid Is guided to the inclined surface of the base forming space and flows smoothly into the end forming space. At the same time, the air in the second space moves smoothly from the end forming space to the first space, and is discharged from the first space to the atmosphere. As a result, the mixed liquid can be reliably filled to the end of the second space, whereby the manufacturing cost can be reduced by improving the productivity.

As for the height from the outer peripheral surface of the said roller body to the front-end | tip of the said projection part, 1/2 or less of the height of the said projection is suitable, and 1/5 or more is more suitable.

If the height of the protruding portion exceeds 1/2 of the height of the entire protruding portion, the deformation amount of the protruding end may be suppressed to be small, and the brushing effect at the time of washing may be insufficient. If the height of the protruding portion is less than 1/5, sufficient strength cannot be obtained. Because there is a possibility.

Further, in any cross section, the intersection angle between the straight line connecting the proximal end and the distal end of the outer surface of the protrusion and the outer peripheral surface of the roller body is preferably 30 ° or more and 60 ° or less.

When the crossing angle is less than 30 °, the protruding portion is greatly widened toward the outer circumferential surface, the area of the lower end surface of the protruding portion is increased, and the total number of protrusions that can be formed on the outer circumferential surface of the roller body is limited. This is because there is a possibility that sufficient strength cannot be obtained when the crossing angle exceeds 60 °.

In addition, the shape of the outer surface of the protruding portion may be a linear inclined plane or a curved inclined plane.

EMBODIMENT OF THE INVENTION Hereinafter, 1st Embodiment of this invention is described based on drawing.

Fig. 1A is a partial sectional view showing the entire cleaning sponge roller according to the first embodiment of the present invention, and Fig. 1B is an enlarged perspective view showing the projection of the sponge roller of Fig. 1A. 1 (c) is a cross-sectional view of FIG. 1 (b).

The cleaning sponge roller 1 is made of a polyvinyl acetal porous material (PVAt porous material) having elasticity in a water-containing state. PVAt-based porous materials are cured in a dry state and softened in a wet state. Moreover, it is excellent in water absorptivity and water retention property, shows favorable flexibility and suitable rebound elasticity at the time of wetness, and is also excellent in abrasion resistance.

As shown in FIG. 1A, the sponge roller 1 has a substantially cylindrical roller body 3 and a plurality of protrusions 5 integrally formed on the outer circumferential surface 3a of the roller body 3. Has

As shown in (b) and (c) of FIG. 1, the protrusion 5 includes a protrusion 11 and a protrusion 11 that protrude integrally from the outer circumferential surface 3a of the roller body 3. Has a protruding end portion (13) extending integrally from the front end surface (11b). The base end surface 11a of the protrusion part 11 is contained in the outer peripheral surface 3a of the roller body 3. The distal end face 11b of the protruding portion 11 and the proximal end face 13a of the protruding end portion 13 almost completely coincide with each other. The protruding portion 11 has an inclined surface (outer surface) 15 which is formed toward the outer circumferential surface 3a of the roller body 3 and has a shape in which the tip is gradually divided.

The protruding portion 11 is formed in a substantially cone shape in which the tip is tapered from the base end face 11a toward the tip end face 11b. The height h from the proximal end surface 11a of the protruding portion 11 to the distal end surface 11b is the height of the protrusion 5 (the line of the protruding end 13 at the proximal end surface 11a of the protruding portion 11). It is set in the range of 1/5 or more and 1/2 or less of the height to the end surface 13b) H. As shown in FIG. 1C, a straight line 17 connecting the proximal end 15a of the inclined surface 15 and the distal end 15b in an arbitrary cross section substantially coincides with the inclined surface 15 and the straight line 17. And orthogonal angle (theta) 1 with the outer peripheral surface 3a of the roller body 3 are set in the range of 30 degrees or more and 60 degrees or less.

The protruding end portion 13 extends in a substantially vertical direction with respect to the outer circumferential surface 3a of the roller body 3, and has a substantially circumferential shape having substantially the same cross-sectional shape from the proximal end surface 13a to the leading end surface 13b. Formed. The front end face 13b of the protruding end 13 intersects substantially perpendicularly to the outer circumferential face of the protruding end 13.

The cleaning sponge roller 3 is, for example, mixed with one or more polyvinyl alcohol (raw material) having a saponification of 80% or more at an average degree of polymerization of 300 to 2000 to form an aqueous solution. Inorganic acids as a catalyst and starch as pore-forming materials are added, and these mixed liquids are injected into the mold 21 as shown in FIG. 2, reacted at 50 to 80 ° C, separated from the mold 21, and then washed with water ( It is obtained by removing a pore forming material etc. by water.

The mold 21 has an outer shape 23, an inner shape 25, a bottom plate 27, a core rod 29, and a cap 31. The outer mold 23 and the inner mold 25 are both formed in a cylindrical shape. The inner mold 25 has an outer diameter equal to or slightly smaller than the inner diameter of the outer mold 23 and is inserted into the outer mold 23. The mandrel 29 is inserted almost in the center of the mold 25. The bottom plate 27 blocks the lower ends 23a and 25a of the outer mold 23 and the inner mold 25 and simultaneously supports the lower end 29a of the mandrel 29. The cap 31 is fitted to the inner circumferential surface of the upper end 23b of the contour 23. The mandrel 29 is positioned by the bottom plate 27 and the cap 31.

As shown in FIG. 3, a substantially cylindrical first space 33 for forming the roller body 3 is partitioned between the inner circumferential surface of the inner mold 25 and the outer circumferential surface of the mandrel 29. The inner mold 25 is provided with a plurality of through holes (second spaces) 35 for forming the projections 5. Each through hole 35 communicates with the first space 33 to form the protruding portion 11, and the end forming the protruding end portion 13 to communicate with the base forming space 37. It has a formation space 39. The base forming space 37 has an inclined surface 41 that extends from the end forming space 39 toward the first space 33.

The mixed liquid is injected into the first space 33 from the mold nozzle 43 inserted between the outer shape 23 and the cap 31, and flows into each through hole 35 in the first space 33. At this time, the mixed liquid is guided to the inclined surface 41 widening toward the first space 33 and smoothly flows into the end forming space 39. At the same time, the air in the through hole 35 smoothly moves from the end forming space 39 to the first space 33 and is discharged to the atmosphere at the top of the first space 33. As a result, the mixed liquid is surely filled to the end of the through hole 35 (end forming space 39). Therefore, productivity improves and manufacturing cost is reduced.

As the PVAt-based porous material, one having a 30% compressive stress of 15 g / cm 2 or more and 150 g / cm 2 or less in a proper moisture state is preferable. The proper water content state refers to a water content state in which the PVAt-based porous material can exhibit an appropriate elasticity, and a water content (weight% of water to dry weight) is obtained in a range of approximately 100% to 1000%. In addition, 30% compressive stress is cut into a PVAt-based porous material in a proper function state so that the distance (height in the longitudinal direction) between both end faces is 30 mm, and it is set on a digital load measuring instrument so that a load is applied to the entire cross section. The load when 30% (9 mm) was pressed in the direction is measured, and the load is obtained as the value obtained by dividing the area by the cross section.

The upper limit of the preferred range of 30% compressive stress in the proper water content state is 150 g / cm 2 because the PVAt-based porous material having a value greater than 150 g / cm 2 is too hard to exhibit the elasticity required for brushing. On the contrary, the lower limit of the preferred range of 30% compressive stress in the proper water content state is 15 g / cm 2, and the PVAt-based porous material having this value smaller than 15 g / cm 2 is so flexible that distortion occurs when the roller body 3 is rotated. Because.

As the PVAt-based porous material, those having a porosity of 85% or more and 95% or less and an average pore diameter of 10 μm or more and 200 μm or less are suitable.

This is because if the porosity is less than 85%, the flexibility in wetness is insufficient, and if the porosity is greater than 95%, the practical strength is insufficient and it is not suitable for cleaning use. If the average pore diameter is smaller than 10 mu m, the elasticity at the time of wetness is insufficient, and a sufficient brushing effect cannot be obtained. If the average pore diameter exceeds 200 mu m, the mesh is too rough and unsuitable for fine cleaning.

In addition, the porosity here is a value calculated by the following formula (1) by measuring the PVAt type porous material of the rectangular parallelepiped fully dried by the dryer with a dry automatic density meter, and the apparent volume and true volume of a rectangular parallelepiped.

Porosity (%) = (apparent volume-true volume) / apparent volume × 100

In addition, an average pore diameter is a measured value based on ASTM (Desirnation: D4404-84), and is a value calculated | required by the mercury porosimetry porosity measurement using the mercury polomat by PORUS MATERIALS, INC.

Next, washing | cleaning using the sponge roller 1 is demonstrated.

As shown in FIG. 4, the rotating shaft 7 is inserted into the hollow portion of the sponge roller 1, and the roller body 3 is fixed with respect to the rotating shaft 7. The cleaning of the to-be-cleaned body 9 is performed by making the top part 5a of the processus | protrusion 5 which rotates moving with the rotation of the rotating shaft 7 contact the cleaning surface 9a of the to-be-cleaned body 9. The top part 5a of the projection 5 is constituted by the tip part including the tip face 13b of the protruding end part 13. The top 5a of the projection 5 frequently repeats the deformed state (see FIG. 5) pressed horizontally by the object to be cleaned 9 and the deformed state apart from the object 9 to clean the cleaning surface 9a. Brush it. The to-be-cleaned body 9 is wash | cleaned favorably by the brushing action of the processus | protrusion 5.

Here, as shown in FIG. 6, there is a substantially cylindrical protrusion 53 having a substantially same cross-sectional shape from the base end surface 53a on the outer peripheral face 3a of the roller body 3 to the tip end surface 53b. In the case where the sponge roller 51 is used, the tensile force acting on the projection 53 in contact with the cleaning surface 9a concentrates on the base end surface 53a and greatly deforms locally near the base end surface 53a. In addition, since the outer circumferential surface 3a is inclined in an arc shape toward the side opposite to the protruding direction of the protrusion 53 rather than a perfect plane, it is easier to deform in the transverse direction than when protruding from a safe plane. For this reason, the front end part 55 of the base end surface 53a is easily cut | disconnected.

On the other hand, even when the sponge roller 1 of the present embodiment is used, the tensile force acting on the protrusion 5 in contact with the cleaning surface 9a in the same manner as in the case of FIG. 6 is based on the proximal end of the protrusion 5 (projection portion 11). Concentrate on the base end surface 11a). However, as shown in FIG. 5, the protrusion part 11 has the outer surface 15 formed in the shape which gradually ends toward the outer peripheral surface 3a of the roller body 3, and the cross-sectional area of the protrusion part 11 is shown. Is maximized at the proximal end 11a and gradually decreases toward the protruding end 13, so that stress concentration is relaxed in the vicinity of the proximal end 11a where the tension force concentrates when the projection 5 is pressed in the transverse direction. . Therefore, the deformation is distributed throughout the protrusions 11, so that cutting in the vicinity of the front end 45 in the moving direction of the base end face 11a is reliably prevented, and the durability of the protrusions 5 is improved.

Moreover, since the durability of the protrusion 5 can be improved without affecting the shape of the protruding end 13, the protruding end 13 in contact with the object to be cleaned 9 can be freely set to the size shape optimal for brushing. have.

As described above, according to the present embodiment, when the top 5a of the protrusion 5 is in contact with the object to be cleaned 9 and the protrusion 5 is pressed in the horizontal direction, the proximal end 11a of the protruding portion 11 Since stress concentration is alleviated in the vicinity, deformation is dispersed throughout the protruding portion 11 so that the durability of the protrusion 5 is improved.

Moreover, since the durability of the protrusion 5 can be improved without affecting the shape of the protruding end 13, the protruding end 13 in contact with the object to be cleaned 9 can be freely set in a size shape optimal for brushing. This makes it possible to improve the durability of the protrusions 5 without impairing the cleaning performance.

In addition, the mold 21 into which the mixed liquid is injected at the time of manufacture of the sponge roller 1 includes a base forming space 37 which forms the first space 33 and the protrusion 11 for forming the roller body 3; A through hole 35 for forming the projection 5 including an end forming space 39 forming the protruding end 13, and the base forming space 37 is an inclined surface widening toward the first space 33; Has 41. The mixed liquid injected into the first space 33 is guided to the inclined surface 41 and smoothly flows into the end forming space 39, and the air in the through hole 35 flows into the first space 33 in the end forming space 39. Move smoothly into the atmosphere and release into the atmosphere. Therefore, the mixed liquid is reliably filled to the end where the through hole 35 is closed, so that the manufacturing cost can be reduced by improving the productivity.

Next, the projection 5 (object sample) of the sponge roller 1 as shown in FIG. 1B and the projection 53 (comparative sample) of the sponge roller 51 as shown in FIG. Tensile strength test will be described.

PVAt-based porous materials with a porosity of 90%, average pore diameter of 130㎛, and 30% compressive stress of 60g / cm2 were used for both the sample and the comparative sample.

The projection 5 of the sample has a total height H of 4.5 mm, an outer diameter of 7.5 mm of the protruding end 13, a height h of the protrusion 11 of 1.5 mm, and an outer surface 3a. The cross-angle angle θ of the inclined surface 11 is about 45 ° (the outer diameter of the proximal end surface 11a of the protrusion 11 is 10.5 mm), and the projection 53 of the comparative sample has a total height of A 4.5mm and 7.5mm external diameter was used.

The experiment is a limit in which the projections 5 and 53 are clipped with clips (not shown) while the roller body 3 of each sample is held by a chuck (not shown), and the cuttings are formed in the projections 5 and 53. The tensile strength of the clip was measured until it was measured.

As shown in FIG. 8, the tensile strength of the comparative sample was 1.59 kg, the tensile strength of the target sample was 1.85 kg, and the tensile strength of the target sample was increased by 16.4% compared to the comparative sample.

Next, a second embodiment of the present invention will be described.

7 is an enlarged cross-sectional view of a main part showing the projection 63 of the PVAt-based cleaning sponge roller 61 according to the present embodiment. In addition, the same code | symbol is attached | subjected to the same component part as 1st Embodiment, and the detailed description is abbreviate | omitted.

The projection 63 of the present embodiment has a curved portion between the protrusion 65 having the curved outer surface 67 and the outer circumferential surface of the protruding end 13 and the distal end surface 13b. The point where 59 is provided differs from the first embodiment.

In the cross section shown in FIG. The crossing angle θ ₂ is set to 30 ° or more and 60 ° or less.

According to this embodiment, the durability of the projection 63 can be improved without impairing the cleaning performance as in the first embodiment, and the manufacturing cost can be reduced by the improvement of the productivity.

In addition, although the cross-sectional shape of the protrusion parts 11 and 65 and the protrusion end part 13 demonstrated the substantially circular thing in 1st and 2nd embodiment, this invention is not limited to this and this cross section is rectangular. It can be set to various shapes such as oval or long circle.

As described above, according to the present invention, when the top of the protrusion contacts the object to be cleaned and the protrusion is pressed laterally, the stress concentration is alleviated in the vicinity of the proximal end of the protrusion, so that deformation is dispersed throughout the protrusion so that the durability of the protrusion is improved. do.

Also, since the durability of the projection can be improved without affecting the shape of the projection, it is possible to freely set the projection in contact with the object to be cleaned to a size shape that is optimal for brushing, thereby maintaining the durability of the projection without compromising cleaning performance. Improvement can be aimed at.

In addition, the mold into which the mixed liquid is injected during the production of the sponge roller includes a first space for forming a roller body, a base forming space for forming a protrusion, and an end forming space for forming a protrusion end; The space is provided, and the base forming space has an inclined surface that is widened toward the first space. The mixed liquid injected into the first space is guided to the inclined surface and smoothly flows into the end forming surface, and the air in the space is smoothly moved from the end forming space to the first space and discharged to the atmosphere. Therefore, the mixed liquid can be reliably filled to the end of the second space, whereby the manufacturing cost can be reduced by the improvement of the productivity.

Claims (3)

It is composed of a polyvinyl acetal porous material having elasticity in a wet state, and has a plurality of protrusions integrally formed on a cylindrical roller body and an outer circumferential surface of the roller body, and the top of the protrusion is in rotational contact with the object to be cleaned. In the cleaning sponge roller for cleaning the object to be cleaned, The protrusions extend from the outer circumferential surface of the roller body and have a tapered end portion; And a protruding end portion having the same cross-sectional shape from the tip of the protruding portion to the top portion. The method of claim 1, The protruding portion is formed in the shape of a truncated cone, Sponge roller for cleaning, characterized in that the projecting end is formed in a cylindrical shape. The method of claim 1, The height from the outer circumferential surface of the roller body to the tip of the protrusion is 1/5 or more and 1/2 or less of the height of the protrusion, Sponge roller for cleaning, characterized in that the intersection angle between the straight line connecting the proximal end and the front end of the outer surface of the protrusion and the outer peripheral surface of the roller body in any cross section.