TWI784196B - Vapor deposition mask intermediate, vapor deposition mask, and manufacturing method of vapor deposition mask - Google Patents

Abstract

Possess: a belt-shaped part having a shape following the edge of the vapor deposition mask; a frame-shaped part having an inner edge having a shape following the edge of the belt-shaped part and surrounding the belt-shaped part; and a plurality of bridging parts connecting the belt-shaped part The edge is connected to the inner edge of the frame-shaped part. The strip-shaped part forms a vapor deposition mask by cutting off each bridging part. A curved portion having a shape following the bottom of the notch is provided on the edge of the strip-shaped portion, and each bridging portion is connected to a portion other than the curved portion in the edge of the strip-shaped portion.

Description

Vapor deposition mask intermediate, vapor deposition mask, and manufacturing method of vapor deposition mask

The present invention relates to a vapor deposition mask intermediate, a vapor deposition mask, and a method for manufacturing the vapor deposition mask.

The vapor deposition mask has a rectangular plate shape having a front surface and a back surface. The vapor deposition mask has a plurality of through holes penetrating from the front to the back. Each through-hole has a first opening opened on the front surface and a second opening opened on the back surface. Each through-hole is a passage of the vapor deposition material. When vapor deposition is performed on an object using the vapor deposition mask, the vapor deposition material enters the through hole from the first opening to form a pattern corresponding to the shape and position of the second opening on the object. A vapor deposition mask having a thickness of 50 μm or less has been proposed in order to prevent the wall surfaces defining the through holes from obstructing the passage of the vapor deposition material (see, for example, Patent Document 1). [Prior Art Literature] [Patent Document]

[Patent Document 1] Japanese Patent No. 6319505

When using a vapor deposition mask, the vapor deposition mask is fixed to the support frame. At this time, the vapor deposition mask is fixed to the frame in a state where tension is applied along the longitudinal direction of the vapor deposition mask. Since the vapor deposition mask is very thin, when the vapor deposition mask is fixed to the frame, deformation such as wrinkles or torsion due to tension may occur on the vapor deposition mask. Therefore, it is required that the deformation of the vapor deposition mask can be suppressed when the vapor deposition mask is used.

An object of the present invention is to provide a vapor deposition mask intermediate, a vapor deposition mask, and a method for producing a vapor deposition mask capable of suppressing deformation of the vapor deposition mask when the vapor deposition mask is used.

The vapor deposition mask intermediate used to solve the above-mentioned problems is a thin sheet made of metal that is used to manufacture the vapor deposition mask. The vapor deposition mask has a belt shape surrounded by a pair of first edge portions and a pair of second edge portions, each second edge portion is shorter than the first edge portion and has a slit, and the above-mentioned slit has a direction toward the first edge portion. 1. A U-shaped part that is concave in the direction in which the edge extends, that is, the longitudinal direction, and the bottom of the U-shaped part is curved. The aforementioned vapor deposition mask intermediate system includes: a belt-shaped portion having a shape following the edge of the aforementioned evaporation mask; a frame-shaped portion having an inner edge having a shape following the edge of the aforementioned belt-shaped portion and surrounding the aforementioned belt-shaped portion; And a plurality of bridging portions connecting the aforementioned edge of the aforementioned strip-shaped portion to the inner edge of the aforementioned frame-shaped portion. The belt-shaped part is formed by cutting each bridging part to form the vapor deposition mask, and a curved part having a shape of the bottom following the cutout is provided on the edge of the belt-shaped part. Each bridging portion is connected to a portion other than the bending portion in the edge of the belt-shaped portion.

The vapor deposition mask used to solve the above-mentioned problems is a vapor deposition mask comprising a band-shaped portion of a metal sheet vapor deposition mask intermediate, and the vapor deposition mask intermediate system is provided with a pair of first edge portions and A strip-shaped portion surrounded by a pair of second edge portions, a frame-shaped portion surrounding the strip-shaped portion, and a plurality of bridging portions connected to the aforementioned strip-shaped portion and the aforementioned frame-shaped portion, and the aforementioned strip-shaped portion is configured from the aforementioned The vapor deposition mask intermediate is removed by cutting off the aforementioned bridging portion. Each second edge is shorter than the first edge and has a slit, and the notch has a U-shaped portion that is concave in the direction extending toward the first edge, that is, the longitudinal direction, and the U-shaped portion The bottom is curved. A curved portion belonging to the bottom of the cutout is provided on the edge of the vapor deposition mask. By cutting the bridging portion, bridging traces are formed on the edge of the vapor deposition mask other than the bent portion.

A method of manufacturing a vapor deposition mask for solving the above-mentioned problems is to manufacture a vapor deposition mask having a belt shape surrounded by a pair of first edge portions and a pair of second edge portions, each second edge portion It is shorter than the first edge and has a notch. The notch has a U-shaped portion that is concave in the direction extending toward the first edge, that is, the longitudinal direction. The bottom of the U-shaped portion is curved. The manufacturing method includes forming a vapor deposition mask intermediate body, and forming a vapor deposition mask from the strip-shaped portion by cutting each bridging portion, the vapor deposition mask intermediate system comprising a metal sheet and having: A belt-shaped portion in the shape of the edge of the vapor deposition mask; a frame-shaped portion having an inner edge following the edge of the belt-shaped portion and surrounding the belt-shaped portion; connecting the aforementioned edge of the belt-shaped portion to the frame-shaped portion a plurality of bridging portions of the inner edge; and forming a vapor deposition mask from the strip-shaped portion by cutting off each bridging portion. Forming the vapor deposition mask from the strip-shaped portion is that a curved portion having a shape of the bottom following the cutout is provided on the aforementioned edge of the strip-shaped portion, and each bridging portion is connected in the aforementioned edge of the aforementioned strip-shaped portion. in parts other than the above-mentioned curved part.

According to the above configuration, the vapor deposition mask formed from the belt-shaped portion includes a U-shaped portion and has a cutout having a curved bottom. Therefore, when tension is applied to the vapor deposition mask by stretching both sides of the slit in each second edge in a direction away from each other with a pair of second edges, the force acting on the slit is due to the force of the slit. shape is dispersed. Thereby, when using a vapor deposition mask, deformation|transformation, such as a wrinkle and a twist, can be suppressed in a vapor deposition mask.

Also, the bridging portion connecting the strip-shaped portion to the frame-shaped portion is a portion connected to the edge of the strip-shaped portion other than the bent portion. Therefore, in the vapor deposition mask formed by cutting the bridge part, it is suppressed that a part of the bridge part remains and a part of the bend part is missing in the bent part of the cutout. Thereby, the shape of the bent portion is maintained in a shape capable of distributing tension applied to the vapor deposition mask. Therefore, when the vapor deposition mask is used, deformation of the vapor deposition mask can be suppressed.

In the above-mentioned evaporation mask intermediate body, the aforementioned edge of the strip-shaped portion may include the pair of first edge portions and the pair of second edge portions, and each second edge portion of the aforementioned strip-shaped portion has a Connect to the connecting portion of the aforementioned frame-shaped portion by means of the plurality of bridging portions.

When producing the vapor deposition mask intermediate body, the vapor deposition mask intermediate body is conveyed in a state where tension along the longitudinal direction is applied to the vapor deposition mask intermediate body. According to the above-mentioned configuration, because the second edge of the strip-shaped portion is connected to the frame-shaped portion by the bridging portion, when the vapor-deposition mask intermediate is transported when the vapor-deposition mask intermediate is produced, the long side of the strip-shaped portion Both ends of the direction are continuously supported by the frame-shaped part. Thereby, even if the magnitude of the tension along the longitudinal direction varies between one end and the other end in the longitudinal direction, deformation of the belt-shaped portion can be suppressed.

In the above-mentioned evaporation mask intermediate body, each second edge portion of the strip-shaped portion may be provided with a cutout having a shape following the aforementioned cutout of the aforementioned vapor-deposition mask, and each cutout of the aforementioned strip-shaped portion is covered by the aforementioned The connection part is double-teamed.

According to the above configuration, both sides of the notch are connected to the frame-shaped portion by the bridge portion. Therefore, compared with the case where only one of the two sides of the slit is connected to the frame-shaped part through the bridging part, when the vapor deposition mask intermediate is conveyed along the longitudinal direction during the manufacture of the vapor deposition mask intermediate , the band is continuously supported by the frame. In addition, compared with the case where only one of the two sides of the notch is connected to the frame-shaped portion via the bridging portion, the belt-shaped portion is less likely to be displaced relative to the frame-shaped portion. Therefore, when the vapor deposition mask intermediate body is conveyed along the longitudinal direction during the production of the vapor deposition mask intermediate body, a part of the strip-shaped portion can be suppressed from being bent by using the strip-shaped portion, for example, by a contact conveyance mechanism. .

In the above vapor deposition mask intermediate body, the second edge of the belt-shaped portion is provided with a notch having a shape following the aforementioned notch of the vapor deposition mask, and the inner edge of the aforementioned frame-shaped portion is provided with a shape following the aforementioned strip. The protruding edge in the shape of the aforementioned incision of the strip-shaped portion, each of the incisions of the aforementioned strip-shaped portion includes the aforementioned curved portion and a pair of straight lines extending from the aforementioned curved portion to the aforementioned longitudinal direction, and each straight line portion can also be connected to the The aforementioned protruding edge.

The portion of the strip-shaped portion surrounding the cutout has a smaller width in the direction perpendicular to the longitudinal direction than other portions of the strip-shaped portion. According to the above structure, the rigidity between each straight portion and the protruding edge is improved by connecting each straight portion to the protruding edge. Thereby, deformation of the belt-shaped portion is suppressed. Furthermore, it is suppressed that the protruding edge is bent with respect to the strip-shaped part. As a result, when conveying the vapor deposition mask intermediate body, it is possible to suppress a part of the belt-shaped portion or the protruding edge from catching on the conveying mechanism or the like.

In the above vapor deposition mask intermediate body, the aforementioned edge of the strip-shaped portion includes the aforementioned pair of first edge portions and the aforementioned pair of second edge portions, and each first edge portion of the aforementioned strip-shaped portion can also be formed by the aforementioned plurality of The bridging portion is connected to the aforementioned frame portion. According to the above configuration, when the vapor deposition mask intermediate is conveyed, the first edge of the strip-shaped portion is continuously supported by the frame-shaped portion. Therefore, each first edge portion is suppressed from being bent, and deformation of the belt-shaped portion is suppressed.

In the above-mentioned vapor deposition mask intermediate body, each second edge portion of the strip-shaped portion may have a shape following the aforementioned incision of the vapor deposition mask, and may be provided with a notch including the aforementioned bent portion, and the strip-shaped portion may have a Each first edge portion is connected to the aforementioned frame-shaped portion at the first connecting position, and each second edge portion of the aforementioned belt-shaped portion is connected to the aforementioned frame-shaped portion at the second connecting position through the plurality of bridging portions. The first connection part is located closer to the second connection part in the longitudinal direction than the second connection part.

The corner portion formed by the first edge portion and the second edge portion in the band-shaped portion is easier to float from the frame-shaped portion than the center of the second edge portion and the center of the first edge portion. In addition, the portion of the belt-shaped portion that sandwiches the notch has lower rigidity than the other portions. According to the above configuration, since the first connecting portion is located closer to the second connecting portion than the bent portion, the corner portion of the band-shaped portion is suppressed from floating with respect to the frame-shaped portion. Therefore, when the vapor deposition mask intermediate body is transported along the longitudinal direction during production of the vapor deposition mask intermediate body, it is possible to suppress the corners from being caught by the transport mechanism or the like.

In the above-mentioned evaporation mask intermediate body, the strip-shaped portion includes a mask portion including a plurality of through holes, and each first edge of the strip-shaped portion can also be positioned in the longitudinal direction without being connected to the mask. The portion where the parts overlap is connected to the aforementioned frame-shaped portion by the aforementioned bridging portion.

According to the above configuration, compared with the case where the bridging portion and the mask portion are aligned in the longitudinal direction, when the vapor deposition mask intermediate is transported along the longitudinal direction in the production of the vapor deposition mask intermediate, the bridging portion The force acting on the mask portion can be relaxed. Therefore, deformation of the through hole included in the mask portion can be suppressed.

In the above-mentioned vapor deposition mask intermediate body, the frame-shaped portion may be provided with a weakened portion having a linear shape extending in a direction from the inner edge of the frame-shaped portion toward the outer edge of the frame-shaped portion. The mechanical strength of the fragile portion is lower than the mechanical strength of the frame-shaped portion other than the fragile portion.

According to the above configuration, since the mechanical strength of the fragile portion is lower than that of the frame-shaped portion other than the fragile portion, the frame-shaped portion is easily cut along the fragile portion. Moreover, since one end of the fragile portion is located on the inner edge of the frame, the ring formed by the inner edge can be cut when the strip is removed from the frame. Thereby, it becomes easy to cut|disconnect a bridge|bridging part.

According to the present invention, deformation of the vapor deposition mask during use of the vapor deposition mask can be suppressed.

An embodiment of a vapor deposition mask intermediate, a vapor deposition mask, and a method of manufacturing a vapor deposition mask will be described with reference to FIGS. 1 to 16 . Hereinafter, the configuration of the vapor deposition mask intermediate, the configuration of the mask device, and the manufacturing method of the vapor deposition mask will be sequentially described.

［Composition of Evaporation Mask Intermediate］ The configuration of the vapor deposition mask intermediate will be described with reference to FIGS. 1 to 13 . The vapor deposition mask intermediate body 10 shown in FIG. 1 is a metal plate, ie, a metal sheet, for manufacturing a vapor deposition mask. As shown in FIG. 1 , the vapor deposition mask intermediate body 10 has a strip shape extending in the longitudinal direction. When manufacturing a vapor deposition mask, the vapor deposition mask intermediate body 10 is conveyed by conveyance means, such as a conveyance roller, along a longitudinal direction. The vapor deposition mask has a belt shape surrounded by a pair of first edges and a pair of second edges. Each second edge is shorter than the first edge and has a notch. The notch has a U-shaped portion that is recessed in the direction extending toward the first edge, that is, in the longitudinal direction, and the bottom of the U-shaped portion is curved. The longitudinal direction in which the first edge extends is parallel to the longitudinal direction of the vapor deposition mask intermediate body 10 , that is, to the conveyance direction.

As shown in FIG. 1 , the vapor deposition mask intermediate body 10 includes a belt-shaped portion 11 , a frame-shaped portion 12 , and a plurality of bridging portions 13 . The strip 11 has a shape that follows the edge of the evaporation mask. The edge 11E of the belt-shaped portion 11 is constituted by a pair of first edge portions 11L and a pair of second edge portions 11W. The frame-shaped portion 12 has an inner edge 12E following the edge 11E of the strip-shaped portion 11 to surround the strip-shaped portion 11 . The bridging portion 13 connects the edge 11E of the belt-shaped portion 11 to the inner edge 12E of the frame-shaped portion 12 . The belt-shaped portion 11 is formed by cutting each bridging portion 13 to form a vapor deposition mask. Each second edge portion 11W of the belt-shaped portion 11 is provided with a notch 11N. The notch 11N has a U-shaped portion following the notch of the vapor deposition mask, and the bottom of the U-shaped portion is a curved line. The edge of the cutout 11N is a concave rim following the shape of the cutout of the evaporation mask. The inner edge 12E has a protruding edge 12E1 having a shape following the notch 11N. The notch 11N includes a bent portion 11N1 following the bottom of the notch that the vapor deposition mask has. Each bridging portion 13 is connected to a portion other than the bent portion 11N1 in the edge 11E of the belt-shaped portion 11 .

According to this vapor deposition mask intermediate body 10 , the vapor deposition mask formed from the belt-shaped portion 11 has a cutout having a U-shaped portion and the bottom of the U-shaped portion is a curved line. Therefore, when tension is applied to the vapor deposition mask by pulling both sides of the slit in each second edge in a direction in which the pair of second edges are separated from each other, the force acting on the slit is due to the force of the slit. shape is dispersed. Thereby, when using a vapor deposition mask, deformation|transformation, such as a wrinkle and a twist, can be suppressed in a vapor deposition mask.

In addition, the bridging portion 13 connecting the strip-shaped portion 11 to the frame-shaped portion 12 is a portion connected to the edge 11E of the strip-shaped portion 11 other than the bent portion 11N1 . Therefore, in the vapor deposition mask formed by cutting the bridge portion 13 , it is suppressed that a part of the bridge portion 13 remains and a part of the bend portion is missing in the bent portion of the cutout. Thereby, the shape of the bent portion is maintained in a shape capable of distributing tension applied to the vapor deposition mask. Therefore, when the vapor deposition mask is used, deformation of the vapor deposition mask can be suppressed.

The belt-shaped portion 11 includes a plurality of mask portions 11M. A plurality of through-holes penetrating the belt-shaped portion 11 are formed in each mask portion 11M. The plurality of mask parts 11M are arranged at intervals along the longitudinal direction DL. In addition, although the belt-shaped part 11 shown in FIG. 1 includes three mask parts 11M, the number of mask parts 11M included in each belt-shaped part 11 can be arbitrarily changed to a number of one or more.

The edge 11E of the strip-shaped portion 11 is composed of a bridging region R13 including a connecting portion connected to the frame portion 12 via the bridging portion 13 and a non-bridging region RN not including the connecting portion. In the belt portion 11 shown in FIG. 1 , dots are added along the bridge region R13 in order to clearly distinguish the bridge region R13 from the non-bridge region RN.

The bridging region R13 is constituted by a pair of first edge portions 11L, a region other than the notch 11N in each second edge portion 11W, and a region other than the bent portion 11N1 in each notch 11N. Each region included in the bridging region R13 has a shape extending along the longitudinal direction DL, or has a shape extending along the width direction DW. The width direction DW is a direction perpendicular to the longitudinal direction DL. The non-bridging region RN is constituted by each bent portion 11N1. Each of the bent portions 11N1 does not have a region of any one of the shape extending along the longitudinal direction DL and the shape extending along the width direction DW.

A plurality of bridging portions 13 may exist along the bridging region R13. Each bridging portion 13 connects a part of the bridging region R13 to the frame-shaped portion 12 . In addition, in FIG. 1 , for the convenience of enumerating the positions where the bridging portion 13 can be arranged, the bridging portion 13 is indicated by a dotted line.

FIG. 2 shows two examples of the shape of the notch 11N that the second edge portion 11W has. FIG. 2( a ) shows a first example of the notch 11N, and FIG. 2( b ) shows a second example of the notch 11N.

As shown in FIG. 2( a ), in the first example of the notch 11N, the notch 11N is composed of a curved portion 11N1 and a pair of straight portions 11N2 extending from the curved portion 11N1 in the longitudinal direction DL. Each linear portion 11N2 extends in the longitudinal direction DL, and a pair of linear portions 11N2 are arranged at intervals in the width direction DW. The bent portion 11N1 has an arcuate shape that becomes concave in a direction from the notch 11N including the bent portion 11N1 toward the other notches 11N. In the first example of the notch 11N, a pair of linear portions 11N2 are included in the bridging region R13. In contrast, the bent portion 11N1 is included in the non-bridging region RN.

As shown in FIG. 2( b ), the second example of the notch 11N has a substantially parabolic shape. The second example of the notch 11N is constituted by a pair of curved portions 11N3. The pair of curved portions 11N3 have shapes that pass through the bottom of the notch 11N and are symmetrical to each other with respect to a straight line extending in the longitudinal direction DL. Each curved portion 11N3 extends along a direction intersecting the longitudinal direction DL. In the second example of the notch 11N, the entire notch 11N is a bent portion. Therefore, the entire notch 11N is included in the non-bridging region RN.

In FIG. 3 , one bridging portion 13 in the vapor deposition mask intermediate body 10 and a part of the belt-shaped portion 11 and a part of the frame-shaped portion 12 connected by the bridging portion 13 are enlarged and shown. In addition, FIG. 3 shows a bridging portion 13 that connects a part of the region extending in the width direction DW of the edge 11E of the belt-shaped portion 11 to the frame-shaped portion 12 .

As shown in FIG. 3( a ), the bridging portion 13 has a shape extending from the frame-shaped portion 12 to the belt-shaped portion 11 . In this embodiment, the bridging portion 13 has a rectangular shape. In addition, the shape of the bridging portion 13 may be changed to any shape other than the rectangular shape as long as it is a shape extending from the frame-shaped portion 12 to the belt-shaped portion 11 . The edge 11E of the belt-shaped portion 11 has a bridging notch 11ED. One bridging portion 13 is connected to one bridging notch 11ED. In the bridging notch 11ED, a gap is formed between the bridging portion 13 and the band-shaped portion 11 on both sides of the bridging portion 13 in the width direction DW. The bridging notch 11ED is a rectangular notch. The shape of the bridging notch 11ED is not limited to a rectangular shape, and may be, for example, an arc shape.

In the bridging portion 13 , the end connected to the band-shaped portion 11 is called a base end, and the end connected to the frame-shaped portion 12 is called a front end. The base end portion has a fragile portion 13A whose mechanical strength is lower than that of the front end portion. The weak portion 13A is, for example, a portion that is half-etched at a base end portion in the width direction DW. The plurality of portions where the fragile portion 13A is half-etched may be arranged at intervals along the base end portion. In addition, the bridging portion 13 may not have the weak portion 13A.

The width of the bridging notch 11ED in the width direction DW is, for example, not less than 1 mm and not more than 3 mm. The width of the bridging notch 11ED in the longitudinal direction DL is, for example, 0.1 mm or more and 0.3 mm or less. The thickness of the bridging portion 13 is equal to the thickness of the metal sheet before processing and is used to form the vapor deposition mask intermediate. The width of the bridging portion 13 in the width direction DW is set to, for example, 70% or more and 80% or less of the width of the bridging notch 11ED in the width direction DW.

In the example shown in FIG. 3( a ), the fragile portion 13A of the bridge portion 13 is composed of one half-etched portion. The half-etched portion is a portion that is half-etched in the bridge portion 13 . In this case, the width of the fragile portion 13A in the width direction DW is set to, for example, 50% to 80% of the width of the bridging portion 13 in the width direction DW. The width of the fragile portion 13A in the longitudinal direction DL is set to, for example, 25% to 50% of the width of the bridging notch 11ED in the longitudinal direction DL.

When the bridging portion 13 is cut by bending the bridging portion 13 because the bridging portion 13 has the weak portion 13A, it is easier to cut the bridging portion 13 than when the bridging portion 13 has no weak portion 13A. In addition, since the bridging portion 13 is easily cut, it is difficult to cause unevenness in the shape of the trace of the cut bridging portion 13 , that is, the cut trace. Moreover, since the bridging portion 13 has the weak portion 13A at the proximal end, a part of the bridging portion 13 is less likely to remain on the vapor deposition mask. Therefore, when a tension is applied to the vapor deposition mask along the longitudinal direction of the vapor deposition mask, it becomes difficult to generate tension on the vapor deposition mask based on the remaining portion of the bridging portion 13 in the vapor deposition mask. Deformation such as wrinkles or twists.

Also, in the case where the bridging portion 13 is cut off because the fragile portion 13A is located in the bridging notch 11ED and the bridging portion 13 is bent, the remaining portion of the bridging portion 13 is smaller than that in the edge of the vapor deposition mask. It is suppressed that parts other than one part protrude outward. Furthermore, since the fragile portion 13A is located in the bridging notch 11ED, when the vapor deposition mask intermediate 10 is transported, the fragile portion 13A is protected from the outside by the area divided by the bridging notch 11ED in the edge 11E. Thereby, when conveying the vapor deposition mask intermediate body 10, it can suppress that the bridge|bridging part 13 is cut|disconnected from the belt-shaped part 11.

Moreover, as shown in FIG.3(b), the edge 11E of the belt-shaped part 11 does not have to have the bridging notch 11ED. In this case, the bridging portion 13 is a portion that connects the edge 11E of the belt-shaped portion 11 and has a shape extending in the width direction DW. In addition, the fragile portion 13B may have a plurality of through holes arranged along the width direction DW.

Furthermore, as shown in FIG. 3( c ), the fragile portion 13C may also have a plurality of through holes 13C1 and a plurality of half-etched portions 13C2 . In this case, in the fragile portion 13C, the through-holes 13C1 and the half-etched portions 13C2 are alternately arranged in the width direction DW.

In addition, even in the case where the edge 11E of the belt-shaped portion 11 has the bridging notch 11ED, the fragile portion may have a plurality of through holes, and the through holes and half-etched portions may be alternately arranged in the fragile portion. Also, even in the case where the edge 11E of the strip-shaped portion 11 does not have the bridging notch 11ED, the fragile portion may be constituted by one half-etched portion. In addition, the fragile portion includes a plurality of half-etched portions, and the plurality of half-etched portions may be arranged at intervals along the direction in which the fragile portion extends.

FIG. 4 shows a cross-sectional structure of a mask portion 11M of the vapor deposition mask intermediate body 10 along a plane perpendicular to the surface and extending along the longitudinal direction DL. FIG. 4( a ) shows the cross-sectional structure of the first example of the mask portion 11M. FIG. 4( b ) shows the cross-sectional structure of the second example of the mask portion 11M.

As shown in FIG. 4( a ), the vapor deposition mask intermediate body 10 includes a surface 10F and a surface opposite to the surface 10F, that is, a rear surface 10R. The surface 10F faces the vapor deposition source of the vapor deposition device in a state where the vapor deposition mask is attached to the vapor deposition device. The back surface 10R faces a vapor deposition target such as a glass substrate in a state where the vapor deposition mask is attached to the vapor deposition device. The mask portion 11M has a plurality of through holes 11H penetrating through the vapor deposition mask intermediate body 10 . The wall surface of the through hole 11H has an inclination in a cross-sectional view with respect to the thickness direction of the vapor deposition mask intermediate body 10 . The shape of the wall surface of the through hole 11H is a semicircular arc shape protruding toward the outside of the through hole 11H in a cross-sectional view. In addition, the shape of the wall surface of the through hole 11H may be a complex curved shape having a plurality of bending points in a cross-sectional view.

The thickness of the mask portion 11M is, for example, 15 μm or less. Since the thickness of the mask portion 11M is 15 μm or less, the depth of the through hole 11H formed in the mask portion 11M can be set to 15 μm or less. In this way, if the vapor-deposition mask intermediate body 10 is thin, the area of the wall surface of the through-hole 11H itself can be reduced, and since the thickness of the vapor-deposition mask intermediate body 10 is thin, the vapor-deposited material is formed in the through-hole. The flying distance in the hole 11H is short. Thereby, the amount of vapor-deposited substances adhering to the wall surface of the through-hole 11H can be reduced. In addition, in the vapor deposition mask intermediate body 10 , the thickness of the portion other than the mask portion 11M is, for example, 25 μm or less. In the evaporation mask intermediate body 10, the thickness of the portion other than the mask portion 11M is the same as that of the metal sheet before processing, that is, the metal sheet before the belt-shaped portion 11, the frame-shaped portion 12, and the bridging portion 13 are formed. equal thickness.

The surface 10F includes a first opening H1 that is an opening of the through-hole 11H. The back surface 10R includes a second opening H2 which is the opening of the through-hole 11H. The first opening H1 is larger than the second opening H2 in plan view of the facing surface 10F. Each through-hole 11H is a passage through which the vapor deposition substance sublimated from the vapor deposition source passes. The vapor deposition substance sublimated from the vapor deposition source advances from the first opening H1 to the second opening H2. In the through-hole 11H, since the first opening H1 is larger than the second opening H2, the amount of the vapor-deposited substance entering the through-hole 11H from the first opening H1 can be increased. In addition, the area of the through-hole 11H in the cross section along the surface 10F may also increase monotonously from the second opening H2 to the first opening H1, from the second opening H2 to the first opening H1, or may have an area extending from the second opening H2 to the first opening H1. The middle of the 2 opening H2 to the 1st opening H1 becomes a substantially constant position.

As shown in FIG. 4( b ), the first opening H1 is larger than the second opening H2 in plan view of the facing surface 10F. The through hole 11H is composed of a large hole 11LH having a first opening H1 and a small hole 11SH having a second opening H2. The cross-sectional area of the large hole 11LH decreases monotonously from the first opening H1 toward the rear surface 10R. The cross-sectional area of the small hole 11SH decreases monotonously from the second opening H2 toward the surface 10F. The wall surface of the through hole 11H is a portion where the large hole 11LH and the small hole 11SH are connected in a cross-sectional view, that is, in the middle of the thickness direction of the vapor deposition mask intermediate body 10, and has a shape protruding toward the inside of the through hole 11H. The distance between the portion protruding from the wall surface of the through-hole 11H and the back surface 10R has a step height SH.

In addition, in the first example of the mask portion 11M, the step height SH is zero. From the viewpoint of securing the amount of the vapor-deposited substance reaching the second opening H2, the step height SH is preferably zero. In the case of the first example in which the band-shaped portion 11 includes the mask portion 11M, the thickness of the metal sheet before processing is so thin that the through-hole 11H is formed by wet-etching the metal sheet from one side. The thickness of the metal flake before processing is, for example, 25 μm or less as described above. In addition, in the case of the second example in which the belt-shaped portion 11 includes the mask portion 11M, the thickness of the mask portion 11M is, for example, 25 μm or less. Also, in this case, the thickness of the thin metal sheet before processing is, for example, 50 μm or less.

[Example of vapor deposition mask intermediate] Next, nine examples of the vapor deposition mask intermediate body 10 will be described with reference to FIGS. 5 to 13 . In the nine examples of the vapor deposition mask intermediate body 10 , in the edge 11E of the strip-shaped portion 11 , the regions connected to the frame-shaped portion 12 via the bridge portion 13 are different from each other. Moreover, in the vapor deposition mask intermediate body 10 of each example, the belt-shaped part 11 is provided with the 1st example of the notch 11N. However, in the first example (see FIG. 5 ), the second example (see FIG. 6 ), and the fourth to sixth examples (see FIGS. 8 to 10 ) of the vapor deposition mask intermediate 10 described below, and the first example (see FIG. 8 to FIG. 10 ), In the ninth example (see FIG. 13 ), the belt-shaped portion 11 may be provided with the notch 11N of the second example.

[Example 1] As shown in FIG. 5 , each second edge portion 11W of the belt-shaped portion 11 is connected to the frame-shaped portion 12 via a plurality of bridging portions 13 . When producing the vapor-deposition mask intermediate body 10 , the vapor-deposition mask intermediate body 10 is conveyed in a state where tension along the longitudinal direction DL is applied to the vapor-deposition mask intermediate body 10 . In this example, the second edge portion 11W of the belt-shaped portion 11 is connected to the frame-shaped portion 12 via the bridging portion 13 . Therefore, when the vapor deposition mask intermediate body 10 is conveyed when the vapor deposition mask intermediate body 10 is produced, both ends of the strip-shaped portion 11 in the longitudinal direction DL are continuously supported by the frame-shaped portion 12 . Thereby, even if the magnitude of the tension along the longitudinal direction DL varies between one end and the other end in the longitudinal direction DL, deformation of the belt-shaped portion 11 can be suppressed.

In particular, if the second edge portion 11W of the belt-shaped portion 11 is continuously supported by the frame portion 12, the second edge portion 11W is prevented from being bent or curled when the vapor deposition mask intermediate body 10 is transported. situation, so that the deformation of the belt-shaped portion 11 is suppressed.

Each notch 11N of the belt-shaped portion 11 is sandwiched by the connecting portion connected by the bridging portion 13 in the direction in which the second edge portion 11W extends. Thereby, both sides of the notch 11N in the width direction DW are connected to the frame-shaped part 12 by the bridging part 13 . Therefore, compared with the case where only one of the two sides of the notch 11N in the width direction DW is connected to the frame-shaped part 12 by the bridging part 13, when the vapor deposition mask intermediate body 10 is transported, the belt-shaped part 11 It is continuously supported by the frame portion 12 . Also, compared to the case where only one of both sides of the notch 11N in the width direction DW is connected to the frame-shaped portion 12 via the bridging portion 13 , the belt-shaped portion 11 is less likely to be displaced relative to the frame-shaped portion 12 . Therefore, when conveying the vapor deposition mask intermediate body 10, the belt-shaped part 11 suppresses a part of the belt-shaped part 11 from being bent by contacting a conveyance mechanism etc., for example.

In the width direction DW, the notch 11N is sandwiched by a pair of second edge elements. Each second edge element extends along the width direction DW. In each of the second edge portions 11W, the connecting portion is located in each of the second edge elements and is not located in the straight portion 11N2 of the notch 11N.

Preferably, there are a plurality of connection locations on both sides of the cutout 11N in the width direction DW. The effect of suppressing bending of the edge portion 11W is more easily obtained by the entire second edge portion 11W than in the case where there is one connecting portion. Furthermore, it is preferable that a plurality of same number of connection sites exist on both sides of the slit 11N in the width direction DW. Thereby, compared with the case where the number of locations where the belt-shaped portion 11 is supported by the frame-shaped portion 12 on both sides of the notch 11N in the width direction DW is different, the load supported by one connecting portion can be suppressed. the deviation. Therefore, it is suppressed that the deviation of the load produces different deformations on both sides of the notch 11N in the width direction DW.

On both sides of the notch 11N in the width direction DW, it is preferable that a plurality of connection sites exist at equal intervals. Thereby, the second edge portion 11W is suppressed from being bent at the portion where the density of the connection portion is lower than that of other portions.

A plurality of bridging portions 13 connected to one second edge portion 11W of the pair of second edge portions 11W constitute a first bridging portion group, and a plurality of bridging portions 13 connected to the other second edge portion 11W constitute a second bridging portion group. In the width direction DW, the position of each bridging part 13 belonging to the first bridging part group is preferably equal to the position of one bridging part 13 belonging to the second bridging part group. Thereby, compared with the case where the number and position of the connection part in the width direction DW differ from each other in a pair of 2nd edge part 11W, the variation of the load supported by one connection part can be suppressed. Therefore, it is suppressed that the variation in the load causes different deformations in the pair of second edge portions 11W.

[Example 2] As shown in FIG. 6, in the second example of the vapor deposition mask intermediate body 10, each first edge portion 11L is connected to the frame-shaped portion 12 not only by each second edge portion 11W, but also by a plurality of bridging portions 13. . Therefore, it is suppressed that each 1st edge part 11L is bent when conveying the vapor deposition mask intermediate body 10, and deformation|transformation of the belt-shaped part 11 is suppressed. The plurality of bridging portions 13 connected to each first edge portion 11L preferably include bridging portions 13 existing at equal intervals in the longitudinal direction DL. Thereby, in the first edge portion 11L, it is suppressed that the degree of warping differs depending on the area between the adjacent bridging portions 13 . As a result, when conveying the vapor-deposition mask intermediate body 10, when a certain tension is applied to the vapor-deposition mask intermediate body 10 along the longitudinal direction DL, the shape of the vapor-deposition mask intermediate body 10 is different in the longitudinal direction DL. Inhomogeneities are suppressed.

The pair of first edge portions 11L are preferably connected to the frame-shaped portion 12 by the same number of bridging portions 13 . A plurality of bridging portions 13 connected to one first edge portion 11L of the pair of first edge portions 11L constitute a first bridging portion group, and a plurality of bridging portions 13 connected to the other first edge portion 11L constitute a second bridging portion group. In the longitudinal direction DL, the position of each bridging portion 13 belonging to the first bridging portion group is preferably equal to the position of one bridging portion 13 belonging to the second bridging portion group. Thereby, compared with the case where the number and position of the connection part in the longitudinal direction DL differ from each other in a pair of 1st edge part 11L, the variation of the load supported by one connection part can be suppressed. Therefore, it is suppressed that the variation in the load causes different deformations in the pair of first edge portions 11L.

The first bridging portion group and the second bridging portion group are preferably respectively included in the bridging portion located closer to the end of the second edge portion 11W including the notch 11N than the bottom of each notch 11N in the longitudinal direction DL. 13. That is, each first edge portion 11L of the belt-shaped portion 11 is connected to the frame-shaped portion 12 at a first connection point, and each second edge portion 11W of the belt-shaped portion 11 is connected to the frame-shaped portion at a second connection point. department. Preferably, the first connection portion is located closer to the second connection portion than the bent portion 11N1 in the longitudinal direction DL. In other words, the first connection portion is preferably located outside the bent portion 11N1 in the longitudinal direction DL.

The corner portion formed by the second edge portion 11W and the first edge portion 11L in the belt-shaped portion 11 is easier to float from the frame-shaped portion 12 than the center of the second edge portion 11W and the center of the first edge portion 11L. In addition, the portion of the belt-shaped portion 11 sandwiching the notch 11N has a lower rigidity than the other portions where only the notch 11N exists. If the first edge portion 11L is connected to the frame-shaped portion 12 at a position closer to the end than the bottom of the notch 11N, it is possible to suppress the corner formed by the second edge portion 11W and the first edge portion 11L from being opposite to the edge. The case where the frame-shaped portion 12 is bent. Therefore, when conveying the vapor deposition mask intermediate body 10, it can suppress that a corner part catches a conveyance mechanism etc. from occurring.

In other words, since the first connection point is located closer to the second connection point than the bent portion 11N1 , the corners of the strip-shaped portion 11 are suppressed from floating with respect to the frame-shaped portion 12 . Therefore, when the vapor-deposition mask intermediate body 10 is conveyed along the longitudinal direction DL during production of the vapor-deposition mask intermediate body 10 , it is possible to suppress the corners from being caught by the conveyance mechanism or the like.

Each first edge portion 11L is connected to the frame-shaped portion 12 via a bridging portion 13 at a portion that does not overlap with the mask portion 11M in the longitudinal direction DL. The area between the mask parts 11M adjacent to each other in the longitudinal direction DL is a non-evaporation area. The connection site included in the first edge portion 11L is included in a region that extends the non-deposition region along the width direction DW. Therefore, compared with the case where the bridging portion 13 and the mask portion 11M are aligned in the longitudinal direction DL, the force acting on the mask portion 11M through the bridging portion 13 is relaxed when the vapor deposition mask intermediate body 10 is transported. Therefore, deformation of the through hole 11H included in the mask portion 11M is suppressed.

[Example 3] As shown in FIG. 7 , in the third example of the vapor deposition mask intermediate body 10 , each notch 11N is connected not only by a pair of second edge portions 11W and a pair of first edge portions 11L, but also by a bridging portion 13 . Frame-shaped part 12. In each notch 11N, each linear portion 11N2 is connected to the protruding edge 12E1 of the frame-shaped portion 12 entering the notch 11N via the bridging portion 13 . The portion of the strip-shaped portion 11 surrounding the notch 11N has a smaller width in the direction perpendicular to the longitudinal direction DL than other portions of the strip-shaped portion 11 . By connecting each straight portion 11N2 to the frame portion 12 , the rigidity between each straight portion 11N2 and the protruding edge 12E1 is improved, so that each straight portion 11N2 is prevented from being bent relative to the frame portion 12 . Thereby, deformation of the belt-shaped portion 11 is suppressed. Furthermore, the protruding edge 12E1 of the inner edge 12E of the frame-shaped portion 12 is suppressed from being bent relative to the band-shaped portion 11 . Thereby, when conveying the vapor deposition mask intermediate body 10, it can suppress that a part of the frame-shaped part 12 catches a conveyance mechanism etc.

Each linear portion 11N2 preferably includes a plurality of connection locations. Compared with the case where there is only one connecting portion, the area capable of obtaining the effect of suppressing bending of each straight portion 11N2 is expanded in the straight portion 11N2. It is preferable that a plurality of connection sites in each linear portion 11N2 are arranged at equal intervals in the longitudinal direction DL. Thereby, the degree of bending in the linear portion 11N2 is suppressed from being different depending on the area between the adjacent connection portions.

The pair of linear portions 11N2 are preferably connected to the frame portion 12 through the same number of bridging portions 13 . The plurality of bridging portions 13 connected to one straight portion 11N2 of the pair of straight portions 11N2 constitute a first bridging portion group, and the plurality of bridging portions 13 connected to the other straight portion 11N2 constitute a second bridging portion group. In the width direction DW, the position of each bridging part 13 belonging to the first bridging part group is preferably equal to the position of one bridging part 13 belonging to the second bridging part group. Thereby, compared with the case where the number or position of the parts where the straight part 11N2 is supported by the frame-shaped part 12 in the longitudinal direction DL differs from each other in a pair of straight part 11N2, it is possible to suppress the number of parts supported by one connecting part. load deviation. Therefore, it is suppressed that the deviation of the load produces mutually different deformation|transformation in a pair of linear part 11N2.

Each first edge portion 11L has no connection portion at an end portion closer to the second edge portion 11W including the notch 11N than the bottom of each notch 11N in the longitudinal direction DL. In this example, in each notch 11N, since a pair of linear parts 11N2 are connected to the frame-shaped part 12, it is possible to omit the inclusion of the notch located closer to the bottom of each notch 11N in each first edge part 11L. The connecting portion of the end portion of the second edge portion 11W of the 11N. In this way, depending on the connection parts included in the straight line part 11N2, one connection part can suppress the bending of the area following the notch 11N in the inner edge 12E of the frame part 12 and support the end part in the strip part 11.

The second edge portion 11W includes a pair of second edge elements sandwiching the notch 11N in the width direction DW. It is preferable that the number of connection parts per unit length in each linear part 11N2, that is, the density be higher than the density of connection parts in each second edge element.

[Case 4] As shown in FIG. 8 , in the fourth example of the vapor deposition mask intermediate body 10 , the pair of first edge portions 11L are connected to the frame-shaped portion 12 not only by the pair of second edge portions 11W but also by the bridging portion 13 . . Each first edge portion 11L is connected to the frame-shaped portion 12 by a bridging portion 13 at an end portion closer to the second edge portion 11W including the bent portion 11N1 than the bent portion 11N1 in the longitudinal direction DL.

Preferably, each first edge portion 11L is connected to the frame-shaped portion 12 by a plurality of bridging portions 13, and the plurality of bridging portions 13 are located closer to the curved portion 11N1 in the longitudinal direction DL than the curved portion 11N1 and connected to the curved portion. The end portion of the second edge portion 11W of 11N1. Thereby, the load of the belt-shaped portion 11 in the longitudinal direction DL can be supported by the plurality of bridging portions 13 that exist toward the end of each first edge portion 11L. Therefore, the bridging portion 13 located in the region surrounded by the pair of notches 11N in the longitudinal direction DL can be omitted. Therefore, when the vapor deposition mask intermediate body 10 is transported, external force is suppressed from acting on the mask portion 11M through the bridging portion 13 . As a result, deformation of the through hole 11H included in the mask portion 11M can be suppressed.

In addition, since each first edge portion 11L is connected to the frame-shaped portion 12 at an end portion closer to the second edge portion 11W including the bent portion 11N1 than the bent portion 11N1 in the longitudinal direction DL, it is connected to the vapor deposition mask. Similarly to the second example of the cover intermediate body 10 , the corner portion formed by the second edge portion 11W and the first edge portion 11L is suppressed from floating relative to the frame-shaped portion 12 .

Each first edge portion 11L is preferably connected to the frame-shaped portion 12 by the same number of bridging portions 13 . A plurality of bridging portions 13 connected to one first edge portion 11L of the pair of first edge portions 11L constitute a first bridging portion group, and a plurality of bridging portions 13 connected to the other first edge portion 11L constitute a second bridging portion group. In the longitudinal direction DL, the position of each bridging portion 13 belonging to the first bridging portion group is preferably equal to the position of one bridging portion 13 belonging to the second bridging portion group. Thereby, compared with the case where the number and position of the parts supported by the frame-shaped part 12 in the longitudinal direction DL are mutually different in the pair of first edge parts 11L, it is possible to suppress the number of parts supported by one connecting part. load deviation. Therefore, it is suppressed that the variation in the load causes different deformations in the pair of first edge portions 11L.

[Example 5] As shown in FIG. 9 , in the fifth example of the vapor deposition mask intermediate body 10 , the belt-shaped portion 11 is connected to the frame-shaped portion 12 by the bridging portion 13 only in a pair of first edge portions 11L. Each of the first edge portions 11L has a connecting portion closer to the end to which the second edge portion 11W including the curved portion 11N1 is connected than the curved portion 11N1 in the longitudinal direction DL. Each first edge portion 11L further includes a connecting portion at a position overlapping with the bent portion 11N1 in the longitudinal direction DL.

Thus, each first edge portion 11L is connected to the frame-shaped portion 12 by a plurality of bridging portions 13 from the bottom of the notch 11N to the end connected to the second edge portion 11W including the notch 11N. Thereby, the load of the belt-shaped part 11 in the longitudinal direction DL and the width direction DW can be supported by the plurality of bridging parts 13 that are located toward the ends of the respective first edge parts 11L. Therefore, in this example, the bridging portion 13 in the region surrounded by the pair of notches 11N in the longitudinal direction DL can be omitted. Therefore, when the vapor deposition mask intermediate body 10 is transported, external force is suppressed from acting on the mask portion 11M through the bridging portion 13 . As a result, deformation of the through hole 11H included in the mask portion 11M can be suppressed.

In addition, since each first edge portion 11L is connected to the frame-shaped portion 12 at an end portion closer to the second edge portion 11W including the bent portion 11N1 than the bent portion 11N1 in the longitudinal direction DL, it is connected to the vapor deposition mask. Similarly to the second example of the cover intermediate body 10 , the corner portion formed by the second edge portion 11W and the first edge portion 11L is suppressed from floating relative to the frame-shaped portion 12 .

A plurality of bridging portions 13 connected to one first edge portion 11L of the pair of first edge portions 11L constitute a first bridging portion group, and a plurality of bridging portions 13 connected to the other first edge portion 11L constitute a second bridging portion group. In the longitudinal direction DL, the position of each bridging portion 13 belonging to the first bridging portion group is preferably equal to the position of one bridging portion 13 belonging to the second bridging portion group. Thereby, compared with the case where the number and positions of the parts supported by the frame-shaped part 12 in the longitudinal direction DL are different in the pair of first edge parts 11L, the load supported by one connecting part can be suppressed. the deviation. Therefore, it is suppressed that the variation in the load causes different deformations in the pair of first edge portions 11L.

[Example 6] As shown in FIG. 10 , in the sixth example of the vapor deposition mask intermediate body 10 , in addition to the pair of first edge portions 11L, the belt-shaped portion 11 also has a bridging portion in the pair of second edge portions 11W. 13 is connected to the frame-shaped part 12. Each second edge portion 11W includes one connecting portion at a corner portion formed by the second edge element and the straight line portion 11N2.

Thereby, the corner portion formed by the second edge element and the straight line portion 11N2 in the belt-shaped portion 11 is supported by the frame-shaped portion 12 . Therefore, the corner portion formed by the second edge element and the straight line portion 11N2 is suppressed from floating relative to the frame-shaped portion 12 . Therefore, when the vapor deposition mask intermediate body 10 is transported, deformation of the vapor deposition mask intermediate body 10 is further suppressed.

[Case 7] As shown in FIG. 11, in the seventh example of the vapor deposition mask intermediate body 10, the belt-shaped portion 11 is connected by a bridging portion 13 in a pair of linear portions 11N2 in addition to the pair of first edge portions 11L. on the frame portion 12 . Each straight portion 11N2 includes a connecting portion that is located closer to the second edge portion 11W including the notch 11N provided with the straight portion 11N2 than the central portion of the straight portion 11N2 in the longitudinal direction DL. 2nd edge element.

Thereby, the vicinity of the corner portion formed by the second edge element and the straight line portion 11N2 in the belt-shaped portion 11 is supported by the frame-shaped portion 12 . Therefore, the corner portion formed by the second edge element and the straight line portion 11N2 is suppressed from floating relative to the frame-shaped portion 12 . Therefore, when the vapor deposition mask intermediate body 10 is transported, deformation of the vapor deposition mask intermediate body 10 is further suppressed.

[Eighth case] As shown in FIG. 12, in the eighth example of the vapor deposition mask intermediate body 10, the belt-shaped portion 11 is connected by a bridging portion 13 in a pair of linear portions 11N2 in addition to the pair of first edge portions 11L. on the frame portion 12 . Each linear portion 11N2 includes a plurality of connecting portions. The plurality of connecting parts includes a connecting part that is located closer to the second edge part 11W including the second edge part 11N including the cutout 11N provided with the straight part 11N2 than the central part of the straight part 11N2 in the longitudinal direction DL. The position of the edge element.

Thereby, the vicinity of the corner portion formed by the second edge element and the straight line portion 11N2 in the belt-shaped portion 11 is supported by the frame-shaped portion 12 . Therefore, the corner portion formed by the second edge element and the straight line portion 11N2 is suppressed from floating relative to the frame-shaped portion 12 .

In addition, in this example, compared with the seventh example, there is also a connecting portion near the curved portion 11N1 in the linear portion 11N2. Thereby, the protruding edge 12E1 of the frame-shaped portion 12 is supported by the belt-shaped portion 11 . Therefore, the protruding edge 12E1 is suppressed from floating with respect to the belt-shaped portion 11 .

[Case 9] As shown in FIG. 13 , in the ninth example of the vapor deposition mask intermediate body 10 , each second edge portion 11W includes a plurality of notches 11N. In each second edge portion 11W, a plurality of notches 11N are arranged at equal intervals. Therefore, compared with the case where a plurality of notches 11N are arranged irregularly, by stretching the vapor deposition mask formed from the band-shaped portion 11 so that the pair of second edge portions 11W are separated from each other, there is an effect along the In the case of tension in the longitudinal direction, unevenness in the tension acting on the vapor deposition mask in the width direction of the vapor deposition mask is suppressed. Therefore, deformation such as wrinkles and twists in the deposition mask is suppressed.

In the second edge portion 11W, a region extending along the width direction DW is a second edge element. The belt-shaped part 11 is connected to the frame-shaped part 12 via the bridging part 13 on the second edge element. In the second edge portion 11W, each second edge element preferably has one or more connection sites. Each second edge element preferably has a plurality of same number of connection sites. Thereby, the bending of the second edge portion 11W in the width direction DW is suppressed.

A plurality of bridging portions 13 connected to one second edge portion 11W of the pair of second edge portions 11W constitute a first bridging portion group, and a plurality of bridging portions 13 connected to the other second edge portion 11W constitute a second bridging portion group. In the width direction DW, the position of each bridging part 13 belonging to the first bridging part group is preferably equal to the position of one bridging part 13 belonging to the second bridging part group. Thereby, compared with the case where the number of locations supported by the frame-shaped portion 12 in the width direction DW differs between the pair of second edge portions 11W, variations in the load supported by one connecting location can be suppressed. Therefore, it is suppressed that the variation in the load causes different deformations in the pair of second edge portions 11W.

Like the third example of the vapor deposition mask intermediate body 10 , each first edge portion 11L is connected to the frame-shaped portion 12 via a bridging portion 13 at a portion not overlapping with the mask portion 11M in the longitudinal direction DL.

[Composition of masking device] The configuration of the mask device will be described with reference to FIGS. 14 and 15 . As shown in FIG. 14 , the mask device 20 includes a main frame 21 and a plurality of vapor deposition masks 31 . The main frame 21 has a rectangular frame shape supporting a plurality of vapor deposition masks 31 and is mounted on a vapor deposition device for vapor deposition. The main frame 21 has a main frame hole 21H penetrating through the main frame 21 over substantially the entire range where the vapor deposition masks 31 exist.

Each vapor deposition mask 31 is a belt-shaped portion 11 that is removed from the vapor deposition mask intermediate body 10 having a pair of first edge portions 11L and The strip-shaped portion 11 surrounded by the pair of second edge portions 11W, the frame-shaped portion 12 surrounding the strip-shaped portion 11 , and the plurality of bridging portions 13 connected to the strip-shaped portion 11 and the frame-shaped portion 12 . The vapor deposition mask 31 has a belt shape surrounded by a pair of first edge portions 31L and a pair of second edge portions 31W. Each second edge portion 31W is shorter than the first edge portion 31L and has a U-shaped notch 31N concaved in the longitudinal direction of the first edge portion 31L, and the bottom of the U-shape is curved. The edge 31E of the vapor deposition mask 31 has the bottom of the notch 31N, that is, the bent portion 31N1. The traces of the cut bridging portion 13 , that is, the portion where the bridging trace is located in the edge 31E of the vapor deposition mask 31 is a portion other than the bent portion 31N1 . The vapor deposition mask 31 includes a plurality of mask portions 31M arranged along the longitudinal direction of the vapor deposition mask 31 . The second edge portion 31W of each vapor deposition mask 31 is attached to the main frame 21 in a state where tension is applied in a direction in which the pair of second edge portions 31W are separated from each other. In addition, in a plan view facing the evaporation mask 31 , the notch 31N of the evaporation mask 31 may also be located outside the main frame 21 .

In addition, the pair of first edge portions 31L in the vapor deposition mask 31 corresponds to the pair of first edge portions 11L in the strip portion 11 . The pair of second edge portions 31W in the vapor deposition mask 31 corresponds to the pair of second edge portions 11W in the strip portion 11 . The edge 31E of the vapor deposition mask 31 corresponds to the edge 11E of the strip portion 11 . The notch 31N in the vapor deposition mask 31 corresponds to the notch 11N in the strip portion 11 . The bent portion 31N1 in the vapor deposition mask 31 corresponds to the bent portion 11N1 in the belt-shaped portion 11 . The mask portion 31M of the vapor deposition mask 31 corresponds to the mask portion 11M of the strip portion 11 .

FIG. 15 is an enlarged display of one of the plurality of bridging marks included in the vapor deposition mask 31 . In addition, FIG. 15( a ) shows bridging traces in the case of having the bridging portion 13 described above using FIG. 3( a ). In contrast, FIG. 15( b ) shows bridging traces in the case of the bridging portion 13 described above using FIG. 3( b ). FIG. 15( c ) shows bridging traces in the case of the bridging portion 13 described above using FIG. 3( c ). In addition, below, the case where the vapor deposition mask 31 is the vapor deposition mask obtained from the 1st example of the vapor deposition mask intermediate body 10 is demonstrated. In addition, even if the vapor deposition mask 31 is obtained from any of the second to ninth examples of the vapor deposition mask intermediate body 10 , the vapor deposition mask 31 may have bridging traces described below.

As shown in FIG. 15( a ), the second edge portion 31W has a notch 31ED dented in the same direction as the direction in which the notch 31N is dented. The notch 31ED is a rectangular notch. The notch 31ED corresponds to one bridging notch 11ED that the second edge portion 11W of the belt-shaped portion 11 has. There is a bridging mark 31A in the notch 31ED. The bridging mark 31A corresponds to the above-mentioned weak portion 13A. The bridging mark 31A is a bent portion where a part of the fragile portion 13A is bent toward the surface of the vapor deposition mask 31 . The bent portion is formed by rolling up the connection portion of the strip-shaped portion 11 toward the surface of the strip-shaped portion 11 when the bridging portion 13 is cut from the strip-shaped portion 11 .

As shown in FIG. 15( b ), each bridging trace 31B included in the second edge portion 31W of the vapor deposition mask 31 is constituted by a plurality of arc-shaped notches and a plurality of curved portions. In each bridging trace 31B, notches and curved portions are alternately arranged. The bent portion is a portion where a part of the edge 31E of the vapor deposition mask 31 is bent toward the surface of the vapor deposition mask 31 . The bent portion is formed by rolling up the connection portion of the strip-shaped portion 11 toward the surface of the strip-shaped portion 11 when the bridging portion 13 is cut from the strip-shaped portion 11 . The notch of the bridging mark 31B corresponds to the through hole of the fragile portion 13B. In contrast, the curved portion of the bridging mark 31B corresponds to a portion other than the through hole in the base end portion of the bridging portion 13 .

As shown in FIG. 15(c), the bridging traces 31C of the second edge 31W of the vapor deposition mask 31 are formed by a plurality of arc-shaped notches and a plurality of curved portions similarly to the bridging traces 31B. constitute. Wherein, the bending amount of the bridging trace 31C at the curved portion is smaller than the bending amount of the bridging trace 31B at the bending portion.

In addition, when the bridging traces 31A, 31B, and 31C have curved portions like the bridging traces 31A, 31B, and 31C, it is preferable that the curved portions be curved toward the surface including the first opening H1 in the vapor deposition mask 31 . Thereby, even if the bridging traces 31A, 31B, and 31C have curved portions, it is possible to suppress the vapor deposition mask 31 from floating up from the main frame 21 depending on the degree of the curved portions.

In addition, the vapor deposition mask 31 may also have bridging traces that protrude toward the outside of the edge 31E and extend along the plane where the vapor deposition mask 31 expands. Alternatively, the evaporation mask 31 may also have bridging traces recessed toward the inner side of the edge 31E.

[Manufacturing method of vapor deposition mask] The manufacturing method of the vapor deposition mask 31 includes: preparing a metal sheet; forming the belt-shaped part 11 , the frame-shaped part 12 , and the bridging part 13 on the vapor deposition mask intermediate body 10 ; and forming the vapor deposition mask 31 . The prepared metal flake is, for example, a metal flake formed of an iron-nickel alloy. The metal flake is preferably a metal flake made of constant steel in an iron-nickel alloy.

The belt-shaped part 11, the frame-shaped part 12, and the bridging part 13 are formed on the evaporation mask intermediate body 10, and the belt-shaped part 11 having a shape following the edge 31E of the evaporation mask 31 is formed, and the belt-shaped part 11 having a shape following the evaporation mask 31 is formed. The inner edge 12E of the edge 31E of the cover 31 surrounds the frame portion 12 of the strip portion 11 and a plurality of bridging portions 13 connecting the edge 11E of the strip portion 11 and the inner edge 12E of the frame portion 12 . The vapor deposition mask 31 is formed by cutting each bridging portion 13 to form the vapor deposition mask 31 from the belt-shaped portion 11 .

The strip-shaped portion 11 is formed on the vapor deposition mask intermediate body 10 , and the strip-shaped portion 11 is formed to have an edge 11E having a bent portion 11N1 following the bottom of the cutout 31N. Bridge portions 13 are formed on the vapor deposition mask intermediate body 10 , and each bridge portion 13 is connected to a site other than the bent portion 11N1 in the edge 11E of the belt-shaped portion 11 . Referring to FIG. 16 , the manufacturing method of the evaporation mask 31 will be described in more detail. In addition, below, the manufacturing method of the vapor deposition mask 31 in the case of the 1st example in which the belt-shaped part 11 is equipped with the mask part 11M is demonstrated.

As shown in FIG. 16 , in the method of manufacturing the vapor deposition mask 31 , first, a metal sheet is prepared (step S11 ). In the process of preparing metal flakes, electrolysis can also be used to prepare metal flakes, and metal flakes can also be prepared by rolling and grinding. The metal foil prepared in the metal foil preparation process has a roll shape in which the metal foil in the form of a strip is wound up. Next, a resist layer is formed on one of the target surfaces of the metal sheet (step S12 ), and then a resist mask is formed on the target surface by exposing and developing the resist layer (step S13 ).

Next, a plurality of through-holes 11H are formed in the metal sheet by wet-etching the target surface using the resist mask (step S14 ). At this time, the strip-shaped portion 11 , the frame-shaped portion 12 , and the plurality of bridging portions 13 are formed simultaneously with the formation of the plurality of through-holes 11H. Also, when the plurality of bridging portions 13 have the weakened portion 13A, the weakened portion 13A is also formed simultaneously with the through-hole 11H. Thereby, the vapor deposition mask intermediate body 10 was obtained. That is, the belt-shaped portion 11 , the frame-shaped portion 12 , and a plurality of bridging portions 13 can be formed on the vapor deposition mask intermediate body 10 . In the vapor deposition mask intermediate body 10 , a plurality of strip-shaped portions 11 are formed so as to be arranged at intervals.

Next, the above-mentioned mask portion 11M is formed by removing the resist mask from the target surface (step S15 ). Next, the roll-shaped vapor deposition mask intermediate body 10 is cut along the width direction. Thereby, an intermediate sheet having a plurality of belt-shaped portions 11 is obtained (step S16). Then, the vapor deposition mask 31 mentioned above can be obtained by cutting the plurality of bridging parts 13 connected to the belt-shaped part 11 (step S17). When cutting the bridging portion 13 , the fragile portion 13A can be cut by bending the frame-shaped portion 12 relative to the belt-shaped portion 11 .

In addition, in the case of the second example in which the belt-shaped portion 11 is provided with the mask portion 11M, the process from the above-mentioned step S12 to step S15 is performed on the back surface 10R, whereby the small hole 11SH is formed. Next, a protective layer for protecting the small hole 11SH is filled in the small hole 11SH. Next, the process from the above-mentioned step S12 to step S15 is performed on the surface 10F, whereby the large holes 11LH are formed. Thereby, the second example of the mask portion 11M can be obtained. The resist mask used for forming the large holes 11LH can also be removed simultaneously with the resist mask used for forming the small holes 11SH.

In addition, in the case where the belt-shaped portion 11 has the second example of the mask portion 11M and the weak portion 13A is formed by half-etching, the weak portion 13A can also be formed when the process from step S12 to step S15 is performed on the rear surface 10R. Alternatively, the fragile portion 13A can also be formed when the process from step S12 to step S15 is performed on the surface 10F.

As described above, according to one embodiment of the vapor deposition mask intermediate, the vapor deposition mask, and the manufacturing method of the vapor deposition mask, the effects described below can be obtained. (1) The vapor deposition mask 31 formed from the belt-shaped portion 11 includes a U-shaped portion and includes a cutout 31N whose bottom is curved. Therefore, when tension is applied to the vapor deposition mask 31 by pulling both sides of the notch 31N in each second edge portion 31W in a direction in which the pair of second edge portions 31W are separated from each other, the tension acting on the notch 31N is The force is dispersed due to the shape the notch 31N has. Thereby, when the vapor deposition mask 31 is used, deformation such as wrinkles and twists can be suppressed from occurring in the vapor deposition mask 31 .

(2) The bridging portion 13 connecting the strip-shaped portion 11 to the frame-shaped portion 12 is a portion connected to the edge 11E of the strip-shaped portion 11 other than the bent portion 11N1 . Therefore, in the vapor deposition mask 31 formed by cutting the bridge portion 13, it is suppressed that a part of the bridge portion 13 remains in the bent portion 31N1 of the notch 31N, and a part of the bent portion 31N1 is missing. . Thereby, the shape of the bent portion 31N1 is maintained in a shape capable of distributing the tension applied to the vapor deposition mask 31 . Therefore, when the vapor deposition mask 31 is used, deformation of the vapor deposition mask 31 can be suppressed.

(3) When conveying the vapor deposition mask intermediate body 10 , the second edge portion 11W of the belt-shaped portion 11 is continuously supported by the frame-shaped portion 12 . Therefore, each second edge portion 11W can be suppressed from floating from the frame-shaped portion 12 , and deformation of the belt-shaped portion 11 can be suppressed.

(4) Both sides of the notch 11N are connected to the frame-shaped portion 12 by the bridging portion 13 . Therefore, compared with the case where only one of the two sides of the notch 11N is connected to the frame-shaped portion 12 by the bridging portion 13, when the vapor deposition mask intermediate 10 is transported, the belt-shaped portion 11 is continued by the frame-shaped portion 12. support. Also, compared to the case where only one of the two sides of the notch 11N is connected to the frame-shaped portion 12 via the bridging portion 13 , it is difficult for the belt-shaped portion 11 to be displaced relative to the frame-shaped portion 12 . Therefore, when the vapor deposition mask intermediate body 10 is conveyed, the belt-shaped part 11 can suppress a part of the belt-shaped part 11 from being bent, for example, by contacting the conveyance mechanism or the like.

(5) By connecting each straight portion 11N2 to the protruding edge 12E1, the rigidity between each straight portion 11N2 and the protruding edge 12E1 is improved. Thereby, deformation of the belt-shaped portion 11 is suppressed. Furthermore, the protruding edge 12E1 is suppressed from being bent relative to the belt-shaped portion 11 . As a result, when the vapor deposition mask intermediate body 10 is transported, it is possible to suppress a part of the belt-shaped portion 11 or the protruding edge 12E1 from being caught by the transport mechanism or the like.

(6) When conveying the vapor deposition mask intermediate body 10 , the first edge portion 11L of the belt-shaped portion 11 is continuously supported by the frame-shaped portion 12 . Therefore, each first edge portion 11L is suppressed from being bent, and deformation of the belt-shaped portion 11 is suppressed.

(7) Since the first edge portion 11L is connected to the frame-shaped portion 12 at an end portion closer to the bent portion 11N1 , the corner portion of the strip-shaped portion 11 is suppressed from floating with respect to the frame-shaped portion 12 . Therefore, when conveying the vapor deposition mask intermediate body 10, it can suppress that a corner part catches a conveyance mechanism etc. from occurring.

(8) Compared with the case where the bridging portion 13 and the mask portion 11M are aligned in the longitudinal direction DL, the force acting on the mask portion 11M by the bridging portion 13 is relaxed when the vapor deposition mask intermediate body 10 is transported. Therefore, deformation of the through hole 11H included in the mask portion 11M is suppressed.

In addition, the above-mentioned embodiment can be suitably modified and implemented as follows. [Position of connection part] ・The two bridging portion groups corresponding to the pair of first edge portions 11L or the pair of second edge portions 11W may be changed as follows. That is, the position of each bridging portion belonging to the first bridging portion group may not be equal to the position of the plurality of bridging portions belonging to the second bridging portion group in the direction in which the plurality of bridging portions belonging to the first bridging portion group are arranged. .

・If the belt-shaped portion 11 can be supported by the frame-shaped portion 12, the connecting portion may exist only in one first edge portion 11L of the pair of first edge portions 11L, or only in a pair of second edge portions A second edge portion 11W in the portion 11W.

[Traces of bridging] ・The plurality of bridging traces included in the vapor deposition mask 31 may include bridging traces having a first shape and bridging traces having a second shape different from the first shape.

[Bridging Department] ・The belt-shaped portion 11 and the frame-shaped portion 12 may be connected to each other through the fragile portion between the belt-shaped portion 11 and the frame-shaped portion 12 through the above-mentioned weak portion. In this case, a part of the thin metal sheet included in the weak portion serves as a bridging portion. In other words, the portion other than the through hole in the fragile portion is a bridging portion.

For example, as described with reference to FIG. 3( a ), when the fragile portion 13A is constituted by one half-etched portion, the whole of the fragile portion 13A is a bridging portion. Also, as described with reference to FIG. 3( b ), when the fragile portion 13B has a plurality of through holes, the portion between the through holes in the fragile portion 13B is a bridging portion. Also, as described with reference to FIG. 3( c), when the fragile portion 13C includes a plurality of through-holes 13C1 and a plurality of half-etched portions 13C2, and the through-holes 13C1 and the half-etched portions 13C2 are alternately arranged, the half-etched portions 13C2 are bridging portions. . Also, in the case where a plurality of half-etched portions are arranged at intervals in the weakened portion, the entire weakened portion becomes a bridge portion.

[Linear fragile part] As shown in FIG. 17 , the frame-shaped portion 12 may include a linear weak portion 12A extending in a direction from the inner edge 12E of the frame-shaped portion 12 toward the outer edge 12F of the frame-shaped portion 12 . In the example shown in FIG. 17 , the linear fragile portion 12A extends in a direction intersecting the longitudinal direction DL. In addition, one end of the linear weak portion 12A is located in a portion extending along the longitudinal direction DL in the inner edge 12E, and the other end of the linear weak portion 12A is located inside the frame-shaped portion 12 .

The vapor deposition mask intermediate body 10 includes a plurality of linear fragile portions 12A. The plurality of linear weakened portions 12A include: an upstream weakened portion 12AU located upstream of the mask portion 11M in the transport direction of the vapor deposition mask intermediate body 10; and a downstream portion located downstream of the mask portion 11M. The side fragile part 12AD. In the upstream weakened portion 12AU, one end portion of the upstream weakened portion 12AU extends along the longitudinal direction DL in the inner edge 12E, and is connected to a portion located upstream of the mask portion 11M. On the one hand, in the downstream fragile portion 12AD, one end portion of the downstream fragile portion 12AD extends along the longitudinal direction DL in the inner edge 12E, and is connected to a portion located downstream of the mask portion 11M.

The vapor deposition mask intermediate body 10 has two upstream weakened parts 12AU and two downstream weakened parts 12AD between the two belt-shaped parts 11 in the width direction DW. The two upstream weakened portions 12AU are aligned in the width direction DW, and extend toward portions surrounding the different strip-shaped portions 11 in the inner edge 12E. The two downstream side fragile parts 12AD are arranged in the width direction DW, and extend toward the part which surrounds the mutually different belt-shaped part 11 in 12E of inner side edges.

In addition, the vapor deposition mask intermediate body 10 has a pair of upstream weakened parts 12AU sandwiching two belt-shaped parts 11 in the width direction DW, and a pair of downstream weak parts 12AU sandwiching two belt-shaped parts 11 in the width direction DW. Section 12AD. In addition, the vapor deposition mask intermediate body 10 should just have at least one of these linear weak parts 12A.

The mechanical strength of the linear weak portion 12A is lower than that of the frame-shaped portion 12 other than the linear weak portion 12A. Therefore, the frame-shaped portion 12 is easily cut along the linear fragile portion 12A. Furthermore, since one end of the linear fragile portion 12A is located at the inner edge 12E of the frame portion 12 , the loop formed by the inner edge 12E can be cut when the strip portion 11 is detached from the frame portion 12 . This makes it easier to cut the bridging portion 13 .

When forming the vapor deposition mask from the belt-shaped portion 11, first, the vapor deposition mask intermediate body 10 is cut along the width direction DW at a predetermined position in the longitudinal direction DL. Thereby, the vapor deposition mask intermediate body 10 which has only the two strip-shaped part 11 lined up along the width direction DW is obtained. Next, the loop surrounding the inner edge 12E of the belt-shaped portion 11 is cut by cutting the frame-shaped portion 12 along the linear weak portion 12A. Then, the bridging portion 13 is cut from the belt-shaped portion 11 by bending the bridging portion 13 . Thereby, a vapor deposition mask can be formed from the belt-shaped portion 11 .

FIG. 18 shows an enlarged area A shown in FIG. 17 , and FIG. 19 shows an enlarged area B shown in FIG. 17 . FIG. 20 is an enlarged display of the area C shown in FIG. 17 . In addition, the region A includes the upstream end of the two upstream weakened portions 12AU, and the region B includes the downstream end of the two downstream weakened portions 12AD. The region C includes the upstream end of the downstream fragile portion 12AD and a portion connected to the upstream end in the inner edge 12E.

As shown in FIG. 18 , the upstream end portion of each upstream fragile portion 12AU is connected to an upstream penetrating portion 12BU penetrating through the frame-shaped portion 12 . The two upstream side penetration portions 12BU are arranged at predetermined intervals in the width direction DW. When forming the vapor deposition mask 31 from the belt-shaped portion 11, for example, by using an instrument that can cut the frame-shaped portion 12, the frame-shaped portion 12 is sandwiched by two upstream side penetration portions 12BU in the width direction DW. Partially cut, thereby forming a cut piece. Next, by pulling up the cut piece in a direction intersecting the plane in which the vapor deposition mask intermediate body 10 expands, the force for cutting the two upstream weakened portions 12AU can act on the two upstream weakened portions 12AU simultaneously.

Moreover, each of a pair of upstream side weak part 12AU which sandwiches two belt-shaped parts 11 in the width direction DW is also connected to the upstream side penetration part 12BU at the upstream end part.

As shown in FIG. 19 , the frame-shaped portion 12 includes a gripped piece 12C connected to the downstream end of the downstream fragile portion 12AD, and a downstream penetration portion 12BD surrounding the gripped piece 12C. Thereby, since the downstream end part of the downstream fragile part 12AD can be grasped with a tool or a person's finger, the force which cuts the downstream fragile part 12AD can act easily on the downstream fragile part 12AD. By pulling up the gripped piece 12C in a direction intersecting the plane in which the vapor deposition mask intermediate body 10 expands, the force for cutting the two downstream side fragile portions 12AD can act on the two downstream side fragile portions 12AD simultaneously.

In addition, the downstream end of each of the pair of downstream fragile parts 12AD sandwiching the two belt-shaped parts 11 in the width direction DW is also connected to the holding piece 12C, and the held piece 12C is bounded by the downstream through part 12BD. surrounded by.

Also, as shown in FIG. 20 , the inner edge 12E of the frame-shaped portion 12 may have a notch 12EA that is recessed in a direction away from the first edge portion 11L of the frame-shaped portion 12 surrounded by the inner edge 12E. Viewed from the direction facing the surface 10F of the evaporation mask intermediate body 10 , the notch 12EA has a rectangular shape. The upstream end portion of the downstream side weakened portion 12AD is connected to the notch 12EA in the inner edge 12E. In addition, the upstream end portion of the downstream side fragile portion 12AD may be connected on the way from one end toward the other end of the side located on the most downstream side in the notch 12EA.

Since the inner edge 12E has the notch 12EA and the downstream weak portion 12AD is connected to the notch 12EA, when the frame portion 12 is cut along the downstream weak portion 12AD, the external force for cutting the frame portion 12 can be suppressed. on the band 11. Thereby, external force can be suppressed from acting on the mask portion 11M included in the strip portion 11 . Also, the upstream end portion is present in the notch 12EA other than the one end and the other end of the side located on the most downstream side, so that the downstream side fragile portion 12AD becomes easy to be cut.

In addition, the inner edge 12E is not limited to the place where the downstream weakened parts 12AD are connected, and the place where the upstream weakened parts 12AU are connected may also have a notch 12EA, whereby the effect based on the above-mentioned notch 12EA can be obtained. the effect achieved.

In the examples shown in FIGS. 18 to 20 , the linear fragile portion 12A has a plurality of penetrating portions 12A1 arranged at intervals. The linear fragile portion 12A may be formed by one half-etched portion, or may have a plurality of half-etched portions arranged at intervals. Alternatively, the linear weak portion 12A may also have a plurality of half-etched portions and a plurality of through holes, and in the linear weak portion 12A, the half-etched portions and the through portions are alternately arranged.

In addition, the upstream through portion 12BU connected to the upstream end of the upstream weak portion 12AU may be changed to the grasped piece 12C for connecting the downstream weak portion 12AD and the downstream through portion 12BD surrounding the grasped piece 12C. Alternatively, the grasped piece 12C connected to the downstream end of the downstream weakened portion 12AD and the downstream through portion 12BD surrounding the grasped piece 12C may also be changed to an upstream through portion for connecting the upstream end of the upstream weakened portion 12AU. Department 12BU.

[Vapor deposition mask intermediate] ・Vapor deposition mask intermediates may include not only metal foils, but also resin layers laminated on metal foils. In this case, the vapor deposition mask formed from the vapor deposition mask intermediate is also formed of a metal foil and a resin layer. Alternatively, the vapor deposition mask intermediate body may include two metal sheets and a resin layer sandwiched by the two metal sheets in the thickness direction of the vapor deposition mask intermediate body. In this case, the vapor deposition mask formed from the vapor deposition mask intermediate is also formed of two metal sheets and a resin layer sandwiched between the two metal sheets. In any of these cases, the synthetic resin forming the resin layer may be, for example, polyimide resin. In addition, the through-holes included in these evaporation mask intermediates can be formed by irradiating the resin layer with laser light.

[Manufacturing method of vapor deposition mask] ・The strip-shaped portion 11, the frame-shaped portion 12, and the plurality of bridging portions 13 can also be formed in a process different from the process for forming the through-hole 11H of the mask portion 11M. In this case, the fragile portion 13A of each bridging portion 13 can also be formed by the process of forming the through hole 11H of the mask portion 11M, or can be formed by forming the belt-shaped portion 11, the frame-shaped portion 12, and a plurality of bridging portions 13 The project is formed.

In these cases, the strip-shaped portion 11 , the frame-shaped portion 12 , the bridging portion 13 , and the fragile portion 13A can also be formed by wet etching similarly to the through-hole 11H of the mask portion 11M. Also, in the case where the process of forming the belt-shaped portion 11, the frame-shaped portion 12, and the plurality of bridging portions 13 is different from the process of forming the fragile portion 13A, the belt-shaped portion 11, the frame-shaped portion 12, and the plurality of bridging portions 13 are Formed by laser processing, on the other hand, the fragile portion 13A can also be formed by wet etching. Alternatively, the strip-shaped portion 11 , the frame-shaped portion 12 , the bridging portion 13 , and the fragile portion 13A can also be formed by laser processing. Alternatively, the belt-shaped portion 11 , the frame-shaped portion 12 , and the plurality of bridging portions 13 are formed by press processing. On the other hand, the fragile portion 13A can also be formed by wet etching or laser processing.

In addition, in the case where the belt-shaped portion 11, the frame-shaped portion 12, the bridging portion 13, and the fragile portion 13A are formed by the same process, these may also be formed by laser processing.

10: Evaporation mask intermediate 10F: surface 10R: Back 11: Ribbon 11E, 31E: edge 11ED: notch for bridge 11H, 13C1: through hole 11L, 31L: the first edge 11LH: large hole 11M, 31M: mask part 11N, 31N: Notch 11N1, 31N1: bending part 11N2: Straight line 11N3: curve part 11SH: small hole 11W, 31W : Second edge 12: frame part 12A: linear fragile part 12A1: Penetrating part 12AD: Downstream fragile part 12AU: The vulnerable part on the upstream side 12BD: Downstream side penetration part 12BU: Upstream side penetration 12C: controlled part 12E: medial edge 12E1: Protruding border 12EA, 31ED: notch 12F: outer edge 13: Bridging department 13A, 13B, 13C: vulnerable parts 13C2: half-etched part 20: masking device 21: Main frame 21H: Main frame hole 31: Evaporation mask 31A, 31B, 31C: Bridging traces H1: 1st opening H2: 2nd opening R13: Bridging area RN: Non-bridging area SH: step height

FIG. 1 is a plan view showing the structure of an evaporation mask intermediate. FIG. 2( a ) is a plan view showing a first example of the notch provided in the strip-shaped portion, and FIG. 2( b ) is a plan view showing a second example of the notch provided in the strip-shaped portion. 3( a ) to FIG. 3( c ) are plan views showing enlarged bridging parts, parts connected to the bridging parts in the band-shaped part, and parts connected to the bridging parts in the frame-shaped part. FIG. 4( a ) is a cross-sectional view showing a first example of a through-hole included in a mask portion, and FIG. 4( b ) is a cross-sectional view showing a second example of a through-hole included in a mask portion. Fig. 5 is a plan view showing the structure of the first example of the vapor deposition mask intermediate. Fig. 6 is a plan view showing the structure of the second example of the vapor deposition mask intermediate. Fig. 7 is a plan view showing the structure of the third example of the vapor deposition mask intermediate. Fig. 8 is a plan view showing the structure of the fourth example of the vapor deposition mask intermediate. Fig. 9 is a plan view showing the structure of a fifth example of the vapor deposition mask intermediate. Fig. 10 is a plan view showing the structure of the sixth example of the vapor deposition mask intermediate. Fig. 11 is a plan view showing the structure of the seventh example of the vapor deposition mask intermediate. Fig. 12 is a plan view showing the structure of the eighth example of the vapor deposition mask intermediate. Fig. 13 is a plan view showing the structure of the ninth example of the vapor deposition mask intermediate. Fig. 14 is a plan view showing the structure of a mask device provided with a vapor deposition mask. 15( a ) to 15 ( c ) are enlarged plan views showing bridging traces included in the vapor deposition mask. FIG. 16 is a flowchart illustrating a method of manufacturing a vapor deposition mask. Fig. 17 is a plan view showing the structure of a modified example of the vapor deposition mask intermediate. FIG. 18 is an enlarged plan view showing part of the area A in FIG. 17 . FIG. 19 is an enlarged plan view showing part of the region B in FIG. 17 . FIG. 20 is an enlarged plan view showing part of the region C in FIG. 17 .

10: Evaporation mask intermediate

11: Ribbon

11E: Edge

11L: the first edge

11M: mask part

11N: Notch

11N1: bending part

11W: the second edge

12: frame part

12E: medial edge

12E1: Protruding border

13: Bridging Department

R13: Bridging area

RN: Non-bridging area

Claims (12)

An evaporation mask intermediate, which contains a metal sheet used to manufacture an evaporation mask, the aforementioned evaporation mask has a belt shape surrounded by a pair of first edges and a pair of second edges, each The second edge is shorter than the first edge and has a slit. The notch has a U-shaped portion that is recessed in the longitudinal direction. The long direction is the direction in which the first edge extends. The U-shaped The bottom of the part is curved, and the above-mentioned vapor deposition mask intermediate system has: a band-shaped part having a shape following the edge of the aforementioned vapor-deposition mask; a frame-shaped part having an inner edge having a shape following the edge of the aforementioned strip-shaped part And surround the aforementioned belt-shaped part; and a plurality of bridging parts, the aforementioned edge of the aforementioned belt-shaped part is connected to the aforementioned inner edge of the aforementioned frame-shaped part, and the aforementioned belt-shaped part forms the aforementioned vapor deposition mask by cutting off each bridging part The cover is provided with a curved portion having the shape of the bottom following the cutout on the aforementioned edge of the aforementioned strip-shaped portion, and each bridging portion is connected to a portion other than the aforementioned curved portion in the aforementioned edge of the aforementioned strip-shaped portion, and the aforementioned strip-shaped The aforementioned edge of the portion includes the aforementioned pair of first edge portions and the aforementioned pair of second edge portions, and each second edge portion of the aforementioned strip-shaped portion has a connecting portion, and the aforementioned connecting portion is connected to the aforementioned frame by the aforementioned plurality of bridging portions. Each second edge of the band-shaped portion is provided with a cutout having a shape following the shape of the cutout of the vapor deposition mask, The inner edge of the aforementioned frame-shaped portion is provided with a protruding edge having a shape following the aforementioned cutout of the aforementioned strip-shaped portion, and each cutout of the aforementioned strip-shaped portion includes the aforementioned bent portion and a portion extending from the aforementioned bent portion in the aforementioned longitudinal direction. For the straight portion, each straight portion includes the aforementioned connecting portion, and the aforementioned connecting portion is connected to the aforementioned protruding edge through the aforementioned bridging portion. The vapor deposition mask intermediate as claimed in claim 1, wherein the aforementioned connecting portion is the first connecting portion, each second edge portion of the aforementioned strip-shaped portion has a second connecting portion, and each cutout of the aforementioned strip-shaped portion is covered by the aforementioned first 2 The connection part is double-teamed. An evaporation mask intermediate, which contains a metal sheet used to manufacture an evaporation mask, the aforementioned evaporation mask has a belt shape surrounded by a pair of first edges and a pair of second edges, each The second edge is shorter than the first edge and has a slit. The notch has a U-shaped portion that is recessed in the longitudinal direction. The long direction is the direction in which the first edge extends. The U-shaped The bottom of the part is curved, and the above-mentioned vapor deposition mask intermediate system has: a band-shaped part having a shape following the edge of the aforementioned vapor-deposition mask; a frame-shaped part having an inner edge having a shape following the edge of the aforementioned strip-shaped part And surround the aforementioned belt-shaped part; and a plurality of bridging parts, the aforementioned edge of the aforementioned belt-shaped part is connected to the aforementioned inner edge of the aforementioned frame-shaped part, and the aforementioned belt-shaped part forms the aforementioned vapor deposition mask by cutting off each bridging part a cover having the aforementioned bottom at the aforementioned edge of the aforementioned strip portion following the aforementioned cutout Each bridging portion is connected to a position other than the aforementioned curved portion in the aforementioned edge of the aforementioned strip-shaped portion. The aforementioned edge of the aforementioned strip-shaped portion includes the aforementioned pair of first edge portions and the aforementioned pair of second edge portions. Each first edge of the strip-shaped portion is connected to the frame-shaped portion by the plurality of bridging portions, and each second edge of the strip-shaped portion has the aforementioned slit following the evaporation mask. Shape and equipped with a cutout containing the aforementioned curved portion, each first edge of the aforementioned strip-shaped portion is connected to the aforementioned frame-shaped portion at the first connection position, and each second edge of the aforementioned strip-shaped portion is connected to the second connection position. The plurality of bridging portions are connected to the frame-shaped portion, and the first connecting portion is located closer to the second connecting portion in the longitudinal direction than the bent portion. The vapor deposition mask intermediate according to claim 3, wherein each cutout of the aforementioned strip-shaped portion is surrounded by the aforementioned second connecting portion. The vapor deposition mask intermediate as claimed in claim 3, wherein the inner edge of the aforementioned frame-shaped portion has a protruding edge having a shape following the aforementioned slit of the aforementioned strip-shaped portion, and each slit of the aforementioned strip-shaped portion includes the aforementioned curved portion and a pair of straight parts extending from the curved part in the longitudinal direction, each straight part is connected to the protruding edge through the bridging part. The vapor deposition mask intermediate according to any one of claims 1 to 5, wherein the strip-shaped portion includes a mask portion containing a plurality of through holes, Each first edge portion of the belt-shaped portion is connected to the frame-shaped portion through the bridging portion at a portion that does not overlap with the mask portion in the longitudinal direction. An evaporation mask intermediate, which contains a metal sheet used to manufacture an evaporation mask, the aforementioned evaporation mask has a belt shape surrounded by a pair of first edges and a pair of second edges, each The second edge is shorter than the first edge and has a slit. The notch has a U-shaped portion that is recessed in the longitudinal direction. The long direction is the direction in which the first edge extends. The U-shaped The bottom of the part is curved, and the above-mentioned vapor deposition mask intermediate system has: a band-shaped part having a shape following the edge of the aforementioned vapor-deposition mask; a frame-shaped part having an inner edge having a shape following the edge of the aforementioned strip-shaped part And surround the aforementioned belt-shaped part; and a plurality of bridging parts, the aforementioned edge of the aforementioned belt-shaped part is connected to the aforementioned inner edge of the aforementioned frame-shaped part, and the aforementioned belt-shaped part forms the aforementioned vapor deposition mask by cutting off each bridging part The cover is provided with a curved portion having the shape of the bottom following the cutout on the aforementioned edge of the strip-shaped portion, and each bridging portion is connected to a part other than the curved portion in the aforementioned edge of the aforementioned strip-shaped portion, and the frame-shaped The part is provided with a weak portion having a linear shape extending from the inner edge of the frame-shaped portion toward the outer edge of the frame-shaped portion, and the mechanical strength of the weak portion is higher than that of the frame-shaped portion. The mechanical strength of parts other than the aforementioned weak part is still low. An evaporation mask, which is an evaporation mask containing a metal sheet The belt-shaped part of the intermediate body, the above-mentioned vapor deposition mask intermediate system has a belt-shaped part surrounded by a pair of first edge parts and a pair of second edge parts, a frame-shaped part surrounding the belt-shaped part, and a belt connected to the belt Shaped portion and a plurality of bridging portions of the aforementioned frame-like portion, and the aforementioned strip-shaped portion is configured to be removed from the aforementioned vapor deposition mask intermediate by cutting off the aforementioned bridging portion, and each second edge portion is larger than the aforementioned second edge portion. 1. The edge portion is short and has a slit. The aforementioned slit has a U-shaped portion that is concave toward the longitudinal direction. The long-side direction is the direction in which the first edge portion extends. The bottom of the U-shaped portion is curved. The edge of the vapor deposition mask is provided with a curved portion, which is the bottom of the cutout, and a plurality of bridges are formed on the edge of the vapor deposition mask other than the curved portion by cutting the bridge portion. Each notch includes the curved portion and a pair of linear portions extending from the curved portion in the longitudinal direction, and the plurality of bridging traces include the bridging traces located in each straight portion. A vapor deposition mask is a belt-shaped part of a vapor deposition mask intermediate body comprising metal sheets, the vapor deposition mask intermediate system having a belt surrounded by a pair of first edge parts and a pair of second edge parts a frame-shaped portion surrounding the strip-shaped portion, and a plurality of bridging portions connected to the aforementioned strip-shaped portion and the aforementioned frame-shaped portion, and the aforementioned strip-shaped portion is configured from the aforementioned vapor deposition mask intermediate by cutting The above-mentioned bridging portion is broken and removed, and each second edge is shorter than the first edge and has a cutout, and the cutout has a U-shaped part that is recessed in the long side direction, and the long side direction is the first In the direction in which the edge extends, the bottom of the aforementioned U-shaped portion is curved, and a curved portion is provided on the edge of the aforementioned vapor deposition mask, and the curved portion is the aforementioned bottom of the aforementioned cutout, By cutting the bridging portion, a plurality of bridging traces are formed on the edge of the vapor deposition mask other than the bending portion, and each first edge of the vapor deposition mask has a bridging trace at the first connecting portion. Each second edge of the vapor deposition mask has a plurality of bridging traces at the second connection site. Compared with the curved part, the first connection site is located closer to the second connection site in the longitudinal direction. location of the part. A method of manufacturing a vapor deposition mask, which is to manufacture a vapor deposition mask, the vapor deposition mask has a belt shape surrounded by a pair of first edge portions and a pair of second edge portions, each second edge portion is larger than the aforementioned first edge portion. The edge is short and has a slit. The aforementioned slit has a U-shaped portion that is concave toward the long-side direction. The long-side direction is the direction in which the first edge portion extends. The bottom of the U-shaped portion is curved. The manufacturing The method includes: forming a vapor deposition mask intermediate; and forming a vapor deposition mask from the strip-shaped portion by cutting each bridging portion, the vapor deposition mask intermediate system comprising a metal sheet and having: A band-shaped portion in the shape of the edge of the plated mask; a frame-shaped portion having an inner edge following the edge of the aforementioned band-shaped portion and surrounding the aforementioned band-shaped portion; and connecting the aforementioned edge of the aforementioned band-shaped portion to the aforementioned frame-shaped portion A plurality of bridging portions of the inner edge are provided with a curved portion having a shape following the bottom of the cutout at the aforementioned edge of the strip-shaped portion, and each bridging portion is connected to the curved portion in the aforementioned edge of the aforementioned strip-shaped portion other than the position, the aforementioned edge of the aforementioned belt-shaped portion includes the aforementioned pair of first edge portions and the aforementioned pair of second edge portions, Each second edge of the strip-shaped portion has a connecting portion connected to the frame-shaped portion by the plurality of bridging portions, and each second edge of the strip-shaped portion has the aforementioned cutout following the evaporation mask. The incision of the shape, the inner edge of the aforementioned frame-shaped portion is equipped with a protruding edge having the shape of the aforementioned incision following the aforementioned strip-shaped portion, and each of the incisions of the aforementioned strip-shaped portion includes the aforementioned curved portion and extends from the aforementioned curved portion to the aforementioned A pair of linear portions in the longitudinal direction, each linear portion includes the aforementioned connecting portion connected to the aforementioned protruding edge through the aforementioned bridging portion. A method of manufacturing a vapor deposition mask, which is to manufacture a vapor deposition mask, the vapor deposition mask has a belt shape surrounded by a pair of first edge portions and a pair of second edge portions, each second edge portion is larger than the aforementioned first edge portion. The edge is short and has a slit. The aforementioned slit has a U-shaped portion that is concave toward the long-side direction. The long-side direction is the direction in which the first edge portion extends. The bottom of the U-shaped portion is curved. The manufacturing The method includes: forming a vapor deposition mask intermediate; and forming a vapor deposition mask from the strip-shaped portion by cutting each bridging portion, the vapor deposition mask intermediate system comprising a metal sheet and having: A band-shaped portion in the shape of the edge of the plated mask; a frame-shaped portion having an inner edge following the edge of the aforementioned band-shaped portion and surrounding the aforementioned band-shaped portion; and connecting the aforementioned edge of the aforementioned band-shaped portion to the aforementioned frame-shaped portion A plurality of bridging portions of the inner edge are provided with a curved portion having a shape following the bottom of the cutout at the aforementioned edge of the strip-shaped portion, and each bridging portion is connected to the curved portion in the aforementioned edge of the aforementioned strip-shaped portion other parts, The aforementioned edge of the aforementioned belt-shaped portion includes the aforementioned pair of first edge portions and the aforementioned pair of second edge portions. Each second edge of the strip-shaped portion has a shape following the aforementioned cutout of the vapor deposition mask and has a cutout containing the aforementioned bending portion, and each first edge portion of the aforementioned strip-shaped portion is connected to the aforementioned In the frame-shaped part, each second edge of the strip-shaped part is connected to the aforementioned frame-shaped part at the second connecting part by the plurality of bridging parts. Compared with the curved part, the first connecting part is connected to the long side The direction is located close to the aforementioned second connection site. A method of manufacturing a vapor deposition mask, which is to manufacture a vapor deposition mask, the vapor deposition mask has a belt shape surrounded by a pair of first edge portions and a pair of second edge portions, each second edge portion is larger than the aforementioned first edge portion. The edge is short and has a slit. The aforementioned slit has a U-shaped portion that is concave toward the long-side direction. The long-side direction is the direction in which the first edge portion extends. The bottom of the U-shaped portion is curved. The manufacturing The method includes: forming a vapor deposition mask intermediate; and forming a vapor deposition mask from the strip-shaped portion by cutting each bridging portion, the vapor deposition mask intermediate system comprising a metal sheet and having: A band-shaped portion in the shape of the edge of the plated mask; a frame-shaped portion having an inner edge following the edge of the aforementioned band-shaped portion and surrounding the aforementioned band-shaped portion; and connecting the aforementioned edge of the aforementioned band-shaped portion to the aforementioned frame-shaped portion The plurality of bridging portions of the inner edge are provided with a curved portion having a shape of the bottom following the cutout at the edge of the strip-shaped portion, Each bridging portion is connected to a portion other than the above-mentioned bending portion in the aforementioned edge of the aforementioned strip-shaped portion, and the aforementioned frame-shaped portion is equipped with a weak portion having a The linear shape extending in the direction of the outer edge of the portion, the mechanical strength of the fragile portion is lower than the mechanical strength of the frame-shaped portion other than the fragile portion.

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