JPH0528759Y2 - - Google Patents

Description

[Detailed description of the invention] [Field of industrial application] The present invention relates to cleaning tools, and more specifically,
This invention relates to a cleaning tool suitable for spark-cleaning the surfaces of glass, plastics, ceramics, etc.

[Conventional technology]

In order to finish the surface of an article made of metal, glass, etc. with extremely high precision, a method is used in which the surface is finished with high precision step by step using a lathe, a solid grindstone, or loose abrasive grains. In this case, polishing debris, abrasive grains, and dust in the air adhere to and remain on the surface, so after each stage of polishing work is completed, remove fine particles such as dust, polishing debris, and abrasive grains using appropriate means. It is necessary to wash and remove. If these residues remain, they will cause problems such as causing streaks in the next polishing step, and will significantly reduce the quality of the product. Particularly, when the article is a wafer, a photomask, or a memory disk substrate, which is a raw material for semiconductors, extremely small amounts of residual particles cause defects in the product, resulting in a significant decrease in yield. Conventionally, as a method for cleaning and removing these fine particles, a brush made by pasting a non-woven fabric such as felt or lacquer on a flat disk-shaped substrate, or a brush made by implanting a large number of single fine synthetic fibers on the substrate is used as a cleaning tool. A method has been implemented in which the surface of an object to be cleaned is friction-cleaned by rotating the cleaning tool around its axis while supplying water or other cleaning liquid. However, the non-woven fabrics such as felt and rashia used as these materials, as well as the synthetic fiber single thread brushes, lack flexibility and are generally poor in hydrophilicity, so they exert high stress on the object to be cleaned, causing damage to its surface. It has the drawback that it damages the surface of the object to be cleaned, and further pollutes the surface of the object to be cleaned due to the falling of fine fibers, making it difficult to say that it is a perfect cleaning tool.

[Problem that the invention attempts to solve]

The inventors of the present invention continued their intensive research in view of the above-mentioned problems of existing cleaning tools. As a result, they developed a cleaning surface of a plurality of rotating disc-shaped plates each equipped with a porous elastic member as a cleaning surface. The present invention was developed by discovering that cleaning can be carried out by pressing the object to be cleaned that rotates in the opposite direction to the plate. Another object of the present invention is to provide a cleaning tool that can efficiently clean both sides of a plurality of disc-shaped or annular objects to be cleaned at the same time, and does not require fixing the cleaning member with an adhesive.

[Means to solve the problem]

The above-mentioned problem is solved by using a plurality of rotating disc-shaped plates each having a cleaning surface formed by the top of a member made of a polyvinyl acetal porous elastic material, and a disc-shaped or annular object to be cleaned. a receiver consisting of a plurality of parallel gripping drive shafts capable of simultaneously gripping a plurality of objects to be cleaned and rotating the objects to be cleaned in a direction opposite to the direction of the disk-shaped plate; A tool for cleaning by crimping the polyvinyl acetal porous elastic body, wherein the polyvinyl acetal porous elastic body is held between holes or grooves formed in the disc-shaped plate and a plurality of protrusions are provided on both sides of the disc-shaped plate. , the plurality of disk-shaped plates are inserted into the plate drive shaft through a plate drive shaft insertion hole drilled in the center of each of the plurality of disk-shaped plates, and the interval between the opposing cleaning surfaces of adjacent disk-shaped plates can be widened or narrowed. This is accomplished by a cleaning tool made up of:

〔Example〕

An example of an embodiment of the present invention will be described below based on the drawings.

Fig. 1 is an explanatory diagram of a disc-shaped plate according to the present invention, Fig. 2 is an explanatory diagram of a disc-shaped plate shown in Fig. 1 with porous elastic members inserted into the perforations of the disc-shaped plate, and Fig. 3 4 and 5 are explanatory views showing another example of a disc-shaped plate into which a porous elastic member is inserted, and FIGS. 6 and 7 are explanatory views of main parts of the cleaning tool according to the present invention. FIG. 6 is an explanatory diagram for explaining the state in which the porous elastic member is held between the disc-shaped plates shown in FIGS. 4 and 5. FIG.

In FIGS. 1 to 3, reference numeral 1 denotes a disk-shaped plate, and a hole 2 for inserting a drive shaft for the plate is bored in the center of the disk-shaped plate.
The material of the disc-shaped plate is not particularly limited, such as metal, glass, ceramic, plastic, or wood. Specifically, stainless steel, copper, aluminum alloy, and hard ceramic are preferable. A large number of porous elastic members 5 are provided in a protruding manner on the disc-shaped plate 1, and the top portion thereof forms a cleaning surface. In this way, by forming the cleaning surface from a porous elastic material having appropriate flexibility, damage to the surface of the object to be cleaned can be minimized, cleaning can be carried out effectively, and dust can be removed from the object to be cleaned. etc. can be easily removed through the spaces between the porous elastic members. Various methods can be considered for attaching the porous elastic member 5 to the disc-shaped plate 1, such as adhesion, heat fusion, fitting, screwing, and fixing with a receiver. A fourth method of drilling a perforation 3a from the outer peripheral edge to the center of the disc-shaped plate 1 and sandwiching a porous elastic member in the perforation as shown in FIGS. 1 and 7.
As shown in FIG. 6 and FIG. 6, the method of drilling holes 3b at appropriate positions on the disk surface of the disc-shaped plate 1 and sandwiching the porous elastic member between the holes prevents the elution of the adhesive component and allows the porous elastic member to This is suitable because it can be fixed relatively stably without losing strength. The top of the porous elastic member 5 can have various shapes such as rectangular, square, curved, circular, etc., but it is best to configure it so that it comes into uniform contact with the entire surface of the object to be cleaned. 2 and 5, porous elastic members each having a rectangular or curved top shape are uniformly arranged radially in the perforated groove 3a of the disc-shaped plate from the center toward the outer peripheral edge of the disc-shaped plate.
The one shown in the figure or the fourth one in which a porous elastic member with a circular top is uniformly arranged on the disk-shaped plate surface.
The one shown in the figure is preferred. Disk-shaped plates 1, 1', equipped with such elastic members 5;
1″... is the hole 2 for inserting the drive shaft for that plate.
It is attached and fixed to one drive shaft 4 via the drive shaft 4, and is rotated by the drive shaft 4. Adjacent disc-shaped plate 1,
It is necessary to configure the spacing between the opposing cleaning surfaces 1' to be freely adjustable. On the other hand, the object to be cleaned 6 is given a rotational force in the opposite direction to the disc-shaped plate by a receiver or the like consisting of a plurality of parallel gripping drive shafts 7, 7', etc., as shown in FIG. 3, for example. They are supported in this state and arranged so that one sheet is inserted between the disk-shaped plates 1 and 1'. When cleaning, the object to be cleaned is inserted between the disc-shaped plates, and while applying cleaning liquid, the surface of the object to be cleaned is rubbed with the top of the porous elastic member provided protrudingly on the disc-shaped plate. Cleaning is performed by In other words, the adhesion force of the contaminants adhered to the surface of the object to be cleaned is reduced by the effect of the cleaning liquid, and by rubbing it with the cleaning tool, the contaminants are dissociated from the surface of the object to be cleaned, and some of them are removed from the system along with the cleaning liquid. excluded from
In addition, some of it is trapped in the pores of the porous elastic body.

One of the features of the present invention is that a large number of small pieces of porous elastic material members are provided protrudingly on a disc-shaped plate. By arranging a large number of porous elastic material members at appropriate intervals in this way, This reduces the coefficient of friction caused by rubbing against the object to be cleaned during rotation, making rotation easier and also effective in draining the cleaning liquid. In other words, when a porous elastic material is arranged on the entire surface, the coefficient of friction between it and the object to be cleaned is high, and unnecessary torque is not only applied during rotation, but also it causes the stick slip phenomenon and leaves an undesirable pattern on the cleaning surface. It tends to be. Furthermore, it becomes difficult to uniformly apply an appropriate amount of the cleaning liquid to the object to be cleaned, which aggravates the above-mentioned undesirable phenomena and often impairs the cleaning effect itself. In addition, the porous elastic body is extremely flexible, has excellent elasticity, and has a large stress relaxation ability, so even if particles are adsorbed in its pores, it can absorb the rigidity well, preventing damage to the surface of the object to be cleaned. It rarely causes defects that leave marks. Furthermore, unlike conventional fiber materials, there is no phenomenon of reverse contamination due to shedding of fine fibers.

Here, examples of the porous elastic body include polyurethane sponge, synthetic rubber, latex, viscose sponge, etc., but in the present invention, a polyvinyl acetal (hereinafter abbreviated as PVAt) type porous elastic body is used. PVAt-based poroelastic material is
It has many hydroxyl groups in its molecular structure and is extremely hydrophilic, so it is easily compatible with cleaning liquids, has excellent ability to adsorb fine particles, and has special cleaning performance. In particular, those having continuous pores manufactured by the following method are excellent. That is, the average degree of polymerization is 300~
2000, one or more polyvinyl alcohols with a degree of saponification of 80% or more are appropriately mixed to form an aqueous solution,
It is obtained by adding aldehydes as a crosslinking agent, starch or a modified product thereof as a pore forming agent, and reacting at 50 to 80°C in the presence of an acid catalyst,
Particularly suitable are those having a porosity of 85 to 95%, an average pore diameter of 10 to 200 μm, and a 30% compressive stress of 15 to 150 g/cm ² in a state containing 100% water based on the dry weight. In this case, the polyvinyl alcohol may be partially modified with other functional groups, but if the porosity becomes small, the flexibility tends to decrease, and if the porosity is too large, the strength tends to decrease, and the average porosity tends to decrease. If the pore diameter is small, the elasticity will be reduced and the performance for cleaning will be reduced, and if the pore diameter is too large, the pores will be too coarse and will not be suitable for precision cleaning. Furthermore, if the compressive stress is too small, it becomes soft and causes distortion during use, while if it is too large, it tends to be hard and unable to provide adequate elasticity.

The above-mentioned PVAt-based poroelastic material exhibits extremely excellent cleaning ability due to the combination of its excellent flexibility when retaining water and the high hydrophilicity of the material itself. If the 30% compressive stress is within the above range, the strength, durability, cleaning ability, etc. in practical use will be excellent, and particularly favorable results will be obtained.

〔effect〕

As described above, the cleaning tool according to the present invention cleans the cleaning surface.
By forming the top part of a PVAt-based porous elastic material, particles, rigidity, etc. are absorbed into the pores of the PVAt-based porous elastic material by utilizing the excellent flexibility, elasticity, and stress relaxation ability of the PVAt-based porous elastic material. To prevent damage to articles and the generation of streaks, and also to prevent reverse contamination caused by fine fibers falling off when using conventional fiber materials such as nonwoven fabrics such as felt and rashers, and fine rigid fiber single yarns. I can do it. Especially porosity 85-95
%, average pore diameter 10-200μ, 100% of dry weight
30% compressive stress in water-containing state is 15~
When using a PVAt-based porous elastic material with 150 g/cm ² of continuous pores, the PVAt-based porous elastic material has many hydroxyl groups in its molecular structure and is extremely hydrophilic, making it compatible with cleaning liquids. It is easy to clean, has excellent adsorption ability for fine particles, and exhibits outstanding cleaning ability. In addition, by arranging cleaning members made of PVAt-based porous elastic material on the disc-shaped plate at appropriate intervals to form a cleaning surface, the cleaning surface can be formed on the entire surface of the disc-shaped plate as in the conventional method. Compared to the case where the friction coefficient between the cleaning surface and the surface to be cleaned increases, the occurrence of stick slip phenomenon and the occurrence of cleaning traces and scratches on the surface of the object to be cleaned are reduced, and furthermore, the cleaning liquid circulates better. In addition, with this invention, it is possible to precisely clean multiple objects to be cleaned at the same time at high speed, so if it is incorporated into a line and used in conjunction with processes such as chemical treatment, ultrasonic cleaning, drying, and post-treatment, the effect will be further increased. .

In the cleaning tool of the present invention, since the cleaning member is not fixed with adhesive, there is no elution of the adhesive component.
The cleaning member made of the PVAt porous elastic body can be fixed relatively stably without impairing the strength of the cleaning member.

[Brief explanation of the drawing]

Fig. 1 is an explanatory diagram of a disc-shaped plate according to the present invention, Fig. 2 is an explanatory diagram of a disc-shaped plate shown in Fig. 1 with porous elastic members inserted into the perforations of the disc-shaped plate, and Fig. 3 4 and 5 are explanatory diagrams showing another example of a disc-shaped plate into which a PVAt-based porous elastic body is inserted, and FIGS. The figure is an explanatory diagram of the PVAt-based poroelastic body in the disc-shaped plate shown in FIGS. 4 and 5. 1...Disc-shaped plate, 2...Drilling hole for inserting the drive shaft for the plate, 3a...Drilling groove, 3b...Drilling hole, 4
... Drive shaft for plate, 5 ... PVAt-based porous elastic body, 6 ... object to be cleaned.

Claims (1)

[Claims for Utility Model Registration] (1) A plurality of rotating disc-shaped plates each having a cleaning surface formed by the top of a member made of polyvinyl acetal porous elastic material, and a disc-shaped or annular plate. a holder consisting of a plurality of parallel gripping drive shafts capable of simultaneously gripping a plurality of objects to be cleaned and rotating these objects to be cleaned in a direction opposite to the direction of the disk-shaped plate; A tool for cleaning the object by pressing the object to be cleaned, wherein the polyvinyl acetal porous elastic body is held between holes or grooves formed in the disc-shaped plate, and the polyvinyl acetal-based porous elastic body is sandwiched between holes or grooves formed in the disc-shaped plate, and A plurality of convex disk-shaped plates are inserted into the plate drive shaft through a plate drive shaft insertion hole drilled in the center of each of the plurality of disc-shaped plates,
A cleaning tool in which the distance between opposing cleaning surfaces of adjacent disc-shaped plates can be freely widened or narrowed. (2) Utility model registration for a polyvinyl acetal porous elastic body with a porosity of 85 to 95%, an average pore diameter of 10 to 200μ, and a 30% compressive stress of 100% water content of 15 to 150g/cm ² A cleaning tool according to claim (1).