TWI696520B - 板狀物的端面加工裝置 - Google Patents

板狀物的端面加工裝置 Download PDF

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Publication number
TWI696520B
TWI696520B TW104125612A TW104125612A TWI696520B TW I696520 B TWI696520 B TW I696520B TW 104125612 A TW104125612 A TW 104125612A TW 104125612 A TW104125612 A TW 104125612A TW I696520 B TWI696520 B TW I696520B
Authority
TW
Taiwan
Prior art keywords
rotating
end surface
whetstone
plate
outer peripheral
Prior art date
Application number
TW104125612A
Other languages
English (en)
Chinese (zh)
Other versions
TW201628778A (zh
Inventor
伊吹真澄
市川耕二
Original Assignee
日商日本電氣硝子股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 日商日本電氣硝子股份有限公司 filed Critical 日商日本電氣硝子股份有限公司
Publication of TW201628778A publication Critical patent/TW201628778A/zh
Application granted granted Critical
Publication of TWI696520B publication Critical patent/TWI696520B/zh

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/009Tools not otherwise provided for
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D5/00Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
TW104125612A 2014-08-06 2015-08-06 板狀物的端面加工裝置 TWI696520B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-160863 2014-08-06
JP2014160863A JP6609847B2 (ja) 2014-08-06 2014-08-06 板状物の端面加工装置

Publications (2)

Publication Number Publication Date
TW201628778A TW201628778A (zh) 2016-08-16
TWI696520B true TWI696520B (zh) 2020-06-21

Family

ID=55263881

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104125612A TWI696520B (zh) 2014-08-06 2015-08-06 板狀物的端面加工裝置

Country Status (5)

Country Link
JP (1) JP6609847B2 (ja)
KR (1) KR102397586B1 (ja)
CN (1) CN106660188B (ja)
TW (1) TWI696520B (ja)
WO (1) WO2016021620A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6978724B2 (ja) * 2017-09-12 2021-12-08 日本電気硝子株式会社 板ガラスの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007044817A (ja) * 2005-08-10 2007-02-22 Tokyo Seimitsu Co Ltd ウェーハ面取り装置、ウェーハ面取り用砥石、及びツルーイング砥石
TWI418442B (zh) * 2005-05-27 2013-12-11 Nippon Electric Glass Co 玻璃基板的端面加工裝置及端面加工方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5154777B2 (ja) * 2005-09-29 2013-02-27 Hoya株式会社 研磨ブラシ、研磨方法、研磨装置及び磁気ディスク用ガラス基板の製造方法、並びに磁気ディスクの製造方法
JP4742845B2 (ja) * 2005-12-15 2011-08-10 信越半導体株式会社 半導体ウエーハの面取り部の加工方法及び砥石の溝形状の修正方法
JP5305214B2 (ja) 2006-10-06 2013-10-02 日本電気硝子株式会社 板ガラスの端面加工方法
KR20090063804A (ko) * 2007-12-14 2009-06-18 주식회사 실트론 연삭 휠 트루잉 공구 및 그 제작방법, 이를 이용한 트루잉장치, 연삭 휠의 제작방법, 및 웨이퍼 에지 연삭장치
JP2010238302A (ja) * 2009-03-31 2010-10-21 Hoya Corp 磁気ディスク用ガラス基板の製造方法及びそれに用いる電着砥石
JP2015006697A (ja) * 2011-10-31 2015-01-15 旭硝子株式会社 板状物の加工装置及び加工方法
JP6238117B2 (ja) * 2013-09-19 2017-11-29 旭硝子株式会社 板状体の加工方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI418442B (zh) * 2005-05-27 2013-12-11 Nippon Electric Glass Co 玻璃基板的端面加工裝置及端面加工方法
JP2007044817A (ja) * 2005-08-10 2007-02-22 Tokyo Seimitsu Co Ltd ウェーハ面取り装置、ウェーハ面取り用砥石、及びツルーイング砥石

Also Published As

Publication number Publication date
JP2016036867A (ja) 2016-03-22
KR102397586B1 (ko) 2022-05-13
KR20170041700A (ko) 2017-04-17
CN106660188A (zh) 2017-05-10
CN106660188B (zh) 2019-08-23
JP6609847B2 (ja) 2019-11-27
TW201628778A (zh) 2016-08-16
WO2016021620A1 (ja) 2016-02-11

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