JPS59170852U - Photomask cleaning equipment - Google Patents

Photomask cleaning equipment

Info

Publication number
JPS59170852U
JPS59170852U JP1983064123U JP6412383U JPS59170852U JP S59170852 U JPS59170852 U JP S59170852U JP 1983064123 U JP1983064123 U JP 1983064123U JP 6412383 U JP6412383 U JP 6412383U JP S59170852 U JPS59170852 U JP S59170852U
Authority
JP
Japan
Prior art keywords
photomask
gear
support
ring
cleaning equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983064123U
Other languages
Japanese (ja)
Other versions
JPS6230030Y2 (en
Inventor
田中　規雄
Original Assignee
シャープ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by シャープ株式会社 filed Critical シャープ株式会社
Priority to JP1983064123U priority Critical patent/JPS59170852U/en
Publication of JPS59170852U publication Critical patent/JPS59170852U/en
Application granted granted Critical
Publication of JPS6230030Y2 publication Critical patent/JPS6230030Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来のフォトマスク洗浄装置の概略構造図、第
２図はこの考案の実施例であるフォトマスク洗浄装置の
概略構造図、第３図は同実施例に示すリング状ギアの平
面図、第４図Ａ、　Ｂはフォトマスク支持体１１のアー
ム先端部の平面図、側面図である。 １−フォトマスク、４−スピンモータ、６．６′−スポ
ンジブラシ、７．　７’−ハイプレッシャーウォータ発
生装置、８−ボウル、１〇−駆動ギア、１１−フォトマ
スク支持体、１１ａ−リング状ギア部、１２〜１５−ア
ーム。Fig. 1 is a schematic structural diagram of a conventional photomask cleaning device, Fig. 2 is a schematic structural diagram of a photomask cleaning device that is an embodiment of this invention, and Fig. 3 is a plan view of a ring-shaped gear shown in the same embodiment. , and FIGS. 4A and 4B are a plan view and a side view of the arm tip of the photomask support 11, respectively. 1-Photomask, 4-Spin motor, 6.6'-Sponge brush, 7. 7'-High pressure water generator, 8-Bowl, 10-Drive gear, 11-Photomask support, 11a-Ring-shaped gear portion, 12-15-Arms.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）フォトマスクを高速回転し、その表面をスポンジ
ブラシおよび／またはハイプレッシャーウォータ発生装
置からなる洗浄手段によって洗浄するフォトマスク洗浄
装置において、前記フォトマスクを側方から支持固定す
るフォトマスク支持体と、モータを含み前記支持体を高
速回転する回転駆動部とを設けるとともに、前記フォト
マスクの上下両面に対向して前記洗浄手段を配設したこ
とを特徴とするフォトマスク洗浄装置。(1) In a photomask cleaning device that rotates a photomask at high speed and cleans its surface with a cleaning means consisting of a sponge brush and/or a high pressure water generator, a photomask support that supports and fixes the photomask from the sides. A photomask cleaning apparatus, comprising: a rotation drive unit that includes a motor and rotates the support at high speed; and the cleaning means is disposed to face both upper and lower surfaces of the photomask. （２）前記フォトマスク支持体を、前記フォトマスク側
端部の適所を挾持固定するアームおよびこのアームが固
着したリング状ギアで構成し、前記回転駆動部を前記リ
ング状ギアに係合する駆動ギアおよびこの駆動ギアに連
結するモータで構成した実用新案登録請求の範囲第１項
記載のフォトマスク洗浄装置。(2) The photomask support body is constituted by an arm that clamps and fixes the photomask side end at a proper position, and a ring-shaped gear to which this arm is fixed, and the rotation drive unit is driven to engage with the ring-shaped gear. A photomask cleaning apparatus according to claim 1, which comprises a gear and a motor connected to the drive gear.
JP1983064123U 1983-04-28 1983-04-28 Photomask cleaning equipment Granted JPS59170852U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983064123U JPS59170852U (en) 1983-04-28 1983-04-28 Photomask cleaning equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983064123U JPS59170852U (en) 1983-04-28 1983-04-28 Photomask cleaning equipment

Publications (2)

Publication Number Publication Date
JPS59170852U true JPS59170852U (en) 1984-11-15
JPS6230030Y2 JPS6230030Y2 (en) 1987-08-01

Family

ID=30194307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983064123U Granted JPS59170852U (en) 1983-04-28 1983-04-28 Photomask cleaning equipment

Country Status (1)

Country Link
JP (1) JPS59170852U (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61201796A (en) * 1985-03-04 1986-09-06 Matsushita Refrig Co Manufacture of wall surface of heat exchanger tube
JPS61158948U (en) * 1985-03-23 1986-10-02
JPS63137429A (en) * 1986-11-28 1988-06-09 Dainippon Screen Mfg Co Ltd Apparatus for washing both surface of substrate
JPH11135468A (en) * 1997-10-31 1999-05-21 Shibaura Mechatronics Corp Method and apparatus for cleaning and cleaning disk brush
JP2020074450A (en) * 2020-01-23 2020-05-14 株式会社東京精密 Cleaning device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61201796A (en) * 1985-03-04 1986-09-06 Matsushita Refrig Co Manufacture of wall surface of heat exchanger tube
JPS61158948U (en) * 1985-03-23 1986-10-02
JPS63137429A (en) * 1986-11-28 1988-06-09 Dainippon Screen Mfg Co Ltd Apparatus for washing both surface of substrate
JPH11135468A (en) * 1997-10-31 1999-05-21 Shibaura Mechatronics Corp Method and apparatus for cleaning and cleaning disk brush
JP2020074450A (en) * 2020-01-23 2020-05-14 株式会社東京精密 Cleaning device

Also Published As

Publication number Publication date
JPS6230030Y2 (en) 1987-08-01

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