TWI784196B - 蒸鍍遮罩中間體、蒸鍍遮罩、及蒸鍍遮罩的製造方法 - Google Patents

蒸鍍遮罩中間體、蒸鍍遮罩、及蒸鍍遮罩的製造方法 Download PDF

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Publication number
TWI784196B
TWI784196B TW108132180A TW108132180A TWI784196B TW I784196 B TWI784196 B TW I784196B TW 108132180 A TW108132180 A TW 108132180A TW 108132180 A TW108132180 A TW 108132180A TW I784196 B TWI784196 B TW I784196B
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Taiwan
Prior art keywords
aforementioned
edge
shaped
vapor deposition
shaped portion
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TW108132180A
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English (en)
Chinese (zh)
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TW202024365A (zh
Inventor
西剛廣
山本龍彥
小林昭彥
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日商凸版印刷股份有限公司
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
  • Chemical Vapour Deposition (AREA)
TW108132180A 2018-09-07 2019-09-06 蒸鍍遮罩中間體、蒸鍍遮罩、及蒸鍍遮罩的製造方法 TWI784196B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-167972 2018-09-07
JP2018167972 2018-09-07

Publications (2)

Publication Number Publication Date
TW202024365A TW202024365A (zh) 2020-07-01
TWI784196B true TWI784196B (zh) 2022-11-21

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TW108132180A TWI784196B (zh) 2018-09-07 2019-09-06 蒸鍍遮罩中間體、蒸鍍遮罩、及蒸鍍遮罩的製造方法

Country Status (5)

Country Link
JP (1) JP6930658B2 (ko)
KR (1) KR102397503B1 (ko)
CN (2) CN112639157B (ko)
TW (1) TWI784196B (ko)
WO (1) WO2020050398A1 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI784196B (zh) * 2018-09-07 2022-11-21 日商凸版印刷股份有限公司 蒸鍍遮罩中間體、蒸鍍遮罩、及蒸鍍遮罩的製造方法
JP7099512B2 (ja) * 2020-02-05 2022-07-12 凸版印刷株式会社 蒸着マスク中間体、蒸着マスク、マスク装置、および、蒸着マスクの製造方法
WO2021157463A1 (ja) * 2020-02-05 2021-08-12 凸版印刷株式会社 蒸着マスク中間体、蒸着マスク、マスク装置、および、蒸着マスクの製造方法
JP7151745B2 (ja) * 2020-07-16 2022-10-12 凸版印刷株式会社 蒸着マスク中間体、蒸着マスク、および、蒸着マスクの製造方法
TWI826810B (zh) * 2021-07-30 2023-12-21 達運精密工業股份有限公司 金屬遮罩的製作方法及電鑄母板

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015055007A (ja) * 2013-09-13 2015-03-23 大日本印刷株式会社 金属板、金属板の製造方法、および金属板を用いてマスクを製造する方法
TW201527560A (zh) * 2013-11-14 2015-07-16 Dainippon Printing Co Ltd 蒸鍍遮罩、附有框架之蒸鍍遮罩及有機半導體元件之製造方法
WO2018066325A1 (ja) * 2016-10-07 2018-04-12 大日本印刷株式会社 蒸着マスクの製造方法、蒸着マスクが割り付けられた中間製品及び蒸着マスク

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4140716A (en) 1978-01-05 1979-02-20 Monsanto Company Process for making an amide of formic acid and forming nitrodiarylamine therefrom
JP6240960B2 (ja) * 2014-02-03 2017-12-06 株式会社ブイ・テクノロジー 成膜マスクの製造方法及び成膜マスク
WO2017014016A1 (ja) * 2015-07-17 2017-01-26 凸版印刷株式会社 メタルマスク用基材の製造方法、蒸着用メタルマスクの製造方法、メタルマスク用基材、および、蒸着用メタルマスク
CN205676528U (zh) * 2016-06-17 2016-11-09 鄂尔多斯市源盛光电有限责任公司 掩膜板
KR102657827B1 (ko) * 2017-01-17 2024-04-17 다이니폰 인사츠 가부시키가이샤 중간 제품
TWI784196B (zh) * 2018-09-07 2022-11-21 日商凸版印刷股份有限公司 蒸鍍遮罩中間體、蒸鍍遮罩、及蒸鍍遮罩的製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015055007A (ja) * 2013-09-13 2015-03-23 大日本印刷株式会社 金属板、金属板の製造方法、および金属板を用いてマスクを製造する方法
TW201527560A (zh) * 2013-11-14 2015-07-16 Dainippon Printing Co Ltd 蒸鍍遮罩、附有框架之蒸鍍遮罩及有機半導體元件之製造方法
WO2018066325A1 (ja) * 2016-10-07 2018-04-12 大日本印刷株式会社 蒸着マスクの製造方法、蒸着マスクが割り付けられた中間製品及び蒸着マスク

Also Published As

Publication number Publication date
WO2020050398A1 (ja) 2020-03-12
JP6930658B2 (ja) 2021-09-01
KR20210049115A (ko) 2021-05-04
TW202024365A (zh) 2020-07-01
JPWO2020050398A1 (ja) 2020-09-10
KR102397503B1 (ko) 2022-05-12
CN112639157B (zh) 2022-04-29
CN112639157A (zh) 2021-04-09
CN210711709U (zh) 2020-06-09

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