TWI652471B - Online gantry with conveyor equipment for AOI θ axis alignment - Google Patents

Abstract

The conveying equipment of the on-line stand of the present invention comprises: a conveying flat plate portion (110), placing the inspection object, reciprocating conveyance on the on-line stand (10), and performing θ-axis alignment; and a conveying belt portion (120), performing lifting / Lower to load or unload the inspection object onto the conveying plate portion (110); the first crossbar (130) and the second crossbar (131) support the conveyer belt portion (120) in a vertical direction The ground is formed and arranged on one side and the other side of the line stand (10); the first raising / lowering driving part (140) and the second raising / lowering driving part (141), so that the first horizontal The bar (130) and the second cross bar (131) are raised / lowered, and are coupled to both ends of each of the first cross bar (130) and the second cross bar (131).

Description

On-line stand with conveyor capable of AOI θ-axis alignment

The present invention relates to an on-line detection device having a display screen conveying device, and more specifically, to an AOI θ-axis alignment and vacuum suction display screen for conveyance, so that a display screen that can be safely conveyed without shaking can be used. AOI On-line stand for θ-aligned conveyors.

Generally speaking, on-line inspection equipment is used to detect pattern defects or foreign objects on display screens such as TFT LCD panels, PDPs, and color filters.

This type of in-line stage detection equipment includes a conveyor that conveys a test target board, and an up / down module for the conveyor belt. The same base surface of the shelf drive shaft of the object board.

In addition, as shown in FIGS. 1 to 2, the StandAloneAOI detection device is formed with a theta align axis at a lower portion of a main base of a rack of a transport rack.

In addition, the rack is formed with a servomotor that transmits power for securing the angle, and a cross roller bearing for precise rotation.

In addition, the lifting / lowering device of the conveyor belt raising / lowering is formed on the same base surface as the drive shaft of the rack. Therefore, when the conventional rack linear conveyor structure is applied to the θ-axis alignment module for angle assurance, the θ-axis occurs The interference between the alignment module and the belt lifting / lowering device.

Problem to be Solved: In order to solve the above-mentioned problem, the present invention provides an on-line stand having a conveying device capable of performing AOI θ-axis alignment. In order to prevent the θ-axis alignment module and the conveyor belt for detecting the θ-axis alignment of an object board The raising / lowering device interferes, and the raising / lowering device is formed on the outer side of the wire rack.

However, the objects of the present invention are not limited to the objects described above, and those with ordinary knowledge in the technical field of the present invention should understand other objects not involved.

In order to achieve the above object, the present invention is characterized in that according to the on-line stand of the present invention, an optical inspection machine for optically detecting a defect of a component and a conveying device for moving an inspection object body at a predetermined interval are formed. To carry out inspection, the conveying equipment includes: a conveying flat plate section (110), placing the inspection object body, reciprocating conveyance on a bottom plate (12) on a wire rack (10), and performing θ-axis alignment; a conveyor belt The first cross bar (130) and the second cross bar (131) are used to support the conveyer belt. The portion (120) is formed vertically and vertically, and is arranged on one side and the other side of the line stand (10), respectively; the first raising / lowering driving portion (140) and the second raising / lowering driving portion (141). So that the first crossbar (130) and the second crossbar (131) are raised / lowered, and are coupled to both ends of each of the first crossbar (130) and the second crossbar (131).

In addition, the conveyor belt portion (120) includes a support frame (121), a plurality of which are arranged side by side at a predetermined interval in a conveying direction of the inspection object body, and both ends are placed on the first crossbar (130) And the upper part of the second cross bar (131); a plurality of conveyor belt rollers (122) are arranged on the support frame (121) to rotate; and a roller driving unit (123) is provided to rotate the conveyor belt rollers (122) Driving power.

In addition, the support frame (121) is formed by being supported on the first crossbar (130) and the second crossbar (131), so that between the conveyor belt portion (120) and the bottom plate (12) A space (13) is formed therebetween, so that the conveying flat plate portion (110) is reciprocated in the space (13).

In addition, the conveying flat plate section (110) includes: an LM guide (111), and a plurality of longitudinally arranged and operated on an upper portion of the bottom plate (12); a base (112), in the LM guide (111) The upper configuration is combined and conveyed longitudinally by the operation of the LM guide (111); the θ-axis adjustment plate (113) is configured on the upper portion of the base (112) for the inspection object body The theta axis alignment is guaranteed while rotating.

Furthermore, a servo motor (M2) and a guide block (GB) continuously formed by forming an arc with respect to the center of the base (112) are formed on the upper portion of the base (112), and are adjusted on the θ axis A guide rail (GL) protruding toward the guide block (GB) side is formed in a lower portion of the plate (113), and the θ axis is adjusted by driving the servo motor (M2). The guide rail (GL) of the plate (113) is conveyed along the guide block (GB) of the base (112).

In addition, the conveying flat plate section (110) further includes a vertical plate frame (114), and a plurality of upper-end portions of the θ-axis adjusting plate (113) are arranged in the conveying direction of the inspection object body, and are arranged side by side at a predetermined interval. Ground arrangement; a plurality of level vacuum plates (115) are arranged at the upper end of the vertical plate frame (114) in the conveying direction of the inspection object body, and can be fixed on the upper surface in order to adsorb the inspection object body, An adsorption hole (H) is formed to adsorb air.

In addition, the level vacuum plate (115) is arranged at a predetermined interval to prevent interference with the support frame (121) and the roller (122) of the adjacent conveyor belt portion (120), and is arranged at each of the level vacuum plates. A predetermined space is formed between (115), and a conveyor belt roller (122) of the conveyor belt portion (120) is formed in the predetermined space.

The features and benefits of the present invention will be made clearer by using the following detailed description of the level.

The terms or words used in this specification and the scope of the patent application cannot be interpreted in ordinary and lexicographical terms. The principle of the term may be appropriately defined by the inventor in order to explain his invention in the best way, so as to conform to the technicality of the present invention. Explain the meaning and concept of thought.

10‧‧‧online stand

11‧‧‧Optical Inspection Machine

110‧‧‧Transportation flat section

111‧‧‧LM guide

112‧‧‧base

113‧‧‧θ axis adjustment plate

114‧‧‧Vertical plate frame

115‧‧‧level vacuum plate

12‧‧‧ floor

120‧‧‧ Conveyor Belt Department

121‧‧‧ support frame

122‧‧‧ Conveyor Roller

123‧‧‧Roller driving unit

13‧‧‧ space

130‧‧‧ the first bar

131‧‧‧ Second bar

140‧‧‧First lift / lower drive unit

141‧‧‧Second lifting / lowering drive unit

GB‧‧‧Guide block

GL‧‧‧Guide rail

FIG. 1 is a perspective view of a conventional ordinary on-line stand.

Fig. 2 is a configuration diagram showing a conventional ordinary stand Alone AOI.

Fig. 3 is a perspective view of an on-line stand having a conveyor belt portion according to the present invention.

Fig. 4 is a plan view of an on-line stand according to the present invention.

Fig. 5 is an exploded perspective view of a conveying flat plate portion according to the present invention.

Fig. 6 is a perspective view of an on-line stand in a state where a conveyor belt portion according to the present invention is disassembled.

Fig. 7 is an enlarged view schematically illustrating a coupling state of a conveyor belt portion and a raising / lowering driving portion according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In the process, for the sake of clarity and convenience of explanation, the thickness of the lines or the size of the constituent elements shown in the drawings may be exaggerated.

In addition, the terms described later are terms defined in consideration of the functions in the present invention, and may be different according to the intentions or conventions of users and operators. Therefore, the definition of such terms should be determined based on the entire content of this specification.

In addition, the following embodiments are not intended to limit the patent scope of the present invention, but are merely exemplary matters of the constituent elements suggested in the patent application scope of the present invention. Embodiments of the constituent elements included in the technical ideas throughout the specification and included in the constituent elements in the scope of patent application that can be replaced by equivalents belong to the patent scope of the present invention.

FIG. 3 is a perspective view of an on-line stand having a conveyor belt portion according to the present invention, FIG. 4 is a plan view of the on-line stand according to the present invention, and FIG. 5 is an exploded view of a conveying flat portion according to the present invention. A perspective view, FIG. 6 is a perspective view of an on-line stand in a state where the conveyor belt portion according to the present invention is disassembled, and FIG. 7 is an enlarged view schematically showing a combined state of the conveyor belt portion and the raising / lowering driving portion according to the present invention. .

As shown in FIG. 3 to FIG. 7, the on-line stand 10 according to the present invention includes: an optical inspection machine 11 for optically detecting a defect of a component; and a conveying device for inspecting an object (not shown) ) Move at a given interval.

At this time, the conveying equipment includes: a conveying flat plate portion 110; a conveying belt portion 120; a first cross bar 130 and a second cross bar 131; a first raising / lowering driving portion 140 and a second raising / lowering driving portion 141.

Furthermore, the inspection object is placed on the conveying flat plate portion 110, and the upper portion of the bottom plate 12 on the wire rack 10 is reciprocated to be conveyed, so that theta-axis alignment can be performed.

In addition, the conveyor belt unit 120 loads or unloads the inspection target body on the upper portion of the conveyor flat plate unit 110 by lifting / lowering.

In addition, the first crossbar 130 and the second crossbar 131 are formed perpendicular to the longitudinal direction to support the conveyor belt portion 120 and are respectively disposed on one side and the other side of the line stand 10.

In addition, the conveyor belt portion 120 includes a support frame 121, a plurality of which are arranged side by side with a predetermined interval in the conveying direction of the inspection object body, and the two ends are placed on the first crossbar 130 and the second crossbar An upper part of 131; a plurality of conveyor belt rollers 122 are provided on the support frame 121 to rotate; and a roller driving section 123 provides power for driving the conveyor belt rollers 122 to rotate.

That is, the conveyor belt portion 120 includes a support frame 121 provided on the upper portion of the first crossbar 130 and the second crossbar 131 to support both sides in the longitudinal direction. A plurality of conveyor belts are provided on the support frame 121. Roller 122.

In addition, when the support frame 121 is formed in a double number (four or more), in order to connect the support frames 121 other than the support frame 121 formed on the outer side (the outermost side) with two, it is further included on one side and The other side is connected with the connection part.

In addition, the support frame 121 is formed by supporting the first crossbar 130 and the second crossbar 131, so that a space 13 is formed between the conveyer belt portion 120 and the bottom plate 12, and the conveyance flat plate portion 110 is conveyed back and forth in the space 13.

In addition, the conveying flat plate portion 110 includes: a plurality of LM guides 111 arranged in the upper portion of the bottom plate 12 to run in a longitudinal direction; and a combination of LM guides 111 arranged in the upper portion of the LM guide 111 and guided by the LM A base 112 that is transported in the longitudinal direction by the operation of the member 111; a θ-axis adjustment plate 113 that is rotated for securing the θ-axis alignment of the inspection object body is arranged on the upper portion of the base 112.

At this time, the LM guide 111 is a structure in which the block moves longitudinally on the track, and the block moves on the track by a driving motor (linear motor), which is a well-known matter, and therefore, the structure and work related thereto are omitted. principle.

A servo motor M2 and a guide block GB continuously formed in a circular arc with respect to the center of the base 112 are formed on the base 112.

In addition, a guide rail GL protruding toward the guide block GB side is formed at a lower portion of the θ-axis adjustment plate 113, so that the θ-axis adjustment plate 113 is driven by driving of the servo motor M2. The guide rail GL is conveyed along the guide block GB of the base 112.

Driven by the servo motor M2, the guide rail GL of the θ-axis adjustment plate 113 is transported along the guide block GB of the base 112, and thereby the θ-axis alignment of the inspection object can be performed.

That is, in the high-level equipment, in order to transmit the signal to the inspection object body to the on-line rack 10 side, the conveying equipment of the on-line rack 10 starts to operate. At this time, the inspection object body is placed on the above-mentioned conveyor belt unit 120. The upper part of the flat plate part 110 is conveyed.

In addition, a fixed inspection object is sucked and fixed on the upper surface of the level vacuum plate 115, and after reading a mark by an alignment camera (not shown), it is rotated by θ driven by the servo motor M2. The axis adjustment plate 113 performs θ-axis alignment of the inspection object body.

In addition, the conveying flat plate portion 110 further includes: a plurality of vertical plate frames 114 arranged on the upper end portion of the θ-axis adjustment plate 113 in the conveying direction of the inspection object body and arranged side by side at a predetermined interval; A plurality of upper end portions of the vertical plate frame 114 are arranged in the conveying direction of the inspection object body, and a level vacuum plate 115 is formed to form an adsorption hole H for adsorbing and fixing the inspection object body on an upper surface.

A level vacuum plate 115 is fixed on the vertical plate frame 114 to adsorb and fix the inspection object along the vertical plate frame 114, so that the inspection object can be vacuum-adsorbed, safely transported without shaking, and defects can be ensured. The uniformity and safety of detection can improve the flatness of the inspection object.

In addition, the level vacuum plate 115 and the support frame 121 and the belt roller 122 of the adjacent conveyor belt portion 120 are arranged at a predetermined interval without interference, and a predetermined space is formed between each of the level vacuum plates 115. A conveyor belt roller 122 of the conveyor belt section 120 is provided in the predetermined space.

That is, the level vacuum plate 115 is formed with an adsorption hole H for adsorbing air, and an inspection object is adsorbed and fixed on the upper surface of the level vacuum plate 115, and has a substantially rectangular plate shape.

In addition, the vertical plate frames 114 are arranged side by side with a predetermined interval therebetween, and the level vacuum plates 115 are arranged in the conveying direction of the inspection object body, and can be arranged to prevent interference with the mutually connected conveyor belt rollers 122.

In addition, the vertical plate frame 114 supports the level vacuum plate 115, and the level vacuum plates 115 are arranged at a predetermined interval. A predetermined space is formed between each of the level vacuum plates 115, and a certain space is formed in the predetermined space. The belt roller 122 of the belt section 120 is described.

That is, in addition to the vertical plate frames arranged on the outer sides of the left and right sides, one level vacuum plate is arranged in contact with the upper surfaces of the two vertical plate frames, and the level vacuum plates are arranged at predetermined intervals, and each level vacuum plate 115 There is an established space between them.

At this time, another vertical vacuum plate is formed on the two vertical plate frames that are in contact with the one horizontal vacuum plate so as to overlap and not contact each other.

In addition, the first raising / lowering driving unit 140 and the second raising / lowering driving unit 141 include a linear motor M1 fixedly installed on the upper corner side of the wire rack 10 and the linear motors M1. In combination, a post P that vertically moves up and down by the operation of the linear motor M1.

In addition, the first raising / lowering driving section 140 and the second raising / lowering driving section 141 raise / lower the first crossbar 130 and the second crossbar 131 with each of the first crossbar 130 and the first Both ends of the two cross bars 131 are combined.

At this time, the LM guide 111 is disposed on the inner side of the on-line stand 10 compared to the first raising / lowering driving portion 140 and the second raising / lowering driving portion 141.

That is, the LM guide 111 is disposed between the lifting rods P of the first raising / lowering driving portion 140 and the second raising / lowering driving portion 141.

Accordingly, by forming the first lifting / lowering driving section 140 and the second lifting / lowering driving section 141 on the outer side of the line stand 10, the conveying flat plate section 110, the first lifting / lowering driving section 140, and the first lifting / lowering driving section 140 are prevented. Interference from the two raising / lowering driving section 141.

The present invention has been described in detail through specific embodiments, but it is only a detailed description of the present invention, and the present invention is not limited to this. Those skilled in the art of the present invention can make modifications within the scope of the technical idea of the present invention. Or improvement.

The simple deformation or deformation of the present invention belongs to the scope of the present invention, and the specific protection scope of the present invention will be clarified by applying for a patent scope.

According to the present invention, as described above, according to the present invention, the raising / lowering driving portion is formed on the outer side of the line stand, thereby preventing interference between the conveying flat plate portion and the raising / lowering driving portion, and enabling θ-axis alignment. , And improve the distortion of the position of the inspection object, and improve the accuracy of the inspection results.

In addition, the inspection object is conveyed by vacuum suction, so that the display screen can be safely transported without shaking, thereby ensuring uniformity and safety of defect detection and improving the flatness of the inspection object.

Claims (5)

An on-line stand formed with an optical inspection machine for optically detecting a defect of a component and a conveying device for moving an inspection object body at a predetermined interval for inspection, wherein the conveying device includes: a conveying plate section (110) , The inspection object is placed, and the bottom plate (12) of the on-line stand (10) is reciprocally conveyed to perform θ-axis alignment; the conveyor belt portion (120) is raised / lowered to load the inspection object on the transport plate portion ( 110) upper part or unloading; the first crossbar (130) and the second crossbar (131) are formed vertically to support the conveyor belt part (120), and are respectively arranged on one side of the line stand (10) And the other side; and the first raising / lowering driving section (140) and the second raising / lowering driving section (141), so that the first crossbar (130) and the second crossbar (131) are raised / lowered, Combined with the two ends of each of the first crossbar (130) and the second crossbar (131); wherein the conveyor belt part (120) includes: a support frame (121), and the conveying direction of the inspection object body is determined according to a predetermined A plurality are arranged side by side at intervals, and both ends are placed on the upper part of the first crossbar (130) and the second crossbar (131); the conveyor belt roller (122) is on the support A plurality of frames (121) are provided to rotate; and a roller driving unit (123) provides power for rotationally driving the belt roller (122), and the first crossbar (130) and the second crossbar ( 131) is supported on the support frame (121) to form a space (13) between the conveyor belt portion (120) and the bottom plate (12), so that the conveyor flat plate portion (110) is in the space (13) Conveying. According to the on-line platform described in item 1 of the patent application scope, wherein the conveying flat plate portion (110) includes: an LM guide (111), and a plurality of longitudinally arranged upper portions of the bottom plate (12) are operated; a base ( 112), a combination is arranged on the upper part of the LM guide (111), and is conveyed in the longitudinal direction by the operation of the LM guide (111); and a θ-axis adjustment plate (113) is arranged on the upper part of the base (112) In combination, the inspection object is rotated for θ-axis alignment guarantee. The on-line stand according to item 2 of the scope of patent application, wherein a servo motor (M2) is formed on the upper portion of the base (112) and a guide block continuously formed by forming an arc with respect to the center of the base (112) A guide (GL) is formed on the lower part of the θ-axis adjustment plate (113), and a guide rail (GL) protruding toward the guide block (GB) side is formed. Driven so that the guide rail (GL) of the θ-axis adjustment plate (113) is conveyed along the guide block (GB) of the base (112). According to the on-line stand described in item 2 of the patent application scope, wherein the conveying flat plate portion (110) further includes: a vertical plate frame (114), and an upper end portion of the θ-axis adjusting plate (113) is formed by the inspection object. A plurality of conveying directions are arranged side by side at a predetermined interval; and a level vacuum plate (115) is arranged at the upper end portion of the vertical plate frame (114) in the conveying direction of the inspection object body, and the inspection object The body adsorption may be fixed on the upper surface, and an adsorption hole (H) for forming adsorption air is formed. The on-line stand as described in item 4 of the scope of patent application, wherein the level vacuum plate (115) prevents interference with the support frame (121) and the belt roller (122) of the adjacent belt section (120). They are arranged at predetermined intervals, a predetermined space is formed between each of the level vacuum plates (115), and a belt roller (122) of the belt section (120) is formed in the predetermined space.