CN109521017B - Inline gantry with AOI theta axis alignable transport apparatus - Google Patents
Inline gantry with AOI theta axis alignable transport apparatus Download PDFInfo
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- CN109521017B CN109521017B CN201711175894.8A CN201711175894A CN109521017B CN 109521017 B CN109521017 B CN 109521017B CN 201711175894 A CN201711175894 A CN 201711175894A CN 109521017 B CN109521017 B CN 109521017B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/11—Roller frames
- B65G13/12—Roller frames adjustable
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/02—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor using a plurality of sample containers moved by a conveyor system past one or more treatment or analysis stations
- G01N35/04—Details of the conveyor system
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
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- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- Textile Engineering (AREA)
- Mechanical Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The conveying apparatus of an inline stage according to the present invention comprises: a conveying flat plate part (110) for placing the inspection object body, carrying out reciprocating conveying on the online bench (10) and aligning the theta axis; a conveyor belt unit (120) that is raised/lowered to load/unload the inspection object onto/from the upper part of the conveyor flat plate unit (110); 1 st and 2 nd crossbars (130,131) vertically formed in the longitudinal direction for supporting the conveyor belt part (120) and respectively disposed on one side and the other side of the on-line stage (10); 1 st and 2 nd lifting/lowering driving parts (140,141) for lifting/lowering the 1 st and 2 nd cross bars (130,131) and combining the 1 st and 2 nd cross bars (130,131) at both ends.
Description
Technical Field
The present invention relates to an on-line inspection apparatus having a display screen conveying apparatus, and more particularly, to an on-line stage having a conveying apparatus capable of performing AOI theta axis alignment, vacuum-adsorbing a display screen for conveying, and thereby, safely conveying the display screen without shaking.
Background
In general, an in-line inspection apparatus is an apparatus for inspecting a tft lcd panel or a display screen such as a PDP, a color filter, or the like for pattern defects or foreign substances.
Such an online stage (in-line stage) detection apparatus includes: a conveyor belt (conveyor) for conveying a board to be inspected is formed on the same base surface as a rack drive shaft on which the board to be inspected is placed, so that a conveyor belt lifting/lowering device (up/down module) is provided.
Also, as shown in fig. 1 to 2, the Stand Alone AOI inspection apparatus is formed with theta axis alignment (theta alignment) at the lower portion of the shelf main base 1 of the transport shelf.
The rack is formed with a motor 2(servo motor) for transmitting power for ensuring an angle and a cross roller bearing 3(cross roller bearing) for precise rotation.
Further, since the lifting/lowering device for lifting/lowering the belt is formed on the same base surface as the rack driving shaft, when the conventional rack linear belt structure is applied to the θ -axis alignment module for ensuring the angle, there occurs a problem that the θ -axis alignment module and the belt lifting/lowering device interfere with each other.
Disclosure of Invention
Problems to be solved by the invention
In order to solve the above-described problems, the present invention provides an inline stage having a transport apparatus capable of AOI theta axis alignment, and an elevating/lowering device is formed at an outer side of the inline stage in order to prevent a theta axis alignment module for detecting theta axis alignment assurance of a target board from interfering with a transport belt elevating/lowering device.
However, the object of the present invention is not limited to the above-described object, and those skilled in the art of the present invention will understand other objects not mentioned.
Technical scheme for solving problems
In order to achieve the above object, according to an on-line stage of the present invention, an optical inspection machine for optically detecting a defect of a component and a conveying apparatus for moving an inspection object at a predetermined interval are formed to perform an inspection, the conveying apparatus including: a conveying flat plate part 110 for placing the inspection object body, reciprocating conveying on a bottom (bottom) plate 12 of the online bench 10, and aligning the theta axis; a conveyor belt unit 120 that is raised/lowered to load/unload the inspection object onto/from the upper part of the conveyor flat plate unit 110; 1 st and 2 nd crossbars 130 and 131 vertically formed in the longitudinal direction for supporting the conveyor belt part 120 and respectively disposed at one side and the other side of the inline stage 10; the 1 st and 2 nd raising/lowering driving parts 140 and 141 raise/lower the 1 st and 2 nd crossbars 130 and 131 and are coupled to both ends of the 1 st and 2 nd crossbars 130 and 131, respectively.
The conveyor belt unit 120 includes: a plurality of support frames 121 arranged side by side at predetermined intervals in the conveying direction of the inspection object, both ends of each support frame being placed on the upper portions of the 1 st and 2 nd horizontal bars 130, 131; a plurality of belt rollers 122 rotatably provided on the support frame 121; the roller driving unit 123 provides power for driving the belt roller 122 to rotate.
The supporting frame 121 is supported and formed on the 1 st and 2 nd horizontal bars 130 and 131, so that a space 13 is formed between the conveyer belt part 120 and the bottom (bottom) plate 12, and the conveyer flat plate part 110 is reciprocatingly conveyed in the space 13.
The conveying flat plate portion 110 includes: an LM guide 111 which runs by being longitudinally arranged in plurality on the upper portion of the bottom (bottom) plate 12; a base 112 coupled to an upper portion of the LM guide 111 and vertically moved by the operation of the LM guide 111; and a θ -axis adjusting plate 113 disposed and coupled to an upper portion of the base 112 and rotated to ensure alignment of the θ axis of the inspection object.
A servomotor M2 and a guide block GB continuously formed to form an arc with respect to the center of the base 112 are formed on the upper portion of the base 112, and a guide rail GL protruding toward the guide block GB is formed on the lower portion of the θ -axis adjusting plate 113, whereby the guide rail GL of the θ -axis adjusting plate 113 is conveyed along the guide block GB of the base 112 by the driving of the servomotor M2.
The conveying flat plate portion 110 further includes: a plurality of vertical plate frames 114 arranged at the upper end of the θ -axis adjustment plate 113 in the conveying direction of the inspection object and arranged side by side at predetermined intervals; a plurality of horizontal vacuum plates 115 are arranged in the upper end portion of the vertical plate frame 114 in the conveying direction of the inspection object, and have suction holes H formed therein for sucking air so that the inspection object can be sucked and fixed on the upper surface.
The horizontal vacuum plates 115 are disposed at predetermined intervals so as to prevent interference with the support frames 121 and the rollers 122 of the conveyor belt parts 120 adjacent to each other, and a predetermined space is formed between the horizontal vacuum plates 115, and the conveyor rollers 122 of the conveyor belt parts 120 are formed in the predetermined space.
The features and benefits of the present invention will become more apparent from the following detailed description, taken in conjunction with the accompanying drawings.
Terms or words used in the scope of the present specification and claims cannot be interpreted in a general and dictionary manner, and are interpreted in the meaning and concept conforming to the technical idea of the present invention on the principle that the inventor may appropriately define terms for the best explanation of his own invention.
ADVANTAGEOUS EFFECTS OF INVENTION
As described above, according to the present invention, the raising/lowering driving portion is formed outside the wire stage, so that interference between the conveying flat plate portion and the raising/lowering driving portion is prevented, the θ -axis alignment is performed, the position distortion of the inspection object is improved, and the accuracy of the inspection result is improved.
Further, the inspection object is conveyed by vacuum suction, so that the display screen can be conveyed safely without shaking, thereby ensuring uniformity and safety of defect detection and improving flatness of the inspection object.
Drawings
FIG. 1 is a perspective view of a conventional on-line stage,
FIG. 2 is a diagram showing the structure of a conventional general Stand Alone AOI,
figure 3 is a perspective view of an inline skid with a conveyor belt section according to the invention,
figure 4 is a plan view of an in-line gantry according to the present invention,
figure 5 is an exploded perspective view of a conveying flat plate section according to the present invention,
figure 6 is a perspective view of an on-line gantry with a conveyor belt portion exploded according to the present invention,
fig. 7 is an enlarged view schematically showing a coupling state of the conveyor belt part and the lifting/lowering driving part according to the present invention.
Reference signs
1 main base 2 motor 3 cross roller bearing
10 on-line stage 110 conveying flat plate part
111: LM guide 112: base
113 theta axis adjusting plate 114 vertical plate frame
115 horizontal vacuum plate 120 conveyor belt part
121, support frame 122, conveyor belt roller
123 connecting parts 130,131 No. 1 and No. 2 cross bars
140,141 No. 1 and No. 2 lifting/lowering driving parts
GB guide piece block GL guide piece rail
Detailed Description
Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In this process, the thickness of the lines and the size of the components shown in the drawings are exaggerated for clarity and convenience of description.
The term to be described later is defined in consideration of the functions of the present invention, and may be different depending on the intention of the user or the operator or the convention. Therefore, definitions for such terms should be determined based on the entire contents of the present specification.
The following embodiments are not intended to limit the scope of the present invention, and are merely exemplary matters of the constituent elements presented in the claims of the present invention, and embodiments including constituent elements that can be replaced with equivalents in the constituent elements of the claims included in the technical idea of the entire specification of the present invention belong to the scope of the present invention.
Fig. 3 of the accompanying drawings is a perspective view of an inline stage having a conveyor belt part according to the present invention, fig. 4 is a plan view of the inline stage according to the present invention, fig. 5 is an exploded perspective view of a conveyor flat plate part according to the present invention, fig. 6 is a perspective view of the inline stage in a state where the conveyor belt part according to the present invention is exploded, and fig. 7 is an enlarged view schematically illustrating a coupling state of the conveyor belt part and the elevation/depression driving part according to the present invention.
As shown in fig. 3 to 7, the inline stage 10 according to the present invention includes: an optical inspection machine 11 for optically inspecting the component for defects; and a transport facility for moving the object to be inspected (not shown) at predetermined intervals.
At this time, the conveying apparatus includes: a conveying flat plate portion 110; a conveyor belt portion 120; 1 st and 2 nd crossbars 130, 131; 1 st and 2 nd up/down driving parts 140 and 141.
The inspection object is placed on the conveying flat plate portion 110, and is reciprocated above a bottom (bottom) plate 12 of the in-line stage 10, so that the θ -axis alignment can be performed.
The conveyor unit 120 is raised and lowered to load and unload the inspection object on and from the upper part of the conveyor flat plate portion (110).
The 1 st and 2 nd crossbars 130 and 131 are formed perpendicular to the longitudinal direction to support the conveyor belt part 120, and are disposed at one side and the other side of the wire rack 10, respectively.
The conveyor belt unit 120 includes: a plurality of support frames 121 arranged side by side at predetermined intervals in the conveying direction of the inspection object, both ends of each support frame being placed on the upper portions of the 1 st and 2 nd horizontal bars 130, 131; a plurality of belt rollers 122 rotatably provided on the support frame 121; and a roller driving part 123 for providing power for driving the conveying belt roller 122 to rotate.
That is, the conveyer belt part 120 includes a support frame 121 provided on the upper portions of the 1 st and 2 nd crossbars 130 and 131 for supporting both sides in the longitudinal direction; a plurality of belt rollers 122 are provided on the support frame 121.
When the number of the support frames 121 is two (4 or more), the support frames 121 other than the support frame 121 formed on the outer side (outermost side) may be connected to each other by 2 pieces, and may further include a connecting portion connected to one side and the other side.
The supporting frame 121 is supported and formed by the 1 st and 2 nd horizontal bars 130 and 131, so that a space 13 is formed between the conveyer belt part 120 and the bottom (bottom) plate 12, and the conveyer flat plate part 110 is reciprocatingly conveyed in the space 13.
The conveying flat plate portion 110 includes: an LM guide 111 running by being longitudinally arranged in plurality on the upper portion of the bottom (bottom) plate 12; a base 112 coupled to an upper portion of the LM guide 111 and vertically conveyed by the operation of the LM guide 111; a θ -axis adjusting plate 113 is disposed above the base 112 and coupled to rotate to ensure alignment of the θ -axis of the inspection object.
In this case, the LM guide 111 is a structure in which the block is moved longitudinally on the rail, and the block is moved on the rail by a driving motor (linear motor), which is a well-known matter, and thus, the structure and operation principle thereof are omitted.
A servomotor M2 and a guide block GB continuously formed in an arc shape with respect to the center of the base 112 are formed on the upper portion of the base 112.
A guide rail GL protruding toward the guide block GB side is formed at a lower portion of the θ -axis adjustment plate 113, and thus the guide rail GL of the θ -axis adjustment plate 113 is conveyed along the guide block GB of the base 112 by the driving of the servomotor M2.
By driving the servomotor M2, the guide rail GL of the θ -axis adjusting plate 113 is conveyed along the guide block GB of the base 112, and thereby the θ -axis alignment of the inspection target body can be performed.
That is, in the upstream apparatus, when the transport apparatus of the inline stage 10 starts to operate in order to transmit a signal to the inspection object to the inline stage 10 side, the inspection object is placed on the upper portion of the transport flat plate portion 110 by the transport belt portion 120.
Then, the inspection target object is sucked and fixed on the upper surface of the horizontal vacuum plate 115, and after a mark (mark) is read by an alignment camera (not shown), the θ axis alignment of the inspection target object is performed by the θ axis adjustment plate 113 rotated by the driving of the servo motor M2.
The conveying flat plate portion 110 further includes: a plurality of vertical plate frames 114 arranged at an upper end portion of the θ -axis adjustment plate 113 in a conveying direction of the inspection object and arranged side by side at a predetermined interval; a plurality of horizontal vacuum plates 115 are disposed in the upper end portion of the vertical plate frame 114 in the conveying direction of the inspection object, and adsorption holes H for adsorbing air are formed to adsorb and fix the inspection object to the upper surface.
A horizontal vacuum plate 115 for sucking and fixing the inspection object along the vertical plate frame 114 is formed at an upper portion of the vertical plate frame 114, so that the inspection object can be sucked in a vacuum manner, and can be safely conveyed without shaking, thereby ensuring uniformity and safety of defect detection and improving flatness of the inspection object.
The horizontal vacuum plates 115 are disposed at predetermined intervals from the support frame 121 and the rollers 122 of the conveyor belt part 120 adjacent to each other without interference, and a predetermined space is formed between the horizontal vacuum plates 115, and the conveyor rollers 122 of the conveyor belt part 120 are disposed in the predetermined space.
That is, the horizontal vacuum plate 115 is formed with adsorption holes H for adsorbing air, and the inspection object is adsorbed and fixed to the upper surface of the horizontal vacuum plate 115, and has a substantially rectangular plate shape.
The vertical plate frames 114 are arranged side by side at predetermined intervals, and the horizontal vacuum plates 115 are arranged in the conveying direction of the inspection object body so as to be able to prevent interference with the conveyor rollers 122 connected to each other.
The vertical plate frame 114 supports the horizontal vacuum plates 115, the horizontal vacuum plates 115 are disposed at predetermined intervals, a predetermined space is formed between the horizontal vacuum plates 115, and the conveyor roller 122 of the conveyor belt 120 is formed in the predetermined space.
That is, one horizontal vacuum plate is disposed in contact with the upper surfaces of the two vertical plate frames, except for the vertical plate frames disposed outside the left and right sides, and the horizontal vacuum plates are disposed with a predetermined interval therebetween, and a predetermined space is formed between the horizontal vacuum plates 115.
At this time, another horizontal vacuum plate is overlapped and formed without contact on the two vertical plate frames contacting the one horizontal vacuum plate.
The 1 st and 2 nd up/down driving units 140 and 141 include: linear motors M1 fixedly installed at upper corner sides of the wire gantry 10, and a lift rod (post) P vertically moving up and down by the operation of the linear motor M1 in combination with the linear motors M1.
The 1 st and 2 nd raising/lowering driving units 140 and 141 raise and lower the 1 st and 2 nd crossbars 130 and 131 to be coupled to both ends of the 1 st and 2 nd crossbars 130 and 131, respectively.
At this time, the LM guide 111 is disposed inside the line stage 10 from the 1 st and 2 nd elevation driving units 140 and 141.
That is, the LM guide 111 is disposed between the lift pins P of the 1 st and 2 nd elevation driving parts 140 and 141.
Thus, the ascending/ descending driving portions 140 and 141 are formed outside the wire bed 10, and the interference of the conveying flat plate portion 110 with the ascending/ descending driving portions 140 and 141 is prevented.
The present invention has been described in detail with reference to the specific embodiments, but the present invention is only described in detail, and the present invention is not limited thereto, and those skilled in the art of the present invention can make modifications and improvements within the technical spirit of the present invention.
While the invention has been described in connection with specific embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (3)
1. An in-line stage in which an optical inspection machine for optically inspecting a defect of a component and a conveying means for moving an inspection object at a predetermined interval are formed to perform an inspection,
the conveying apparatus includes:
a conveying flat plate part (110) for placing the inspection object body, reciprocating conveying on a bottom plate (12) of the online bench (10) and aligning theta axis;
a conveyor belt unit (120) that is raised and lowered to load and unload the inspection object onto and from the upper part of the conveyor flat plate unit (110);
1 st and 2 nd crossbars (130,131) vertically formed in the longitudinal direction for supporting the conveyor belt part (120) and respectively disposed on one side and the other side of the on-line stage (10);
1 st and 2 nd lifting driving parts (140,141) which lift the 1 st and 2 nd cross bars (130,131) and are combined at two ends of the 1 st and 2 nd cross bars (130, 131);
the conveyor belt portion (120) comprising:
a plurality of support frames (121) arranged side by side at a predetermined interval in the conveying direction of the object to be inspected, and both ends of the support frames are placed on the upper parts of the 1 st and 2 nd transverse rods (130, 131);
a plurality of belt conveying rollers (122) which are rotatably provided on the support frame (121);
a roller driving part (123) for providing power for driving the conveying belt roller (122) to rotate,
and the supporting frame (121) is supported and formed on the 1 st and 2 nd crossbars (130,131) so as to form a space (13) between the conveyor belt part (120) and the bottom plate (12),
so that the conveying flat plate part (110) is conveyed to and fro in the space (13);
the conveying plate portion (110) comprises:
an LM guide (111) which is provided in plurality in the longitudinal direction and runs on the upper portion of the base plate (12);
a base (112) coupled to the upper portion of the LM guide (111) and vertically conveyed by the operation of the LM guide (111);
a theta axis adjustment plate (113) which is disposed and coupled to an upper portion of the base (112) and rotates to ensure theta axis alignment of the inspection object;
a servo motor and a guide block continuously formed to form an arc with respect to the center of the base (112) are formed on the upper portion of the base (112),
a guide rail protruding toward the guide block side is formed on a lower portion of the theta axis adjustment plate (113), and thus the guide rail of the theta axis adjustment plate (113) is conveyed along the guide block of the base (112) by the driving of the servo motor.
2. The inline stage of claim 1,
the conveying flat plate portion (110) further includes:
a plurality of vertical plate frames (114) arranged at the upper end of the theta axis adjusting plate (113) in the conveying direction of the object to be inspected and arranged side by side at a predetermined interval;
and a plurality of horizontal vacuum plates (115) arranged in the conveying direction of the inspection object at the upper end of the vertical plate frame (114), and having adsorption holes formed thereon for adsorbing and fixing the inspection object on the upper surface.
3. The inline stage of claim 2,
the horizontal vacuum plates (115) are disposed at predetermined intervals so as to prevent interference with the support frame (121) and the rollers (122) of the conveyor belt part (120) adjacent to each other, a predetermined space is formed between the horizontal vacuum plates (115), and the conveyor belt rollers (122) of the conveyor belt part (120) are formed in the predetermined space.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2017-0120209 | 2017-09-19 | ||
| KR1020170120209A KR101827313B1 (en) | 2017-09-19 | 2017-09-19 | AOI In-line stage with transport device capable of θ-axis alignment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109521017A CN109521017A (en) | 2019-03-26 |
| CN109521017B true CN109521017B (en) | 2021-10-15 |
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ID=61232369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711175894.8A Active CN109521017B (en) | 2017-09-19 | 2017-11-22 | Inline gantry with AOI theta axis alignable transport apparatus |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101827313B1 (en) |
| CN (1) | CN109521017B (en) |
| TW (1) | TWI652471B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102052135B1 (en) * | 2018-04-09 | 2019-12-04 | 주식회사 에이치비테크놀러지 | AOI inspection equipment that can adjust θ axis alignment of side dual gripper drive system |
| KR101994624B1 (en) * | 2018-10-10 | 2019-10-01 | 변성경 | Apparatus for inspection component |
| KR101994622B1 (en) * | 2018-10-10 | 2019-07-02 | 변성경 | Apparatus for transferring component |
| KR102095386B1 (en) * | 2018-11-20 | 2020-03-31 | 주식회사 쎄믹스 | Alignment apparatus for an wafer prober |
| KR102175502B1 (en) * | 2019-03-28 | 2020-11-06 | 주식회사 에이치비테크놀러지 | Hybrid Display Panel Inspection Device Capable of Aligning the Theta Axis of Both the Original Plate and the Separated Plate |
| CN112098418B (en) * | 2020-09-10 | 2024-06-21 | 安徽皓视光电科技有限公司 | Angle correction mechanism and AOI detection device based on glass substrate under air floatation transmission |
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| TW201206803A (en) * | 2010-04-14 | 2012-02-16 | Tae Sung Eng Co Ltd | Multi-gate conveyor |
| CN102514971A (en) * | 2011-12-08 | 2012-06-27 | 深圳市鑫联达包装机械有限公司 | Transfer system capable of continuously delivering paper and transfer method thereof |
| KR101174860B1 (en) | 2012-02-15 | 2012-08-17 | (주)버금시스템 | Display panel test device for aligning tested object with testing board |
| KR101329073B1 (en) * | 2012-07-16 | 2013-11-14 | 주식회사 엠플러스 | Secondary battery electrode stacking machine |
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2017
- 2017-09-19 KR KR1020170120209A patent/KR101827313B1/en active IP Right Grant
- 2017-11-22 CN CN201711175894.8A patent/CN109521017B/en active Active
- 2017-12-25 TW TW106145549A patent/TWI652471B/en active
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|---|---|---|---|---|
| CN1513739A (en) * | 2002-12-18 | 2004-07-21 | 满留安机械株式会社 | Roll conveyer |
| CN1693902A (en) * | 2004-04-30 | 2005-11-09 | 日本麦可罗尼克斯股份有限公司 | Detection device |
| JP2008166348A (en) * | 2006-12-27 | 2008-07-17 | Olympus Corp | Substrate transfer apparatus |
| CN102374995A (en) * | 2010-08-11 | 2012-03-14 | 乐金显示有限公司 | Apparatus and method for inspecting display device |
| CN106564757A (en) * | 2015-08-19 | 2017-04-19 | 数字成像技术公司 | Linear moving stage apparatus |
| KR20160085740A (en) * | 2016-07-07 | 2016-07-18 | 삼성디스플레이 주식회사 | Improved fault detection capability in-line Stage |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101827313B1 (en) | 2018-02-08 |
| CN109521017A (en) | 2019-03-26 |
| TW201915477A (en) | 2019-04-16 |
| TWI652471B (en) | 2019-03-01 |
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