TWI691111B - Substrate stretching unit, film forming device, and method for manufacturing film and organic electronic device - Google Patents

Abstract

A substrate stretching device is provided, which can exert the substrate stretching force in response to the slack of the substrate, and the slack of the substrate is less likely to occur. The mask and the substrate can be overlapped well, so that the film can be formed with high accuracy.

A substrate stretching device includes a pair of clamping mechanisms facing each other, and has the following structure: the clamping mechanism includes a plurality of gripping portions for gripping a substrate from above and below, and each of the gripping portions includes A driving means for transmitting the pressing force for holding the substrate and the stretching force for drawing the substrate to the outside to the holding portion.

Description

Substrate stretching device, film forming device, film manufacturing method, and organic electronic device manufacturing method

The present invention relates to a substrate stretching device that prevents slack in a substrate by stretching the substrate.

The weight of the substrate increases as the size of the substrate increases. Therefore, when the large-sized substrate is held horizontally, the substrate may deflect downward due to the weight of the substrate, causing slack in the substrate. For example, in Patent Document 1, a device has been described which prevents the occurrence of slack in the substrate by stretching the ends of the opposing substrates against each other.

[Prior Technical Literature] [Patent Literature]

[Patent Document 1] Korean Patent Publication No. 10-1456671

The substrate clamping mechanism described in Patent Document 1 is configured to use a flat plate in which a plurality of subdivided substrate support pieces are joined, and the substrate is stretched and driven to both sides through the flat plate.

In addition, depending on the material/shape/area of the supported substrate, the degree of slack in the substrate varies. According to the structure of Patent Document 1, depending on the supported substrate, the force of clamping the substrate between the support pieces is unbalanced, or the substrate slides between the support pieces with weak clamping force, so that when the substrate is stretched, Unbalance occurs in the tensile force of the substrate in the longitudinal direction of the flat plate. For this reason, there is a possibility that the slack of the substrate cannot be eliminated or the slack of the substrate is promoted instead.

If the slack of the substrate is large and uniform film formation cannot be performed, when a thin film is formed on the substrate using a mask, it may cause a large deviation in the film formation pattern.

In addition, since it is a structure in which the flat plate under all the supporting pieces is combined and driven to stretch, the clamping force is strengthened when the clamping force is strengthened in order to eliminate the slippage of the substrate under the supporting pieces whose clamping force is weak. The substrate may be damaged because the position becomes too strong. Furthermore, a driving device with a large stretching force is required, so that the energy consumption required for substrate stretching increases, and the stretching device may become large.

The present invention was created in view of the above-mentioned current situation. The substrate stretching device according to the present invention is a substrate stretching device provided with a pair of clamping mechanisms facing each other. The clamping mechanism includes a plurality of The gripping parts sandwiched up and down are each provided with a pressing force for gripping the substrate and a stretching force for stretching the substrate outwardly according to the gripping part The driving means of the aforementioned grip.

According to the substrate stretching device of the present invention, the substrate pressing force and the substrate stretching force in response to the slack of the substrate can be applied, and the edges of the opposing substrates can be evenly stretched, which can effectively reduce Substrate relaxation. In addition, when the substrate stretching apparatus according to the present invention is used in a film forming apparatus, the substrate is less likely to be slack, so that uniform film formation, high-precision film formation using a mask, etc. can be achieved.

1: substrate

2: side

3, 4: hold the film

5: frame

6: Lifting board

7: Connection

8: bottom plate

9: fixed table

10: electric cylinder

11, 12: Board Department

13: Link board

14: clamping body

15: movable body

16: Horizontal Board Department

17: Vertical board

18: Standing board

19: Level

20: Edge

21: base plate support claw

22: electric cylinder

23: movable front end

24: Lifting rod

25: Anti-drop lock

26: Most of the diameter

27: Spring

28: front end hanging down

29: Roller

30: Ditch

31: Carrying Department

32: Guide block

33: rail

34: Stretching force transmission body

35: Rotating shaft

36: Bearing Department

37: Roller

38: Electric cylinder

39: movable front end

40: Carrier

41: Roller

42: Carrier sheet

43: Elastic screw buckle

44: Ditch

45: Guide rod

46: Linear bearing

60: display device

61: display area

62: pixels

62B: The first light-emitting element

62G: Second light-emitting element

62R: Third light-emitting element

63: substrate

64: 1st electrode

65: hole transport layer

66B, 66G, 66R: light emitting layer

67: electron transport layer

68: 2nd electrode

69: Insulation

70: protective layer

80: vacuum tank

81: substrate

82: Film thickness monitor

83: Film thickness meter

84: Power supply for heater

85: evaporation source

86: Mask

[Fig. 1] A schematic explanatory perspective view of this embodiment.

[Fig. 2] An enlarged explanatory perspective view of a main part of this embodiment.

[Fig. 3] An enlarged explanatory perspective view of a main part of this embodiment.

[Fig. 4] An operation explanatory view of the clamping mechanism of this embodiment.

[Fig. 5] An operation explanatory view of the clamping mechanism of this embodiment.

[Fig. 6] An operation explanatory view of the clamping mechanism of this embodiment.

[Fig. 7] A schematic front view of a vapor deposition device.

[Fig. 8] (a) is a perspective view of an organic EL display device produced by using a vacuum evaporation device according to the present invention, and (b) is a cross-sectional view taken along line A-B of (a).

For an embodiment of the present invention deemed suitable, the present invention is shown based on FIG. 1 The effect of the invention will be described briefly.

The opposing side portions 2 of the substrate 1 are respectively held by the clamping mechanism, and the substrate 1 is supported while being stretched outward without slack.

In this case, the driving means provided for each of the plurality of gripping parts respectively provided along the opposing side portions 2 of the substrate 1 of the clamping mechanism makes it possible for each gripping part to be set for gripping the substrate The pressing force or the tensile force for stretching outwards, for example, even if the slack of the substrate 1 is different between the central side and the end side of the opposite side portion 2 of the substrate 1, the opposite direction of the substrate 1 can be made The edges are stretched evenly so that the slack disappears.

In addition, since the driving means is provided for each of the gripping parts, a driving device with a large tensile force is not required, and a smaller one can be used for the driving means, so that the energy consumption is reduced accordingly.

[Example]

A specific embodiment of the present invention will be explained based on the drawings.

This embodiment is a substrate stretching device, which is provided with a pair of clamping mechanisms that can hold the opposing side portions 2 of the substrate 1 and stretch the opposing side portions 2 outward.

The gripping mechanism of this embodiment is to arrange a plurality of gripping portions for gripping the substrate 1 from above and below along the side portions 2 of the substrate 1 to be gripped, and each gripping portion is provided with Driving means for pressing force for holding the substrate 1 and stretching force for pulling the substrate 1 outward.

That is, in this embodiment, a pair of opposing side portions 2 of the substrate 1 is grasped by each of the aforementioned clamping mechanisms, and the opposing grasping portions are separated from each other to hold the substrate 1 toward Stretch outside.

This embodiment, as shown in FIG. 1, is configured to be connected in a suspended state by hanging the frame 5 provided with the clamping mechanism on the connecting body 7 of the lifting plate 6, and provided with respect to the bottom plate 8. A lifting mechanism for lifting the lifting plate 6. In addition, the connecting body 7 is configured to connect the four corners of the lifting plate 6 and the frame 5 respectively, and the bottom plate 8 is provided with an insertion hole through which the connecting body 7 is inserted.

The lifting plate 6 is arranged in parallel above the bottom plate 8 at predetermined intervals. Above the lifting plate 6, a fixing base 9 is provided with four legs inserted through the insertion holes of the lifting plate 6 and fixed to the bottom plate 8. In terms of the lifting mechanism, an electric cylinder 10 such as a built-in servo motor, a ball screw, etc., which is fixed to the fixed table 9 at the base end side and fixed at the movable front end side is adopted.

Therefore, at the time of substrate replacement, etc., the movable front end of the electric cylinder 10 is moved forward and backward and the lifting plate 6 is raised and lowered relative to the bottom plate 8 so that the frame 5 (clamping mechanism) connected to the lifting plate 6 in a suspended state can be raised and lowered. The lifting system of the lifting plate 6 is guided through the legs of the fixed table 9.

In the case where the vacuum film forming apparatus that performs film formation while keeping the substrate still is provided with the substrate stretching apparatus of this embodiment, the lower surface outer peripheral portion of the bottom plate 8 is fixed to the top surface portion of the vacuum film forming chamber, which is lower than the bottom plate 8 The portion on the side may be arranged in the vacuum film forming chamber, and the bottom plate 8 and the portion above the bottom plate 8 may be arranged in the atmospheric area outside the vacuum film forming area. When the bottom plate 8 also serves as the upper surface wall of the chamber of the film forming apparatus, it is preferable because the structural material required for the film forming apparatus can be reduced. Installed in a vacuum film forming apparatus that moves a substrate to form a film In the case of the substrate stretching apparatus of this embodiment, the entire substrate stretching apparatus shown in FIG. 1 may be arranged in the apparatus and connected to the substrate transport mechanism of the apparatus. In this case, since the bottom plate 8 becomes unnecessary, it can be omitted.

The clamping mechanism is configured such that the holding portion is formed by a pair of holding pieces 3, 4 and the substrate 1 is pressed from above and below by the pair of holding pieces 3, 4 and the held substrate 1 is stretched outward Constitutes the aforementioned driving means.

The gripping part, as shown in FIG. 2, adopts the following structure: each is provided with a cross-sectional, zigzag-shaped clamping body formed by opposed upper and lower plate parts 11 and 12 and a connecting plate part 13 connecting the same 14. A movable body 15 which is movably provided on the holding body 14. Specifically, a configuration is adopted such that the holding pieces 3 and 4 face the front end of the lower plate portion 12 of the holder 14 and the front end of the movable body 15, respectively.

A plurality of the holding bodies 14 are arranged on the pair of first side portions of the frame body 5 along the side portions 2 of the substrate 1 to be held (eight in the present embodiment). When the long side of the substrate is gripped by the holding body 14, it is preferable to reduce the tensile force required at each grip portion for the slack of the substrate, as compared to the case of gripping the short side. In addition, a configuration is adopted in which a pair of second side portions of the frame body 5 along the side portion 20 of the substrate 1 that is not held is provided with substrate support claws 21. Specifically, the first side portion of the frame 5 adopts a configuration in which the vertical plate portion 17 is suspended at both ends of the horizontal plate portion 16, and the second side portion is connected to the vertical plate portion 17 of the first side portion The standing plate portion 18 and the horizontal portion 19 connecting the lower ends of the standing plate portion 18 are configured. The substrate support claw 21 protrudes toward the inside of the horizontal portion 19. Therefore, from the second side The loading of the substrate 1 on the side is performed satisfactorily.

Hereinafter, it will be described in detail how to transmit the pressing force for holding the substrate 1 and the pulling force for stretching the substrate 1 outwards to the side portions 2 of the substrate 1 at the respective holding portions (a pair of holding pieces 3 and 4). Stretching force.

The upper plate portion 11 of the clamping body 14 is provided with an insertion hole through which the upper end is locked with the movable front end portion 23 of the electric cylinder 22 and the lower end is locked with the movable body 15. The lower end of the lifting rod 24 is provided with an anti-disengagement locking portion 25 that is locked to the lower surface of the movable body 15, and the upper surface of the movable body 15 is below the large diameter portion 26 provided at the middle portion of the lifting rod 24. A spring 27 is provided between the surfaces. In addition, the base end side of the electric cylinder 22 is fixed to the lifting plate 6.

In addition, between the upper plate portion 11 and the lower plate portion 12, a pair of left and right guide bars 45 parallel to the coupling plate portion 13 are provided. The movable body 15 is formed with insertion holes through which the guide rods 45 are respectively inserted. In the figure, symbol 46 is a linear bearing.

Therefore, the pressing force caused by the movable front end portion 23 of the electric cylinder 22 is transmitted to the movable body 15 via the spring 27, and the substrate 1 held by the holding piece 4 of the movable body 15 and the holding piece 3 of the clamping body 14 is held (Refer to Figure 5). In such a configuration, since the electric cylinders 22 are provided in the respective clamping bodies 14, the pressing force can be controlled by each of the gripping portions, so that the substrate 1 can be gripped well in response to the slack of the substrate 1. Furthermore, by exchanging the spring 27 for a spring having a different elastic coefficient as appropriate, the force transmitted from the electric cylinder 22 to the grip portion can be adjusted, that is, the grip force can be adjusted.

In addition, in the present embodiment, a structure in which a grip piece 4 made of synthetic resin is detachably provided at the lower end of the front end hanging portion 28 of the movable body 15 to make. For synthetic resin, silicon, neoprene, nitrile rubber, etc. can be used. Therefore, when the grip piece 4 is worn/degraded, it can be exchanged as appropriate. In addition, in this embodiment, although the gripping piece 3 at the front end of the lower plate portion 12 is integrally provided with the lower plate portion 12, a gripping piece made of synthetic resin may be detachably provided at the front end of the lower plate portion 12 3 composition.

In addition, although not shown, the thickness of the gripping piece 4 may be changed, or other members may be interposed between the lower end of the front end of the movable body 15 and the gripping piece 4 to adjust between the gripping piece 4 and the gripping piece 3 Interval, and adjust the holding force of each holding piece. In addition, an elastic member such as a spring may be interposed between the lower end of the front end of the movable body 15 and the lower end of the lower part 28 and the grip piece 4, and by setting the elasticity of the elastic member (coefficient of elasticity at the time of spring) as appropriate to adjust each Holding power of the film.

In addition, the front end of the lifting rod 24 is formed in a T-shape in front view, and rollers 29 are provided at both ends of the T-shaped front end, respectively. The front end of the lifting rod 24 is arranged in a supporting portion 31 provided with a groove 30 that avoids the middle portion of the lifting rod 24 in a cross-sectional zigzag shape opened in front of the movable front end portion 23 fixed to the electric cylinder 22. The interval between the upper and lower plate portions of the bearing portion 31 is set to be an interval slightly wider than the diameter of the roller 29. The front end of the lifting rod 24 that is locked to the bearing portion 31 comes into contact with the roller 29 across the inner surface of the bearing portion 31 to smoothly perform horizontal sliding of the clamping body 14 when a tensile force described later is transmitted.

The horizontal movement of the clamping body 14 when the tensile force is transmitted can be realized by a linear guide provided between the plate portion 11 above the clamping body 14 and the horizontal plate portion 16 of the frame 5. Specifically, the upper plate portion 11 of the re-clamping body 14 On the upper surface, a guide rail 33 into which the guide block 32 provided on the lower surface of the horizontal plate portion 16 of the frame 5 is fitted is provided. Therefore, the clamp body 14 (grip portion) slides horizontally with respect to the frame body 5.

FIG. 3 shows the structure of the grip portion viewed from the outside. On the outer side of the block 32 of the horizontal plate portion 16 of the frame 5, a bearing for supporting a rotating shaft 35 provided at a bent portion of a tensile force transmitting body 34 in a slightly L-shaped cross section that transmits tensile force部36. The tensile force transmitting body 34 is configured to be rotatable about the rotating shaft 35 provided in the bending portion. The front end of the tensile force transmitting body 34 is formed in a T-shape in front view, and rollers 37 are provided at both ends of the T-shaped front end, respectively. The front end of the tensile force transmitting body 34 is carried by a cross-sectional, zigzag-shaped carrier 40 fixed to the front of the movable front end 39 of the electric cylinder 38 and opened. The interval between the upper and lower plate portions of the carrier 40 is set to be an interval slightly wider than the diameter of the roller 37. In addition, the base end side of the electric cylinder 38 is fixed to the lifting plate 6.

In addition, the base end of the tensile force transmitting body 34 is also formed in a T-shape in front view, and rollers 41 are provided at both ends of the T-shaped base end. The base end of the tensile force transmitting body 34 is an L-shaped cross section of the support plate 42 formed by the horizontal piece and the vertical piece and the connecting plate portion 13 disposed on the back surface of the connecting plate portion 13 provided on the holder 14 Between the back. The distance between the back surface of the connecting plate portion 13 and the vertical sheet of the carrier sheet 42 is set to be a slightly wider interval than the diameter of the roller 41.

Therefore, the movable front end 39 of the electric cylinder 38 is driven to move up the carrier 40 in which the front end of the tensile force transmitting body 34 is locked, so that the base end of the tensile force transmitting body 34 takes the rotating shaft 35 provided in the bending portion as Center turned outward As a result, the base end of the tensile force transmitting body 34 presses the vertical piece of the carrier sheet 42 to the outside, so that the clamping body 14 (grip portion) moves to the outside, and transmits the tensile force to the substrate 1 (refer to FIG. 6 ).

Between the bending portion of the tensile force transmitting body 34 and the base end, an elastic screw buckle 43 is provided, and the elastic screw buckle 43 is rotated to adjust the distance between the bending portion and the base end so that the slave electric cylinder can be adjusted 38 The force transmitted to the grip portion, that is, the tensile force can be adjusted (increasing the distance between the bent portion and the base end portion can increase the tensile force). Specifically, a structure in which a screw portion extending from the curved portion toward the base end side and a reverse screw portion extending from the base end toward the curved portion are screwed and connected by an elastic screw 43.

In addition, the above-mentioned clamping mechanism is configured to include an individual adjustment capable of individually adjusting the pressing force, the stretching force, or both of the driving means provided by each of the aforementioned gripping parts according to each of the driving means Means; Alternatively, the individual control means may be individually controlled by each of the driving means according to the respective pressing force, tensile force, or both of the driving means provided by each of the aforementioned gripping parts. In the present embodiment, the spring 27 corresponds to individual adjustment means for adjusting the pressing force, and the elastic screw 43 corresponds to individual adjustment means for adjusting the tensile force. The electric cylinder 22 corresponds to individual control means for adjusting the pressing force, and the electric cylinder 38 corresponds to individual control means for adjusting the stretching force. In addition, although individual adjustment means are provided to optimize the pressing force and tensile force for further reducing the relaxation of the substrate, it is not necessary to provide both the pressing means and the tensile force transmission means, and either one or both sides.

In this embodiment, as described above, with individual adjustments as described above Individual adjustment means for the stretching force of the driving means provided by each gripping unit and individual control means capable of individually controlling the pressing force according to the driving means provided by each gripping section.

According to the substrate stretching device related to this embodiment, the individual adjustment means or the individual control means can be used to individually adjust or individually control each of the aforementioned holding parts according to the degree of slack generated at the edge of the substrate to be held Separate pressing force, tensile force, or both of the driving means provided.

For example, the individual adjustment means or the individual control means can be used to make the pressing force, the tensile force, or both of the driving means provided by each of the gripping parts at the center of the edge of the gripped substrate The area is higher than the end area on the side of the substrate.

In addition, in this embodiment, the carrier 40 is configured to allow the tensile force transmitting bodies 34 of the clamping bodies 14 of the clamping mechanism on one side to be uniformly operated. The configuration of one long carrier 40 that is locked (refer to FIG. 3 ). That is, a configuration is adopted in which the front end of each tensile conveyance body 34 is locked at a predetermined interval to a long elongated carrier 40 that is open in a cross-sectional view, and can be moved up and down by this carrier 40. All the gripping parts of the one-side gripping mechanism are stretched. In this embodiment, the following configuration is adopted: the movable front end portions 39 of the electric cylinder 38 are fixed to both ends of the carrier 40, and the two electric cylinders 38 collectively hold all the clamping mechanisms on one side. The part is stretched.

In addition, a plate portion above the carrier 40 is provided with a mechanism for avoiding tensile force transmission The groove 44 in the middle of the body 34.

In addition, although this embodiment is configured as described above, the following configuration may also be adopted: as the pressing force, one carrier 40 is also provided in each clamping body in terms of tensile force, and each carrier 40 is provided according to this The electric cylinder 38 individually controls the tensile force of the grip portion of each holder with the electric cylinder 38 provided separately.

In addition, the movable front end portions 23 and 39 of the electric cylinders 22 and 38 are inserted through the insertion holes of the bottom plate 8 and connected to the bearing portion 31 and the bearing body 40. In the case where the substrate stretching device is installed in the vacuum device, it may be configured such that the insertion hole is surrounded by a telescopic tube or the like provided between the bottom plate 8 and the lifting plate 6 to maintain the vacuum in the device.

When forming a film in a vacuum state in the film forming apparatus, the top surface portion may be deformed inward due to the negative pressure acting on the top surface portion of the vacuum film forming chamber. The bottom plate 8 also serves as the top surface portion of the vacuum device chamber, or when the bottom plate 8 is fixed to the top surface portion, the deformation of the top plate portion will affect the substrate stretching device and increase the slack of the substrate. Therefore, the rigidity of the bottom plate 8 may be higher than that of the top surface of the vacuum deposition chamber, or it may be provided to seal the outer peripheral portion of the lower surface of the bottom plate 8 with the top surface of the vacuum deposition chamber with a telescopic tube, a seal ring, or the like. With this structure, even if the top surface portion is deformed inward due to the negative pressure acting on the top surface portion of the vacuum deposition chamber, the influence on the bottom plate 8 can be suppressed, and the deformation of the top surface portion toward the inside during film formation can be reduced The substrate underneath is relaxed, and the accuracy of film formation is improved.

In addition, the clamping mechanism may be provided with the individual control means provided with the driving means provided for each of the gripping parts. The structure of the joint control means of control. In terms of the joint control means, a control device that controls the advance and retreat amount, timing, etc. of the movable front end of each electric cylinder can be used.

For example, the above-mentioned joint control means may be configured to control each individual control means according to the driving means provided by each of the gripping units in conjunction with each other according to the degree of slack generated at the edge of the substrate to be gripped.

In addition, the above-mentioned joint control means can make the pressing force or the tensile force of the driving means provided by each of the holding parts, or both of them in the central area of the edge of the substrate held in The height of the end region of the side is set, and the pressing means and the tensile force transmitting means are controlled.

The tendency and degree of slack in the substrate to be gripped above vary depending on specifications such as material/shape/area/weight/aspect ratio of the substrate to be used. Therefore, the substrates are grouped according to specifications, and the tendency of substrate slack is measured in advance for each substrate group. In addition, it is also preferable to determine the degree of slack of the substrate in each gripping section based on this tendency of slack of the substrate, and it is also preferable to jointly control the individual control means according to the driving means of each gripping section according to the determined degree of slack of the substrate.

In addition, it is also possible to adopt a configuration for detecting the tendency and degree of slack of the substrate held by the slack detection means. For example, a slack detection device that grasps the substrate and detects the slack state through image processing, a laser displacement meter, or the like can be used. When using this slack detection means, when the substrate is held by the substrate stretching device, it can be confirmed whether the slack of the substrate has been reduced to an allowable range.

In addition, the aforementioned individual adjustment means or the aforementioned individual control means It is also preferable to individually adjust or individually control the driving means according to the timing of stretching the substrate according to the respective driving means provided for each of the aforementioned gripping parts.

Specifically, the timing of stretching the substrate by the driving means may be made in front of the central region of the edge of the substrate to be grasped than by the end area of the grasping edge, or it may be made to further pull the substrate by the driving means. The timing of extending the substrate gradually delays toward the end region of the edge of the substrate to be grasped. Through such control, the slack of the substrate can be further suppressed.

For example, the following configuration may also be adopted: one carrier body is provided for each clamping body, an electric cylinder is provided for each carrier body, and the stretching force of the grip portion of each clamping body is individually controlled by each electric cylinder; and It is configured to control the driving timing of the electric cylinder and sequentially operate the tensile force transmitting body from the center side toward the end side.

In addition, for individual adjustment means, for example, the following configuration may be adopted: a spring (not shown) that presses the holder 14 shown in FIG. 4 toward the inside (substrate side) along the guide rail 33 is provided, and the holder can be pressed. Each of the holders individually adjusts the interval between the carrier sheet 42 and the back surface of the connecting plate portion 13, and adopts a configuration in which a stretching force is applied to the substrate when the roller 41 contacts the carrier sheet 42 to individually adjust the timing of stretching the substrate.

In addition, although the present embodiment adopts a structure in which the substrate is stretched outward by the clamping mechanisms that hold the opposed edges of the substrate, the following configuration may be adopted: The driving means of the clamping mechanism provided on either side of the opposing side portions are controlled so that only the pressing force is generated.

FIG. 7 is an example of applying the substrate stretching apparatus according to the present invention to a vacuum evaporation apparatus that performs film formation while keeping the substrate still. In practice, although the same substrate stretching apparatus as that in FIG. 1 is used, FIG. 7 shows the minimum required structural members briefly. This vacuum evaporation apparatus is to form a thin film on a substrate 81 in a vacuum tank 80 that maintains a reduced-pressure environment, and to evaporate the film-forming material evaporation source 85 at a position opposed to the substrate 81, and is provided with a monitor A film thickness monitor 82 for the evaporation rate of the evaporated particles discharged from the evaporation source 85, a film thickness meter 83 provided outside the vacuum chamber 80 that converts the amount of the monitored evaporated particles into a film thickness, and The heater power supply 84 for heating the evaporation source 85 is controlled by controlling the evaporation rate of the film forming material so that the film thickness becomes a desired film thickness. In addition, a moving mechanism for moving the evaporation source 85 in a direction perpendicular to the paper surface is provided, and a relative moving mechanism for moving the substrate 81 and the evaporation source 85 relatively is provided. The film is formed while moving the evaporation source 85 relative to the substrate 81 so that a vapor-deposited film with a uniform film thickness can be formed on the entire surface of the substrate. In addition, the mask support member having the support mask 86 can be formed by aligning the relative positions of the substrate 81 and the mask 86 using an alignment mechanism (not shown).

In addition, the present invention is not limited to this embodiment, and the specific structure of each constituent element can be designed as appropriate.

Next, an example of manufacturing an organic EL display device as an example of an organic electronic device using a vacuum evaporation device provided with a substrate stretching device according to the present invention will be described.

First, the organic EL display device to be manufactured will be explained. 8(a) is an overall view of an organic EL display device 60, and FIG. 8(b) is a display 1 pixel cross-sectional structure.

As shown in FIG. 8( a ), in the display area 61 of the display device 60, a plurality of pixels 62 are arranged in a matrix, and the pixels 62 are provided with a plurality of light-emitting elements. Each light-emitting element has a structure including an organic layer sandwiched by a pair of electrodes, and details will be described later. In addition, the pixel here refers to the smallest unit that can display a desired color in the display area 61. In the case of the display device according to this embodiment, the pixel 62 is formed by a combination of the first light-emitting element 62R, the second light-emitting element 62G, and the third light-emitting element 62B that exhibit different light emission from each other. The pixel 62 is mostly composed of a combination of red light-emitting elements, green light-emitting elements, and blue light-emitting elements, but a combination of yellow light-emitting elements, cyan blue light-emitting elements, and white light-emitting elements may also be used, as long as there is at least one color or more. limit.

FIG. 8(b) is a schematic cross-sectional view taken along line A-B of FIG. 8(a). The pixel 62 has an organic EL element which includes a first electrode (anode) 64, a hole transport layer 65, a light emitting layer 66R, 66G, 66B, an electron transport layer on a substrate 63 67, and the second electrode (cathode) 68. Among these, the hole transport layer 65, the light emitting layers 66R, 66G, 66B, and the electron transport layer 67 correspond to the organic layer. In this embodiment, the light-emitting layer 66R is a red organic EL layer, the light-emitting layer 66G is a green organic EL layer, and the light-emitting layer 66B is a blue organic EL layer. The light-emitting layers 66R, 66G, and 66B are formed into patterns corresponding to light-emitting elements (also sometimes described as organic EL elements) that emit red, green, and blue, respectively. In addition, the first electrode 64 is formed by separating each light-emitting element. Hole transport layer 65, electron transport layer 67. The second electrode 68 may be formed in common with a plurality of light-emitting elements 62, or may be formed for each light-emitting element. In addition, in order to prevent the first electrode 64 and the second electrode 68 from being short-circuited by a foreign substance, an insulating layer 69 is provided between the first electrode 64. In addition, the organic EL layer deteriorates due to moisture, oxygen, etc., so a protective layer 70 for protecting the organic EL element from moisture, oxygen, etc. is provided.

To form the organic EL layer in units of light-emitting elements, a method of forming a film through a mask is used. In recent years, with the advancement of high-definition display devices, a mask with an opening width of several tens of μm has been used in the formation of an organic EL layer. In the case of film formation using such a mask, the position of the mask and the substrate may deviate when the mask is heated from the evaporation source during the film formation and thermally deformed, and the pattern of the thin film formed on the substrate may deviate from the desired position While forming. Therefore, in terms of film formation of these organic EL layers, it is suitable to use the vacuum deposition apparatus related to the present invention.

Next, an example of a method for manufacturing an organic EL display device will be specifically described.

First, the substrate 63 on which the circuit (not shown) for driving the organic EL display device and the first electrode 64 are formed is prepared.

An acrylic resin is formed by spin coating on the substrate 63 on which the first electrode 64 is formed, and the acrylic resin is patterned by photolithography so that an opening is formed in the portion where the first electrode 64 is formed and an insulating layer 69 is formed. This opening corresponds to a light-emitting area where the light-emitting element actually emits light.

The substrate 63 on which the insulating layer 69 is patterned is carried into a vacuum evaporation device, and the substrate stretching device according to the present invention is used to hold the substrate to transfer holes. The transport layer 65 is formed as a layer common to the first electrode 64 in the display area. The hole transport layer 65 is formed by vacuum evaporation. In fact, the hole transport layer 65 is formed to have a larger size than the display area 61, so a high-definition mask is not required.

Next, a red light-emitting layer 66R is formed on the portion where the red-emitting element is arranged by the vapor deposition mask. First, the substrate 63 formed up to the hole transport layer 65 is carried into the vacuum deposition apparatus of FIG. 7 and held by the substrate stretching apparatus. At this time, in order to make the slack of the substrate fall within the allowable range, the pressing force and the tensile force of each gripping portion are adjusted using individual control means, individual adjustment means, or the like. When the slack of the substrate falls within the allowable range, alignment with the mask 86 having an opening corresponding to the area where the first light-emitting element 62R is formed is performed. The allowable range of substrate slack can be set according to the accuracy required for film formation.

The evaporation source 85 system accommodates the organic EL material that is the material of the light-emitting layer 66R, and performs preheating in preparation for adhesion to the substrate to evaporate the organic material. The preheating is to preheat the evaporation source 85 at a temperature equal to the film formation temperature in order to stabilize the molten state of the film-forming material contained in the evaporation source 85. When it is confirmed from the time change of the film forming speed (evaporation rate) obtained by the film thickness monitor 82 that the film forming material has stabilized in the molten state and then the film formation of the light-emitting layer 66R is resumed, a film with high accuracy becomes possible Thick control.

According to this example, since the slack of the substrate 63 can be reduced for the entire substrate, the mask and the substrate can be overlapped well, so that high-precision film formation can be performed.

Like the film formation of the light-emitting layer 66R, a light-emitting layer 66G that emits green is formed using a mask having an opening corresponding to the area where the second light-emitting element 62G is formed, and a mask having an opening corresponding to the area where the third light-emitting element 62B is formed The cover forms a blue light-emitting layer 66B.

After the film formation of the light-emitting layers 66G and 66B is completed, the electron transport layer 65 is formed on the entire display region 61. The electron transport layer 65 is formed as a layer common to the first to third light-emitting layers.

The substrate up to the electron transport layer 65 is moved to the sputtering device to form the second electrode 68, and then moved to the plasma CVD device to form the protective layer 70, thereby completing the organic EL display device 60.

From the time when the substrate 63 with the insulating layer 69 patterned is carried into the vacuum evaporation device until the film formation of the protective layer 70 is completed, if it is exposed to an environment containing moisture, oxygen, etc., there is a light-emitting layer made of an organic EL material due to moisture. , Oxygen, etc. may deteriorate. Therefore, in this example, the loading and unloading of the substrate between the film forming apparatuses is performed in a vacuum environment or an inert gas environment.

In the organic EL display device thus obtained, the light-emitting layer is accurately formed for each light-emitting element. Therefore, when the above manufacturing method is used, it is possible to suppress the occurrence of defects in the organic EL display device due to the positional deviation of the light emitting layer.

In addition, here, a method for manufacturing an organic EL display device that performs vapor deposition using a mask is discussed, but the application of the substrate stretching device related to the present invention is not limited to this. Regardless of whether or not a mask is used, the substrate stretching of the present invention can be applied to a film forming apparatus in a case where a film is formed by supporting a surface to be processed in a direction crossing with respect to the gravity direction Device.

1‧‧‧ substrate

2‧‧‧Border

5‧‧‧Frame

6‧‧‧Lifting board

7‧‧‧Connect

8‧‧‧Bottom plate

9‧‧‧Fixed

10‧‧‧Electric cylinder

14‧‧‧Clamping body

16‧‧‧Horizontal Board Department

17‧‧‧Vertical Board Department

18‧‧‧ Standing board

19‧‧‧ Level

20‧‧‧Border

21‧‧‧Base support claw

22‧‧‧Electric cylinder

23‧‧‧Moveable front end

38‧‧‧Electric cylinder

39‧‧‧Moveable front end

40‧‧‧Carrier

Claims (22)

A substrate stretching device is provided with a pair of clamping mechanisms facing each other, the clamping mechanism is provided with a plurality of gripping portions for clamping the substrate from above and below, and each of the gripping portions is provided with a driving means, The driving means is for transmitting a pressing force for holding the substrate and a stretching force for pulling the substrate outward to the holding portion, and the driving means is configured to hold the substrate through the holding portion In the state of the pair of opposing side portions of the substrate, the opposing holding portions are separated from each other to stretch the substrate outward, and the clamping mechanism is provided with a separate adjustment means, and the individual adjustment means is The individual pressing force and tensile force of the driving means provided by each of the gripping parts may be adjusted individually for each of the driving means. A substrate stretching device according to claim 1 of the patent application, wherein the gripping portion of the gripping mechanism includes a pair of gripping pieces, and the driving means is configured to be pressed from above and below through the pair of gripping pieces The aforementioned substrate simultaneously stretches the grasped substrate outward. A substrate stretching device as claimed in item 1 of the patent application, wherein the clamping mechanism is provided with a separate control means, and the individual control means can be an individual pressing force or a pulling force according to the driving means provided by each of the gripping parts Stretching force, or both, is controlled individually by each driving means. For example, the substrate stretching device of claim 3, wherein the clamping mechanism is provided with a joint control means, the joint control means is The individual control means according to the driving means provided by each of the gripping units are controlled in conjunction with each other. A substrate stretching device as claimed in item 1 or 2 of the patent application, wherein the individual adjustment means is configured to individually adjust the drive provided by each of the grasping parts according to the degree of slack generated at the edge of the grasped substrate Means of separate pressing force or stretching force, or both. A substrate stretching device according to claim 3 of the patent application, wherein the individual control means is configured to individually control the driving means provided by each of the grasping parts according to the degree of slack generated at the edge of the grasped substrate Separate pressing force or tensile force, or both. A substrate stretching device as claimed in item 1 or 2 of the patent application, wherein the aforementioned individual adjustment means is configured such that the pressing force or the stretching force at the central region of the edge of the substrate to be held, or both The driving means of each of the aforementioned gripping sections is individually adjusted so as to be higher than the end area of the side of the substrate to be gripped. A substrate stretching device as claimed in item 3 of the patent application, wherein the aforementioned individual control means is configured such that the pressing force or the stretching force at the central region of the edge of the substrate to be held, or both The driving means of each of the aforementioned gripping sections is individually controlled so that the end regions of the sides of the gripped substrate are high. A substrate stretching device as claimed in item 1 or 2 of the patent application, wherein the individual adjustment means is configured to stretch the substrate with the stretching force due to the respective driving means provided by each of the gripping parts The timing of each is individually adjusted according to the driving means. A substrate stretching device as claimed in item 3 of the patent application, wherein the individual control means is configured for the timing of stretching the substrate by the stretching force caused by the respective driving means provided by each of the gripping parts , Individually controlled by each of the driving means. A substrate stretching device as claimed in item 9 of the patent application, wherein the individual adjustment means is configured such that the timing of stretching the substrate with the stretching force caused by the driving means is at the center of the edge of the gripped substrate The area becomes more than the front of the end area of the holding edge. A substrate stretching device as claimed in item 10 of the patent application, wherein the individual control means is configured such that the timing of stretching the substrate with the stretching force caused by the driving means is at the center of the edge of the gripped substrate The area becomes more than the front of the end area of the holding edge. A substrate stretching device as claimed in item 11 of the patent application, wherein the individual adjustment means is configured such that the timing of stretching the substrate with the stretching force caused by the driving means is directed toward the edge of the substrate being held The end of the area gradually delayed. A substrate stretching device as claimed in item 12 of the patent application, wherein the individual control means is configured such that the timing of stretching the substrate with the stretching force caused by the driving means is directed toward the edge of the substrate being held The end of the area gradually delayed. According to the substrate stretching device of claim 4 of the patent application, the aforementioned joint control means is configured such that, depending on the degree of slack generated at the edge of the substrate to be gripped, each of the driving means provided by each of the aforementioned gripping sections will be The control means are controlled in conjunction with each other. A substrate stretching device as claimed in item 4 of the patent application, wherein the aforementioned joint control means is configured such that the pressing force or the stretching force at the central region of the edge of the substrate to be held, or both The driving means provided for each of the aforementioned gripping sections is controlled so that the end area of the gripped side section is high. A substrate stretching device as claimed in item 15 of the patent application, wherein the joint control means is configured to use the material/shape/area/weight/aspect ratio of the substrate used according to the degree of slack of the substrate held The substrate slack tendency measured in advance by each of the grouped substrate groups is determined, and in accordance with the determined degree of slack of the substrates, individual control means according to the driving means provided by each of the gripping units are controlled in conjunction with each other. For example, the substrate stretching device according to any one of claims 1 to 4 includes a slack detection means for detecting the slack of the substrate held above. According to the substrate stretching device of claim 3, the individual control means is configured to separately control the driving means of one of the clamping mechanisms of the pair of opposed clamping mechanisms. A film forming device is a film forming device for a substrate provided in a film forming chamber: a substrate stretching device as described in any one of items 1 to 19 of the patent application range. A method for manufacturing a film, including: a procedure for carrying a substrate into a film forming room; The procedure of stretching the substrate to the outside; and the procedure of attaching the film to the substrate; the procedure of stretching the substrate to the outside is as described in any of items 1 to 19 of the patent application Substrate stretching device. A method of manufacturing an organic electronic device, comprising a plurality of elements provided with an organic layer sandwiched by a pair of electrodes on a substrate, having a procedure of carrying a substrate having a plurality of electrodes into a vapor deposition chamber; holding the aforementioned A procedure of stretching the substrate outward; a procedure of heating the organic material contained in the evaporation source; and a procedure of attaching the vapor of the organic material to the substrate; wherein, the procedure of stretching the substrate outward while holding the substrate, Use the substrate stretching device as described in any of items 1 to 19 of the patent application.

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