TWI707016B - 導電材料、連接構造體及連接構造體之製造方法 - Google Patents

導電材料、連接構造體及連接構造體之製造方法 Download PDF

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TWI707016B
TWI707016B TW106130769A TW106130769A TWI707016B TW I707016 B TWI707016 B TW I707016B TW 106130769 A TW106130769 A TW 106130769A TW 106130769 A TW106130769 A TW 106130769A TW I707016 B TWI707016 B TW I707016B
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electrode
solder
conductive
conductive material
particles
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TW106130769A
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TW201816044A (zh
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士輝 宋
伊藤将大
定永周治郎
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日商積水化學工業股份有限公司
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Abstract

本發明提供一種導電材料,其即便於將導電材料放置一定期間之情形時,亦可於電極上有效率地配置導電性粒子中之焊料,進而,可充分地抑制加熱時導電材料之黃變。 本發明之導電材料包含:於導電部之外表面部分具有焊料之複數個導電性粒子、硬化性化合物及三氟化硼錯合物。

Description

導電材料、連接構造體及連接構造體之製造方法
本發明係關於一種包含於導電部之外表面部分具有焊料之導電性粒子之導電材料。又,本發明係關於一種使用上述導電材料之連接構造體及連接構造體之製造方法。
眾所周知有各向異性導電膏及各向異性導電膜等各向異性導電材料。於上述各向異性導電材料中,於黏合劑樹脂中分散有導電性粒子。 上述各向異性導電材料係用於獲得各種連接構造體。作為上述連接構造體,例如可列舉:軟性印刷基板與玻璃基板之連接(FOG(Film on Glass,鍍膜玻璃))、半導體晶片與軟性印刷基板之連接(COF(Chip on Film,薄膜覆晶))、半導體晶片與玻璃基板之連接(COG(Chip on Glass,玻璃覆晶))、以及軟性印刷基板與玻璃環氧基板之連接(FOB(Film on Board,鍍膜板))等。 例如於藉由上述各向異性導電材料將軟性印刷基板之電極與玻璃環氧基板之電極電性連接時,於玻璃環氧基板上配置包含導電性粒子之各向異性導電材料。其次,積層軟性印刷基板,進行加熱及加壓。藉此,使各向異性導電材料硬化,經由導電性粒子將電極間電性連接,獲得連接構造體。 作為上述各向異性導電材料之一例,於下述專利文獻1中記載有一種包含導電性粒子、及於該導電性粒子之熔點下未完成硬化之樹脂成分之各向異性導電材料。作為上述導電性粒子,具體而言,可列舉:錫(Sn)、銦(In)、鉍(Bi)、銀(Ag)、銅(Cu)、鋅(Zn)、鉛(Pb)、鎘(Cd)、鎵(Ga)及鉈(Tl)等金屬;或該等金屬之合金。 於專利文獻1中記載有經過將各向異性導電樹脂加熱至高於上述導電性粒子之熔點且未完成上述樹脂成分之硬化之溫度的樹脂加熱步驟、及使上述樹脂成分硬化之樹脂成分硬化步驟,將電極間電性連接。又,於專利文獻1中記載有以專利文獻1之圖8所示之溫度分佈進行安裝。於專利文獻1中,於在加熱各向異性導電樹脂之溫度下未完成硬化之樹脂成分內,導電性粒子熔融。 於下述專利文獻2中揭示有一種接著帶,其含有包含熱硬化性樹脂之樹脂層、焊料粉及硬化劑,且上述焊料粉及上述硬化劑存在於上述樹脂層中。該接著帶為膜狀,並非為糊狀。 又,於專利文獻2中揭示有一種使用上述接著帶之接著方法。具體而言,自下往上依序積層第一基板、接著帶、第二基板、接著帶及第三基板,獲得積層體。此時,使設置於第一基板之表面之第一電極與設置於第二基板之表面之第二電極對向。又,使設置於第二基板之表面之第二電極與設置於第三基板之表面之第三電極對向。然後,將積層體於特定之溫度下進行加熱而接著。藉此,獲得連接構造體。 於下述專利文獻3中揭示有一種導電性接著劑組合物,其含有包含熔點為220℃以下之金屬之導電性粒子、熱硬化性樹脂及助焊活性劑,且上述助焊活性劑之平均粒徑為1 μm以上且15 μm以下。 又,於專利文獻3中,作為調配成分,記載有硬化促進劑,具體而言,使用咪唑化合物。 [先前技術文獻] [專利文獻] [專利文獻1]日本專利特開2004-260131號公報 [專利文獻2]WO2008/023452A1 [專利文獻3]WO2012/102077A1
[發明所欲解決之問題] 於專利文獻1、2中記載之先前之包含焊料粉、或於表面具有焊料層之導電性粒子之各向異性導電膏中,有焊料粉或導電性粒子於電極(線)上之移動速度較慢之情況。尤其於將導電材料配置於基板等後,放置長時間之情形時,有焊料難以凝集於電極上之情況。 又,若使用專利文獻3中記載之導電性接著劑組合物,將電極間電性連接,則有導電性接著劑之耐熱性因作為硬化促進劑之咪唑化合物而降低,於加熱時導電性接著劑發生黃變之情況。 本發明之目的在於提供一種導電材料,其即便於將導電材料放置一定期間之情形時,亦可於電極上有效率地配置導電性粒子中之焊料,進而,可充分地抑制加熱時導電材料之黃變。又,本發明之目的在於提供一種使用上述導電材料之連接構造體及連接構造體之製造方法。 [解決問題之技術手段] 根據本發明之廣泛之態樣,提供一種導電材料,其包含:於導電部之外表面部分具有焊料之複數個導電性粒子、硬化性化合物及三氟化硼錯合物。 於本發明之導電材料之某一特定之態樣中,上述三氟化硼錯合物為三氟化硼-胺錯合物。 於本發明之導電材料之某一特定之態樣中,於導電材料100重量%中,上述三氟化硼錯合物之含量為0.1重量%以上且1.5重量%以下。 於本發明之導電材料之某一特定之態樣中,25℃下之黏度為50 Pa・s以上且500 Pa・s以下。 於本發明之導電材料之某一特定之態樣中,上述導電性粒子之平均粒徑為0.5 μm以上且100 μm以下。 於本發明之導電材料之某一特定之態樣中,於導電材料100重量%中,上述導電性粒子之含量為30重量%以上且95重量%以下。 於本發明之導電材料之某一特定之態樣中,上述導電材料為導電膏。 根據本發明之廣泛之態樣,提供一種連接構造體,其包括:第1連接對象構件,其於表面具有至少1個第1電極;第2連接對象構件,其於表面具有至少1個第2電極;及連接部,其將上述第1連接對象構件與上述第2連接對象構件連接;上述連接部之材料為上述導電材料;且上述第1電極與上述第2電極係藉由上述連接部中之焊料部而電性連接。 於本發明之連接構造體之某一特定之態樣中,於沿上述第1電極、上述連接部及上述第2電極之積層方向觀察上述第1電極與上述第2電極之相互對向之部分時,於上述第1電極與上述第2電極之相互對向之部分之面積100%中之50%以上配置有上述連接部中之焊料部。 根據本發明之廣泛之態樣,提供一種連接構造體之製造方法,其包括如下步驟:使用上述導電材料,將上述導電材料配置於表面具有至少1個第1電極之第1連接對象構件之表面上;將表面具有至少1個第2電極之第2連接對象構件以上述第1電極與上述第2電極對向之方式配置於上述導電材料之與上述第1連接對象構件側相反之表面上;及藉由將上述導電材料加熱至上述導電性粒子中之焊料之熔點以上,而藉由上述導電材料形成將上述第1連接對象構件與上述第2連接對象構件連接之連接部,且藉由上述連接部中之焊料部將上述第1電極與上述第2電極電性連接。 於本發明之連接構造體之製造方法之某一特定之態樣中,獲得如下連接構造體:於沿上述第1電極、上述連接部及上述第2電極之積層方向觀察上述第1電極與上述第2電極之相互對向之部分時,於上述第1電極與上述第2電極之相互對向之部分之面積100%中之50%以上配置有上述連接部中之焊料部。 [發明之效果] 本發明之導電材料由於包含於導電部之外表面部分具有焊料之複數個導電性粒子、硬化性化合物及三氟化硼錯合物,故而即便於將導電材料放置一定期間之情形時,亦可於電極上有效率地配置導電性粒子中之焊料,進而,可充分地抑制加熱時導電材料之黃變。
以下,說明本發明之詳細內容。 (導電材料) 本發明之導電材料包含:於導電部之外表面部分具有焊料之複數個導電性粒子、硬化性化合物及三氟化硼錯合物。焊料包含於導電部,為導電部之一部分或全部。 於本發明中,由於具備上述構成,故而即便於將導電材料放置一定期間之情形時,亦可於電極上有效率地配置導電性粒子中之焊料,進而,可充分地抑制加熱時導電材料之黃變。例如,即便於將導電材料配置於基板等連接對象構件上後,將導電材料放置於連接對象構件上一定期間之情形時,亦可於電極上有效率地配置導電性粒子中之焊料。 又,於本發明中,由於具備上述構成,故而於將電極間電性連接之情形時,複數個導電性粒子容易聚集於上下對向之電極間,可將複數個導電性粒子有效率地配置於電極(線)上。又,可使複數個導電性粒子之一部分不易配置於未形成電極之區域(間隙),且使配置於未形成電極之區域之導電性粒子之量相當少。因此,可提高電極間之導通可靠性。而且,可防止不應當連接之橫向鄰接之電極間之電性連接,可提高絕緣可靠性。 於製作連接構造體時,尤其於將LED(light emitting diode,發光二極體)晶片連接於基板時,必須將LED晶片配置於基板上,故而有於藉由網版印刷等配置導電材料後至LED晶片與基板電性連接之前,放置一定期間之情況。於先前之導電材料中,例如若於配置導電材料後放置一定期間,則無法於電極上有效率地配置導電性粒子,電極間之導通可靠性亦降低。於本發明中,由於採用上述構成,故而即便於將配置導電材料後放置一定期間,亦可於電極上有效率地配置導電性粒子,可充分地提高電極間之導通可靠性。 進而,於本發明中,使用三氟化硼錯合物作為硬化促進劑,故而可充分地抑制加熱時導電材料之黃變。為了獲得此種效果,使用三氟化硼錯合物係大有幫助。 就將導電性粒子中之焊料進一步有效率地配置於電極上之觀點而言,上述導電材料之25℃下之黏度(η25)較佳為50 Pa・s以上,更佳為100 Pa・s以上,且較佳為500 Pa・s以下,更佳為300 Pa・s以下。 上述黏度(η25)可根據調配成分之種類及調配量適當進行調整。又,藉由使用填料,可相對提高黏度。 上述黏度(η25)例如可使用E型黏度計(東機產業公司製造之「TVE22L」)等,於25℃及5 rpm之條件下進行測定。 上述導電材料係以導電膏及導電膜等之形式使用。上述導電膏較佳為各向異性導電膏,上述導電膜較佳為各向異性導電膜。就將導電性粒子中之焊料進一步配置於電極上之觀點而言,上述導電材料較佳為導電膏。 上述導電材料較佳地用於電極之電性連接。上述導電材料較佳為電路連接材料。 上述導電材料包含黏合劑。上述導電材料包含硬化性化合物作為上述黏合劑。上述硬化性化合物較佳為熱硬化性化合物。上述導電材料及上述黏合劑可包含熱硬化劑。上述導電材料及上述黏合劑較佳為不包含熱硬化劑。上述黏合劑及上述硬化性化合物較佳為於25℃下為液狀成分,或者為於導電連接時成為液狀之成分。 以下,說明導電材料中所包含之各成分。 (導電性粒子) 上述導電性粒子係將連接對象構件之電極間電性連接。上述導電性粒子係於導電部之外表面部分具有焊料。上述導電性粒子可為藉由焊料所形成之焊料粒子。上述焊料粒子係於導電部之外表面部分具有焊料。上述焊料粒子係中心部分及導電部之外表面部分均藉由焊料形成。上述焊料粒子係中心部分及導電性之外表面均為焊料之粒子。上述導電性粒子可具有基材粒子、及配置於該基材粒子之表面上之導電部。於此情形時,上述導電性粒子係於導電部之外表面部分具有焊料。 上述導電性粒子係於導電部之外表面部分具有焊料。上述基材粒子可為藉由焊料所形成之焊料粒子。上述導電性粒子可為基材粒子及導電部之外表面部分均為焊料之焊料粒子。 再者,與使用上述焊料粒子之情形相比,於使用包括未藉由焊料形成之基材粒子、及配置於該基材粒子之表面上之焊料部之導電性粒子的情形時,導電性粒子難以聚集於電極上。又,於使用包括未藉由焊料形成之基材粒子、及配置於該基材粒子之表面上之焊料部之導電性粒子的情形時,導電性粒子彼此之焊接性較低,故而有於電極上移動之導電性粒子容易移動至電極外之傾向,且有電極間之位置偏移之抑制效果亦變低之傾向。因此,上述導電性粒子較佳為藉由焊料所形成之焊料粒子。 就進一步降低連接構造體之連接電阻,進一步抑制孔隙之產生之觀點而言,較佳為於上述導電性粒子之外表面(焊料之外表面)存在羧基或胺基,較佳為存在羧基,較佳為存在胺基。較佳為於上述導電性粒子之外表面(焊料之外表面),經由Si-O鍵、醚鍵、酯鍵或下述式(X)所表示之基,包含羧基或胺基之基進行共價鍵結。包含羧基或胺基之基可包含羧基及胺基兩者。於下述式(X)中,右端部及左端部表示鍵結部位。 [化1]
Figure 02_image001
於焊料之表面存在羥基。藉由使該羥基與包含羧基之基進行共價鍵結,可形成與藉由其他配位鍵結(螯合配位)等進行鍵結之情形相比較強之鍵,故而可獲得能夠降低電極間之連接電阻,且抑制孔隙之產生之導電性粒子。 於上述導電性粒子中,於焊料之表面與包含羧基之基之鍵結形態中,可不包含配位鍵結,可不包含藉由螯合配位之鍵結。 就進一步降低連接構造體之連接電阻,進一步抑制孔隙之產生之觀點而言,上述導電性粒子較佳為藉由使用具有可與羥基進行反應之官能基及羧基或胺基之化合物(以下,有時記載為化合物X),使上述可與羥基進行反應之官能基與焊料之表面之羥基進行反應而獲得。於上述反應中,形成共價鍵。藉由使焊料之表面之羥基與上述化合物X中之上述可與羥基進行反應之官能基進行反應,可容易地獲得包含羧基或胺基之基與焊料之表面共價鍵結之導電性粒子。又,藉由使焊料之表面之羥基與上述化合物X中之上述可與羥基進行反應之官能基進行反應,亦可獲得包含羧基或胺基之基經由醚鍵或酯鍵與焊料之表面共價鍵結之導電性粒子。藉由使上述可與羥基進行反應之官能基與上述焊料之表面之羥基進行反應,可使上述化合物X以共價鍵結之形態與焊料之表面進行化學鍵結。 作為上述可與羥基進行反應之官能基,可列舉:羥基、羧基、酯基及羰基等。上述可與羥基進行反應之官能基較佳為羥基或羧基。上述可與羥基進行反應之官能基可為羥基,亦可為羧基。 作為具有可與羥基進行反應之官能基之化合物,可列舉:乙醯丙酸、戊二酸、乙醇酸、丁二酸、蘋果酸、草酸、丙二酸、己二酸、5-酮基己酸、3-羥基丙酸、4-胺基丁酸、3-巰基丙酸、3-巰基異丁酸、3-甲硫基丙酸、3-苯基丙酸、3-苯基異丁酸、4-苯基丁酸、癸酸、十二烷酸、十四烷酸、十五烷酸、十六烷酸、9-十六碳烯酸、十七烷酸、硬脂酸、油酸、異油酸、亞麻油酸、(9,12,15)-次亞麻油酸、十九烷酸、花生酸、癸二酸及十二烷二酸等。較佳為戊二酸或乙醇酸。上述具有可與羥基進行反應之官能基之化合物可僅使用1種,亦可併用2種以上。上述具有可與羥基進行反應之官能基之化合物較佳為具有至少1個羧基之化合物。 上述化合物X較佳為具有助焊劑作用,上述化合物X較佳為於鍵結於焊料之表面之狀態下具有助焊劑作用。具有助焊劑作用之化合物可去除焊料之表面之氧化膜及電極之表面之氧化膜。羧基具有助焊劑作用。 作為具有助焊劑作用之化合物,可列舉:乙醯丙酸、戊二酸、乙醇酸、己二酸、丁二酸、5-酮基己酸、3-羥基丙酸、4-胺基丁酸、3-巰基丙酸、3-巰基異丁酸、3-甲硫基丙酸、3-苯基丙酸、3-苯基異丁酸及4-苯基丁酸等。較佳為戊二酸、己二酸或乙醇酸。上述具有助焊劑作用之化合物可僅使用1種,亦可併用2種以上。 就進一步降低連接構造體之連接電阻,進一步抑制孔隙之產生之觀點而言,上述化合物X中之上述可與羥基進行反應之官能基較佳為羥基或羧基。上述化合物X中之上述可與羥基進行反應之官能基可為羥基,亦可為羧基。於上述可與羥基進行反應之官能基為羧基之情形時,上述化合物X較佳為具有至少2個羧基。藉由使具有至少2個羧基之化合物之一部分之羧基與焊料之表面之羥基進行反應,可獲得包含羧基之基與焊料之表面共價鍵結之導電性粒子。 上述導電性粒子之製造方法例如包括使用導電性粒子,混合該導電性粒子、具有可與羥基進行反應之官能基及羧基之化合物、觸媒及溶劑之步驟。於上述導電性粒子之製造方法中,藉由上述混合步驟,可容易地獲得包含羧基之基與焊料之表面共價鍵結之導電性粒子。 又,於上述導電性粒子之製造方法中,較佳為使用導電性粒子,混合該導電性粒子、上述具有可與羥基進行反應之官能基及羧基之化合物、上述觸媒及上述溶劑,並進行加熱。藉由混合及加熱步驟,可更容易地獲得包含羧基之基與焊料之表面共價鍵結之導電性粒子。 作為上述溶劑,可列舉:甲醇、乙醇、丙醇、丁醇等醇溶劑、或丙酮、甲基乙基酮、乙酸乙酯、甲苯及二甲苯等。上述溶劑較佳為有機溶劑,更佳為甲苯。上述溶劑可僅使用1種,亦可併用2種以上。 作為上述觸媒,可列舉:對甲苯磺酸、苯磺酸及10-樟腦磺酸等。上述觸媒較佳為對甲苯磺酸。上述觸媒可僅使用1種,亦可併用2種以上。 較佳為於上述混合時進行加熱。加熱溫度較佳為90℃以上,更佳為100℃以上,且較佳為130℃以下,更佳為110℃以下。 就進一步降低連接構造體之連接電阻,進一步抑制孔隙之產生之觀點而言,上述導電性粒子較佳為經過使用異氰酸酯化合物,使上述異氰酸酯化合物與焊料之表面之羥基進行反應之步驟而獲得。於上述反應中,形成共價鍵。藉由使焊料之表面之羥基與上述異氰酸酯化合物進行反應,可容易地獲得源自異氰酸基之基之氮原子與焊料之表面共價鍵結的導電性粒子。藉由使上述異氰酸酯化合物與上述焊料之表面之羥基進行反應,可使源自異氰酸基之基以共價鍵結之形態與焊料之表面進行化學鍵結。 又,可容易地使矽烷偶合劑與源自異氰酸基之基進行反應。就可容易地獲得上述導電性粒子而言,較佳為上述包含羧基之基係藉由使用具有羧基之矽烷偶合劑之反應而導入。又,就可容易地獲得上述導電性粒子而言,上述包含羧基之基較佳為藉由於使用矽烷偶合劑之反應後,使具有至少1個羧基之化合物與源自矽烷偶合劑之基進行反應而導入。上述導電性粒子較佳為藉由使用上述異氰酸酯化合物,使上述異氰酸酯化合物與焊料之表面之羥基進行反應後,與具有至少1個羧基之化合物進行反應而獲得。 就有效地降低連接構造體之連接電阻,有效地抑制孔隙之產生之觀點而言,上述具有至少1個羧基之化合物較佳為具有複數個羧基。 作為上述異氰酸酯化合物,可列舉:二苯基甲烷-4,4'-二異氰酸酯(MDI)、六亞甲基二異氰酸酯(HDI)、甲苯二異氰酸酯(TDI)及異佛爾酮二異氰酸酯(IPDI)等。亦可使用該等以外之異氰酸酯化合物。藉由使該化合物與焊料之表面進行反應後,使殘留異氰酸基和與該殘留異氰酸基具有反應性且具有羧基之化合物進行反應,可經由上述式(X)所表示之基而於焊料之表面導入羧基。 作為上述異氰酸酯化合物,亦可使用具有不飽和雙鍵且具有異氰酸基之化合物。例如可列舉:異氰酸2-丙烯醯氧基乙酯及甲基丙烯酸2-異氰酸基乙酯。藉由使該化合物之異氰酸基與焊料之表面進行反應後,與具有對殘存之不飽和雙鍵具有反應性之官能基且具有羧基之化合物進行反應,可經由上述式(X)所表示之基而於焊料之表面導入羧基。 作為上述矽烷偶合劑,可列舉:3-異氰酸基丙基三乙氧基矽烷(Shin-Etsu Silicones公司製造之「KBE-9007」)及3-異氰酸基丙基三甲氧基矽烷(MOMENTIVE公司製造之「Y-5187」)等。上述矽烷偶合劑可僅使用1種,亦可併用2種以上。 作為上述具有至少1個羧基之化合物,可列舉:乙醯丙酸、戊二酸、乙醇酸、丁二酸、蘋果酸、草酸、丙二酸、己二酸、5-酮基己酸、3-羥基丙酸、4-胺基丁酸、3-巰基丙酸、3-巰基異丁酸、3-甲硫基丙酸、3-苯基丙酸、3-苯基異丁酸、4-苯基丁酸、癸酸、十二烷酸、十四烷酸、十五烷酸、十六烷酸、9-十六碳烯酸、十七烷酸、硬脂酸、油酸、異油酸、亞麻油酸、(9,12,15)-次亞麻油酸、十九烷酸、花生酸、癸二酸及十二烷二酸等。較佳為戊二酸、己二酸或乙醇酸。上述具有至少1個羧基之化合物可僅使用1種,亦可併用2種以上。 藉由使用上述異氰酸酯化合物,使上述異氰酸酯化合物與焊料之表面之羥基進行反應後,使具有複數個羧基之化合物之一部分之羧基與焊料之表面之羥基進行反應,可使包含羧基之基殘存。 於上述導電性粒子之製造方法中,使用導電性粒子,且使用異氰酸酯化合物,使上述異氰酸酯化合物與焊料之表面之羥基進行反應後,與具有至少1個羧基之化合物進行反應,獲得包含羧基之基經由上述式(X)所表示之基而鍵結於焊料之表面的導電性粒子。於上述導電性粒子之製造方法中,藉由上述步驟,可容易地獲得於焊料之表面導入有包含羧基之基之導電性粒子。 作為上述導電性粒子之具體之製造方法,可列舉以下之方法。使導電性粒子分散於有機溶劑中,添加具有異氰酸基之矽烷偶合劑。其後,使用導電性粒子之焊料之表面之羥基與異氰酸基的反應觸媒,使矽烷偶合劑與焊料之表面進行共價鍵結。其次,藉由將矽烷偶合劑之鍵結於矽原子之烷氧基水解而生成羥基。使具有至少1個羧基之化合物之羧基與所生成之羥基進行反應。 又,作為上述導電性粒子之具體之製造方法,可列舉以下之方法。使導電性粒子分散於有機溶劑中,添加具有異氰酸基及不飽和雙鍵之化合物。其後,使用導電性粒子之焊料之表面之羥基與異氰酸基的反應觸媒,形成共價鍵。其後,使具有不飽和雙鍵及羧基之化合物與導入之不飽和雙鍵進行反應。 作為導電性粒子之焊料之表面之羥基與異氰酸基的反應觸媒,可列舉:錫系觸媒(二月桂酸二丁基錫等)、胺系觸媒(三伸乙基二胺等)、羧酸鹽觸媒(環烷酸鉛、乙酸鉀等)、及三烷基膦觸媒(三乙基膦等)等。 就有效地降低連接構造體之連接電阻,有效地抑制孔隙之產生之觀點而言,上述具有至少1個羧基之化合物較佳為下述式(1)所表示之化合物。下述式(1)所表示之化合物具有助焊劑作用。又,下述式(1)所表示之化合物係於導入於焊料之表面之狀態下具有助焊劑作用。 [化2]
Figure 02_image003
上述式(1)中,X表示可與羥基進行反應之官能基,R表示碳數1~5之二價有機基。該有機基可包含碳原子、氫原子及氧原子。該有機基可為碳數1~5之二價烴基。上述有機基之主鏈較佳為二價烴基。於該有機基中,羧基或羥基可鍵結於二價烴基。於上述式(1)所表示之化合物中,例如包含檸檬酸。 上述具有至少1個羧基之化合物較佳為下述式(1A)或下述式(1B)所表示之化合物。上述具有至少1個羧基之化合物較佳為下述式(1A)所表示之化合物,更佳為下述式(1B)所表示之化合物。 [化3]
Figure 02_image005
上述式(1A)中,R表示碳數1~5之二價有機基。上述式(1A)中之R與上述式(1)中之R相同。 [化4]
Figure 02_image007
上述式(1B)中,R表示碳數1~5之二價有機基。上述式(1B)中之R與上述式(1)中之R相同。 較佳為下述式(2A)或下述式(2B)所表示之基鍵結於焊料之表面。較佳為下述式(2A)所表示之基鍵結於焊料之表面,更佳為下述式(2B)所表示之基鍵結於焊料之表面。於下述式(2A)及(2B)中,左端部表示鍵結部位。 [化5]
Figure 02_image009
上述式(2A)中,R表示碳數1~5之二價有機基。上述式(2A)中之R與上述式(1)中之R相同。 [化6]
Figure 02_image011
上述式(2B)中,R表示碳數1~5之二價有機基。上述式(2B)中之R與上述式(1)中之R相同。 就進一步提高焊料之表面之潤濕性之觀點而言,上述具有至少1個羧基之化合物之分子量較佳為10000以下,更佳為1000以下,進而較佳為500以下。 於上述具有至少1個羧基之化合物並非為聚合物之情形時、及可特定上述具有至少1個羧基之化合物之結構式之情形時,上述分子量意指可根據該結構式算出之分子量。又,於上述具有至少1個羧基之化合物為聚合物之情形時,意指重量平均分子量。 就於電極間進一步有效率地配置導電性粒子中之焊料之觀點而言,上述導電性粒子較佳為具有導電性粒子、及配置於上述導電性粒子之表面上之陰離子聚合物。上述導電性粒子較佳為藉由利用陰離子聚合物或成為陰離子聚合物之化合物對導電性粒子進行表面處理而獲得。上述導電性粒子較佳為藉由陰離子聚合物或成為陰離子聚合物之化合物進行處理之表面處理物。上述陰離子聚合物及上述成為陰離子聚合物之化合物分別可僅使用1種,亦可併用2種以上。 作為藉由陰離子聚合物對導電性粒子本體進行表面處理之方法,可列舉使陰離子聚合物之羧基與導電性粒子本體之表面之羥基進行反應的方法等。作為該反應中所使用之陰離子聚合物,例如可列舉:使(甲基)丙烯酸進行共聚而成之(甲基)丙烯酸系聚合物;由二羧酸及二醇合成且兩末端具有羧基之聚酯聚合物;藉由二羧酸之分子間脫水縮合反應而獲得且兩末端具有羧基之聚合物;由二羧酸及二胺合成且兩末端具有羧基之聚酯聚合物;以及具有羧基之改性聚乙烯醇(日本合成化學公司製造之「Gohsenx T」)等。 作為上述陰離子聚合物之陰離子部分,可列舉上述羧基,除此以外,亦可列舉:甲苯磺醯基(p-H3 CC6 H4 S(=O)2 -)、磺酸根離子基(-SO3 -)及磷酸根離子基(-PO4 -)等。 又,作為表面處理之其他方法,可列舉如下方法:使用具有與導電性粒子本體之表面之羥基進行反應之官能基,進而,具有可藉由加成、縮合反應而進行聚合之官能基之化合物,將該化合物於導電性粒子本體之表面上進行聚合物化。作為與導電性粒子本體之表面之羥基進行反應之官能基,可列舉:羧基及異氰酸基等,作為藉由加成、縮合反應而進行聚合之官能基,可列舉:羥基、羧基、胺基及(甲基)丙烯醯基。 上述陰離子聚合物之重量平均分子量較佳為2000以上,更佳為3000以上,且較佳為10000以下,更佳為8000以下。若上述重量平均分子量為上述下限以上及上述上限以下,則可於導電性粒子之表面導入充分之量之電荷及助焊性。藉此,可有效地提高導電連接時導電性粒子之凝集性,且於連接對象構件之連接時,可有效地去除電極之表面之氧化膜。 若上述重量平均分子量為上述下限以上及上述上限以下,則容易於導電性粒子本體之表面上配置陰離子聚合物,可有效地提高導電連接時焊料粒子之凝集性,可於電極上進一步有效率地配置導電性粒子。 上述重量平均分子量表示藉由凝膠滲透層析法(GPC)測得之藉由聚苯乙烯換算之重量平均分子量。 藉由利用成為陰離子聚合物之化合物對導電性粒子本體進行表面處理所獲得之聚合物的重量平均分子量可藉由熔解導電性粒子中之焊料,利用不會引起聚合物之分解之稀鹽酸等,去除導電性粒子後,測定殘存之聚合物之重量平均分子量而求出。 關於陰離子聚合物之導電性粒子之表面之導入量,導電性粒子每1 g之酸值較佳為1 mgKOH以上,更佳為2 mgKOH以上,且較佳為10 mgKOH以下,更佳為6 mgKOH以下。 上述酸值可以如下之方式進行測定。 將導電性粒子1 g添加於丙酮36 g中,藉由超音波使之分散1分鐘。其後,使用酚酞作為指示劑,於0.1 mol/L之氫氧化鉀乙醇溶液中進行滴定。 其次,一面參照圖式,一面說明導電性粒子之具體例。 圖4係表示可用於導電材料之導電性粒子之第1例之剖視圖。 圖4所示之導電性粒子21為焊料粒子。導電性粒子21係整體藉由焊料形成。導電性粒子21係於核不具有基材粒子,並非為核殼粒子。導電性粒子21係中心部分及導電部之外表面部分均藉由焊料形成。 圖5係表示可用於導電材料之導電性粒子之第2例之剖視圖。 圖5所示之導電性粒子31包括基材粒子32、及配置於基材粒子32之表面上之導電部33。導電部33被覆基材粒子32之表面。導電性粒子31係基材粒子32之表面經導電部33被覆之被覆粒子。 導電部33具有第2導電部33A及焊料部33B(第1導電部)。導電性粒子31係於基材粒子32與焊料部33B之間包括第2導電部33A。因此,導電性粒子31包括:基材粒子32;第2導電部33A,其配置於基材粒子32之表面上;及焊料部33B,其配置於第2導電部33A之外表面上。 圖6係表示可用於導電材料之導電性粒子之第3例之剖視圖。 導電性粒子31中之導電部33具有2層構造。圖6所示之導電性粒子41具有焊料部42作為單層之導電部。導電性粒子41包括基材粒子32、及配置於基材粒子32之表面上之焊料部42。 以下,對導電性粒子之其他詳細內容進行說明。 (基材粒子) 作為上述基材粒子,可列舉:樹脂粒子、除金屬粒子以外之無機粒子、有機無機混合粒子及金屬粒子等。上述基材粒子較佳為除金屬以外之基材粒子,較佳為樹脂粒子、除金屬粒子以外之無機粒子或有機無機混合粒子。上述基材粒子可為銅粒子。上述基材粒子可具有核、及配置於該核之表面上之殼,可為核殼粒子。上述核可為有機核,上述殼可為無機殼。 作為用以形成上述樹脂粒子之樹脂,較佳地使用各種有機物。作為用以形成上述樹脂粒子之樹脂,例如可列舉:聚乙烯、聚丙烯、聚苯乙烯、聚氯乙烯、聚偏二氯乙烯、聚異丁烯、聚丁二烯等聚烯烴樹脂;聚甲基丙烯酸甲酯及聚丙烯酸甲酯等丙烯酸系樹脂;聚碳酸酯、聚醯胺、苯酚-甲醛樹脂、三聚氰胺-甲醛樹脂、苯胍胺-甲醛樹脂、脲甲醛樹脂、酚樹脂、三聚氰胺樹脂、苯胍胺樹脂、脲樹脂、環氧樹脂、不飽和聚酯樹脂、飽和聚酯樹脂、聚對苯二甲酸乙二酯、聚碸、聚苯醚、聚縮醛、聚醯亞胺、聚醯胺醯亞胺、聚醚醚酮、聚醚碸、二乙烯苯聚合物以及二乙烯苯系共聚物等。作為上述二乙烯苯系共聚物等,可列舉:二乙烯苯-苯乙烯共聚物及二乙烯苯-(甲基)丙烯酸酯共聚物等。由於可容易地將上述樹脂粒子之硬度控制為較佳之範圍,故而用以形成上述樹脂粒子之樹脂較佳為使1種或2種以上之具有乙烯性不飽和基之聚合性單體進行聚合而成的聚合物。 於使具有乙烯性不飽和基之聚合性單體進行聚合而獲得上述樹脂粒子之情形時,作為上述具有乙烯性不飽和基之聚合性單體,可列舉:非交聯性之單體及交聯性之單體。 作為上述非交聯性之單體,例如可列舉:苯乙烯、α-甲基苯乙烯等苯乙烯系單體;(甲基)丙烯酸、順丁烯二酸、順丁烯二酸酐等含羧基單體;(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸月桂酯、(甲基)丙烯酸鯨蠟酯、(甲基)丙烯酸硬脂酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸異𦯉基酯等(甲基)丙烯酸烷基酯化合物;(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸甘油酯、聚氧乙烯(甲基)丙烯酸酯、(甲基)丙烯酸縮水甘油酯等含氧原子(甲基)丙烯酸酯化合物;(甲基)丙烯腈等含腈單體;甲基乙烯基醚、乙基乙烯基醚、丙基乙烯基醚等乙烯基醚化合物;乙酸乙烯酯、丁酸乙烯酯、月桂酸乙烯酯、硬脂酸乙烯酯等酸乙烯酯化合物;乙烯、丙烯、異戊二烯、丁二烯等不飽和烴;(甲基)丙烯酸三氟甲酯、(甲基)丙烯酸五氟乙酯、氯乙烯、氟乙烯、氯苯乙烯等含鹵素單體等。 作為上述交聯性之單體,例如可列舉:四羥甲基甲烷四(甲基)丙烯酸酯、四羥甲基甲烷三(甲基)丙烯酸酯、四羥甲基甲烷二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、三(甲基)丙烯酸甘油酯、二(甲基)丙烯酸甘油酯、(聚)乙二醇二(甲基)丙烯酸酯、(聚)丙二醇二(甲基)丙烯酸酯、(聚)四亞甲基二醇二(甲基)丙烯酸酯、1,4-丁二醇二(甲基)丙烯酸酯等多官能(甲基)丙烯酸酯化合物;(異)氰尿酸三烯丙酯、偏苯三酸三烯丙酯、二乙烯苯、鄰苯二甲酸二烯丙酯、二烯丙基丙烯醯胺、二烯丙醚、γ-(甲基)丙烯醯氧基丙基三甲氧基矽烷、三甲氧基矽烷基苯乙烯、乙烯基三甲氧基矽烷等含矽烷單體等。 「(甲基)丙烯酸酯」之用語表示丙烯酸酯及甲基丙烯酸酯。「(甲基)丙烯酸」之用語表示丙烯酸及甲基丙烯酸。「(甲基)丙烯醯基」之用語表示丙烯醯基及甲基丙烯醯基。 藉由公知之方法使上述具有乙烯性不飽和基之聚合性單體進行聚合,藉此可獲得上述樹脂粒子。作為該方法,例如可列舉:於自由基聚合起始劑之存在下進行懸浮聚合之方法;以及使用非交聯之種粒使單體與自由基聚合起始劑一起膨潤而進行聚合之方法等。 於上述基材粒子為除金屬以外之無機粒子或有機無機混合粒子之情形時,作為用以形成基材粒子之無機物,可列舉:二氧化矽、氧化鋁、鈦酸鋇、氧化鋯及碳黑等。上述無機物較佳為並非為金屬。作為藉由上述二氧化矽所形成之粒子,並無特別限定,例如可列舉藉由於將具有2個以上之水解性之烷氧基矽烷基之矽化合物水解而形成交聯聚合物粒子後,視需要進行焙燒而獲得之粒子。作為上述有機無機混合粒子,例如可列舉藉由交聯之烷氧基矽烷基聚合物及丙烯酸系樹脂所形成之有機無機混合粒子等。 上述有機無機混合粒子較佳為具有核、及配置於該核之表面上之殼之核殼型有機無機混合粒子。上述核較佳為有機核。上述殼較佳為無機殼。就進一步降低電極間之連接電阻之觀點而言,上述基材粒子較佳為具有有機核、及配置於上述有機核之表面上之無機殼之有機無機混合粒子。 作為用以形成上述有機核之材料,可列舉用以形成上述樹脂粒子之樹脂等。 作為用以形成上述無機殼之材料,可列舉用以形成上述基材粒子之無機物等。用以形成上述無機殼之材料較佳為二氧化矽。上述無機殼較佳為藉由將金屬烷氧化物於上述核之表面上利用溶膠凝膠法製成殼狀物後,燒結該殼狀物而形成。上述金屬烷氧化物較佳為烷醇矽。上述無機殼較佳為藉由烷醇矽形成。 上述核之粒徑較佳為0.5 μm以上,更佳為1 μm以上,且較佳為100 μm以下,更佳為50 μm以下。若上述核之粒徑為上述下限以上及上述上限以下,則可獲得更適於電極間之電性連接之導電性粒子,可將基材粒子較佳地用於導電性粒子之用途。例如,若上述核之粒徑為上述下限以上及上述上限以下,則於使用上述導電性粒子將電極間連接之情形時,導電性粒子與電極之接觸面積變得足夠大,且於在基材粒子之表面形成導電部時,可不易形成凝集之導電性粒子。又,經由導電性粒子連接之電極間之間隔不會變得過大,且可使導電部不易自基材粒子之表面剝離。 關於上述核之粒徑,於上述核為真球狀之情形時,意指直徑,於上述核為真球狀以外之形狀之情形時,意指最大直徑。又,核之粒徑意指藉由任意之粒徑測定裝置測定核所獲得之平均粒徑。例如可利用使用雷射光散射、電阻值變化、攝像後之圖像分析等原理之粒度分佈測定裝置。 上述殼之厚度較佳為100 nm以上,更佳為200 nm以上,且較佳為5 μm以下,更佳為3 μm以下。若上述殼之厚度為上述下限以上及上述上限以下,則可獲得更適於電極間之電性連接之導電性粒子,可將基材粒子較佳地用於導電性粒子之用途。上述殼之厚度係每1個基材粒子之平均厚度。藉由溶膠凝膠法之控制,可控制上述殼之厚度。 於上述基材粒子為金屬粒子之情形時,作為用以形成該金屬粒子之金屬,可列舉:銀、銅、鎳、矽、金及鈦等。於上述基材粒子為金屬粒子之情形時,該金屬粒子較佳為銅粒子。但是,上述基材粒子較佳為並非為金屬粒子。 上述基材粒子之粒徑較佳為0.5 μm以上,更佳為1 μm以上,且較佳為100 μm以下,更佳為50 μm以下。若上述基材粒子之粒徑為上述下限以上,則導電性粒子與電極之接觸面積變大,故而可進一步提高電極間之導通可靠性,可進一步降低經由導電性粒子連接之電極間之連接電阻。若上述基材粒子之粒徑為上述上限以下,則容易充分地壓縮導電性粒子,可進一步降低電極間之連接電阻,進而,可進一步縮小電極間之間隔。 關於上述基材粒子之粒徑,於基材粒子為真球狀之情形時,表示直徑,於基材粒子並非為真球狀之情形時,表示最大直徑。 上述基材粒子之粒徑尤佳為5 μm以上且40 μm以下。若上述基材粒子之粒徑為5 μm以上且40 μm以下之範圍內,則可使電極間之間隔更小,且即便增厚導電層之厚度,亦可獲得較小之導電性粒子。 (導電部) 於上述基材粒子之表面上形成導電部之方法、以及於上述基材粒子之表面上或上述第2導電部之表面上形成焊料部之方法並無特別限定。作為形成上述導電部及上述焊料部之方法,例如可列舉:藉由無電解鍍覆之方法;藉由電鍍之方法;藉由物理碰撞之方法;藉由機械化學反應之方法;藉由物理蒸鍍或物理吸附之方法;以及將包含金屬粉末、或金屬粉末及黏合劑之糊劑塗覆於基材粒子之表面之方法等。其中,較佳為藉由無電解鍍覆、電鍍或物理碰撞之方法。作為上述藉由物理蒸鍍之方法,可列舉:真空蒸鍍、離子鍍覆及離子濺鍍等方法。又,於上述藉由物理碰撞之方法中,例如使用Theta Composer(德壽工作所公司製造)等。 上述基材粒子之熔點較佳為高於上述導電部及上述焊料部之熔點。上述基材粒子之熔點較佳為超過160℃,更佳為超過300℃,進而較佳為超過400℃,尤佳為超過450℃。再者,上述基材粒子之熔點可未達400℃。上述基材粒子之熔點可為160℃以下。上述基材粒子之軟化點較佳為260℃以上。上述基材粒子之軟化點可未達260℃。 上述導電性粒子可具有單層之焊料部。上述導電性粒子可具有複數層導電部(焊料部、第2導電部)。即,於上述導電性粒子中,可積層2層以上之導電部。於上述導電部為2層以上之情形時,上述導電性粒子較佳為於導電部之外表面部分具有焊料。 上述焊料較佳為熔點為450℃以下之金屬(低熔點金屬)。上述焊料部較佳為熔點為450℃以下之金屬層(低熔點金屬層)。上述低熔點金屬層係包含低熔點金屬之層。上述導電性粒子中之焊料較佳為熔點為450℃以下之金屬粒子(低熔點金屬粒子)。上述低熔點金屬粒子係包含低熔點金屬之粒子。該低熔點金屬表示熔點為450℃以下之金屬。低熔點金屬之熔點較佳為300℃以下,更佳為160℃以下。又,上述導電性粒子中之焊料較佳為包含錫。於上述焊料部中所包含之金屬100重量%中及上述導電性粒子中之焊料中所包含之金屬100重量%中,錫之含量較佳為30重量%以上,更佳為40重量%以上,進而較佳為70重量%以上,尤佳為90重量%以上。若上述導電性粒子中之焊料中所包含之錫之含量為上述下限以上,則導電性粒子與電極之導通可靠性變得更高。 再者,上述錫之含量可使用高頻感應耦合電漿發射光譜分析裝置(堀場製作所公司製造之「ICP-AES」)或螢光X射線分析裝置(島津製作所公司製造之「EDX-800HS」)等進行測定。 藉由使用於導電部之外表面部分具有上述焊料之導電性粒子,焊料發生熔融而與電極接合,焊料使電極間導通。例如,焊料與電極容易進行面接觸而並非點接觸,故而連接電阻變低。又,藉由使用於導電部之外表面部分具有焊料之導電性粒子,焊料與電極之接合強度變高,結果更不易產生焊料與電極之剝離,導通可靠性有效地變高。 構成上述焊料部及上述焊料之低熔點金屬並無特別限定。該低熔點金屬較佳為錫、或包含錫之合金。該合金可列舉:錫-銀合金、錫-銅合金、錫-銀-銅合金、錫-鉍合金、錫-鋅合金、錫-銦合金等。就對電極之潤濕性優異之方面而言,上述低熔點金屬較佳為錫、錫-銀合金、錫-銀-銅合金、錫-鉍合金、錫-銦合金。更佳為錫-鉍合金、錫-銦合金。 構成上述焊料(焊料部)之材料較佳為基於JIS Z3001:焊接用語,液相線為450℃以下之熔填材料。作為上述焊料之組成,例如可列舉包含鋅、金、銀、鉛、銅、錫、鉍、銦等之金屬組成。較佳為低熔點且無鉛之錫-銦系(117℃共晶)或錫-鉍系(139℃共晶)。即,上述焊料較佳為不包含鉛,較佳為包含錫及銦之焊料、或包含錫及鉍之焊料。 為了進一步提高上述焊料與電極之接合強度,上述導電性粒子中之焊料可包含鎳、銅、銻、鋁、鋅、鐵、金、鈦、磷、鍺、碲、鈷、鉍、錳、鉻、鉬、鈀等金屬。又,就更進一步提高焊料與電極之接合強度之觀點而言,上述導電性粒子中之焊料較佳為包含鎳、銅、銻、鋁或鋅。就進一步提高焊料部或導電性粒子中之焊料與電極之接合強度之觀點而言,用以提高接合強度之該等金屬之含量於上述導電性粒子中之焊料100重量%中,較佳為0.0001重量%以上,且較佳為1重量%以下。 上述第2導電部之熔點較佳為高於上述焊料部之熔點。上述第2導電部之熔點較佳為超過160℃,更佳為超過300℃,進而較佳為超過400℃,更進一步較佳為超過450℃,尤佳為超過500℃,最佳為超過600℃。上述焊料部由於熔點較低,故而於導電連接時熔融。上述第2導電部較佳為於導電連接時不熔融。上述導電性粒子較佳為使焊料熔融而使用,較佳為使上述焊料部熔融而使用,較佳為使上述焊料部熔融且不使上述第2導電部熔融而使用。藉由上述第2導電部之熔點高於上述焊料部之熔點,於導電連接時,可不使上述第2導電部熔融,僅使上述焊料部熔融。 上述焊料部之熔點與上述第2導電部之熔點之差的絕對值超過0℃,較佳為5℃以上,更佳為10℃以上,進而較佳為30℃以上,尤佳為50℃以上,最佳為100℃以上。 上述第2導電部較佳為包含金屬。構成上述第2導電部之金屬並無特別限定。作為該金屬,例如可列舉:金、銀、銅、鉑、鈀、鋅、鉛、鋁、鈷、銦、鎳、鉻、鈦、銻、鉍、鍺及鎘、以及該等之合金等。又,作為上述金屬,可使用摻錫氧化銦(ITO)。上述金屬可僅使用1種,亦可併用2種以上。 上述第2導電部較佳為鎳層、鈀層、銅層或金層,更佳為鎳層或金層,進而較佳為銅層。導電性粒子較佳為具有鎳層、鈀層、銅層或金層,更佳為具有鎳層或金層,進而較佳為具有銅層。藉由將具有該等較佳之導電部之導電性粒子用於電極間之連接,電極間之連接電阻變得更低。又,可於該等較佳之導電部之表面,更容易地形成焊料部。 上述焊料部之厚度較佳為0.005 μm以上,更佳為0.01 μm以上,且較佳為10 μm以下,更佳為1 μm以下,進而較佳為0.3 μm以下。若焊料部之厚度為上述下限以上及上述上限以下,則可獲得充分之導電性,且導電性粒子不會變得過硬,於連接電極間時導電性粒子充分地變形。 上述導電性粒子之平均粒徑較佳為0.5 μm以上,更佳為1 μm以上,且較佳為100 μm以下,更佳為50 μm以下,進而較佳為30 μm以下。若上述導電性粒子之平均粒徑為上述下限以上及上述上限以下,則可於電極上進一步有效率地配置導電性粒子,導通可靠性變得更高。 上述導電性粒子之平均粒徑表示數量平均粒徑。導電性粒子之平均粒徑例如藉由利用電子顯微鏡或光學顯微鏡觀察50個任意之導電性粒子,算出平均值,或者進行雷射繞射式粒度分佈測定而求出。 上述導電性粒子之粒徑之變異係數較佳為5%以上,更佳為10%以上,且較佳為40%以下,更佳為30%以下。若上述粒徑之變異係數為上述下限以上及上述上限以下,則可於電極上進一步有效率地配置焊料。但是,上述導電性粒子之粒徑之變異係數可未達5%。 上述變異係數(CV值)可以如下之方式進行測定。 CV值(%)=(ρ/Dn)×100 ρ:導電性粒子之粒徑之標準偏差 Dn:導電性粒子之粒徑之平均值 上述導電性粒子之形狀並無特別限定。上述導電性粒子之形狀可為球狀,亦可為扁平狀等球形狀以外之形狀。 於上述導電材料100重量%中,上述導電性粒子之含量較佳為30重量%以上,更佳為40重量%以上,進而較佳為50重量%以上,且較佳為95重量%以下,更佳為90重量%以下。若上述導電性粒子之含量為上述下限以上及上述上限以下,則可於電極上進一步有效率地配置導電性粒子,容易於電極間配置較多之導電性粒子中之焊料,導通可靠性變得更高。就進一步提高導通可靠性之觀點而言,較佳為上述導電性粒子之含量較多。 (硬化性成分:硬化性化合物) 作為上述硬化性化合物,可列舉熱硬化性化合物及光硬化性化合物等。上述硬化性化合物較佳為熱硬化性化合物。上述熱硬化性化合物係可藉由加熱而硬化之化合物。作為上述熱硬化性化合物,可列舉:氧雜環丁烷化合物、環氧化合物、環硫化合物、(甲基)丙烯酸系化合物、酚化合物、胺基化合物、不飽和聚酯化合物、聚胺基甲酸酯化合物、聚矽酸化合物及聚醯亞胺化合物等。就使導電材料之硬化性及黏度更良好,進一步提高導通可靠性之觀點而言,上述硬化性化合物較佳為環氧化合物或環硫化合物,更佳為環氧化合物。上述導電材料較佳為包含環氧化合物。上述熱硬化性化合物可僅使用1種,亦可併用2種以上。 上述環氧化合物較佳為間苯二酚型環氧化合物、萘型環氧化合物、聯苯型環氧化合物、二苯甲酮型環氧化合物及酚系酚醛清漆型環氧化合物等芳香族環氧化合物。較佳為熔融溫度為焊料之熔點以下之環氧化合物。熔融溫度較佳為100℃以下,更佳為80℃以下,進而較佳為40℃以下。藉由使用上述較佳之環氧化合物,於貼合連接對象構件之階段,於黏度較高,藉由搬送等之衝擊而賦予加速度時,可抑制第1連接對象構件與第2連接對象構件之位置偏移。進而,藉由使用上述較佳之環氧化合物,藉由硬化時之熱,可大幅降低黏度,可高效率地進行導電性粒子中之焊料之凝集。 於上述導電材料100重量%中,上述硬化性化合物之含量較佳為5重量%以上,更佳為8重量%以上,進而較佳為10重量%以上,且較佳為60重量%以下,更佳為55重量%以下,進而較佳為50重量%以下,尤佳為40重量%以下。若上述硬化性化合物之含量為上述下限以上及上述上限以下,則可將導電性粒子進一步有效率地配置於電極上,進一步抑制電極間之位置偏移,進一步提高電極間之導通可靠性。就進一步提高耐衝擊性之觀點而言,較佳為上述熱硬化性化合物之含量較多。 (硬化性成分:熱硬化劑) 本發明之導電材料較佳為不包含熱硬化劑。本發明之導電材料可包含熱硬化性化合物及熱硬化劑。上述熱硬化劑係使上述熱硬化性化合物熱硬化。作為上述熱硬化劑,可列舉:咪唑硬化劑、胺硬化劑、酚硬化劑、多硫醇硬化劑等硫醇硬化劑、酸酐硬化劑、熱陽離子起始劑(熱陽離子硬化劑)及熱自由基產生劑等。上述熱硬化劑可僅使用1種,亦可併用2種以上。於本發明之導電材料包含上述熱硬化劑之情形時,相對於上述熱硬化性化合物100重量份,上述熱硬化劑之含量較佳為未達1重量份,更佳為未達0.1重量份,進而較佳為未達0.05重量份。相對於上述熱硬化性化合物100重量份,上述熱硬化劑之含量尤佳為0重量份(不含有)。若上述熱硬化劑之含量為上述較佳之含量,則即便於將導電材料放置一定期間之情形時,亦可於電極上有效率地配置導電性粒子中之焊料,進而,可充分地抑制加熱時導電材料之黃變。 就即便於將導電材料放置一定期間之情形時,亦於電極上進一步有效率地配置導電性粒子之觀點而言,上述熱硬化劑較佳為並非為硫醇硬化劑。 就進一步抑制加熱時導電材料之黃變之觀點而言,上述熱硬化劑較佳為並非為咪唑硬化劑。於本發明之導電材料包含上述咪唑熱硬化劑之情形時,相對於上述熱硬化性化合物100重量份,上述咪唑熱硬化劑之含量較佳為未達1重量份,更佳為未達0.1重量份,進而較佳為未達0.05重量份。相對於上述熱硬化性化合物100重量份,上述咪唑熱硬化劑之含量尤佳為0重量份(不含有)。若上述咪唑熱硬化劑之含量為上述較佳之含量,則即便於將導電材料放置一定期間之情形時,亦可於電極上有效率地配置導電性粒子中之焊料,進而,可充分地抑制加熱時導電材料之黃變。 上述咪唑硬化劑並無特別限定。作為上述咪唑硬化劑,可列舉:2-甲基咪唑、2-乙基-4-甲基咪唑、1-氰基乙基-2-苯基咪唑、1-氰基乙基-2-苯基咪唑鎓偏苯三酸鹽、2,4-二胺基-6-[2'-甲基咪唑基-(1')]-乙基-均三𠯤及2,4-二胺基-6-[2'-甲基咪唑基-(1')]-乙基-均三𠯤異三聚氰酸加成物等。 上述硫醇硬化劑並無特別限定。作為上述硫醇硬化劑,可列舉:三羥甲基丙烷三-3-巰基丙酸酯、季戊四醇四-3-巰基丙酸酯及二季戊四醇六-3-巰基丙酸酯等。 上述胺硬化劑並無特別限定。作為上述胺硬化劑,可列舉:六亞甲基二胺、八亞甲基二胺、十亞甲基二胺、3,9-雙(3-胺基丙基)-2,4,8,10-四螺[5.5]十一烷、雙(4-胺基環己基)甲烷、間苯二胺及二胺基二苯基碸等。 作為上述熱陽離子起始劑(熱陽離子硬化劑),可列舉:錪系陽離子硬化劑、氧鎓系陽離子硬化劑及鋶系陽離子硬化劑等。作為上述錪系陽離子硬化劑,可列舉雙(4-第三丁基苯基)錪六氟磷酸鹽等。作為上述氧鎓系陽離子硬化劑,可列舉三甲基氧鎓四氟硼酸鹽等。作為上述鋶系陽離子硬化劑,可列舉三-對甲苯基鋶六氟磷酸鹽等。 上述熱自由基產生劑並無特別限定。作為上述熱自由基產生劑,可列舉:偶氮化合物及有機過氧化物等。作為上述偶氮化合物,可列舉偶氮二異丁腈(AIBN)等。作為上述有機過氧化物,可列舉:過氧化二-第三丁基及過氧化甲基乙基酮等。 上述熱硬化劑之反應開始溫度較佳為50℃以上,更佳為60℃以上,進而較佳為70℃以上,且較佳為250℃以下,更佳為200℃以下,進而較佳為190℃以下,尤佳為180℃以下。若上述熱硬化劑之反應開始溫度為上述下限以上及上述上限以下,則導電性粒子進一步有效率地配置於電極上。 上述熱硬化劑之含量並無特別限定。相對於上述熱硬化性化合物100重量份,上述熱硬化劑之含量較佳為0.01重量份以上,更佳為1重量份以上,且較佳為200重量份以下,更佳為100重量份以下,進而較佳為75重量份以下。若熱硬化劑之含量為上述下限以上,則容易使導電材料充分地硬化。若熱硬化劑之含量為上述上限以下,則於硬化後不易殘存未參與硬化之剩餘之熱硬化劑,且硬化物之耐熱性變得更高。 (三氟化硼錯合物) 本發明之導電材料包含三氟化硼錯合物。上述三氟化硼錯合物可僅使用1種,亦可併用2種以上。 於本發明之導電材料中,上述三氟化硼錯合物較佳為作為上述硬化性化合物之硬化促進劑發揮作用。上述導電材料較佳為不包含上述熱硬化劑,較佳為上述硬化性化合物單獨藉由上述三氟化硼錯合物進行硬化。較佳為上述硬化性化合物藉由上述三氟化硼錯合物進行均聚。較佳為上述硬化性化合物單獨藉由上述三氟化硼錯合物進行反應,藉此形成硬化物。於上述導電材料之硬化物中,較佳為複數種上述硬化性化合物彼此相互結合。於此種情形時,即便於將導電材料放置一定期間之情形時,亦可於電極上有效率地配置導電性粒子,可充分地提高電極間之導通可靠性。 作為上述三氟化硼錯合物之較佳之例,可列舉三氟化硼-胺錯合物等。三氟化硼-胺錯合物係三氟化硼與胺化合物之錯合物。上述胺化合物可為環式胺。上述三氟化硼-胺錯合物可僅使用1種,亦可併用2種以上。 作為上述三氟化硼-胺錯合物,可列舉:三氟化硼-單乙胺錯合物、三氟化硼-哌啶錯合物、三氟化硼-三乙胺錯合物、三氟化硼-苯胺錯合物、三氟化硼-二乙胺錯合物、三氟化硼-異丙胺錯合物、三氟化硼-氯苯胺錯合物、三氟化硼-苄胺錯合物及三氟化硼-單戊胺錯合物等。 就即便於將導電材料放置一定期間之情形時,亦於電極上進一步有效率地配置導電性粒子之觀點而言,上述三氟化硼錯合物較佳為三氟化硼-單乙胺錯合物。 於上述導電材料100重量%中,上述三氟化硼錯合物之含量較佳為0.1重量%以上,更佳為0.2重量%以上,且較佳為1.5重量%以下,更佳為1.0重量%以下。若上述三氟化硼錯合物之含量為上述下限以上及上述上限以下,則即便於將導電材料放置一定期間之情形時,亦可於電極上進一步有效率地配置導電性粒子,容易於電極間配置較多之導電性粒子中之焊料,導通可靠性變得更高。 (助焊劑) 上述導電材料較佳為包含助焊劑。藉由使用助焊劑,可將導電性粒子中之焊料更有效地配置於電極上。該助焊劑並無特別限定。作為助焊劑,可使用焊接等中一般使用之助焊劑。 作為上述助焊劑,例如可列舉:氯化鋅、氯化鋅與無機鹵化物之混合物、氯化鋅與無機酸之混合物、熔融鹽、磷酸、磷酸之衍生物、有機鹵化物、肼、有機酸及松脂等。上述助焊劑可僅使用1種,亦可併用2種以上。 作為上述熔融鹽,可列舉氯化銨等。作為上述有機酸,可列舉:乳酸、檸檬酸、硬脂酸、麩胺酸、蘋果酸及戊二酸等。作為上述松脂,可列舉活化松脂及非活化松脂等。上述助焊劑較佳為具有2個以上之羧基之有機酸、或松脂。上述助焊劑可為具有2個以上之羧基之有機酸,亦可為松脂。藉由使用具有2個以上之羧基之有機酸、或松脂,電極間之導通可靠性變得更高。 上述松脂係以松香酸作為主成分之松香類。上述助焊劑較佳為松香類,更佳為松香酸。藉由使用該較佳之助焊劑,電極間之導通可靠性變得更高。 上述助焊劑之活性溫度(熔點)較佳為50℃以上,更佳為70℃以上,進而較佳為80℃以上,且較佳為200℃以下,更佳為190℃以下,進一步較佳為160℃以下,進而較佳為150℃以下,更進一步較佳為140℃以下。若上述助焊劑之活性溫度為上述下限以上及上述上限以下,則更有效地發揮助焊劑效果,導電性粒子中之焊料進一步有效率地配置於電極上。上述助焊劑之活性溫度(熔點)較佳為80℃以上且190℃以下。上述助焊劑之活性溫度(熔點)尤佳為80℃以上且140℃以下。 作為助焊劑之活性溫度(熔點)為80℃以上且190℃以下之上述助焊劑,可列舉:丁二酸(熔點186℃)、戊二酸(熔點96℃)、己二酸(熔點152℃)、庚二酸(熔點104℃)、辛二酸(熔點142℃)等二羧酸、苯甲酸(熔點122℃)及蘋果酸(熔點130℃)等。 又,上述助焊劑之沸點較佳為200℃以下。 上述助焊劑較佳為藉由加熱而釋出陽離子之助焊劑。藉由使用利用加熱而釋出陽離子之助焊劑,可將導電性粒子中之焊料進一步有效率地配置於電極上。 作為上述藉由加熱而釋出陽離子之助焊劑,可列舉上述熱陽離子起始劑(熱陽離子硬化劑)。 上述助焊劑進而較佳為酸化合物與鹼化合物之鹽。上述酸化合物較佳為具有清洗金屬之表面之效果,上述鹼化合物較佳為具有中和上述酸化合物之作用。上述助焊劑較佳為上述酸化合物與上述鹼化合物之中和反應物。上述助焊劑可僅使用1種,亦可併用2種以上。 上述助焊劑之熔點較佳為60℃以上,更佳為80℃以上。若上述助焊劑之熔點為上述下限以上,則上述助焊劑之保存穩定性變得更高。 就將導電性粒子中之焊料進一步有效率地配置於電極上之觀點而言,上述助焊劑之熔點較佳為低於上述導電性粒子中之焊料之熔點,更佳為低5℃以上,進而較佳為低10℃以上。但是,上述助焊劑之熔點可高於上述導電性粒子中之焊料之熔點。通常,上述導電材料之使用溫度係上述導電性粒子中之焊料之熔點以上,若上述助焊劑之熔點為上述導電材料之使用溫度以下,則即便上述助焊劑之熔點高於上述導電性粒子中之焊料之熔點,上述助焊劑亦可充分地發揮作為助焊劑之性能。例如,於導電材料之使用溫度為150℃以上,包含導電性粒子中之焊料(Sn42Bi58:熔點139℃)、及作為蘋果酸與苄胺之鹽之助焊劑(熔點146℃)之導電材料中,上述作為蘋果酸與苄胺之鹽之助焊劑充分地表現出助焊劑作用。 就將導電性粒子中之焊料進一步有效率地配置於電極上之觀點而言,上述助焊劑之熔點較佳為低於上述硬化性化合物之反應開始溫度,更佳為低5℃以上,進而較佳為低10℃以上。 上述酸化合物較佳為具有羧基之有機化合物。作為上述酸化合物,可列舉:作為脂肪族系羧酸之丙二酸、丁二酸、戊二酸、己二酸、庚二酸、辛二酸、壬二酸、癸二酸、檸檬酸、蘋果酸;作為環狀脂肪族羧酸之環己基羧酸、1,4-環己基二羧酸;作為芳香族羧酸之間苯二甲酸、對苯二甲酸、偏苯三甲酸及乙二胺四乙酸等。上述酸化合物較佳為戊二酸、壬二酸或蘋果酸。 上述鹼化合物較佳為具有胺基之有機化合物。作為上述鹼化合物,可列舉:二乙醇胺、三乙醇胺、甲基二乙醇胺、乙基二乙醇胺、環己胺、二環己胺、苄胺、二苯甲基胺、2-甲基苄胺、3-甲基苄胺、4-第三丁基苄胺、N-甲基苄胺、N-乙基苄胺、N-苯基苄胺、N-第三丁基苄胺、N-異丙基苄胺、N,N-二甲基苄胺、咪唑化合物及三唑化合物。上述鹼化合物較佳為苄胺、2-甲基苄胺或3-甲基苄胺。 上述助焊劑可分散於導電材料中,亦可附著於導電性粒子之表面上。就更有效地提高助焊劑效果之觀點而言,上述助焊劑較佳為附著於導電性粒子之表面上。 就使導電材料之保存穩定性更高之觀點;及即便於將導電材料放置一定期間之情形時,亦發揮優異之焊料凝集性,將導電性粒子中之焊料進一步有效率地配置於電極上之觀點而言,上述助焊劑較佳為於25℃下為固體,較佳為於25℃之導電材料中,上述助焊劑以固體之形式分散。 於上述導電材料100重量%中,上述助焊劑之含量較佳為0.1重量%以上,且較佳為20重量%以下,更佳為10重量%以下。若助焊劑之含量為上述下限以上及上述上限以下,則更不易於焊料及電極之表面形成氧化被膜,進而,可更有效地去除形成於焊料及電極之表面之氧化被膜。 (填料) 於上述導電材料中,可添加填料。填料可為有機填料,亦可為無機填料。藉由添加填料,可使導電性粒子均勻地凝集於基板之所有電極上。 上述導電材料較佳為不包含上述填料,或者以5重量%以下包含上述填料。於使用結晶性熱硬化性化合物之情形時,填料之含量越少,則焊料越容易於電極上移動。 於上述導電材料100重量%中,上述填料之含量較佳為0重量%(不含有)以上,且較佳為5重量%以下,更佳為2重量%以下,進而較佳為1重量%以下。若上述填料之含量為上述下限以上及上述上限以下,則導電性粒子進一步有效率地配置於電極上。 (其他成分) 上述導電材料可視需要包含例如填充劑、增量劑、軟化劑、塑化劑、聚合觸媒、硬化觸媒、著色劑、抗氧化劑、熱穩定劑、光穩定劑、紫外線吸收劑、潤滑劑、防靜電劑及阻燃劑等各種添加劑。 (連接構造體及連接構造體之製造方法) 本發明之連接構造體包括:第1連接對象構件,其於表面具有至少1個第1電極;第2連接對象構件,其於表面具有至少1個第2電極;及連接部,其將上述第1連接對象構件與上述第2連接對象構件連接。於本發明之連接構造體中,上述連接部之材料為上述導電材料。於本發明之連接構造體中,上述第1電極與上述第2電極係藉由上述連接部中之焊料部而電性連接。 本發明之連接構造體之製造方法包括如下步驟:使用上述導電材料,將上述導電材料配置於表面具有至少1個第1電極之第1連接對象構件之表面上。本發明之連接構造體之製造方法包括如下步驟:將表面具有至少1個第2電極之第2連接對象構件以上述第1電極與上述第2電極對向之方式配置於上述導電材料之與上述第1連接對象構件側相反之表面上。本發明之連接構造體之製造方法包括如下步驟:藉由將上述導電材料加熱至上述導電性粒子中之焊料之熔點以上,而藉由上述導電材料形成將上述第1連接對象構件與上述第2連接對象構件連接之連接部,且藉由上述連接部中之焊料部將上述第1電極與上述第2電極電性連接。 於本發明之連接構造體及上述連接構造體之製造方法中,由於使用特定之導電材料,故而導電性粒子中之焊料容易聚集於第1電極與第2電極之間,可將焊料有效率地配置於電極(線)上。又,可使焊料之一部分不易配置於未形成電極之區域(間隙),且使配置於未形成電極之區域之焊料之量相當少。因此,可提高第1電極與第2電極之間之導通可靠性。而且,可防止不應當連接之橫向鄰接之電極間之電性連接,可提高絕緣可靠性。 又,為了將導電性粒子中之焊料有效率地配置於電極上,且使配置於未形成電極之區域之焊料之量相當少,較佳為上述導電材料使用導電膏,而並非導電膜。 電極間之焊料部之厚度較佳為10 μm以上,更佳為20 μm以上,且較佳為100 μm以下,更佳為80 μm以下。電極之表面上之焊料潤濕面積(露出電極之面積100%中之焊料所接觸之面積)較佳為50%以上,更佳為60%以上,進而較佳為70%以上,且較佳為100%以下。 以下,一面參照圖式,一面說明本發明之具體之實施形態。 圖1係模式性地表示使用本發明之一實施形態之導電材料而獲得之連接構造體的剖視圖。 圖1所示之連接構造體1包括第1連接對象構件2、第2連接對象構件3、及將第1連接對象構件2與第2連接對象構件3連接之連接部4。連接部4係藉由上述導電材料形成。於本實施形態中,導電材料包含導電性粒子、硬化性化合物及三氟化硼錯合物。於本實施形態中,作為上述硬化性化合物,包含熱硬化性化合物。於本實施形態中,作為上述導電性粒子,包含焊料粒子。將上述熱硬化性化合物及三氟化硼錯合物稱為熱硬化性成分(硬化性成分)。 連接部4具有:焊料部4A,其係複數個焊料粒子聚集並相互接合而成;及硬化物部4B,其係熱硬化性成分進行熱硬化而成。 第1連接對象構件2係於表面(上表面)具有複數個第1電極2a。第2連接對象構件3係於表面(下表面)具有複數個第2電極3a。第1電極2a與第2電極3a係藉由焊料部4A而電性連接。因此,第1連接對象構件2與第2連接對象構件3係藉由焊料部4A而電性連接。再者,於連接部4中,於與聚集於第1電極2a與第2電極3a之間之焊料部4A不同之區域(硬化物部4B部分),不存在焊料。於與焊料部4A不同之區域(硬化物部4B部分),不存在與焊料部4A分離之焊料。再者,若為少量,則可於與聚集於第1電極2a與第2電極3a之間之焊料部4A不同之區域(硬化物部4B部分)存在焊料。 如圖1所示,於連接構造體1中,複數個焊料粒子聚集於第1電極2a與第2電極3a之間,複數個焊料粒子熔融後,焊料粒子之熔融物於在電極之表面潤濕擴散後固化,形成焊料部4A。因此,焊料部4A與第1電極2a、以及焊料部4A與第2電極3a之連接面積變大。即,藉由使用焊料粒子,與使用導電部之外表面部分為鎳、金或銅等金屬之導電性粒子之情形相比,焊料部4A與第1電極2a、以及焊料部4A與第2電極3a之接觸面積變大。因此,連接構造體1之導通可靠性及連接可靠性變高。再者,導電材料亦可包含助焊劑。於使用助焊劑之情形時,藉由加熱,一般助焊劑逐漸失活。 再者,於圖1所示之連接構造體1中,焊料部4A全部位於第1、第2電極2a、3a間之對向之區域。圖3所示之變化例之連接構造體1X僅連接部4X與圖1所示之連接構造體1不同。連接部4X具有焊料部4XA及硬化物部4XB。如連接構造體1X般,焊料部4XA之大部分位於第1、第2電極2a、3a之對向之區域,焊料部4XA之一部分亦可自第1、第2電極2a、3a之對向之區域向側方溢出。自第1、第2電極2a、3a之對向之區域向側方溢出之焊料部4XA係焊料部4XA之一部分,並非自焊料部4XA分離之焊料。再者,於本實施形態中,可減少自焊料部分離之焊料之量,但亦可於硬化物部中存在自焊料部分離之焊料。 若減少焊料粒子之使用量,則容易獲得連接構造體1。若增多焊料粒子之使用量,則容易獲得連接構造體1X。 較佳為於沿上述第1電極、上述連接部及上述第2電極之積層方向觀察上述第1電極與上述第2電極之相互對向之部分時,於上述第1電極與上述第2電極之相互對向之部分之面積100%中之50%以上配置有上述連接部中之焊料部。更佳為於沿上述第1電極、上述連接部及上述第2電極之積層方向觀察上述第1電極與上述第2電極之相互對向之部分時,於上述第1電極與上述第2電極之相互對向之部分之面積100%中之60%以上配置有上述連接部中之焊料部。進而較佳為於沿上述第1電極、上述連接部及上述第2電極之積層方向觀察上述第1電極與上述第2電極之相互對向之部分時,於上述第1電極與上述第2電極之相互對向之部分之面積100%中之70%以上配置有上述連接部中之焊料部。尤佳為於沿上述第1電極、上述連接部及上述第2電極之積層方向觀察上述第1電極與上述第2電極之相互對向之部分時,於上述第1電極與上述第2電極之相互對向之部分之面積100%中之80%以上配置有上述連接部中之焊料部。最佳為於沿上述第1電極、上述連接部及上述第2電極之積層方向觀察上述第1電極與上述第2電極之相互對向之部分時,於上述第1電極與上述第2電極之相互對向之部分之面積100%中之90%以上配置有上述連接部中之焊料部。藉由滿足上述較佳之態樣,可進一步提高導通可靠性。 其次,說明使用本發明之一實施形態之導電材料製造連接構造體1之方法之一例。 首先,準備於表面(上表面)具有第1電極2a之第1連接對象構件2。其次,如圖2(a)所示,於第1連接對象構件2之表面上配置包含熱硬化性成分11B及複數個焊料粒子11A之導電材料11(第1步驟)。導電材料11包含熱硬化性化合物及三氟化硼錯合物作為熱硬化性成分11B。 於第1連接對象構件2之設置有第1電極2a之表面上配置導電材料11。於配置導電材料11後,焊料粒子11A配置於第1電極2a(線)上、及未形成第1電極2a之區域(間隙)上兩者。 作為導電材料11之配置方法,並無特別限定,可列舉:藉由點膠機之塗佈、網版印刷、及藉由噴墨裝置之噴出等。 又,準備於表面(下表面)具有第2電極3a之第2連接對象構件3。其次,如圖2(b)所示,於第1連接對象構件2之表面上之導電材料11中,於導電材料11之與第1連接對象構件2側相反之一側之表面上配置第2連接對象構件3(第2步驟)。於導電材料11之表面上,自第2電極3a側配置第2連接對象構件3。此時,使第1電極2a與第2電極3a對向。 其次,將導電材料11加熱至焊料粒子11A之熔點以上(第3步驟)。較佳為將導電材料11加熱至熱硬化性成分11B(熱硬化性化合物)之硬化溫度以上。於該加熱時,存在於未形成電極之區域之焊料粒子11A聚集於第1電極2a與第2電極3a之間(自凝集效果)。於使用導電膏而非導電膜之情形時,焊料粒子11A有效地聚集於第1電極2a與第2電極3a之間。又,焊料粒子11A熔融,並相互接合。又,熱硬化性成分11B進行熱硬化。其結果為,如圖2(c)所示,藉由導電材料11形成將第1連接對象構件2與第2連接對象構件3連接之連接部4。藉由導電材料11形成連接部4,藉由複數個焊料粒子11A進行接合而形成焊料部4A,藉由熱硬化性成分11B進行熱硬化而形成硬化物部4B。硬化物部4B係熱硬化性化合物單獨藉由三氟化硼錯合物進行硬化而成之硬化物。只要焊料粒子11A充分地移動,則於未位於第1電極2a與第2電極3a之間之焊料粒子11A之移動開始後至焊料粒子11A向第1電極2a與第2電極3a之間之移動完成之前,亦可不將溫度保持為一定。 於本實施形態中,導電材料11具有上述構成。於導電材料11配置於第1連接對象構件2之設置有第1電極2a之表面上後,即便保持圖2(a)之狀態一定期間,於在第3步驟中加熱導電材料11時,存在於未形成電極之區域之焊料粒子11A亦可無任何問題地聚集於第1電極2a與第2電極3a之間。 再者,於使用不具有上述構成之導電材料之情形時,尤其於包含熱硬化劑之情形時,若於將導電材料配置於第1連接對象構件之設置有第1電極之表面上後保持圖2(a)之狀態一定期間,則焊料粒子之表面會因熱硬化劑而被氧化等。因此,有於在第3步驟中加熱導電材料時,存在於未形成電極之區域之焊料粒子無法充分地聚集於第1電極與第2電極之間,焊料粒子殘留於硬化物部中之情形。因此,有無法充分地提高電極間之導通可靠性之情形。而且,有不應當連接之橫向鄰接之電極間電性連接而無法充分地提高絕緣可靠性之情形。 於本實施形態中,較佳為於上述第2步驟及上述第3步驟中,不進行加壓。於此情形時,對導電材料11施加第2連接對象構件3之重量。因此,於形成連接部4時,焊料粒子11A有效地聚集於第1電極2a與第2電極3a之間。再者,若於上述第2步驟及上述第3步驟中之至少一者中進行加壓,則阻礙焊料粒子欲聚集於第1電極與第2電極之間之作用之傾向變高。 又,於本實施形態中,未進行加壓,故而於將第2連接對象構件重疊於塗佈有導電材料之第1連接對象構件時,即便於第1電極與第2電極之對準偏移之狀態下,亦可修正該偏移,使第1電極與第2電極連接(自對準效果)。其原因在於,於第1電極與第2電極之間之焊料與導電材料之其他成分接觸之面積成為最小的情形時,於第1電極與第2電極之間自凝集之熔融之焊料係能量變得穩定,故而施加至作為成為該最小之面積之連接構造之對準之連接構造的力發揮作用。此時,較理想為導電材料未硬化,且於該溫度、時間下,導電材料之導電性粒子以外之成分之黏度足夠低。 焊料之熔點下之導電材料之黏度較佳為50 Pa・s以下,更佳為10 Pa・s以下,進而較佳為1 Pa・s以下,且較佳為0.1 Pa・s以上,更佳為0.2 Pa・s以上。若上述黏度為上述上限以下,則可有效率地使導電性粒子中之焊料凝集,若上述黏度為上述下限以上,則可抑制連接部之孔隙,抑制導電材料向連接部以外之溢出。 焊料之熔點下之導電材料之黏度係以如下之方式進行測定。 上述焊料之熔點下之導電材料之黏度可使用STRESSTECH(EOLOGICA公司製造)等,於應變控制1 rad、頻率1 Hz、升溫速度20℃/分鐘、測定溫度範圍25~200℃(但是,於焊料之熔點超過200℃之情形時,將溫度上限設為焊料之熔點)之條件下進行測定。根據測定結果,評價焊料之熔點(℃)下之黏度。 如此,可獲得圖1所示之連接構造體1。再者,上述第2步驟與上述第3步驟可連續進行。又,可於進行上述第2步驟後,使所獲得之第1連接對象構件2、導電材料11及第2連接對象構件3之積層體移動至加熱部,進行上述第3步驟。為了進行上述加熱,可於加熱構件上配置上述積層體,亦可於加熱之空間內配置上述積層體。 上述第3步驟中之上述加熱溫度較佳為140℃以上,更佳為160℃以上,且較佳為450℃以下,更佳為250℃以下,進而較佳為200℃以下。 作為上述第3步驟中之加熱方法,可列舉:使用回焊爐或者使用烘箱,將連接構造體整體加熱至導電性粒子中之焊料之熔點以上及熱硬化性成分之硬化溫度以上的方法;或僅局部加熱連接構造體之連接部之方法。 作為局部進行加熱之方法中使用之器具,可列舉:加熱板、賦予熱風之熱風槍、烙鐵及紅外線加熱器等。 又,於藉由加熱板局部進行加熱時,較佳為連接部正下方藉由導熱性較高之金屬形成加熱板上表面,其他不佳為進行加熱之部位藉由氟樹脂等導熱性較低之材質形成加熱板上表面。 上述第1、第2連接對象構件並無特別限定。作為上述第1、第2連接對象構件,具體而言,可列舉:半導體晶片、半導體封裝體、LED晶片、LED封裝體、電容器及二極體等電子零件、以及樹脂膜、印刷基板、軟性印刷基板、軟性扁平電纜、剛性軟性基板、玻璃環氧基板及玻璃基板等電路基板等電子零件等。上述第1、第2連接對象構件較佳為電子零件。 較佳為上述第1連接對象構件及上述第2連接對象構件中之至少一者為樹脂膜、軟性印刷基板、軟性扁平電纜或剛性軟性基板。較佳為上述第2連接對象構件為樹脂膜、軟性印刷基板、軟性扁平電纜或剛性軟性基板。樹脂膜、軟性印刷基板、軟性扁平電纜及剛性軟性基板具有柔軟性較高,且相對輕量之性質。於在此種連接對象構件之連接中使用導電膜之情形時,有焊料難以聚集於電極上之傾向。相對於此,藉由使用導電膏,即便使用樹脂膜、軟性印刷基板、軟性扁平電纜或剛性軟性基板,亦使焊料有效率地聚集於電極上,藉此可充分地提高電極間之導通可靠性。於使用樹脂膜、軟性印刷基板、軟性扁平電纜或剛性軟性基板之情形時,與使用半導體晶片等其他連接對象構件之情形相比,更有效地獲得因不進行加壓所帶來之電極間之導通可靠性之提昇效果。 作為設置於上述連接對象構件之電極,可列舉:金電極、鎳電極、錫電極、鋁電極、銅電極、鉬電極、銀電極、SUS電極及鎢電極等金屬電極。於上述連接對象構件為軟性印刷基板之情形時,上述電極較佳為金電極、鎳電極、錫電極、銀電極或銅電極。於上述連接對象構件為玻璃基板之情形時,上述電極較佳為鋁電極、銅電極、鉬電極、銀電極或鎢電極。再者,於上述電極為鋁電極之情形時,可為僅藉由鋁所形成之電極,亦可為於金屬氧化物層之表面積層鋁層而成之電極。作為上述金屬氧化物層之材料,可列舉:摻雜有三價金屬元素之氧化銦;及摻雜有三價金屬元素之氧化鋅等。作為上述三價金屬元素,可列舉:Sn、Al及Ga等。 以下,列舉實施例及比較例,具體地說明本發明。本發明並不僅限定於以下之實施例。 熱硬化性成分(熱硬化性化合物): 陶氏化學公司製造之「D.E.N-431」,環氧樹脂 三菱化學公司製造之「jER 152」,環氧樹脂 熱硬化性成分(熱硬化劑): 澱化學公司製造之「TMTP」,三羥甲基丙烷三硫代丙酸酯 日立化成公司製造之「HN-5500」,3或4-甲基-六氫鄰苯二甲酸酐 三氟化硼錯合物: Stella Chemifa公司製造之「BF3-MEA」,三氟化硼-單乙胺錯合物 Stella Chemifa公司製造之「BF3-PIP」,三氟化硼-哌啶錯合物 「BF3-TEA」,三氟化硼-三乙胺錯合物 (「BF3-TEA」之合成) 使三乙胺與BF3-乙醚於醚中進行反應,藉由減壓蒸餾進行精製,藉此獲得三氟化硼-三乙胺錯合物。 咪唑化合物: 四國化成工業公司製造之「2PZ-CN」,1-氰基乙基-2-苯基咪唑 四國化成工業公司製造之「2E4MZ」,2-乙基-4-甲基咪唑 助焊劑: 和光純藥工業公司製造之「戊二酸」與「苄胺」之1:1莫耳比下之中和反應中所形成的鹽 導電性粒子: 三井金屬礦業公司製造之焊料粒子「Sn42Bi58(DS-10)」 (實施例1~4及比較例1~3) (1)各向異性導電膏之製作 以下述表1所示之調配量調配下述表1所示之成分,獲得各向異性導電膏。 (2)第1連接構造體(L/S=50 μm/50 μm)之製作 (條件A下之連接構造體之具體之製作方法) 使用剛製作後之各向異性導電膏,以如下之方式製作第1連接構造體。 準備於上表面具有L/S為50 μm/50 μm、電極長度3 mm之銅電極圖案(銅電極之厚度12 μm)之玻璃環氧基板(FR-4基板)(第1連接對象構件)。又,準備於下表面具有L/S為50 μm/50 μm、電極長度3 mm之銅電極圖案(銅電極之厚度12 μm)之軟性印刷基板(第2連接對象構件)。 玻璃環氧基板與軟性印刷基板之重疊面積設為1.5 cm×3 mm,所連接之電極數設為75對。 於上述玻璃環氧基板之上表面,於玻璃環氧基板之電極上,以成為厚度100 μm之方式,使用金屬遮罩,藉由網版印刷而塗敷剛製作後之各向異性導電膏,形成各向異性導電膏層。其次,於各向異性導電膏層之上表面,以電極彼此對向之方式積層上述軟性印刷基板。此時,不進行加壓。對各向異性導電膏層施加上述軟性印刷基板之重量。其後,一面以各向異性導電膏層之溫度成為190℃之方式進行加熱,一面使焊料熔融,且使各向異性導電膏層於190℃下硬化10秒,獲得第1連接構造體。 (條件B下之連接構造體之具體之製作方法) 進行以下之變更,除此以外,以與條件A相同之方式,製作第1連接構造體。 自條件A向條件B之變更點: 於玻璃環氧基板之上表面,於玻璃環氧基板之電極上,以成為厚度100 μm之方式,使用金屬遮罩,藉由網版印刷而塗敷剛製作後之各向異性導電膏,形成各向異性導電膏層後,於大氣環境下,於23℃、50% RH之條件下放置12小時。放置後,於各向異性導電膏層之上表面,以電極彼此對向之方式積層軟性印刷基板。 (3)第2連接構造體(L/S=75 μm/75 μm)之製作 準備於上表面具有L/S為75 μm/75 μm、電極長度3 mm之銅電極圖案(銅電極之厚度12 μm)之玻璃環氧基板(FR-4基板)(第1連接對象構件)。又,準備於下表面具有L/S為75 μm/75 μm、電極長度3 mm之銅電極圖案(銅電極之厚度12 μm)之軟性印刷基板(第2連接對象構件)。 使用L/S不同之上述玻璃環氧基板及軟性印刷基板,除此以外,以與第1連接構造體之製作相同之方式,獲得條件A及B下之第2連接構造體。 (4)第3連接構造體(L/S=100 μm/100 μm)之製作 準備於上表面具有L/S為100 μm/100 μm、電極長度3 mm之銅電極圖案(銅電極之厚度12 μm)之玻璃環氧基板(FR-4基板)(第1連接對象構件)。又,準備於下表面具有L/S為100 μm/100 μm、電極長度3 mm之銅電極圖案(銅電極之厚度12 μm)之軟性印刷基板(第2連接對象構件)。 使用L/S不同之上述玻璃環氧基板及軟性印刷基板,除此以外,以與第1連接構造體之製作相同之方式,獲得條件A及B下之第3連接構造體。 (評價) (1)黏度上升率(η2/η1) 測定剛製作後之各向異性導電膏之25℃下之黏度(η1)。又,將剛製作後之各向異性導電膏於常溫下放置24小時,測定放置後之各向異性導電膏之25℃下之黏度(η2)。上述黏度係使用E型黏度計(東機產業公司製造之「TVE22L」),於25℃及5 rpm之條件下進行測定。根據黏度之測定值,算出黏度上升率(η2/η1)。藉由下述基準判定黏度上升率(η2/η1)。 [黏度上升率(η2/η1)之判定基準] ○:黏度上升率(η2/η1)為2以下 ×:黏度上升率(η2/η1)超過2 (2)焊料部之厚度 對所獲得之第1連接構造體進行剖面觀察,藉此評價位於上下之電極間之焊料部之厚度。 (3)電極上之焊料之配置精度 於所獲得之第1、第2、第3連接構造體中,評價於沿第1電極、連接部及第2電極之積層方向觀察第1電極與第2電極之相互對向之部分時,第1電極與第2電極之相互對向之部分之面積100%中之配置有連接部中之焊料部之面積的比率X。藉由下述基準判定電極上之焊料之配置精度。 [電極上之焊料之配置精度之判定基準] ○○:比率X為70%以上 ○:比率X為60%以上且未達70% Δ:比率X為50%以上且未達60% ×:比率X未達50% (4)上下之電極間之導通可靠性 於所獲得之第1、第2、第3連接構造體(n=15個)中,分別藉由四端子法測定上下之電極間之每1個連接部位之連接電阻。算出連接電阻之平均值。再者,根據電壓=電流×電阻之關係,測定流通一定之電流時之電壓,藉此可求出連接電阻。藉由下述基準判定導通可靠性。 [導通可靠性之判定基準] ○○:連接電阻之平均值為50 mΩ以下 ○:連接電阻之平均值超過50 mΩ且為70 mΩ以下 Δ:連接電阻之平均值超過70 mΩ且為100 mΩ以下 ×:連接電阻之平均值超過100 mΩ,或者產生連接不良 (5)橫向鄰接之電極間之絕緣可靠性 於所獲得之第1、第2、第3連接構造體(n=15個)中,於85℃、濕度85%之環境中放置100小時後,對橫向鄰接之電極間施加5 V,於25處測定電阻值。藉由下述基準判定絕緣可靠性。 [絕緣可靠性之判定基準] ○○:連接電阻之平均值為107 Ω以上 ○:連接電阻之平均值為106 Ω以上且未達107 Ω Δ:連接電阻之平均值為105 Ω以上且未達106 Ω ×:連接電阻之平均值未達105 Ω (6)上下之電極間之位置偏移 於所獲得之第1、第2、第3連接構造體中,於沿第1電極、連接部及第2電極之積層方向觀察第1電極與第2電極之相互對向之部分時,觀察第1電極之中心線與第2電極之中心線是否一致,評價位置偏移之距離。藉由下述基準判定上下之電極間之位置偏移。 [上下之電極間之位置偏移之判定基準] ○○:位置偏移未達15 μm ○:位置偏移為15 μm以上且未達25 μm Δ:位置偏移為25 μm以上且未達40 μm ×:位置偏移為40 μm以上 (7)導電材料之變色 於所獲得之第1、第2、第3連接構造體中,藉由顯微鏡觀察各連接構造體之連接部是否變色,評價導電材料之變色。藉由下述基準判定導電材料之變色。 [導電材料之變色之判定基準] ○:連接部未變色 ×:連接部發生變色 將結果示於下述表1。 [表1]
Figure 106130769-A0304-0001
於除軟性印刷基板以外,亦使用樹脂膜、軟性扁平電纜及剛性軟性基板之情形時,可見相同之傾向。
1‧‧‧連接構造體1X‧‧‧連接構造體2‧‧‧第1連接對象構件2a‧‧‧第1電極3‧‧‧第2連接對象構件3a‧‧‧第2電極4‧‧‧連接部4X‧‧‧連接部4A‧‧‧焊料部4XA‧‧‧焊料部4B‧‧‧硬化物部4XB‧‧‧硬化物部11‧‧‧導電材料11A‧‧‧焊料粒子(導電性粒子)11B‧‧‧熱硬化性成分21‧‧‧導電性粒子(焊料粒子)31‧‧‧導電性粒子32‧‧‧基材粒子33‧‧‧導電部(具有焊料之導電部)33A‧‧‧第2導電部33B‧‧‧焊料部41‧‧‧導電性粒子42‧‧‧焊料部
圖1係模式性地表示使用本發明之一實施形態之導電材料而獲得之連接構造體的剖視圖。 圖2(a)~(c)係用以說明使用本發明之一實施形態之導電材料製造連接構造體之方法之一例之各步驟的剖視圖。 圖3係表示連接構造體之變化例之剖視圖。 圖4係表示可用於導電材料之導電性粒子之第1例之剖視圖。 圖5係表示可用於導電材料之導電性粒子之第2例之剖視圖。 圖6係表示可用於導電材料之導電性粒子之第3例之剖視圖。

Claims (10)

  1. 一種導電材料,其包含:於導電部之外表面部分具有焊料之複數個焊料粒子、硬化性化合物及三氟化硼錯合物,於導電材料100重量%中,上述焊料粒子之含量為50重量%以上且95重量%以下,且於導電材料100重量%中,上述硬化性化合物之含量為5重量%以上且50重量%以下。
  2. 如請求項1之導電材料,其中上述三氟化硼錯合物為三氟化硼-胺錯合物。
  3. 如請求項1或2之導電材料,其中於導電材料100重量%中,上述三氟化硼錯合物之含量為0.1重量%以上且1.5重量%以下。
  4. 如請求項1或2之導電材料,其25℃下之黏度為50Pa‧s以上且500Pa‧s以下。
  5. 如請求項1或2之導電材料,其中上述焊料粒子之平均粒徑為0.5μm以上且100μm以下。
  6. 如請求項1或2之導電材料,其係導電膏。
  7. 一種連接構造體,其包括:第1連接對象構件,其於表面具有至少1個第1電極;第2連接對象構件,其於表面具有至少1個第2電極;及連接部,其將上述第1連接對象構件與上述第2連接對象構件連接;上述連接部之材料係如請求項1至6中任一項之導電材料;且上述第1電極與上述第2電極係藉由上述連接部中之焊料部而電性連接。
  8. 如請求項7之連接構造體,其中於沿上述第1電極、上述連接部及上述第2電極之積層方向觀察上述第1電極與上述第2電極之相互對向之部分時,於上述第1電極與上述第2電極之相互對向之部分之面積100%中之50%以上配置有上述連接部中之焊料部。
  9. 一種連接構造體之製造方法,其包括如下步驟:使用如請求項1至6中任一項之導電材料,將上述導電材料配置於表面具有至少1個第1電極之第1連接對象構件之表面上;將表面具有至少1個第2電極之第2連接對象構件以上述第1電極與上述第2電極對向之方式配置於上述導電材料之與上述第1連接對象構件側相反之表面上;及藉由將上述導電材料加熱至上述焊料粒子中之焊料之熔點以上,而藉由上述導電材料形成將上述第1連接對象構件與上述第2連接對象構件連接之連接部,且藉由上述連接部中之焊料部將上述第1電極與上述第2電極電性連接。
  10. 如請求項9之連接構造體之製造方法,其獲得如下連接構造體:於沿上述第1電極、上述連接部及上述第2電極之積層方向觀察上述第1電極與上述第2電極之相互對向之部分時,於上述第1電極與上述第2電極之相互對向之部分之面積100%中之50%以上配置有上述連接部中之焊料部。
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JP2020100807A (ja) * 2018-12-20 2020-07-02 東洋アルミニウム株式会社 導電性接着剤、および導電性接着剤が用いられた回路基板
US11488841B2 (en) * 2019-02-20 2022-11-01 Electronics And Telecommunications Research Institute Method for manufacturing semiconductor package
CN115362601A (zh) * 2020-03-30 2022-11-18 昭和电工材料株式会社 黏合剂组合物及连接结构体
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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104718234A (zh) * 2013-01-17 2015-06-17 积水化学工业株式会社 电子部件用固化性组合物及连接结构体

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI228132B (en) * 2001-09-26 2005-02-21 Nof Corp Soldering flux composition and solder paste
JP3769688B2 (ja) 2003-02-05 2006-04-26 独立行政法人科学技術振興機構 端子間の接続方法及び半導体装置の実装方法
US20050217757A1 (en) * 2004-03-30 2005-10-06 Yoshihiro Miyano Preflux, flux, solder paste and method of manufacturing lead-free soldered body
CN102161873A (zh) * 2005-12-26 2011-08-24 日立化成工业株式会社 粘接剂组合物、电路连接材料以及电路构件的连接结构
JP4591399B2 (ja) * 2006-04-03 2010-12-01 パナソニック株式会社 部品接合方法ならびに部品接合構造
WO2008023452A1 (fr) 2006-08-25 2008-02-28 Sumitomo Bakelite Co., Ltd. Bande adhésive, structure de jonction, et ensemble semi-conducteur
US9566668B2 (en) * 2007-01-04 2017-02-14 Alpha Metals, Inc. Flux formulations
JP5363989B2 (ja) * 2007-10-22 2013-12-11 日本化学工業株式会社 被覆導電性粉体およびそれを用いた導電性接着剤。
KR101225497B1 (ko) * 2009-11-05 2013-01-23 (주)덕산테코피아 도전성 접착제와 그 제조 방법 및 이를 포함하는 전자 장치
US20130000964A1 (en) * 2010-04-22 2013-01-03 Hiroshi Kobayashi Anisotropic conductive material and connection structure
TWI496824B (zh) * 2010-05-21 2015-08-21 Taiwan Union Technology Corp 環氧樹脂組成物及由其製成的預浸材和印刷電路板
JP5900349B2 (ja) 2011-01-27 2016-04-06 日立化成株式会社 導電性接着剤組成物、接続体及び太陽電池モジュール
KR20130066929A (ko) * 2011-12-13 2013-06-21 한국전자통신연구원 패턴 형성 조성물 및 이를 이용한 패턴 형성 방법
JP6155651B2 (ja) * 2012-01-11 2017-07-05 日立化成株式会社 導電粒子、絶縁被覆導電粒子及び異方導電性接着剤
JP6447504B2 (ja) * 2013-10-04 2019-01-09 株式会社スリーボンド 導電性ペースト
JP6577867B2 (ja) * 2014-09-18 2019-09-18 積水化学工業株式会社 導電ペースト、接続構造体及び接続構造体の製造方法
JP6420626B2 (ja) * 2014-10-15 2018-11-07 京セラ株式会社 電子部品接着用導電性樹脂組成物
JP6588843B2 (ja) * 2015-02-19 2019-10-09 積水化学工業株式会社 接続構造体の製造方法
TWI696300B (zh) * 2016-03-15 2020-06-11 晶元光電股份有限公司 半導體裝置及其製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104718234A (zh) * 2013-01-17 2015-06-17 积水化学工业株式会社 电子部件用固化性组合物及连接结构体

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