KR100892088B1 - Non-Contact Film Inspection Equipment by using Porous type Air Floating - Google Patents

Abstract

The present invention relates to a non-contact film inspection apparatus using air floating, the object is to prevent all damage and contamination of the film generated during the inspection process to ensure that all the inspection process of the film, including the loading and unloading of the film is made non-contact. The present invention provides a non-contact film inspection apparatus using air floating. The present invention for this purpose is provided with a non-contact vacuum chuck is a non-contact vacuum suction the film to be inspected and loaded into the inspection device; A porous block for injecting air to the upper surface is provided to support the film carried by the loading unit by air floating, and is formed to be inclined to either one of the left and right sides so that the floated film is moved to either side by the inclination. A first air bearing conveyor; An air blowing guide installed adjacent to the inclined side of the first air bearing conveyor and having another porous block for injecting air to the side of the film so as to align the film at a predetermined position in a non-contact manner; A plurality of nozzles installed at both sides of the first air bearing conveyor, for transporting the film by injecting air into the film located on the first air bearing conveyor; A plurality of cameras installed on a frame positioned vertically above the first air bearing conveyor to check for defects in the film; Stopper nozzles installed on a first air bearing conveyor so as to be positioned before and after the inspection region by the camera, and stopping the film before and after the inspection region by spraying air toward the front of the conveyed film; And a non-contact vacuum chuck, and an unloading unit installed on the discharge side of the first air bearing conveyor and non-contact vacuum adsorption of the completed film, and then loading the film onto a tray. Let that thing be about the technical gist.

Air Bearing Conveyor, Tilt, Gripper, Air Floating

Description

Non-Contact Film Inspection Equipment by using Porous type Air Floating}

1 is a perspective view of a test apparatus according to a preferred embodiment of the present invention,

2 is a plan view of FIG.

3 is a conceptual view showing a state in which the loading unit according to the present invention applied to the inspection apparatus,

4 is a front view of a non-contact vacuum chuck in accordance with the present invention;

5 is a bottom view of a non-contact vacuum chuck in accordance with the present invention;

6 is a front schematic view showing a configuration of a first air bearing conveyor according to the present invention;

7 is a partial perspective view of a porous block located in a transport zone of the present invention;

8 is a partial perspective view of a porous block located in the inspection area of the present invention;

9 is a plan view showing a state in which the nozzle according to the present invention is installed,

10 is a conceptual diagram showing a state in which the film is transported by the nozzle according to the present invention,

11 is a front view showing a state in which the camera according to the present invention is installed,

12 is a conceptual view showing a state in which a stopper nozzle is installed according to the present invention;

13 is a perspective view showing the configuration of the gripper according to the present invention,

14 is a conceptual diagram showing a conveying state of the film by the gripper unit according to the present invention;

15 is a plan view schematically illustrating a state in which a second air bearing conveyor and a marking head are installed according to the present invention;

Figure 16 is a schematic side view showing the operation configuration of the up-down area according to the present invention.

<Description of the symbols for the main parts of the drawings>

100: loading unit 110: non-contact vacuum chuck

120: gantry stage 200: first air bearing conveyor

210: porous block 300: air blowing guide

(320): up-down area (400): nozzle

500: Camera 510: Frame

600: stopper nozzle 700: unloading section

(710): non-contact vacuum chuck 720: gantry type stage

(800): Gripper part 810: Air Gripper

820: transfer frame 830: linear motor

840: Cylinder 900: Second Air Bearing Conveyor

910: stopper 920: marking head

(930): gantry stage (700`): unloading section

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film inspection apparatus, and more particularly, to a non-contact film inspection apparatus using air floating that allows the handling of an inspection subject film to be performed in a non-contact manner in the entire inspection process.

In general, various functional films are used in optical panels such as liquid crystal display (LCD) panels and plasma display panel panels. The functional film may include a protective film, a light diffusion film, a temperature compensation film, and a brightness enhancement film.

Since the functional film as described above effectively generates a very large difference even in the minute defects, a process of inspecting the manufactured film is required.

However, the conventional film inspection process has a low productivity because the work proceeds in a way that depends mostly on the manual work, there is a problem that the reliability is low because the irregularities to the inspection results are generated irregularly according to the skill of the inspector. In spite of these problems, the inspection work is carried out by hand if the film is to be inspected using automated equipment, and the film is directly contacted with the equipment during loading, unloading and conveying of the film for the inspection. This is because it is difficult to provide proper equipment due to various problems such as film damage or foreign matters attached from the equipment.

The present invention has been made in consideration of the above problems, and an object of the present invention is to prevent any damage and contamination of the film generated during the inspection process to be made in a non-contact all inspection process of the film, including the loading and unloading of the film. The present invention provides a non-contact film inspection apparatus using air floating.

Another object of the present invention is to provide a non-contact film inspection apparatus using air floating that can improve productivity by automating the film inspection process.

The present invention to achieve the object as described above and to perform the problem for eliminating the conventional drawbacks is provided with a non-contact vacuum chuck is a non-contact vacuum adsorption of the film to be inspected and loaded into the inspection device;

A porous block for injecting air to the upper surface is provided to support the film carried by the loading unit by air floating, and is formed to be inclined to either one of the left and right sides so that the floated film is moved to either side by the inclination. A first air bearing conveyor;

An air blowing guide installed to be adjacent to the inclined side of the first air bearing conveyor and having another porous block for injecting air to the side of the film so as to align the film at a predetermined position in a non-contact manner;

A plurality of nozzles installed at both sides of the first air bearing conveyor, for transporting the film by injecting air into the film located on the first air bearing conveyor;

A plurality of cameras installed on a frame positioned vertically above the first air bearing conveyor to check for defects in the film;

A stopper nozzle installed on the first air bearing conveyor so as to be positioned before and after the inspection region by the camera, and stopping the film before and after the inspection region by spraying air toward the front of the conveyed film;

A non-loading vacuum chuck is provided, the unloading unit installed on the discharge side of the first air bearing conveyor and vacuum-absorbing the inspected film under vacuum; And
Air floating with a gripper for jetting air from both front and rear sides of the film to be transported on the first air bearing conveyor to be transported by a linear motor in a state where the film is fixed at a fixed position, thereby transporting the film at a constant speed in the inspection area. It features a non-contact film inspection device using.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In describing the present invention, if it is determined that the detailed description of the related known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted.

1 is a perspective view of an inspection apparatus according to a preferred embodiment of the present invention, Figure 2 shows a plan view of FIG. 1 and 2, an inspection apparatus according to a preferred embodiment of the present invention includes a loading unit 100, a first air bearing conveyor 200, an air blowing guide 300, and nozzles 400. And a camera 500, a stopper nozzle 600, and an unloading unit 700. The inspection apparatus is configured such that the entire process including the loading, unloading, and inspection processes is performed by a non-contact method with a film. Each component will be described in detail as follows.

Figure 3 shows a conceptual diagram showing a state in which the loading unit according to the invention applied to the inspection apparatus, Figure 4 shows a front view of the non-contact vacuum chuck according to the present invention, Figure 5 is a bottom view of the non-contact vacuum chuck according to the present invention. It is shown. 3 to 5, the loading unit 100 is a non-contact vacuum chuck which sequentially supplies the film loaded and transported on the tray 11 to the first air bearing conveyor 200, and vacuum-adsorbs the film. And a gantry-type stage 120 for transferring the non-contact vacuum chuck 110 from the tray 11 to the first air bearing conveyor 200. The non-contact vacuum chuck 110 is provided with a plurality of non-contact vacuum chuck pads 111 to vacuum the film in a non-contact manner, by injecting air to the four corners of the film to prevent the vacuum-adsorbed film is separated laterally A restraint guide 113 is provided which restrains the four corners of the film in a non-contact manner. In this case, the non-contact vacuum chuck pad 111 is provided on the surface where the porous block 112 faces the film and is provided with a vacuum hole 112a that provides a vacuum pressure for adsorbing the film to the porous block 112. Non-contact vacuum suction. That is, the film is adsorbed to the vacuum chuck pad 111 by the vacuum pressure provided from the vacuum hole 112a, but the film is not completely adsorbed to the vacuum chuck pad 111 by the air injected from the porous block 112, and is in a non-contact type. Will be adsorbed. In addition, the inner surface of the restraint guide 113 is provided with another porous block 114 for injecting air to the side of the film.

On the other hand, the gantry stage 120 moves the non-contact vacuum chuck 110 in the vertical direction and the tray 11 from the first air bearing conveyor 200 or the first air bearing conveyor 200 from the tray 11. Will provide the ability to move to. Since the configuration of the gantry stage 120 is a known configuration, a more detailed description thereof will be omitted.

6 is a front schematic view showing the configuration of the first air bearing conveyor according to the present invention. 2 and 6, the first air bearing conveyor 200 transfers the film F carried by the loading unit 100, and a porous block spraying air to the upper surface of the upper surface portion. 210 is provided and configured to support by air-floating the film carried by the loading unit 100. On the other hand, the first air bearing conveyor 200 is formed to be inclined to either of the left and right sides so that the air-floating film is moved in a naturally inclined direction by the inclination of the first air bearing conveyor 200, the air blowing guide 300 Configured to be aligned by. This has the advantage that the film can be aligned in the correct position as a simple configuration without providing a complicated structure for aligning the film in place. Meanwhile, the inclination α of the first air bearing conveyor 200 may be freely formed within a range of 90 °, but is preferably formed at 5 ° to prevent sudden movement of the film and to move smoothly.

On the other hand, the first air bearing conveyor 200 is divided into a transport region (S1), which only conveys the film, and an inspection region (S2), which transports and inspects the film, and the porous blocks of the two regions have different structures from each other. 7 shows a partial perspective view of a porous block located in the transport zone of the invention, and FIG. 8 shows a partial perspective view of a porous block located in the inspection zone of the invention. 7 and 8, a plurality of vacuum grooves 211a are formed on the upper surface of the porous block 211 positioned in the transfer area S1 to be parallel to the transfer direction of the film to provide a vacuum pressure. In the upper surface of the porous block 212 positioned in the inspection region S2, a plurality of vacuum holes 212a partially providing a vacuum pressure are formed. As such, the vacuum grooves 211a and the vacuum holes 212a formed in the porous block 211 of the transfer area S1 and the porous block 212 of the inspection area S2 are air injected from the micropores of the porous blocks 211 and 212. It provides a function to hold the film floated by the vacuum pressure, and also to increase the rigidity of the air layer between the porous block and the film to ensure the flatness and stability of the film during transport and inspection of the film. In addition, the vacuum groove 211a of the transfer area S1 may ensure a stable transfer of the film by providing a vacuum pressure in a structure that is elongated along the transfer direction of the film.

As described above, the porous blocks 211 and 212 provided in the first air bearing conveyor 200 are non-contacted by injecting air supplied from a compressed air source such as a compressor (not shown) to the upper surface to float the film.

Referring back to FIG. 6, the air blowing guide 300 aligns the film moving to one side by a tilt of the first air bearing conveyor 200 at a predetermined position, and tilts the first air bearing conveyor 200. It is installed to be adjacent to the first air bearing conveyor 200 on the side, the porous block 310 for injecting air to the side of the film is provided on the side. The air blowing guide 300 is a film that is moved by the inclination of the first air bearing conveyor 200 by causing the air supplied from the compressed air source not shown to be evenly injected through the porous block 310 to the side of the film The film is contacted non-contact and maintained at a constant distance.

On the other hand, the porous block 310 is formed so as to reliably support the film moving by the inclination of the first air bearing conveyor 200 is formed with a vortex generating groove 311 is recessed recessed to generate the vortex.

9 is a plan view showing a state in which the nozzle according to the present invention is installed, Figure 10 shows a conceptual diagram showing a state in which the film is transported by the nozzle according to the present invention. 9 and 10, the nozzles 400 are to convey the air-floating film, it is installed to inject air in the conveying direction of the film on both sides of the first air bearing conveyor 200.

11 is a front view showing a state in which the camera according to the present invention is installed. Referring to FIG. 11, the cameras 500 inspect defects of the film, and the first air bearing conveyor 200 may be moved by a frame 510 installed to be positioned vertically above the first air bearing conveyor 200. It is arranged to cross and inspect the defect of the film transported by the first air bearing conveyor 200.

12 is a conceptual diagram illustrating a state in which a stopper nozzle according to the present invention is installed. Referring to FIG. 12, the stopper nozzles 600 temporarily stop the film transported by the first air bearing conveyor 200 before and after the inspection region S2, and are disposed before and after the inspection region S2. And stop the film being conveyed by injecting air in front of the film being conveyed.

Referring to FIG. 3 again, the unloading unit 700 loads the film on which the inspection has been completed on the tray, and is installed on the discharge side of the first air bearing conveyor 200 to load the film on the tray 12. The difference between the loading unit 100 and the non-contact vacuum chuck 710 and the gantry-type stage 720 is the same, so a detailed description of the configuration is omitted. However, the unloading unit 700 may be configured to load the good and defective goods in different trays according to the inspection result. In this case, it can be configured by placing the tray on which the good goods are stacked and the tray where the bad goods are loaded within the operating range of the gantry-type stage 720 and controlling the good and bad goods to be loaded in each tray.

Figure 13 shows a perspective view showing the configuration of the gripper portion according to the present invention, Figure 14 shows a conceptual diagram showing a transfer state of the film by the gripper portion according to the present invention. Referring to FIGS. 13 and 14, a gripper 800 may be further included to increase the reliability of the inspection by transferring the film at a constant speed in the inspection region S2. The gripper part 800 is composed of a pair of air grippers 810, a transfer frame 820, and a linear motor 830 to transfer the film in a non-contact manner. More specifically, the pair of air grippers 810 are arranged in parallel to each other to maintain a constant interval, the porous block 811 for injecting air to both sides of the front and rear of the film is provided to maintain a constant distance from the film The film is restrained in a non-contact manner. The transfer frame 820 supports one end of the pair of air grippers 810 so that the two air grippers 810 move together, and the two air grippers 810 are perpendicular to the first air bearing conveyor 200. The cylinder 840 for raising and lowering in the direction is provided. The linear motor 830 is installed in parallel with the first air bearing conveyor 200 at one side of the first air bearing conveyor 200, and is coupled to the transfer frame 820 to connect the transfer frame 820 with the first air bearing. It is transferred in a direction parallel to the conveyor (200). Meanwhile, although the cylinder 840 for raising and lowering of the air gripper 810 has been used, the present invention is not limited thereto and may be configured using a motor.

As described above, the gripper 800 moves the air gripper 810 in a state in which the air gripper 810 is positioned at both front and rear sides of the film stopped by the stopper nozzle 600 before the film enters the inspection area S2. Constrains the film by spraying air to both sides of the film through the film, and then transports the film at a constant speed in the inspection area S2 while the conveying frame 820 and the air gripper 810 are transported by the linear motor 830. do.

FIG. 15 is a schematic plan view showing a state in which a second air bearing conveyor and a marking head are installed according to the present invention, and FIG. 16 is a side schematic view showing an operation configuration of an up-down area according to the present invention. Referring to FIGS. 15 and 16, the equipment may be further provided to distinguish between good and defective goods according to the inspection result and to be transferred through different conveyors, and to mark the location of a defect in the case of defective goods. In this case, the second air bearing conveyor 900 is disposed at a position adjacent to the first air bearing conveyor 200 and configured to receive a film determined as defective. The stopper 910 is provided on the second air bearing conveyor 900. ), A marking head 920, a gantry stage 930, and an unloading part 700 ′ are provided. In addition, the air blown guide (so that the film determined as a bad test result is conveyed through the first air bearing conveyor 200 and supplied to the second air bearing conveyor 900 by the inclination of the first air bearing conveyor 200 ( 300 has an up-down area 320 in which a portion is moved up and down.

The up-down area 320 is configured by allowing a portion of the air blowing guide 300 installed in the transport area S1 located at the rear end of the inspection area S2 to be able to move up and down, as described above. Cylinders 321 for the operation of raising and lowering are provided at both ends of the up-down area (320). Therefore, when it is determined that the inspection is bad, the up-down area 320 is raised by the cylinder 321 to secure a space for the film can be supplied to the second air bearing conveyor 900, the film is determined to be defective The first air bearing conveyor 200 is transported and then supplied to the second air bearing conveyor 900 through a space formed by the rise of the up-down area 320.

Similar to the first air bearing conveyor 200, the second air bearing conveyor 900 is provided with a porous block 901 for injecting air to an upper surface of the second air bearing conveyor, and air-floats the film to be supplied. The second air bearing conveyor 900 is naturally formed without a separate device by the inclination of the first and second air bearing conveyors 200 and 900 of the film, which is formed to be inclined in the same direction as the inclined direction and is determined to be defective. It is configured to be supplied with.

The stopper 910 stops the film supplied to the second air bearing conveyor 900 at a predetermined position, and the porous block sprays air to the side of the film moving by the inclination of the second air bearing conveyor 900. 911 is provided to support the contactless while maintaining a constant distance from the film.

The marking head 920 may provide a function of displaying a defect detected by the camera 500 on a film.

The gantry stage 930 is installed on the second air bearing conveyor 900 to support the marking head 920 and provide a function of moving the marking head 920 to a position where a defect is to be displayed. Since the gantry stage 930 is a known configuration as mentioned above, a more detailed description thereof will be omitted.

The unloading part 700 ′ loads the film on which the marking is completed on the tray 13, and the second air bearing conveyor 900 includes a non-contact vacuum chuck and a gantry type stage similarly to the loading part 100 mentioned above. ) Film on the tray 13 is loaded.

The inspection process of the film using the inspection apparatus comprised as mentioned above is demonstrated.

The finished films are supplied to the inspection apparatus while being loaded on the tray 11, and the films loaded on the tray 11 are sequentially supplied to the first air bearing conveyor 200 by the loading unit 100. At this time, the loading unit 100 is a non-contact vacuum suction of the film by using a non-contact vacuum chuck 110, and then transferred to the first air bearing conveyor 200 from the tray 11 by the gantry-type stage 120 film To be supplied to the first air bearing conveyor 200.

As described above, the film supplied to the first air bearing conveyor 200 is air-floated by the air and vacuum pressure injected from the upper surface of the porous block 210 provided in the first air bearing conveyor 200, and thus the first air. It is floating while maintaining a constant gap with the bearing conveyor (200). Meanwhile, the air-floating film is moved by the tilt α of the first air bearing conveyor 200 and aligned at a predetermined position with respect to the air blowing guide 300.

When the position of the film is aligned as described above, the film is transported by injecting air from the nozzles 400 provided on both sides of the first air bearing conveyor 200, and the transported film enters the inspection area S2. It is stopped by the air injected from the previous stopper nozzle (600).

When the transfer of the film is stopped as described above, the transfer frame 820 and the pair of air grippers 810 are moved to the top of the stopped film by the linear motor 830, and then the transfer by the operation of the cylinder 840 The frame 820 and the air gripper 810 descend to restrain the film between the air gripper 810 by injecting air through the air gripper 810 while the air gripper 810 is disposed on both sides of the film. Done.

Subsequently, the film is transferred at a constant speed on the inspection area S2 by the movement of the transfer frame 820 and the air gripper 810 by the linear motor 830, and the camera 500 photographs the film to detect defects. Will be examined.

When the inspection of the film is completed through the inspection area (S2) as described above, the air gripper 810 is raised by the cylinder 840 and the transfer frame 820, the film is the first air bearing conveyor 200 and It is conveyed by the nozzle 400.

On the other hand, if the inspection result is determined that the film is good, the film conveyed by the first air bearing conveyor 200 is stopped by the stopper nozzle 600 installed at the rear end of the inspection area (S2), after which the unloading unit 700 By the tray 12.

On the other hand, the up-down area 320 of the air blowing guide 300 disposed at the rear end of the inspection area S2 is selectively operated only when it is determined as a defective product. In other words, if the inspection determines that the film is defective, the up-down area 320 is raised by the cylinder 321. As such, when the up-down area 320 rises, the film cannot be supported from the side, so that the film is inclined by the first air bearing conveyor 200 and the second air bearing conveyor 900. Is supplied.

When the film is supplied to the second air bearing conveyor 900 as described above, the stopper 910 provided in the second air bearing conveyor 900 is sprayed air to the side of the film to stop at the film fixed position, and The gantry-type stage 930 moves the marking head 920 to a defect position to perform a marking operation to mark the defect position on the film.

When the marking operation as described above is completed, the film is loaded on the tray 13 by the unloading unit 700 ′ for loading the defective product on the tray 13 to complete the inspection process.

The present invention is not limited to the above-described specific preferred embodiments, and various modifications can be made by any person having ordinary skill in the art without departing from the gist of the present invention claimed in the claims. Of course, such changes will fall within the scope of the claims.

The present invention is configured to perform the loading, unloading, transport and inspection process of the film while maintaining a non-contact state with the film using air as described above, so that the film can be automatically inspected without damaging the film. Furthermore, the first air bearing conveyor is configured to be inclined to either side, so that the film to be inspected can be aligned in a fixed position without complicated devices.

Claims (8)

delete A non-contact vacuum chuck 110 having a loading unit 100 for non-contact vacuum adsorption of the film to be inspected and then loaded into the inspection apparatus; Porous block 210 for injecting air to the upper surface is provided to support the film carried by the loading unit 100 by air-floating, it is formed to be inclined to either of the left and right sides of the film is inclined (α A first air bearing conveyor (200) formed to move to either side by (); It is installed to be adjacent to the inclined side of the first air bearing conveyor 200, the air blowing to further align the film in a non-contact fixed position is provided with another porous block 310 to inject air to the side of the film Guide 300; A plurality of nozzles 400 which are installed at both sides of the first air bearing conveyor 200 and inject air into a film located on the first air bearing conveyor 200 to transfer the film; A plurality of cameras 500 installed on a frame 510 positioned vertically above the first air bearing conveyor 200 to inspect defects of the film; It is installed in the first air bearing conveyor 200 to be located in front and rear of the inspection area (S2) by the camera 500, by spraying the air in front of the film to be transported to stop the film before and after the inspection area (S2) Stopper nozzles 600; An unloading part 700 provided with a non-contact vacuum chuck 710, installed on the discharge side of the first air bearing conveyor 200, for non-contact vacuum adsorption of the film on which the inspection is completed, and then loading on the tray 12; And The air is sprayed from the front and rear sides of the film transported on the first air bearing conveyor 200 to be transported by the linear motor 830 in a state where the film is fixed at a constant position, thereby transporting the film in the inspection area S2 at a constant speed. Non-contact film inspection apparatus using air floating, characterized in that it comprises a gripper portion 800 to transfer to. The method of claim 2, wherein the gripper portion 800, A pair of air grippers 810 provided with a porous block 811 to inject air to both front and rear sides of the film entering the inspection area S2 by the camera 500; A transport frame 820 having a cylinder 840 or a motor supporting one end of the pair of air grippers 810 and lifting and lowering the air grippers 810 in a vertical direction of the first air bearing conveyor 200. ; And One side of the first air bearing conveyor 200 is installed in parallel with the first air bearing conveyor 200, is connected to the transfer frame 820, the transfer frame 820 to the first air bearing conveyor 200 Non-contact film inspection apparatus using air floating, characterized in that consisting of; linear motor for transferring in parallel with the direction. The method of claim 2, wherein the non-contact vacuum chuck (110, 710), A plurality of non-contact vacuum chuck pads 111 for vacuum-absorbing the film in a non-contact manner, and a restraint guide 113 for injecting air from the four corners of the film to the side of the film to restrain the film in a non-contact manner, The non-contact vacuum chuck pad 111 is provided with a porous block 112 on the surface facing the film, and the vacuum block 112a for providing a vacuum pressure to the porous block 112 is provided with a non-contact vacuum suction Non-contact film inspection apparatus using air floating, characterized in that configured to. The method of claim 2, When the air blowing guide 300 is determined to be a defective product by the inspection result of the camera 500, the defect-determined film is adjacent to the first air bearing conveyor 200 by the inclination of the first air bearing conveyor 200. 2 is provided with an up-down area 320 to form a space to be supplied to the air bearing conveyor 900, The up-down area 320 is configured by allowing a portion of the air blowing guide 300 installed in the transport area S1 located at the rear end of the inspection area S2 to move up and down. Non-contact film inspection apparatus using air floating, characterized in that the cylinder 321 for the lifting operation of the up-down area 320 is installed on both sides. The method of claim 5, wherein A stopper 910 having a porous block 911 for injecting air toward the film such that the film supplied to the second air bearing conveyor 900 stops at a predetermined position; A marking head 920 moving in a vertical upper portion of the second air bearing conveyor 900 and displaying a defect detected by the camera 500 on a film; A gantry stage 930 installed on the second air bearing conveyor 900 to move the marking head 920; And Another unloading unit 700` for loading the film on which the marking operation is completed by the marking head 920 to the tray 13 by non-contact vacuum suction using a non-contact vacuum chuck; Non-contact film inspection apparatus using air floating, characterized in that it further comprises. The method of claim 2, wherein the first air bearing conveyor 200, It consists of an inspection area (S2) where the transfer and inspection of the film is made and a transfer area (S1) where only the transfer of the film is carried out, The porous block 212 of the inspection region S2 is formed with a plurality of vacuum holes 212a partially providing a vacuum pressure. Porous block 211 of the transfer area (S1) is formed in parallel with the conveying direction of the film is formed using a plurality of vacuum grooves (211a) for continuously providing a vacuum pressure to the film to be transported using air floating Non-contact film inspection device. The method of claim 2, Non-contact film inspection apparatus using air floating, characterized in that the porous block 310 of the air blowing guide 300 is recessed recessed to form a vortex generating groove (311).

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