JP3680185B2 - Cleaning roller - Google Patents
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- JP3680185B2 JP3680185B2 JP20879396A JP20879396A JP3680185B2 JP 3680185 B2 JP3680185 B2 JP 3680185B2 JP 20879396 A JP20879396 A JP 20879396A JP 20879396 A JP20879396 A JP 20879396A JP 3680185 B2 JP3680185 B2 JP 3680185B2
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- 238000004140 cleaning Methods 0.000 title claims description 62
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 claims description 3
- 125000002777 acetyl group Chemical class [H]C([H])([H])C(*)=O 0.000 claims description 3
- 239000011148 porous material Substances 0.000 claims description 3
- 229920002554 vinyl polymer Polymers 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 16
- 239000002245 particle Substances 0.000 description 11
- 239000011538 cleaning material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 239000002649 leather substitute Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 239000012209 synthetic fiber Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Images
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- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
【０００１】
【産業上の利用分野】
本発明は、被洗浄体の表面を損傷すること無く、効果の高い洗浄が可能であり、しかも長時間の使用に安定した洗浄効果が発揮できる、ライフの長い洗浄用ローラに関する。
【０００２】
【従来の技術】
金属、ガラス、プラスチック等においてその表面を極めて精度の高い面、所謂鏡面仕上げに仕上げる為に、旋盤、砥石、あるいは遊離砥粒を用いて段階的に高精度に仕上げていく場合、各段階における切削屑、研磨屑、砥石あるいは空気中又は研磨液中の塵埃、夾雑物が次工程に至るまでの残留粒子類を各段階毎に完全に除去する必要がある。
【０００３】
従来これ等の付着物の洗浄除去には細い棒状の中芯の周囲に合成繊維、例えばナイロンのモノフィラメントを多数植毛した洗浄用ブラシローラや外周にスェード調合成皮革を貼付した円筒状ローラを用い、洗浄用の液体、例えば水、洗剤を含んだ水、あるいは有機溶剤等を連続的に供給しつつ、該ローラを回転させて被洗浄体の表面を擦過し付着物を除去する方法がとられていた。しかしこれ等従来のローラは親水性に乏しい上に剛性が強く、これ等を回転させて被洗浄体の表面を擦過した場合、その毛先や脱落物が被洗浄体を損傷したり汚染したりする欠点を有し、洗浄効果も不十分で残留粒子を完全に除去する能力に欠けていた。
【０００４】
そこで発明者等は、親水性及び柔軟性に富み、擦過する際に被洗浄体に与える損傷が極めて少なく且つ優れた洗浄効果を有するものとして、ポリビニルアセタール系（以下ＰＶＡｔと略記する）多孔質体を素材とし、その表面に突起を多数設けた洗浄用ローラを考案し、これを用いる洗浄方法を既に提案している。またその後、洗浄面である突起をスパイラル状に配列することにより、より洗浄効果の高い改善案についても提案されている。
【０００５】
【発明が解決しようとする課題】
前記従来の方法でも、一般的な洗浄分野における洗浄材料については十分に機能するものであったが、近年、シリコンウェハー等の製造工程において高洗浄度を要求される洗浄分野における洗浄材料としては、洗浄の均一性を解決する手段としては、十分といえるものではなかった。
【０００６】
前記従来の方法では、突起の形状が円柱状であるがために、ローラを回転させて被洗浄体の表面を擦過した時に、突起が回転方向とは異なる方向にはねて洗浄残しが生じてしまうということが起こり、そのため、被洗浄体の表面に極めて微量な斑模様が発生することがあった。また、この問題を解決するためにローラーの長さ方向に溝を切ったものも考案したが、今度は被洗浄体の表面を擦過した時に、粒子を払う力にムラが出来てしまいかえって洗浄能力を低下させることになった。
【０００７】
また洗浄ムラ以外でも、比較的多くの洗浄時間を要するものである為、より短時間で且つ高精度な洗浄効果を得る洗浄材料が求められていた。
【０００８】
また、洗浄用ローラの回転数が大きい洗浄条件下での使用、被洗浄物との接触圧力が高い洗浄条件下での使用、あるいは要求洗浄度としてはそれ程高くはないが、その分長期間使用する用途、例えば液晶用硝子の洗浄工程等においては、従来の洗浄用ローラの洗浄面である突起の形状では、強度が不十分であり、突起が洗浄中に欠損、脱落する等の問題が発生し、長時間その洗浄効果を維持する事が出来ない、あるいは、場合によりこの脱落した洗浄材料が逆汚染の原因となる様な問題も発生している。
【０００９】
本発明の目的は、上記従来の問題点に留意し、短時間で均一且つ高精度な洗浄効果を得、しかも長時間その洗浄効果を維持する事が可能な洗浄材料を提供することにある。
【００１０】
【課題を解決するための手段】
これらの問題を解決するべく、洗浄面である突起の形状について鋭意研究を行なった結果、本発明は洗浄用ローラの表面に形成された洗浄面である多数の突起の形状を、長円状にし、かつ一つの列において複数個配設させるとともに、一列上の突起間に生じた隙間の位置には、次の列において、必ず突起を配設させることにより二つの問題を解決させた。
【００１１】
一つは、突起が円柱状である時には理論的には洗い残しがないように、同一列上の突起間に生じた隙間の位置には次の突起が配設されていたが、ローラを回転させて被洗浄体の表面を擦過した時に、突起が回転方向とは異なる方向にはねてしまうために実使用においては洗い残しが生じることもあったが、長円状のものでは回転方向にのみはねるので、理論的にも実使用においても洗い残しがなくなったことである。
【００１２】
二つめは、溝切り形状では場所よって粒子を払う力にムラがあったが、長円の長さをある範囲内で設定することにより、どの突起でも粒子を払う力が同じものになったことである。
【００１３】
長円状の突起の形状については、突起の幅１に対して長さ２以上の比率で、高さが幅１に対して１以下の比率でさらに、その幅は洗浄用ローラの直径に対して１／１０から１／２０の比率で形成されたものが、前記問題点を解決する結論に達した。
【発明の実施の形態】
以下、本発明の実施の形態につき、実施例、比較例を挙げて説明する。
【００１４】
【実施例１】
気孔率約９０％、平均気孔径約１３０μｍのＰＶＡｔ系多孔質体で、その半径が突起部分を含めて６０ｍｍ、長さ１５０ｍｍのものを用いて、突起の長さを幅に対して変化させていった時の洗浄実験を行なったものである。
試験方法はディスクに用いるアルミ円板を遊離砥粒で最終研磨し、流水をもって粗洗浄したものを検体として用い、本発明に係わる各種突起形状をもつ洗浄用ローラを用いて洗浄実験を行なう。この時、洗浄液は、粒子コントローラを行なった純水を用い、洗浄用ローラの前後でシャワー状に被洗浄体にかかる構造とした。実験条件は次の通りで、５回の試験の平均値をとった。
アルミ円板の送り速度 ＝５ｍ／ｍｉｎ
洗浄用ローラの回転速度＝２００ＲＰＭ
接 圧 ＝１０ｇ／ｃｍ2
あらかじめ所定の粒子数を想定しておき、それに要した時間と、一定時間ごとに突起をマイクロスコープにて観察し、突起に欠損が発生するまでの時間によって評価を行なった。結果を表１に示す。
表１からわかるように、突起の幅を１とした時の長さの比率が１を超えるものはいずれも洗浄効果がでるまでの時間（以後、「効果時間」と呼ぶことにする）が短縮されるという結果になった。また、突起が欠落するまでの時間（以後、「ライフ」と呼ぶことにする）はいずれも長くなったことから、突起の長さは幅に対して長いほうが、１つの突起が１回に粒子を払い取る力が大きくなり、より多くの粒子が短時間で除去されることが判明した。さらに、長さが長い分だけ突起の回転方向に対する強度が増すので、ライフアップにもつながることになる。
【００１５】
【表１】
【実施例２】
実施例１において効果のあった形状の洗浄用ローラに対して下記条件にて試験および評価を行なった。結果を表２に示す。下記条件以外は実施例１と同様。
突起の高さ＝幅１に対して、高さの割合を０．６，０．８，１．０，
１．２，１．４と変化させたもの
表２からわかるように、突起の幅を１とした時の高さの比率が１を超えないものついては、いずれの条件においても効果時間が短縮されたが、比率が１を超えるものについては、いずれも効果時間が長くなった。また、ライフにおいては突起の長さが長い分どの条件でも長くなるという結果を示した。このことから、突起の高さは幅に対する比率が１よりも小さいほうが、突起の、粒子を払う力が大きくなるので洗浄効果が高まり、かつライフも長くなることが判明した。
【００１７】
【表２】
【実施例３】
実施例１及び実施例２の結果から効果のあった形状の洗浄用ローラに対して下記条件のものを用いる以外は実施例１と同様にして試験及び評価を行なった。結果を表３に示す。
突起の幅＝洗浄用ローラの直径に対して、１／３，１／５，１／１０，
１／１５，１／２０，１／３０と変化させたもの
これによると、突起の幅が直径の５分の１よりも大きいものは、突起の幅が広すぎるために本来の「粒子を払う」という行為が行われずに、粒子を引きずる形になってしまうために粒子が洗浄用ローラの組織に入り込みやすくなり、突起は欠損しないものの、目詰まりを起こしてしまうことがわかった。また、突起の幅が直径２０分の１よりも小さいものは、逆に粒子を払う力が弱いために洗浄効果が低下するということになってしまう。
【００１９】
【表３】
【比較例】
従来の、突起が円形状のものを用いて評価を行なった。条件は実施例１と同じ
である。結果を表１に示す。また、突起の配置のねじれ角度についてはローラの
回転軸に対し、４５度以上あればその作用に差がない。
【００２１】
【発明の効果】
本発明によれば、短時間で均一且つ高精度な洗浄効果が得られ、また突起の強度が向上するため、長時間その洗浄効果を維持することが可能となる。
【図面の簡単な説明】
【図１】 本発明の洗浄用ローラの説明図である。
（ａ）洗浄用ローラの正面図である。
（ｂ）（ａ）のＡ−Ａ´断面図である。
【図２】 本発明の洗浄用ローラの他の例の説明図である。
【図３】 洗浄時における、突起の形状変化の説明図である。
【符号の説明】
１ 洗浄用ローラ
２ 突起[0001]
[Industrial application fields]
The present invention relates to a cleaning roller having a long life that can perform highly effective cleaning without damaging the surface of an object to be cleaned and can exhibit a stable cleaning effect for a long period of use.
[0002]
[Prior art]
When finishing the surface of metal, glass, plastic, etc. with a highly accurate surface, so-called mirror finish, using a lathe, a grindstone, or loose abrasive grains in stages, cutting at each stage It is necessary to completely remove the residual particles until the next process of dust, polishing scraps, grindstones, dust in the air or polishing liquid, and contaminants to the next process.
[0003]
Conventionally, these deposits were washed and removed using a cleaning brush roller in which a large number of synthetic fibers, such as nylon monofilaments, were planted around a thin rod-shaped core, and a cylindrical roller with a suede-like synthetic leather affixed to the outer periphery. While continuously supplying a cleaning liquid such as water, water containing a detergent, or an organic solvent, the roller is rotated to rub the surface of the object to be cleaned to remove the deposits. It was. However, these conventional rollers have poor hydrophilicity and strong rigidity. When these rollers are rotated and rubbed on the surface of the object to be cleaned, the hair tips and fallen objects may damage or contaminate the object to be cleaned. However, the cleaning effect was insufficient and the ability to completely remove residual particles was lacking.
[0004]
Accordingly, the inventors have described that a polyvinyl acetal-based (hereinafter abbreviated as PVAt) porous body that is rich in hydrophilicity and flexibility, has very little damage to the object to be cleaned when it is rubbed, and has an excellent cleaning effect. Has been devised, and a cleaning method using this has already been proposed. Further, an improvement plan with a higher cleaning effect has been proposed by arranging the protrusions as the cleaning surface in a spiral shape.
[0005]
[Problems to be solved by the invention]
Even in the conventional method, the cleaning material in the general cleaning field functioned sufficiently, but in recent years, as a cleaning material in the cleaning field that requires a high degree of cleaning in the manufacturing process of a silicon wafer or the like, It was not sufficient as a means for solving the uniformity of cleaning.
[0006]
In the conventional method, since the shape of the protrusion is a columnar shape, when the roller is rotated and the surface of the object to be cleaned is rubbed, the protrusion is splashed in a direction different from the rotation direction, leaving a cleaning residue. As a result, an extremely minute spot pattern may occur on the surface of the object to be cleaned. In addition, to solve this problem, we devised a roller cut in the length direction of the roller, but this time, when the surface of the object to be cleaned is rubbed, unevenness is generated in the force of removing particles, and the cleaning ability is changed. Will be reduced.
[0007]
In addition to cleaning unevenness, since a relatively long cleaning time is required, there has been a demand for a cleaning material that can achieve a cleaning effect in a shorter time and with higher accuracy.
[0008]
Also, use under cleaning conditions where the number of rotations of the cleaning roller is high, use under cleaning conditions where contact pressure with the object to be cleaned is high, or the required cleaning degree is not so high, but it is used for a long period of time. For example, in the cleaning process of glass for liquid crystals, the shape of the protrusions, which are the cleaning surface of the conventional cleaning roller, is insufficient in strength, causing problems such as protrusions missing or falling off during cleaning. However, there is a problem that the cleaning effect cannot be maintained for a long time, or in some cases, the dropped cleaning material causes back contamination.
[0009]
An object of the present invention is to provide a cleaning material capable of obtaining a uniform and highly accurate cleaning effect in a short time and maintaining the cleaning effect for a long time while paying attention to the above-mentioned conventional problems.
[0010]
[Means for Solving the Problems]
In order to solve these problems, as a result of intensive research on the shape of the protrusion that is the cleaning surface, the present invention makes the shape of the many protrusions that are the cleaning surface formed on the surface of the cleaning roller into an oval shape. In addition, two problems are solved by arranging a plurality of protrusions in one row and by always disposing protrusions in the next row at the position of the gap formed between the protrusions in one row.
[0011]
First, when the protrusions are cylindrical, the next protrusion is arranged at the position of the gap between the protrusions on the same row so that there is no theoretically left unwashed. However, when the surface of the object to be cleaned is rubbed, the projections may splash in a direction different from the rotation direction. This means that there is no longer any washing in theory or actual use.
[0012]
Second, in the grooving shape, there was unevenness in the force to pay particles depending on the location, but by setting the length of the ellipse within a certain range, the force to pay particles in all protrusions became the same. It is.
[0013]
As for the shape of the oval protrusion, the ratio of the length is 2 or more with respect to the
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to examples and comparative examples.
[0014]
[Example 1]
A PVAt porous body having a porosity of about 90% and an average pore diameter of about 130 μm, the radius of which is 60 mm including the protrusions, and the length of 150 mm is used, and the length of the protrusions is changed with respect to the width. A cleaning experiment was performed.
In the test method, an aluminum disk used for a disk is finally polished with loose abrasive grains and roughly cleaned with running water as a specimen, and a cleaning experiment is performed using cleaning rollers having various projection shapes according to the present invention. At this time, the cleaning liquid is pure water subjected to a particle controller, and has a structure that covers the object to be cleaned in a shower form before and after the cleaning roller. The experimental conditions were as follows, and the average value of five tests was taken.
Aluminum disc feed speed = 5 m / min
Rotation speed of cleaning roller = 200 RPM
Contact pressure = 10g / cm2
A predetermined number of particles was assumed in advance, and the projections were observed with a microscope at regular time intervals, and the evaluation was performed based on the time until defects occurred in the projections. The results are shown in Table 1.
As can be seen from Table 1, the time until the cleaning effect is achieved (hereinafter referred to as “effect time”) is shortened when the ratio of the length when the protrusion width is 1 is over 1. The result was that. In addition, since the time until the protrusions are lost (hereinafter referred to as “life”) has become longer, the longer the protrusions are, the longer the protrusions are, As a result, it was found that more particles were removed in a short time. Furthermore, since the strength with respect to the rotation direction of the protrusion is increased by the length, the life is improved.
[0015]
[Table 1]
[Example 2]
The cleaning roller having a shape effective in Example 1 was tested and evaluated under the following conditions. The results are shown in Table 2. The same as Example 1 except for the following conditions.
The height ratio is 0.6, 0.8, 1.0, with respect to the height of the protrusion =
As changed from 1.2 and 1.4 As can be seen from Table 2, the effect time is shortened under any condition when the ratio of the height when the width of the protrusion is 1 is not more than 1. However, the effect time was longer for all the ratios exceeding 1. In addition, in the life, the result that the length of the protrusion becomes long under any condition is shown. From this, it has been found that when the ratio of the height of the protrusion to the width is smaller than 1, the cleaning force is increased and the life of the protrusion is increased because the force of the protrusion to remove the particles is increased.
[0017]
[Table 2]
[Example 3]
Tests and evaluations were performed in the same manner as in Example 1 except that the cleaning roller having a shape that was effective from the results of Example 1 and Example 2 was used under the following conditions. The results are shown in Table 3 .
Width of protrusion = 1/3, 1/5, 1/10 of cleaning roller diameter
According to this, when the width of the protrusion is larger than one fifth of the diameter, the width of the protrusion is too wide, so It has been found that the particles are easily dragged into the structure of the cleaning roller without being acted, and the protrusions are not lost, but clogging occurs. On the other hand, when the width of the protrusion is smaller than 1/20 of the diameter, the cleaning effect is reduced due to the weak force of applying particles.
[0019]
[Table 3]
[Comparative example]
Evaluation was performed using a conventional protrusion having a circular shape. The conditions are the same as in Example 1. The results are shown in Table 1. Further, if the twist angle of the arrangement of the protrusions is 45 degrees or more with respect to the rotation axis of the roller, there is no difference in the operation.
[0021]
【The invention's effect】
According to the present invention, a uniform and highly accurate cleaning effect can be obtained in a short time, and the strength of the protrusions can be improved, so that the cleaning effect can be maintained for a long time.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram of a cleaning roller of the present invention.
(A) It is a front view of the roller for washing | cleaning.
(B) It is AA 'sectional drawing of (a).
FIG. 2 is an explanatory diagram of another example of the cleaning roller of the present invention.
FIG. 3 is an explanatory diagram of a change in shape of a protrusion during cleaning.
[Explanation of symbols]
1
Claims (2)
前記突起の形状が長円形をなし、円周方向の幅と長さの比が幅１に対して長さが２以上であって、前記突起を複数の列状と成し、前記突起の列において、一つの列の突起間の隙間を、回転方向で次の列の突起が補完していて、前記突起の幅が、当該洗浄用ローラの直径に対して１／１０から１／２０の比率で、高さが幅１に対し１以下の比率で形成されていることを特徴とする洗浄用ローラ。Top of a number of projections disposed Configured surface by polyvinyl acetal porous material having elasticity forms a surface used for washing to form a virtual plane, wherein the plane to be used for cleaning the cleaning object In the cleaning roller for contacting the surface to be cleaned and rotating for cleaning,
The protrusion has an oval shape, the ratio of the width in the circumferential direction to the length is 2 or more with respect to the width 1, and the protrusion has a plurality of rows. In the above, the gap between the protrusions in one row is complemented by the protrusion in the next row in the rotational direction, and the width of the protrusion is a ratio of 1/10 to 1/20 with respect to the diameter of the cleaning roller. The cleaning roller is characterized in that the height is formed at a ratio of 1 or less to the width 1 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20879396A JP3680185B2 (en) | 1996-07-19 | 1996-07-19 | Cleaning roller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20879396A JP3680185B2 (en) | 1996-07-19 | 1996-07-19 | Cleaning roller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1034091A JPH1034091A (en) | 1998-02-10 |
| JP3680185B2 true JP3680185B2 (en) | 2005-08-10 |
Family
ID=16562217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20879396A Expired - Fee Related JP3680185B2 (en) | 1996-07-19 | 1996-07-19 | Cleaning roller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3680185B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11577281B2 (en) | 2019-01-30 | 2023-02-14 | Lg Energy Solution, Ltd. | Cleaning apparatus and cleaning method for press rolls for electrodes |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6502273B1 (en) | 1996-11-08 | 2003-01-07 | Kanebo, Ltd. | Cleaning sponge roller |
| JP3403108B2 (en) * | 1999-02-26 | 2003-05-06 | アイオン株式会社 | Sponge roller for cleaning |
| JP3200036B2 (en) * | 1998-05-22 | 2001-08-20 | アイオン株式会社 | Rotating brush for cleaning |
| WO2005016599A1 (en) | 2003-08-08 | 2005-02-24 | Mykrolys Corporation | Methods and materials for making a monolithic porous pad cast onto a rotatable base |
| CN101336142B (en) | 2005-12-06 | 2012-12-05 | 安格斯公司 | A molded rotatable base for a porous pad |
| JP2009066527A (en) * | 2007-09-13 | 2009-04-02 | Nec Electronics Corp | Washing roller and washing apparatus |
| WO2011103538A2 (en) * | 2010-02-22 | 2011-08-25 | Entegris,Inc. | Post-cmp cleaning brush |
| WO2015127301A1 (en) | 2014-02-20 | 2015-08-27 | Entegris, Inc. | Nodule ratios for targeted enhanced cleaning performance |
-
1996
- 1996-07-19 JP JP20879396A patent/JP3680185B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11577281B2 (en) | 2019-01-30 | 2023-02-14 | Lg Energy Solution, Ltd. | Cleaning apparatus and cleaning method for press rolls for electrodes |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH1034091A (en) | 1998-02-10 |
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