TWI781412B - 探針、檢查治具以及檢查單元 - Google Patents
探針、檢查治具以及檢查單元 Download PDFInfo
- Publication number
- TWI781412B TWI781412B TW109118378A TW109118378A TWI781412B TW I781412 B TWI781412 B TW I781412B TW 109118378 A TW109118378 A TW 109118378A TW 109118378 A TW109118378 A TW 109118378A TW I781412 B TWI781412 B TW I781412B
- Authority
- TW
- Taiwan
- Prior art keywords
- contact
- pair
- probe
- inspection
- contact part
- Prior art date
Links
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06705—Apparatus for holding or moving single probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Geometry (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019107982A JP7306082B2 (ja) | 2019-06-10 | 2019-06-10 | プローブピン、検査治具および検査ユニット |
JP2019-107982 | 2019-06-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202045943A TW202045943A (zh) | 2020-12-16 |
TWI781412B true TWI781412B (zh) | 2022-10-21 |
Family
ID=70931181
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW109118378A TWI781412B (zh) | 2019-06-10 | 2020-06-02 | 探針、檢查治具以及檢查單元 |
Country Status (4)
Country | Link |
---|---|
JP (2) | JP7306082B2 (ko) |
CN (2) | CN210720509U (ko) |
TW (1) | TWI781412B (ko) |
WO (1) | WO2020250638A1 (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI745182B (zh) * | 2020-11-30 | 2021-11-01 | 中華精測科技股份有限公司 | 探針卡裝置及雙臂式探針 |
JP2022135106A (ja) * | 2021-03-04 | 2022-09-15 | オムロン株式会社 | プローブピン、検査治具および検査治具ユニット |
KR102602053B1 (ko) * | 2021-06-16 | 2023-11-14 | 주식회사 메가터치 | 프로브 핀 및 그 프로브 핀을 구비한 소켓 |
CN113866464A (zh) * | 2021-09-22 | 2021-12-31 | 深圳凯智通微电子技术有限公司 | 探针及集成电路测试设备 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002214286A (ja) * | 2001-01-19 | 2002-07-31 | Matsushita Electric Ind Co Ltd | Bga基板の検査装置 |
US20190094269A1 (en) * | 2016-06-17 | 2019-03-28 | Omron Corporation | Probe pin |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002373748A (ja) | 2001-06-14 | 2002-12-26 | Yamaichi Electronics Co Ltd | 半導体装置用ソケット |
JP4486880B2 (ja) * | 2004-12-27 | 2010-06-23 | 日本電子材料株式会社 | コンタクトプローブ |
JP5083430B2 (ja) * | 2011-03-29 | 2012-11-28 | 山一電機株式会社 | コンタクトプローブ及びそれを備えた半導体素子用ソケット |
JP6269337B2 (ja) * | 2014-06-16 | 2018-01-31 | オムロン株式会社 | プローブピン、および、これを用いた電子デバイス |
JP6084592B2 (ja) | 2014-08-05 | 2017-02-22 | 株式会社アイエスシーIsc Co., Ltd. | ポゴピン用プローブ部材 |
JP6515516B2 (ja) * | 2014-12-12 | 2019-05-22 | オムロン株式会社 | プローブピン、および、これを備えた電子デバイス |
JP6642359B2 (ja) * | 2016-09-21 | 2020-02-05 | オムロン株式会社 | プローブピンおよび検査ユニット |
KR101926672B1 (ko) | 2017-03-23 | 2018-12-11 | 주식회사 엔티에스 | 클립 스프링 핀 및 이를 포함하는 테스트 소켓 |
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2019
- 2019-06-10 JP JP2019107982A patent/JP7306082B2/ja active Active
- 2019-08-07 CN CN201921274244.3U patent/CN210720509U/zh active Active
-
2020
- 2020-05-21 WO PCT/JP2020/020167 patent/WO2020250638A1/ja active Application Filing
- 2020-05-21 CN CN202080039956.6A patent/CN113892036B/zh active Active
- 2020-06-02 TW TW109118378A patent/TWI781412B/zh active
-
2023
- 2023-06-28 JP JP2023105717A patent/JP7533707B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002214286A (ja) * | 2001-01-19 | 2002-07-31 | Matsushita Electric Ind Co Ltd | Bga基板の検査装置 |
US20190094269A1 (en) * | 2016-06-17 | 2019-03-28 | Omron Corporation | Probe pin |
Also Published As
Publication number | Publication date |
---|---|
TW202045943A (zh) | 2020-12-16 |
CN113892036B (zh) | 2024-01-05 |
JP2023121805A (ja) | 2023-08-31 |
WO2020250638A1 (ja) | 2020-12-17 |
CN210720509U (zh) | 2020-06-09 |
JP7306082B2 (ja) | 2023-07-11 |
JP7533707B2 (ja) | 2024-08-14 |
JP2020201121A (ja) | 2020-12-17 |
KR20220002619A (ko) | 2022-01-06 |
CN113892036A (zh) | 2022-01-04 |
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