CN115516368B - 电光元件用复合基板 - Google Patents

电光元件用复合基板

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Publication number
CN115516368B
CN115516368B CN202180005302.6A CN202180005302A CN115516368B CN 115516368 B CN115516368 B CN 115516368B CN 202180005302 A CN202180005302 A CN 202180005302A CN 115516368 B CN115516368 B CN 115516368B
Authority
CN
China
Prior art keywords
dielectric constant
constant layer
electro
high dielectric
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202180005302.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN115516368A (zh
Inventor
服部良祐
多井知义
浅井圭一郎
近藤顺悟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of CN115516368A publication Critical patent/CN115516368A/zh
Application granted granted Critical
Publication of CN115516368B publication Critical patent/CN115516368B/zh
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Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305—Constructional arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G02F1/0115—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass in optical fibres
    • G02F1/0118—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass in optical fibres by controlling the evanescent coupling of light from a fibre into an active, e.g. electro-optic, overlay
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/0009—Materials therefor
    • G02F1/0018—Electro-optical materials
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G02F1/0113—Glass-based, e.g. silica-based, optical waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12142—Modulator
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/09—Materials and properties inorganic glass

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Integrated Circuits (AREA)
CN202180005302.6A 2020-05-20 2021-05-19 电光元件用复合基板 Active CN115516368B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020088349 2020-05-20
JP2020-088349 2020-05-20
PCT/JP2021/019037 WO2021235496A1 (ja) 2020-05-20 2021-05-19 電気光学素子用複合基板

Publications (2)

Publication Number Publication Date
CN115516368A CN115516368A (zh) 2022-12-23
CN115516368B true CN115516368B (zh) 2025-08-29

Family

ID=78707897

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180005302.6A Active CN115516368B (zh) 2020-05-20 2021-05-19 电光元件用复合基板

Country Status (6)

Country Link
US (1) US12411367B2 (https=)
JP (3) JP7085599B2 (https=)
CN (1) CN115516368B (https=)
DE (1) DE112021000100T5 (https=)
TW (1) TWI884167B (https=)
WO (1) WO2021235496A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4092453A1 (en) * 2021-05-20 2022-11-23 Canon Kabushiki Kaisha Film, element, and equipment
WO2024190840A1 (ja) 2023-03-13 2024-09-19 三菱ケミカル株式会社 硬化物、硬化物含有炭素材、負極及び非水系二次電池

Citations (2)

* Cited by examiner, † Cited by third party
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WO2019071978A1 (zh) * 2017-10-13 2019-04-18 济南晶正电子科技有限公司 纳米级单晶薄膜
WO2019224908A1 (ja) * 2018-05-22 2019-11-28 日本碍子株式会社 電気光学素子のための複合基板とその製造方法

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JPH065345B2 (ja) * 1985-08-14 1994-01-19 日本電気株式会社 高速光変調器
JP4443011B2 (ja) * 2000-07-27 2010-03-31 日本碍子株式会社 進行波型光変調器
JP4126996B2 (ja) * 2002-03-13 2008-07-30 セイコーエプソン株式会社 デバイスの製造方法及びデバイス製造装置
CN1170175C (zh) * 2002-05-24 2004-10-06 中国科学院上海微系统与信息技术研究所 双绝缘埋层绝缘体上硅基二维光子晶体波导及制备方法
JP4174377B2 (ja) * 2002-05-31 2008-10-29 松下電器産業株式会社 光学素子
US7295742B2 (en) * 2002-05-31 2007-11-13 Matsushita Electric Industrial Co., Ltd. Optical element and method for producing the same
JP4909433B2 (ja) * 2010-06-28 2012-04-04 住友大阪セメント株式会社 光変調器
JP5613580B2 (ja) * 2011-02-09 2014-10-22 三菱電機株式会社 基板の製造方法
KR101497888B1 (ko) 2012-11-14 2015-03-02 엔지케이 인슐레이터 엘티디 복합 기판 및 그 제법
JP6549054B2 (ja) 2016-02-02 2019-07-24 信越化学工業株式会社 複合基板および複合基板の製造方法
WO2018031916A1 (en) * 2016-08-12 2018-02-15 President And Fellows Of Harvard College Micro-machined thin film lithium niobate electro-optic devices
JP6245587B1 (ja) 2016-10-28 2017-12-13 大学共同利用機関法人自然科学研究機構 レーザー部品
JP6696917B2 (ja) 2017-01-18 2020-05-20 信越化学工業株式会社 複合基板の製造方法
JP7152711B2 (ja) * 2018-06-20 2022-10-13 日本電産マシンツール株式会社 接合基板の製造方法及び接合基板
US11664357B2 (en) 2018-07-03 2023-05-30 Adeia Semiconductor Bonding Technologies Inc. Techniques for joining dissimilar materials in microelectronics
WO2020095421A1 (ja) 2018-11-08 2020-05-14 日本碍子株式会社 電気光学素子のための複合基板とその製造方法
US11181760B2 (en) * 2019-07-09 2021-11-23 HyperLight Corporation Low-loss waveguiding structures, in particular modulators
US11899293B2 (en) * 2020-02-07 2024-02-13 HyperLight Corporation Electro optical devices fabricated using deep ultraviolet radiation
US11662520B2 (en) * 2020-05-19 2023-05-30 Ohio State Innovation Foundation Fiber-to-fiber platform for multi-layer ferroelectric on insulator waveguide devices

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WO2019071978A1 (zh) * 2017-10-13 2019-04-18 济南晶正电子科技有限公司 纳米级单晶薄膜
WO2019224908A1 (ja) * 2018-05-22 2019-11-28 日本碍子株式会社 電気光学素子のための複合基板とその製造方法

Also Published As

Publication number Publication date
JP2023040025A (ja) 2023-03-22
DE112021000100T5 (de) 2022-05-12
JP7199571B2 (ja) 2023-01-05
JP7085599B2 (ja) 2022-06-16
TWI884167B (zh) 2025-05-21
WO2021235496A1 (ja) 2021-11-25
CN115516368A (zh) 2022-12-23
JP7401639B2 (ja) 2023-12-19
JPWO2021235496A1 (https=) 2021-11-25
TW202144826A (zh) 2021-12-01
JP2021184075A (ja) 2021-12-02
US12411367B2 (en) 2025-09-09
US20220155619A1 (en) 2022-05-19

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