TWI692622B - 光學濾波器及用於獲得沿著一光學路徑傳播之一光束之一光譜之方法 - Google Patents
光學濾波器及用於獲得沿著一光學路徑傳播之一光束之一光譜之方法 Download PDFInfo
- Publication number
- TWI692622B TWI692622B TW107135212A TW107135212A TWI692622B TW I692622 B TWI692622 B TW I692622B TW 107135212 A TW107135212 A TW 107135212A TW 107135212 A TW107135212 A TW 107135212A TW I692622 B TWI692622 B TW I692622B
- Authority
- TW
- Taiwan
- Prior art keywords
- filter
- optical
- downstream
- optical filter
- interference coating
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 207
- 238000000034 method Methods 0.000 title claims description 13
- 238000001228 spectrum Methods 0.000 title description 40
- 230000001902 propagating effect Effects 0.000 title description 4
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 107
- 238000000576 coating method Methods 0.000 claims description 56
- 239000011248 coating agent Substances 0.000 claims description 54
- 239000010409 thin film Substances 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 33
- 239000010408 film Substances 0.000 claims description 7
- 238000001914 filtration Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 abstract description 8
- 230000006870 function Effects 0.000 abstract description 7
- 230000001629 suppression Effects 0.000 abstract description 5
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 230000003595 spectral effect Effects 0.000 description 47
- 238000009826 distribution Methods 0.000 description 10
- 239000012634 fragment Substances 0.000 description 9
- 230000004044 response Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 230000002238 attenuated effect Effects 0.000 description 5
- 238000009501 film coating Methods 0.000 description 5
- 238000004088 simulation Methods 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 4
- 238000005253 cladding Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000000411 transmission spectrum Methods 0.000 description 4
- 241001507928 Aria Species 0.000 description 3
- 235000004494 Sorbus aria Nutrition 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000000295 emission spectrum Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000004382 potting Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 241000271566 Aves Species 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 235000000391 Lepidium draba Nutrition 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000000701 chemical imaging Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000004476 mid-IR spectroscopy Methods 0.000 description 1
- 238000000255 optical extinction spectrum Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0262—Constructional arrangements for removing stray light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1213—Filters in general, e.g. dichroic, band
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1213—Filters in general, e.g. dichroic, band
- G01J2003/1221—Mounting; Adjustment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1226—Interference filters
- G01J2003/1234—Continuously variable IF [CVIF]; Wedge type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
- G01J2003/2813—2D-array
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectrometry And Color Measurement (AREA)
- Optical Filters (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461934547P | 2014-01-31 | 2014-01-31 | |
| US61/934,547 | 2014-01-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201903368A TW201903368A (zh) | 2019-01-16 |
| TWI692622B true TWI692622B (zh) | 2020-05-01 |
Family
ID=53754601
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW107135212A TWI692622B (zh) | 2014-01-31 | 2015-01-30 | 光學濾波器及用於獲得沿著一光學路徑傳播之一光束之一光譜之方法 |
| TW104103308A TWI641813B (zh) | 2014-01-31 | 2015-01-30 | 光學濾波器及光譜儀及用於獲得沿著一光學路徑傳播之一光束之一光譜之方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104103308A TWI641813B (zh) | 2014-01-31 | 2015-01-30 | 光學濾波器及光譜儀及用於獲得沿著一光學路徑傳播之一光束之一光譜之方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US9625628B2 (enExample) |
| EP (1) | EP3100078B1 (enExample) |
| JP (3) | JP6490700B2 (enExample) |
| KR (2) | KR102351001B1 (enExample) |
| CN (2) | CN106461460B (enExample) |
| CA (1) | CA2938443C (enExample) |
| TW (2) | TWI692622B (enExample) |
| WO (1) | WO2015116756A1 (enExample) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9733124B2 (en) * | 2013-04-18 | 2017-08-15 | BMG LABTECH, GmbH | Microplate reader with linear variable filter |
| EP3100078B1 (en) | 2014-01-31 | 2023-10-11 | Viavi Solutions Inc. | An optical filter and spectrometer |
| JP6473367B2 (ja) * | 2015-03-31 | 2019-02-20 | 三菱重工業株式会社 | ガス分析システム |
| US9945790B2 (en) | 2015-08-05 | 2018-04-17 | Viavi Solutions Inc. | In-situ spectral process monitoring |
| US10048127B2 (en) | 2015-08-05 | 2018-08-14 | Viavi Solutions Inc. | Optical filter and spectrometer |
| US9939587B2 (en) | 2015-08-28 | 2018-04-10 | Samsung Electronics Co., Ltd. | On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer |
| DE102016218578A1 (de) * | 2016-09-27 | 2018-03-29 | Robert Bosch Gmbh | Optische Sensorvorrichtung, Verfahren zum Einstellen einer spektralen Auflösung einer optischen Sensorvorrichtung und spektrales Messverfahren |
| WO2018113938A1 (en) * | 2016-12-21 | 2018-06-28 | CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement | Optical system |
| US10983006B2 (en) | 2016-12-21 | 2021-04-20 | CSEM Centre Suisse d'Electronique et de Microtechnique SA—Recherche et Développement | Optical system |
| JP6806603B2 (ja) * | 2017-03-17 | 2021-01-06 | 倉敷紡績株式会社 | 分光フィルタおよび分光測光装置 |
| KR102364854B1 (ko) | 2017-07-26 | 2022-02-18 | 삼성전자주식회사 | 광 필터를 포함하는 광 분광기 |
| WO2019027724A1 (en) * | 2017-08-02 | 2019-02-07 | The Charles Stark Draper Laboratory, Inc. | OPTICAL FILTER PASSE-BANDE |
| CN111149347B (zh) * | 2017-10-11 | 2021-08-06 | 富士胶片株式会社 | 摄像装置及图像处理装置 |
| JP2021507230A (ja) * | 2017-12-13 | 2021-02-22 | トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング | 分光計装置および分光計システム |
| EP3724618B1 (en) * | 2017-12-13 | 2025-03-26 | trinamiX GmbH | Spectrometer device and system |
| JP2019132607A (ja) * | 2018-01-29 | 2019-08-08 | 株式会社Jvcケンウッド | 分光器 |
| US10962822B2 (en) * | 2018-06-06 | 2021-03-30 | Viavi Solutions Inc. | Liquid-crystal selectable bandpass filter |
| US12138014B2 (en) | 2018-08-08 | 2024-11-12 | Arizona Board Of Regents On Behalf Of The University Of Arizona | Apertureless confocal microscopy devices and methods |
| US12092836B2 (en) * | 2018-10-26 | 2024-09-17 | Viavi Solutions Inc. | Optical element and optical system |
| JP7276444B2 (ja) * | 2019-06-10 | 2023-05-18 | 株式会社ニコン | 計測装置 |
| US12259276B2 (en) * | 2019-07-16 | 2025-03-25 | Ams International Ag | Reconstructing light wavelength spectrum with thin-film device |
| CN114269245A (zh) * | 2019-08-20 | 2022-04-01 | 普罗菲尤萨股份有限公司 | 用于改善带外波长的光学抑制的光学滤波器设备、系统和方法 |
| CN110530782B (zh) * | 2019-09-25 | 2024-05-07 | 迈克医疗电子有限公司 | 消除旁瓣信号干扰的光学系统及方法 |
| TWI716205B (zh) | 2019-11-28 | 2021-01-11 | 財團法人工業技術研究院 | 功率量測保護方法與雷射保護系統 |
| US11226234B2 (en) * | 2020-01-22 | 2022-01-18 | Applied Materials, Inc. | Spectrum shaping devices and techniques for optical characterization applications |
| TWI730862B (zh) | 2020-08-03 | 2021-06-11 | 國立陽明交通大學 | 製造具厚度變化的薄膜的方法 |
| JP2022086227A (ja) * | 2020-11-30 | 2022-06-09 | セイコーエプソン株式会社 | 検出装置および測定装置 |
| CN114569099B (zh) | 2020-11-30 | 2025-08-05 | 精工爱普生株式会社 | 检测装置和测量装置 |
| CN113093322B (zh) * | 2021-03-30 | 2023-03-28 | 联合微电子中心有限责任公司 | Cmos图像传感器、干涉型滤光片及其制备方法 |
| TWI819414B (zh) * | 2021-11-24 | 2023-10-21 | 財團法人工業技術研究院 | 光電感測系統及其方法 |
| KR102694137B1 (ko) * | 2021-11-25 | 2024-08-13 | (주)티에스테크 | 선형 가변 밴드패스 필터를 이용한 유해물질 혼합가스의 검출 장치 |
| US12467790B2 (en) | 2022-02-18 | 2025-11-11 | Oto Photonics Inc. | Spectrometer |
| WO2024261151A1 (en) * | 2023-06-23 | 2024-12-26 | Karlsruher Institut für Technologie | Method of fabricating continuously variable optical filters via inkjet printing |
| CN119355942B (zh) * | 2024-12-26 | 2025-03-28 | 苏州镁伽科技有限公司 | 一种光源耦合系统、方法、设备及存储介质 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5784158A (en) * | 1995-11-22 | 1998-07-21 | Lastek Laboratories Pty. Ltd. | Broad spectrum spectrometer apparatus |
| US6700690B1 (en) * | 2000-10-02 | 2004-03-02 | Ocean Optics, Inc. | Tunable variable bandpass optical filter |
| US20080285165A1 (en) * | 2007-05-14 | 2008-11-20 | Wu Kuohua Angus | Thin film filter system and method |
| US20100208348A1 (en) * | 2008-08-22 | 2010-08-19 | Carestream Health, Inc. | Tunable spectral filtration device |
| CN102741671A (zh) * | 2009-11-30 | 2012-10-17 | Imec公司 | 用于光谱成像系统的集成电路 |
| US8476574B1 (en) * | 2011-03-31 | 2013-07-02 | Mutoh Industries Ltd. | Method of deconvolution of spectral data |
Family Cites Families (76)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4389096A (en) * | 1977-12-27 | 1983-06-21 | Matsushita Electric Industrial Co., Ltd. | Image display apparatus of liquid crystal valve projection type |
| JPS5760231A (en) | 1980-09-29 | 1982-04-12 | Hitachi Ltd | Multi-wavelength spectrometer |
| SE445389B (sv) | 1982-06-28 | 1986-06-16 | Geotronics Ab | Forfarande och anordning for att erhalla metdata fran en kemisk process |
| DE3719806A1 (de) | 1987-06-13 | 1988-12-22 | Basf Ag | Fiberoptischer sensor |
| DE69023875T2 (de) | 1989-09-29 | 1996-05-15 | Waters Investments Ltd | Vorrichtung zum Messen der Lichtabsorption oder Fluoreszenz in flüssigen Proben. |
| US5144498A (en) * | 1990-02-14 | 1992-09-01 | Hewlett-Packard Company | Variable wavelength light filter and sensor system |
| US5166755A (en) * | 1990-05-23 | 1992-11-24 | Nahum Gat | Spectrometer apparatus |
| US5218473A (en) * | 1990-07-06 | 1993-06-08 | Optical Coating Laboratories, Inc. | Leakage-corrected linear variable filter |
| US5272518A (en) | 1990-12-17 | 1993-12-21 | Hewlett-Packard Company | Colorimeter and calibration system |
| JPH04276527A (ja) | 1991-03-04 | 1992-10-01 | Nippon Steel Corp | 炉内温度計 |
| US5872655A (en) | 1991-07-10 | 1999-02-16 | Optical Coating Laboratory, Inc. | Monolithic linear variable filter and method of manufacture |
| JP3375147B2 (ja) * | 1992-05-26 | 2003-02-10 | 浜松ホトニクス株式会社 | 半導体光検出装置 |
| JPH10213482A (ja) * | 1997-01-28 | 1998-08-11 | Minolta Co Ltd | 色彩測定装置 |
| US5949082A (en) | 1998-03-23 | 1999-09-07 | Datex-Ohmeda, Inc. | Ceramic radiation source assembly with metalized seal for gas spectrometer |
| US6075611A (en) | 1998-05-07 | 2000-06-13 | Schlumberger Technology Corporation | Methods and apparatus utilizing a derivative of a fluorescene signal for measuring the characteristics of a multiphase fluid flow in a hydrocarbon well |
| JP3844886B2 (ja) * | 1998-07-28 | 2006-11-15 | 富士通株式会社 | 光フィルタの製造方法 |
| US6057925A (en) * | 1998-08-28 | 2000-05-02 | Optical Coating Laboratory, Inc. | Compact spectrometer device |
| CA2380392A1 (en) | 1999-07-16 | 2001-01-25 | Textron Systems Corporation | Integrated optics block for spectroscopy |
| US6753966B2 (en) | 2000-03-10 | 2004-06-22 | Textron Systems Corporation | Optical probes and methods for spectral analysis |
| US6836325B2 (en) | 1999-07-16 | 2004-12-28 | Textron Systems Corporation | Optical probes and methods for spectral analysis |
| WO2001036948A1 (en) * | 1999-11-19 | 2001-05-25 | Jobin Yvon, Inc. | Compact spectrofluorometer |
| US8565860B2 (en) | 2000-08-21 | 2013-10-22 | Biosensors International Group, Ltd. | Radioactive emission detector equipped with a position tracking system |
| JP2002247455A (ja) | 2001-02-20 | 2002-08-30 | Kureha Chem Ind Co Ltd | 撮像部材及び撮像装置 |
| JP2002268120A (ja) | 2001-03-14 | 2002-09-18 | Kureha Chem Ind Co Ltd | 光学的機能フィルター部材及び撮像装置 |
| US6785002B2 (en) * | 2001-03-16 | 2004-08-31 | Optical Coating Laboratory, Inc. | Variable filter-based optical spectrometer |
| JP2002277326A (ja) | 2001-03-19 | 2002-09-25 | Nireco Corp | 分光測光装置 |
| US7126682B2 (en) | 2001-04-11 | 2006-10-24 | Rio Grande Medical Technologies, Inc. | Encoded variable filter spectrometer |
| US6909548B2 (en) | 2001-06-13 | 2005-06-21 | Jds Uniphase Inc. | Optical filter using a linear variable filter with elliptical beam geometry |
| DE10204963A1 (de) | 2002-02-06 | 2003-08-14 | Isco Inc | Fotometrische Sonde für Untersuchungen an Flüssigkeiten sowie Verfahren hierfür |
| WO2003091676A1 (en) | 2002-04-23 | 2003-11-06 | Hiromu Maeda | Small packaged spectroscopic sensor unit |
| US6958693B2 (en) | 2002-05-24 | 2005-10-25 | Procter & Gamble Company | Sensor device and methods for using same |
| US20040004551A1 (en) | 2002-07-08 | 2004-01-08 | Early Gay M. | Fluid management system |
| US7061607B2 (en) | 2003-05-02 | 2006-06-13 | United Technologies Corporation | Engine spectrometer probe and method of use |
| KR20060015242A (ko) | 2003-06-13 | 2006-02-16 | 니뽄 덴신 덴와 가부시키가이샤 | 파장 가변 광 필터 |
| JP2005043092A (ja) | 2003-07-23 | 2005-02-17 | Kazumoto Onodera | 濁水特性測定装置、水質改良剤注入装置および浄水装置 |
| US7459713B2 (en) | 2003-08-14 | 2008-12-02 | Microptix Technologies, Llc | Integrated sensing system approach for handheld spectral measurements having a disposable sample handling apparatus |
| EP1709405A1 (en) * | 2003-09-26 | 2006-10-11 | Tidal Photonics, Inc. | Apparatus and methods relating to enhanced spectral measurement systems |
| DE112005000972B4 (de) * | 2004-04-30 | 2019-01-31 | X-Rite, Inc. | Farbmessgerät mit parallelen Detektoren |
| US7423258B2 (en) | 2005-02-04 | 2008-09-09 | Baker Hughes Incorporated | Method and apparatus for analyzing a downhole fluid using a thermal detector |
| US7460247B1 (en) * | 2005-05-23 | 2008-12-02 | Sandia Corporation | Full spectrum optical safeguard |
| US7420663B2 (en) | 2005-05-24 | 2008-09-02 | Bwt Property Inc. | Spectroscopic sensor on mobile phone |
| US7530265B2 (en) | 2005-09-26 | 2009-05-12 | Baker Hughes Incorporated | Method and apparatus for elemental analysis of a fluid downhole |
| US7372039B2 (en) | 2005-12-20 | 2008-05-13 | Ecolab Inc. | Near UV absorption spectrometer and method for using the same |
| FI20075622A0 (fi) | 2007-09-07 | 2007-09-07 | Valtion Teknillinen | Spektrometri ja menetelmä liikkuvan näytteen mittaukseen |
| JP2009145224A (ja) | 2007-12-14 | 2009-07-02 | Konica Minolta Sensing Inc | 測光装置 |
| JP2009271046A (ja) * | 2008-04-08 | 2009-11-19 | Sony Corp | 光計測装置及び計測用光学系 |
| JP2009276691A (ja) | 2008-05-16 | 2009-11-26 | Nippon Shinku Kogaku Kk | 光学素子及びその製造方法 |
| GB0809252D0 (en) | 2008-05-21 | 2008-06-25 | Ntnu Technology Transfer As | Underwater hyperspectral imaging |
| US8203769B2 (en) * | 2008-10-10 | 2012-06-19 | Xerox Corporation | In-line linear variable filter based spectrophotometer |
| US8314991B2 (en) * | 2008-10-31 | 2012-11-20 | Cpfilms Inc. | Variable transmission composite interference filter |
| US7987712B2 (en) | 2008-12-10 | 2011-08-02 | Rosemount Aerospace Inc. | High temperature seal assembly for optical sensor |
| US9207348B2 (en) | 2009-05-28 | 2015-12-08 | Westerngeco L.L.C | Collision avoidance for instrumented probes deployed from a seismic vessel |
| JP5736672B2 (ja) | 2010-06-03 | 2015-06-17 | 株式会社ニコン | 光学部品及び分光測光装置 |
| CN101900905A (zh) | 2010-07-20 | 2010-12-01 | 友达光电股份有限公司 | 触控式液晶显示器 |
| JP5810512B2 (ja) | 2010-11-12 | 2015-11-11 | セイコーエプソン株式会社 | 光学装置 |
| JP6074860B2 (ja) | 2011-04-27 | 2017-02-08 | 国立大学法人 岡山大学 | 細胞培養器 |
| JP5825349B2 (ja) | 2011-06-24 | 2015-12-02 | 株式会社島津製作所 | 分光装置 |
| JP5643172B2 (ja) * | 2011-10-17 | 2014-12-17 | 株式会社小松製作所 | 受光部のスペックル軽減機能を有する分光器 |
| CN104040309B (zh) | 2011-11-03 | 2019-06-07 | 威利食品有限公司 | 用于最终使用者食品分析的低成本光谱测定系统 |
| EP2773929B1 (en) | 2011-11-04 | 2023-12-13 | IMEC vzw | Spectral camera with mosaic of filters for each image pixel |
| US8861106B2 (en) * | 2011-12-02 | 2014-10-14 | Raytheon Company | Variable monochromatic uniform calibration source |
| US9013703B2 (en) | 2011-12-27 | 2015-04-21 | Horiba, Ltd. | Gas analyzing apparatus |
| CN103185637A (zh) | 2011-12-28 | 2013-07-03 | 上海丰汇医学科技有限公司 | 用于生化分析仪上的分光光度计的光学系统 |
| US9297749B2 (en) | 2012-03-27 | 2016-03-29 | Innovative Science Tools, Inc. | Optical analyzer for identification of materials using transmission spectroscopy |
| JP5988690B2 (ja) | 2012-05-18 | 2016-09-07 | 浜松ホトニクス株式会社 | 分光センサ |
| CN102944305B (zh) | 2012-11-12 | 2014-08-13 | 北京航空航天大学 | 一种快照式高通量的光谱成像方法和光谱成像仪 |
| WO2014089120A1 (en) | 2012-12-07 | 2014-06-12 | Integrated Plasmonics Corporation | Plasmonic spectroscopic sensor and cuvette therefor |
| CN103278861A (zh) | 2013-05-16 | 2013-09-04 | 浙江大学 | 水下高光谱成像系统 |
| WO2015015493A2 (en) | 2013-08-02 | 2015-02-05 | Verifood, Ltd. | Spectrometry system and method, spectroscopic devices and systems |
| AU2014330131A1 (en) | 2013-10-04 | 2016-05-05 | Massey University | In-situ optical density sensor |
| US20150153156A1 (en) * | 2013-12-03 | 2015-06-04 | Mvm Electronics, Inc. | High spatial and spectral resolution snapshot imaging spectrometers using oblique dispersion |
| EP3100078B1 (en) | 2014-01-31 | 2023-10-11 | Viavi Solutions Inc. | An optical filter and spectrometer |
| US20150219484A1 (en) | 2014-02-03 | 2015-08-06 | Joseph Dehner | Sight glass assembly |
| EP3129326B1 (en) | 2014-04-09 | 2020-08-26 | NCH Corporation | System and method for detecting biofilm growth in water systems |
| US9945790B2 (en) | 2015-08-05 | 2018-04-17 | Viavi Solutions Inc. | In-situ spectral process monitoring |
| US10048127B2 (en) | 2015-08-05 | 2018-08-14 | Viavi Solutions Inc. | Optical filter and spectrometer |
-
2015
- 2015-01-29 EP EP15743537.1A patent/EP3100078B1/en active Active
- 2015-01-29 CN CN201580010174.9A patent/CN106461460B/zh active Active
- 2015-01-29 JP JP2016549230A patent/JP6490700B2/ja active Active
- 2015-01-29 US US14/608,356 patent/US9625628B2/en active Active
- 2015-01-29 KR KR1020207037231A patent/KR102351001B1/ko active Active
- 2015-01-29 WO PCT/US2015/013415 patent/WO2015116756A1/en not_active Ceased
- 2015-01-29 CA CA2938443A patent/CA2938443C/en active Active
- 2015-01-29 CN CN201811373860.4A patent/CN109520618B/zh active Active
- 2015-01-29 KR KR1020167022476A patent/KR102197456B1/ko active Active
- 2015-01-30 TW TW107135212A patent/TWI692622B/zh active
- 2015-01-30 TW TW104103308A patent/TWI641813B/zh active
-
2017
- 2017-04-17 US US15/488,948 patent/US10190910B2/en active Active
-
2019
- 2019-02-27 JP JP2019034471A patent/JP6818067B2/ja active Active
-
2020
- 2020-12-25 JP JP2020216141A patent/JP7119059B2/ja active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5784158A (en) * | 1995-11-22 | 1998-07-21 | Lastek Laboratories Pty. Ltd. | Broad spectrum spectrometer apparatus |
| US6700690B1 (en) * | 2000-10-02 | 2004-03-02 | Ocean Optics, Inc. | Tunable variable bandpass optical filter |
| US20080285165A1 (en) * | 2007-05-14 | 2008-11-20 | Wu Kuohua Angus | Thin film filter system and method |
| US20100208348A1 (en) * | 2008-08-22 | 2010-08-19 | Carestream Health, Inc. | Tunable spectral filtration device |
| CN102741671A (zh) * | 2009-11-30 | 2012-10-17 | Imec公司 | 用于光谱成像系统的集成电路 |
| US8476574B1 (en) * | 2011-03-31 | 2013-07-02 | Mutoh Industries Ltd. | Method of deconvolution of spectral data |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109520618B (zh) | 2021-02-26 |
| US9625628B2 (en) | 2017-04-18 |
| JP2021073484A (ja) | 2021-05-13 |
| EP3100078B1 (en) | 2023-10-11 |
| US20170219430A1 (en) | 2017-08-03 |
| WO2015116756A1 (en) | 2015-08-06 |
| CA2938443C (en) | 2021-01-26 |
| KR102197456B1 (ko) | 2020-12-31 |
| JP2017506763A (ja) | 2017-03-09 |
| EP3100078A1 (en) | 2016-12-07 |
| CN106461460A (zh) | 2017-02-22 |
| JP7119059B2 (ja) | 2022-08-16 |
| CN109520618A (zh) | 2019-03-26 |
| JP6818067B2 (ja) | 2021-01-20 |
| JP2019105856A (ja) | 2019-06-27 |
| JP6490700B2 (ja) | 2019-03-27 |
| US20150219494A1 (en) | 2015-08-06 |
| EP3100078A4 (en) | 2017-09-06 |
| KR102351001B1 (ko) | 2022-01-12 |
| KR20210000743A (ko) | 2021-01-05 |
| US10190910B2 (en) | 2019-01-29 |
| TWI641813B (zh) | 2018-11-21 |
| TW201531674A (zh) | 2015-08-16 |
| CN106461460B (zh) | 2018-11-27 |
| TW201903368A (zh) | 2019-01-16 |
| KR20160138385A (ko) | 2016-12-05 |
| CA2938443A1 (en) | 2015-08-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI692622B (zh) | 光學濾波器及用於獲得沿著一光學路徑傳播之一光束之一光譜之方法 | |
| CN108449957B (zh) | 用于非接触式感测物质的基准开关架构 | |
| JP7129809B2 (ja) | 光学フィルタ及び分光器 | |
| US20200340859A1 (en) | Spectrometer and Spectral Detection and Analysis Method Using the Same | |
| CN102269833B (zh) | 光谱装置、检测装置以及光谱装置的制造方法 | |
| US11698296B2 (en) | Light sensor using pixel optical diffraction gratings having different pitches | |
| CN101819063B (zh) | 相位调制凹槽阵列微型光谱仪 | |
| JP5891958B2 (ja) | 液体成分センサ | |
| CN108458787B (zh) | 中阶梯光栅型空间外差拉曼光谱仪光路结构 | |
| US9273997B2 (en) | Spectrometer, assembling method thereof, and assembling system | |
| WO2020202887A1 (ja) | エアロゾル計測装置及びエアロゾル計測方法 | |
| HK1263055A1 (en) | An optical filter and spectrometer | |
| HK1263055B (en) | An optical filter and spectrometer | |
| WO2020250651A1 (ja) | エアロゾル計測装置及びエアロゾル計測方法 | |
| JP7482416B2 (ja) | エアロゾル計測装置 | |
| CN116183018A (zh) | 用于抑制跨波段光谱成像系统杂散光的方法及光路系统 | |
| HK1234487B (zh) | 光学滤波器和分光仪 |