TWI696520B - 板狀物的端面加工裝置 - Google Patents
板狀物的端面加工裝置 Download PDFInfo
- Publication number
- TWI696520B TWI696520B TW104125612A TW104125612A TWI696520B TW I696520 B TWI696520 B TW I696520B TW 104125612 A TW104125612 A TW 104125612A TW 104125612 A TW104125612 A TW 104125612A TW I696520 B TWI696520 B TW I696520B
- Authority
- TW
- Taiwan
- Prior art keywords
- rotating
- end surface
- whetstone
- plate
- outer peripheral
- Prior art date
Links
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/009—Tools not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014-160863 | 2014-08-06 | ||
JP2014160863A JP6609847B2 (ja) | 2014-08-06 | 2014-08-06 | 板状物の端面加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201628778A TW201628778A (zh) | 2016-08-16 |
TWI696520B true TWI696520B (zh) | 2020-06-21 |
Family
ID=55263881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW104125612A TWI696520B (zh) | 2014-08-06 | 2015-08-06 | 板狀物的端面加工裝置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6609847B2 (ja) |
KR (1) | KR102397586B1 (ja) |
CN (1) | CN106660188B (ja) |
TW (1) | TWI696520B (ja) |
WO (1) | WO2016021620A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6978724B2 (ja) * | 2017-09-12 | 2021-12-08 | 日本電気硝子株式会社 | 板ガラスの製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007044817A (ja) * | 2005-08-10 | 2007-02-22 | Tokyo Seimitsu Co Ltd | ウェーハ面取り装置、ウェーハ面取り用砥石、及びツルーイング砥石 |
TWI418442B (zh) * | 2005-05-27 | 2013-12-11 | Nippon Electric Glass Co | 玻璃基板的端面加工裝置及端面加工方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5154777B2 (ja) * | 2005-09-29 | 2013-02-27 | Hoya株式会社 | 研磨ブラシ、研磨方法、研磨装置及び磁気ディスク用ガラス基板の製造方法、並びに磁気ディスクの製造方法 |
JP4742845B2 (ja) * | 2005-12-15 | 2011-08-10 | 信越半導体株式会社 | 半導体ウエーハの面取り部の加工方法及び砥石の溝形状の修正方法 |
JP5305214B2 (ja) | 2006-10-06 | 2013-10-02 | 日本電気硝子株式会社 | 板ガラスの端面加工方法 |
KR20090063804A (ko) * | 2007-12-14 | 2009-06-18 | 주식회사 실트론 | 연삭 휠 트루잉 공구 및 그 제작방법, 이를 이용한 트루잉장치, 연삭 휠의 제작방법, 및 웨이퍼 에지 연삭장치 |
JP2010238302A (ja) * | 2009-03-31 | 2010-10-21 | Hoya Corp | 磁気ディスク用ガラス基板の製造方法及びそれに用いる電着砥石 |
JP2015006697A (ja) * | 2011-10-31 | 2015-01-15 | 旭硝子株式会社 | 板状物の加工装置及び加工方法 |
JP6238117B2 (ja) * | 2013-09-19 | 2017-11-29 | 旭硝子株式会社 | 板状体の加工方法 |
-
2014
- 2014-08-06 JP JP2014160863A patent/JP6609847B2/ja active Active
-
2015
- 2015-08-04 CN CN201580041709.9A patent/CN106660188B/zh active Active
- 2015-08-04 KR KR1020177001940A patent/KR102397586B1/ko active IP Right Grant
- 2015-08-04 WO PCT/JP2015/072152 patent/WO2016021620A1/ja active Application Filing
- 2015-08-06 TW TW104125612A patent/TWI696520B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI418442B (zh) * | 2005-05-27 | 2013-12-11 | Nippon Electric Glass Co | 玻璃基板的端面加工裝置及端面加工方法 |
JP2007044817A (ja) * | 2005-08-10 | 2007-02-22 | Tokyo Seimitsu Co Ltd | ウェーハ面取り装置、ウェーハ面取り用砥石、及びツルーイング砥石 |
Also Published As
Publication number | Publication date |
---|---|
JP2016036867A (ja) | 2016-03-22 |
KR102397586B1 (ko) | 2022-05-13 |
KR20170041700A (ko) | 2017-04-17 |
CN106660188A (zh) | 2017-05-10 |
CN106660188B (zh) | 2019-08-23 |
JP6609847B2 (ja) | 2019-11-27 |
TW201628778A (zh) | 2016-08-16 |
WO2016021620A1 (ja) | 2016-02-11 |
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