TWI747588B - 基板保持手及基板搬送機器人 - Google Patents

基板保持手及基板搬送機器人 Download PDF

Info

Publication number
TWI747588B
TWI747588B TW109138069A TW109138069A TWI747588B TW I747588 B TWI747588 B TW I747588B TW 109138069 A TW109138069 A TW 109138069A TW 109138069 A TW109138069 A TW 109138069A TW I747588 B TWI747588 B TW I747588B
Authority
TW
Taiwan
Prior art keywords
pressing
pallet
substrate
tilt adjustment
movable
Prior art date
Application number
TW109138069A
Other languages
English (en)
Chinese (zh)
Other versions
TW202210254A (zh
Inventor
清水一平
Original Assignee
日商川崎重工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商川崎重工業股份有限公司 filed Critical 日商川崎重工業股份有限公司
Application granted granted Critical
Publication of TWI747588B publication Critical patent/TWI747588B/zh
Publication of TW202210254A publication Critical patent/TW202210254A/zh

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0028—Gripping heads and other end effectors with movable, e.g. pivoting gripping jaw surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0008—Balancing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H10P72/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Cutting Devices (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Manipulator (AREA)
TW109138069A 2020-09-03 2020-11-02 基板保持手及基板搬送機器人 TWI747588B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020148493 2020-09-03
JP2020-148493 2020-09-03

Publications (2)

Publication Number Publication Date
TWI747588B true TWI747588B (zh) 2021-11-21
TW202210254A TW202210254A (zh) 2022-03-16

Family

ID=79907541

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109138069A TWI747588B (zh) 2020-09-03 2020-11-02 基板保持手及基板搬送機器人

Country Status (6)

Country Link
US (1) US20230311334A1 (https=)
JP (1) JP7420954B2 (https=)
KR (1) KR102748424B1 (https=)
CN (1) CN116114053B (https=)
TW (1) TWI747588B (https=)
WO (1) WO2022049786A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7610943B2 (ja) * 2020-09-18 2025-01-09 ニデックインスツルメンツ株式会社 産業用ロボット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7290813B2 (en) * 2004-12-16 2007-11-06 Asyst Technologies, Inc. Active edge grip rest pad
TW201910082A (zh) * 2017-08-04 2019-03-16 日商川崎重工業股份有限公司 狀態監視系統及狀態監視方法
TW202026120A (zh) * 2018-11-06 2020-07-16 日商川崎重工業股份有限公司 機器人手及具備其之機器人

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04113445U (ja) * 1991-03-20 1992-10-05 株式会社日立製作所 ウエハ移載装置のウエハ吸着板固定装置
JP3802119B2 (ja) * 1996-02-02 2006-07-26 株式会社安川電機 ウェハ搬送装置
KR100331157B1 (ko) * 1998-07-24 2002-04-03 다니구찌 이찌로오, 기타오카 다카시 웨이퍼 홀딩 핸드
JP2006150538A (ja) * 2004-11-30 2006-06-15 Rorze Corp 把持型搬送装置並びにこれを用いるロボット、円盤状物加工設備及び円盤状物搬送方法。
JP4607756B2 (ja) * 2005-12-22 2011-01-05 川崎重工業株式会社 ロボットハンドおよび基板搬送ロボット
KR101181560B1 (ko) * 2008-09-12 2012-09-10 다이닛뽕스크린 세이조오 가부시키가이샤 기판처리장치 및 그것에 사용되는 기판반송장치
JP5589790B2 (ja) * 2010-03-31 2014-09-17 株式会社安川電機 基板搬送用ハンドおよび基板搬送ロボット
CN202678300U (zh) * 2011-06-28 2013-01-16 清华大学 一种利用弹簧夹子的晶圆夹持装置
TWI538789B (zh) * 2011-08-10 2016-06-21 川崎重工業股份有限公司 A end effector device, and a substrate transport robot including the end effector device
JP5553065B2 (ja) 2011-09-22 2014-07-16 株式会社安川電機 基板搬送用ハンドおよび基板搬送ロボット
JP5750472B2 (ja) * 2013-05-22 2015-07-22 株式会社安川電機 基板搬送ロボット、基板搬送システムおよび基板の配置状態の検出方法
JP2015079820A (ja) * 2013-10-16 2015-04-23 株式会社東京精密 基板搬送装置
JP6314157B2 (ja) * 2013-12-26 2018-04-18 川崎重工業株式会社 エンドエフェクタおよび基板搬送ロボット
US9929034B2 (en) * 2015-09-03 2018-03-27 Kawasaki Jukogyo Kabushiki Kaisha Substrate transfer device
JP2017175072A (ja) * 2016-03-25 2017-09-28 川崎重工業株式会社 基板搬送ハンド及びロボット
JP6276317B2 (ja) * 2016-03-31 2018-02-07 平田機工株式会社 ハンドユニットおよび移載方法
US10090188B2 (en) * 2016-05-05 2018-10-02 Applied Materials, Inc. Robot subassemblies, end effector assemblies, and methods with reduced cracking
JP2018041854A (ja) * 2016-09-08 2018-03-15 株式会社荏原製作所 基板把持検出装置、基板把持装置、基板把持検出装置の調整方法
JP6782180B2 (ja) * 2017-01-31 2020-11-11 川崎重工業株式会社 基板把持ハンド及び基板搬送装置
US11964383B2 (en) * 2019-01-16 2024-04-23 Kawasaki Jukogyo Kabushiki Kaisha Robot hand and robot having the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7290813B2 (en) * 2004-12-16 2007-11-06 Asyst Technologies, Inc. Active edge grip rest pad
TW201910082A (zh) * 2017-08-04 2019-03-16 日商川崎重工業股份有限公司 狀態監視系統及狀態監視方法
TW202026120A (zh) * 2018-11-06 2020-07-16 日商川崎重工業股份有限公司 機器人手及具備其之機器人

Also Published As

Publication number Publication date
WO2022049786A1 (ja) 2022-03-10
CN116114053B (zh) 2025-02-25
US20230311334A1 (en) 2023-10-05
CN116114053A (zh) 2023-05-12
JP7420954B2 (ja) 2024-01-23
JPWO2022049786A1 (https=) 2022-03-10
KR20230048405A (ko) 2023-04-11
KR102748424B1 (ko) 2024-12-30
TW202210254A (zh) 2022-03-16

Similar Documents

Publication Publication Date Title
JP6314157B2 (ja) エンドエフェクタおよび基板搬送ロボット
US11685055B2 (en) Robot gripper for moving wafer carriers and packing materials and method of operating the same
JP6276317B2 (ja) ハンドユニットおよび移載方法
CN104690641A (zh) 用于弯曲晶圆的传送模块
KR20130033268A (ko) 로봇 핸드 및 로봇
US20260084320A1 (en) Robot gripper for moving wafer carriers and packing materials and method of operating the same
TWI747588B (zh) 基板保持手及基板搬送機器人
KR20140039137A (ko) 기판 조작 장치 및 방법
CN101253616B (zh) 工件传送装置
JP7610943B2 (ja) 産業用ロボット
TWI741686B (zh) 機器手、機器人及固定裝置
JP6220240B2 (ja) 研削装置
CN116325108B (zh) 基板保持机械手和基板搬运机器人
US20240025054A1 (en) Substrate holding hand and substrate conveying robot
US9236285B2 (en) Movable range adjusting mechanism for workpiece conveying device
TWI763108B (zh) 基板保持手及基板搬送機器人
TWI605918B (zh) 傳動機構以及具有此傳動機構的取物裝置
JPH06349933A (ja) ウエハ移載装置
JP2026061789A (ja) 搬送ロボット
JPH0770585B2 (ja) ウェ−ハ支持方法