TWI884167B - 電光元件用複合基板 - Google Patents

電光元件用複合基板 Download PDF

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Publication number
TWI884167B
TWI884167B TW109129250A TW109129250A TWI884167B TW I884167 B TWI884167 B TW I884167B TW 109129250 A TW109129250 A TW 109129250A TW 109129250 A TW109129250 A TW 109129250A TW I884167 B TWI884167 B TW I884167B
Authority
TW
Taiwan
Prior art keywords
dielectric constant
electro
constant layer
high dielectric
substrate
Prior art date
Application number
TW109129250A
Other languages
English (en)
Chinese (zh)
Other versions
TW202144826A (zh
Inventor
服部良祐
多井知義
淺井圭一郎
近藤順悟
Original Assignee
日商日本碍子股份有限公司
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Application filed by 日商日本碍子股份有限公司 filed Critical 日商日本碍子股份有限公司
Publication of TW202144826A publication Critical patent/TW202144826A/zh
Application granted granted Critical
Publication of TWI884167B publication Critical patent/TWI884167B/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305—Constructional arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G02F1/0115—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass in optical fibres
    • G02F1/0118—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass in optical fibres by controlling the evanescent coupling of light from a fibre into an active, e.g. electro-optic, overlay
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/0009—Materials therefor
    • G02F1/0018—Electro-optical materials
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G02F1/0113—Glass-based, e.g. silica-based, optical waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12142—Modulator
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/09—Materials and properties inorganic glass

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Integrated Circuits (AREA)
TW109129250A 2020-05-20 2020-08-27 電光元件用複合基板 TWI884167B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020088349 2020-05-20
JP2020-088349 2020-05-20

Publications (2)

Publication Number Publication Date
TW202144826A TW202144826A (zh) 2021-12-01
TWI884167B true TWI884167B (zh) 2025-05-21

Family

ID=78707897

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109129250A TWI884167B (zh) 2020-05-20 2020-08-27 電光元件用複合基板

Country Status (6)

Country Link
US (1) US12411367B2 (https=)
JP (3) JP7085599B2 (https=)
CN (1) CN115516368B (https=)
DE (1) DE112021000100T5 (https=)
TW (1) TWI884167B (https=)
WO (1) WO2021235496A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4092453A1 (en) * 2021-05-20 2022-11-23 Canon Kabushiki Kaisha Film, element, and equipment
WO2024190840A1 (ja) 2023-03-13 2024-09-19 三菱ケミカル株式会社 硬化物、硬化物含有炭素材、負極及び非水系二次電池

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1170175C (zh) * 2002-05-24 2004-10-06 中国科学院上海微系统与信息技术研究所 双绝缘埋层绝缘体上硅基二维光子晶体波导及制备方法
TWI224489B (en) * 2002-03-13 2004-11-21 Seiko Epson Corp Method and apparatus for fabricating a device, and the device and an electronic equipment
WO2019224908A1 (ja) * 2018-05-22 2019-11-28 日本碍子株式会社 電気光学素子のための複合基板とその製造方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH065345B2 (ja) * 1985-08-14 1994-01-19 日本電気株式会社 高速光変調器
JP4443011B2 (ja) * 2000-07-27 2010-03-31 日本碍子株式会社 進行波型光変調器
JP4174377B2 (ja) * 2002-05-31 2008-10-29 松下電器産業株式会社 光学素子
US7295742B2 (en) * 2002-05-31 2007-11-13 Matsushita Electric Industrial Co., Ltd. Optical element and method for producing the same
JP4909433B2 (ja) * 2010-06-28 2012-04-04 住友大阪セメント株式会社 光変調器
JP5613580B2 (ja) * 2011-02-09 2014-10-22 三菱電機株式会社 基板の製造方法
KR101497888B1 (ko) 2012-11-14 2015-03-02 엔지케이 인슐레이터 엘티디 복합 기판 및 그 제법
JP6549054B2 (ja) 2016-02-02 2019-07-24 信越化学工業株式会社 複合基板および複合基板の製造方法
WO2018031916A1 (en) * 2016-08-12 2018-02-15 President And Fellows Of Harvard College Micro-machined thin film lithium niobate electro-optic devices
JP6245587B1 (ja) 2016-10-28 2017-12-13 大学共同利用機関法人自然科学研究機構 レーザー部品
JP6696917B2 (ja) 2017-01-18 2020-05-20 信越化学工業株式会社 複合基板の製造方法
CN108539009B (zh) * 2017-10-13 2025-04-04 济南晶正电子科技有限公司 纳米级单晶薄膜
JP7152711B2 (ja) * 2018-06-20 2022-10-13 日本電産マシンツール株式会社 接合基板の製造方法及び接合基板
US11664357B2 (en) 2018-07-03 2023-05-30 Adeia Semiconductor Bonding Technologies Inc. Techniques for joining dissimilar materials in microelectronics
WO2020095421A1 (ja) 2018-11-08 2020-05-14 日本碍子株式会社 電気光学素子のための複合基板とその製造方法
US11181760B2 (en) * 2019-07-09 2021-11-23 HyperLight Corporation Low-loss waveguiding structures, in particular modulators
US11899293B2 (en) * 2020-02-07 2024-02-13 HyperLight Corporation Electro optical devices fabricated using deep ultraviolet radiation
US11662520B2 (en) * 2020-05-19 2023-05-30 Ohio State Innovation Foundation Fiber-to-fiber platform for multi-layer ferroelectric on insulator waveguide devices

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI224489B (en) * 2002-03-13 2004-11-21 Seiko Epson Corp Method and apparatus for fabricating a device, and the device and an electronic equipment
CN1170175C (zh) * 2002-05-24 2004-10-06 中国科学院上海微系统与信息技术研究所 双绝缘埋层绝缘体上硅基二维光子晶体波导及制备方法
WO2019224908A1 (ja) * 2018-05-22 2019-11-28 日本碍子株式会社 電気光学素子のための複合基板とその製造方法

Also Published As

Publication number Publication date
JP2023040025A (ja) 2023-03-22
DE112021000100T5 (de) 2022-05-12
JP7199571B2 (ja) 2023-01-05
JP7085599B2 (ja) 2022-06-16
WO2021235496A1 (ja) 2021-11-25
CN115516368A (zh) 2022-12-23
JP7401639B2 (ja) 2023-12-19
JPWO2021235496A1 (https=) 2021-11-25
TW202144826A (zh) 2021-12-01
CN115516368B (zh) 2025-08-29
JP2021184075A (ja) 2021-12-02
US12411367B2 (en) 2025-09-09
US20220155619A1 (en) 2022-05-19

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