CN112782879A - Automatic large-size liquid crystal display AOI inspection machine - Google Patents

Automatic large-size liquid crystal display AOI inspection machine Download PDF

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Publication number
CN112782879A
CN112782879A CN202110019647.9A CN202110019647A CN112782879A CN 112782879 A CN112782879 A CN 112782879A CN 202110019647 A CN202110019647 A CN 202110019647A CN 112782879 A CN112782879 A CN 112782879A
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China
Prior art keywords
frame
liquid crystal
transverse moving
crystal display
module
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CN202110019647.9A
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Chinese (zh)
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CN112782879B (en
Inventor
洪亚德
林中龙
王士奇
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Xiamen G First Oeic Co ltd
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Xiamen G First Oeic Co ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Liquid Crystal (AREA)

Abstract

The invention discloses an AOI automatic inspection machine for a large-size liquid crystal screen, which comprises a machine base, a feeding mechanism, a delivery inspection mechanism, a detection mechanism and a blanking mechanism, wherein the feeding mechanism, the delivery inspection mechanism, the detection mechanism and the blanking mechanism are arranged on the machine base, the feeding mechanism is used for grabbing the liquid crystal screen to be inspected to be transversely placed on the delivery inspection mechanism along the machine base, the delivery inspection mechanism longitudinally moves along the machine base to convey the liquid crystal screen to be inspected, the detection mechanism is used for detecting the liquid crystal screen, and the blanking mechanism is used for grabbing the liquid crystal screen which is inspected on the delivery inspection mechanism to be transversely moved along the machine. The invention provides an AOI automatic inspection machine for a large-size liquid crystal display, which saves space and cost, has high automation degree and high transfer efficiency, and improves the inspection efficiency.

Description

Automatic large-size liquid crystal display AOI inspection machine
Technical Field
The invention relates to the technical field of liquid crystal screens, in particular to an AOI automatic inspection machine for a large-size liquid crystal screen.
Background
With the development of electronic technology, the price of consumer electronics is lower and lower, the demand of people for electronic products is continuously enlarged, and the size of the liquid crystal screen is larger and larger, which drives the development of the liquid crystal screen. However, in the production of large-sized liquid crystal display panels, with the increase of speed and precision requirements, the defect detection technology has become a bottleneck in the development thereof. The existing large-size liquid crystal screen detection equipment has low automation degree and low efficiency. And because of the large size, transport safety during testing becomes a significant problem.
Disclosure of Invention
The invention provides an AOI automatic inspection machine for a large-size liquid crystal display, which saves space and cost, has high automation degree and high transfer efficiency, and improves the inspection efficiency.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a jumbo size LCD screen AOI automatic check machine, includes the frame, locates feed mechanism, censorship mechanism, detection mechanism and unloading mechanism on the frame, feed mechanism is used for snatching to wait to examine the LCD screen and follows the frame lateral shifting place in censorship mechanism, censorship mechanism follows the frame longitudinal movement is carried and is awaited to examine the LCD screen, detection mechanism is used for detecting the LCD screen, unloading mechanism is used for snatching to examine the mechanism on having examined the LCD screen and follows the frame lateral shifting unloading.
Preferably, the frame is provided with a stabilizing plate, the stabilizing plate is made of marble, the stabilizing plate is provided with a mounting frame, the feeding mechanism and the discharging mechanism are arranged on the mounting frame relatively and respectively comprise a first transverse moving module, a first transverse moving table, a first lifting module, a first lifting table and a grabbing assembly, the first transverse moving module is fixedly arranged on the front side of the mounting frame and used for driving the first transverse moving table to transversely move, the first lifting module is arranged on the first transverse moving table and used for driving the first lifting table to lift, and the grabbing assembly is rotatably arranged at the lifting end of the first lifting assembly.
Preferably, be equipped with the link on the first elevating platform, it is equipped with to rotate on the link and is used for the installation snatch the column spinner of subassembly, the column spinner passes through the rotating electrical machines drive, snatch the subassembly including snatching bed frame and suction nozzle, it is equipped with the regulation base pole to snatch the bed frame both ends, be equipped with the slip mouth on the regulation base pole, the slip is equipped with the slide bar on the slide mouth, and it snatchs all to be equipped with on bed frame and the slide bar through hasp latched position, it is equipped with a plurality of to slide on the regulation mouth the suction nozzle, it passes through hasp latched position.
Preferably, the inspection mechanism comprises a longitudinal moving module, a longitudinal moving platform, a rotating platform, a direct-drive motor and a carrying platform, wherein the longitudinal moving module is fixedly arranged on the stabilizing plate and used for driving the longitudinal moving platform to longitudinally move, the longitudinal moving platform is provided with the rotating platform, the carrying platform is rotatably arranged on the rotating platform, the rotating platform is provided with a rotating motor groove, the direct-drive motor used for driving the carrying platform is arranged in the rotating motor groove, and the carrying platform is provided with a suction hole.
Preferably, the detection mechanism comprises a second traverse module, a second traverse table, a second lifting module, a detection frame, a detection camera and a laser range finder, a stabilizing frame is arranged on the stabilizing plate and made of marble, the second traverse module is fixedly arranged on the stabilizing frame and used for driving the second traverse table to traverse, the second lifting module is fixedly arranged on the second traverse table and used for driving the detection frame to lift, and the detection camera and the laser range finder are arranged on the detection frame.
Preferably, the device further comprises a visual positioning mechanism, wherein the visual positioning mechanism comprises a third transverse moving module, a third transverse moving table, a CCD positioning camera and an image processing module, the third transverse moving module is fixedly arranged on the mounting frame and used for driving the third transverse moving table to transversely move, and the CCD positioning camera is arranged on the third transverse moving table and used for acquiring the information of the liquid crystal screen on the carrying table and sending the information to the image processing module to obtain the coordinate information of the liquid crystal screen to be detected on the carrying table.
Preferably, the liquid crystal display panel further comprises an ion fan for removing static electricity on the surface of the liquid crystal display screen, a connecting plate is arranged on the bottom side of the mounting frame, hinged plates for being hinged to the connecting plate are arranged on two sides of the ion fan, and a plurality of air outlets are transversely formed in the ion fan.
Preferably, still include substandard product conveying mechanism, substandard product conveying mechanism is including carrying bed frame, rotary rod, delivery wheel, tensioning rod, conveyor belt and conveyor motor, carry the bed frame to set firmly on the frame, carry the bed frame both ends to rotate and be equipped with the rotary rod, carry to lie in on the bed frame the inboard rotation of rotary rod below is equipped with the tensioning rod, equal axial is equipped with a plurality of on rotary rod and the tensioning rod the delivery wheel, conveyor belt sets up be used for carrying substandard product LCD screen on the delivery wheel, one of them a set of rotary rod with conveyor motor's output shaft, be equipped with the belt supporting board on the transport bed frame.
After adopting the technical scheme, compared with the background technology, the invention has the following advantages:
1. the invention provides an AOI automatic inspection machine for large-size liquid crystal screens, wherein a feeding mechanism and a discharging mechanism can be directly used for connecting links before and after an inspection process to grab the liquid crystal screens, the feeding mechanism automatically grabs the liquid crystal screens to be detected and places the liquid crystal screens on a delivery mechanism, the detected liquid crystal screens are automatically grabbed and taken in the next process link through the discharging mechanism, a special connecting assembly line is not needed, the space and the cost are saved, the automation degree is high, the transfer efficiency is high, and the inspection efficiency is improved.
2. The invention provides an AOI automatic inspection machine for a large-size liquid crystal display screen.
3. The invention provides an AOI automatic inspection machine for a large-size liquid crystal screen, wherein a grabbing component can adjust the distance between suction nozzles according to the size of the liquid crystal screen, so that the stability of the grabbing process is ensured, and the liquid crystal screen is prevented from falling.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the present invention (with the outer frame removed);
FIG. 3 is a schematic view of the structure of the feeding mechanism of the present invention;
FIG. 4 is a schematic view of the inspection mechanism of the present invention;
FIG. 5 is a schematic view of the detecting mechanism of the present invention;
FIG. 6 is a schematic view of a visual positioning mechanism according to the present invention;
FIG. 7 is a schematic view of an ion blower according to the present invention;
FIG. 8 is a schematic view of a defective product conveying mechanism according to the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are all based on the orientation or positional relationship shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the apparatus or element of the present invention must have a specific orientation, and thus, should not be construed as limiting the present invention.
Examples
The invention discloses a large-size liquid crystal display AOI automatic inspection machine which comprises a machine base 1, a feeding mechanism 2, a delivery inspection mechanism 3, a detection mechanism 4 and a discharging mechanism 5, wherein the feeding mechanism 2, the delivery inspection mechanism 3, the detection mechanism 4 and the discharging mechanism 5 are arranged on the machine base 1, the feeding mechanism 2 is used for grabbing a liquid crystal display to be inspected and placing the liquid crystal display to be inspected on the delivery inspection mechanism 3 along the transverse direction of the machine base 1, the delivery inspection mechanism 3 longitudinally moves along the machine base 1 to convey the liquid crystal display to be inspected to the position below the detection mechanism 4, the detection mechanism 4 is used for detecting the liquid crystal display, and the discharging mechanism 5 is used for grabbing the liquid crystal display to be inspected on the.
Be equipped with stabilizer plate 11 on the frame 1, stabilizer plate 11 adopts the marble material, be equipped with mounting bracket 12 on the stabilizer plate 11, feed mechanism 2 and 5 relative activities of unloading mechanism set up on mounting bracket both sides 12, it all includes first sideslip module 21, first sideslip platform 22, first lifting module 23, first elevating platform 24 and snatch subassembly 25, first sideslip module 21 sets firmly in mounting bracket 12 front side, be used for driving first sideslip platform 22 sideslip, first lifting module 23 sets up on first sideslip platform 22, be used for driving first elevating platform 24 and go up and down, snatch the rotatable lift end that sets up at first elevating module 24 of subassembly 25.
Be equipped with link 26 on first elevating platform 24, it is equipped with the column spinner 27 that is used for the installation to snatch subassembly 25 to rotate on the link 26, the column spinner 27 passes through the rotating electrical machines 28 drive, it is including snatching bed frame 251 and suction nozzle 252 to snatch the subassembly 25, it is equipped with the regulation base pole 253 to snatch the bed frame 251 both ends, be equipped with the sliding opening 2531 on adjusting the base pole 253, it is equipped with the slide bar 254 to slide on the sliding opening 2531, it passes through hasp 255 latched position, it all is equipped with on bed frame 251 and the slide bar 254 and adjusts mouth 2541, it is equipped with a plurality of suction nozzle 252 to slide on adjusting the mouth 2541, it.
The inspection mechanism 3 includes a longitudinal moving module 31, a longitudinal moving table 32, a rotating table 33, a direct drive motor (not shown in the figure), and a platform 34, wherein the longitudinal moving module 31 is fixed on the stabilizing plate 11 and is used for driving the longitudinal moving table 32 to move longitudinally, the rotating table 33 is arranged on the longitudinal moving table 32, the platform 34 is rotatably arranged on the rotating table 33, a rotating motor groove is arranged on the rotating table 33, the direct drive motor for driving the platform is arranged in the rotating motor groove, and a suction hole is arranged on the platform 34.
The detection mechanism 4 comprises a second traverse module 41, a second traverse table 42, a second lifting module 43, a detection frame 44, a detection camera 45 and a laser range finder 46, wherein a stabilization frame 13 is arranged on the stabilization plate 11, the stabilization frame 13 is made of marble, the second traverse module 41 is fixedly arranged on the stabilization frame 13 and used for driving the second traverse table 42 to traverse, the second lifting module 43 is fixedly arranged on the second traverse table and used for driving the detection frame 44 to lift, and the detection camera 45 and the laser range finder 46 are arranged on the detection frame 44.
The device is characterized by further comprising a visual positioning mechanism 6, wherein the visual positioning mechanism 6 comprises a third transverse moving module 61, a third transverse moving table 62, a CCD positioning camera 63 and an image processing module (not shown in the figure), the third transverse moving module 61 is fixedly arranged on the mounting frame 12 and used for driving the third transverse moving table 62 to transversely move, the CCD positioning camera 63 is arranged on the third transverse moving table 62 and used for collecting liquid crystal screen information on the carrying table and sending the liquid crystal screen information to the image processing module to obtain coordinate information of the liquid crystal screen to be detected on the carrying table 34.
The liquid crystal display panel air conditioner further comprises an ion fan 14 used for removing static electricity on the surface of the liquid crystal display panel, a connecting plate 15 is arranged on the bottom side of the mounting frame 12, hinged plates 16 used for being hinged on the connecting plate 15 are arranged on two sides of the ion fan 14, and a plurality of air outlets 141 are transversely formed in the ion fan 14.
Still include substandard product conveying mechanism 7, substandard product conveying mechanism 7 is including carrying bed frame 71, first rotary rod 72, conveying wheel 73, second rotary rod 74, conveyor belt 75 and conveyor motor 76, carry bed frame 71 and set firmly on frame 1, carry bed frame 71 both ends to rotate and be equipped with first rotary rod 73, it is equipped with second rotary rod 72 to lie in the inboard rotation in first rotary rod 75 below on the transport bed frame 71, all be equipped with a plurality of conveying wheel 73 on first rotary rod 72 and the second rotary rod 74 axially, conveyor belt 75 sets up and is used for carrying the substandard product LCD screen on the conveying wheel 73, wherein a set of first rotary rod 72 or second rotary rod 72 and conveyor motor 76's output shaft, be equipped with on the transport bed frame 71 and prevent falling board 77.
Still include substandard product conveying mechanism 7, substandard product conveying mechanism 7 is including carrying bed frame 717, rotary rod 72, delivery wheel 73, tensioning rod 74, conveyor belt 75 and conveyor motor 76, carry bed frame 71 to set firmly 1 on the frame, carry bed frame 71 both ends to rotate and be equipped with rotary rod 73, it is equipped with tensioning rod 74 to lie in the inboard rotation in rotary rod 72 below on the transport bed frame 71, equal axial is equipped with a plurality of delivery wheel 73 on rotary rod 72 and the tensioning rod 74, conveyor belt 75 sets up and is used for carrying the substandard product LCD screen on delivery wheel 73, one of them a set of rotary rod 72 and conveyor motor 76's output shaft, be equipped with belt supporting plate 77 on the transport bed frame 71.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (8)

1. A jumbo size LCD screen AOI automatic check machine which characterized in that: including the frame, locate feed mechanism, censorship mechanism, detection mechanism and unloading mechanism on the frame, feed mechanism is used for snatching to wait to examine the LCD screen and follows the frame lateral shifting place in censorship mechanism, censorship mechanism follows the frame longitudinal movement is carried and is awaited to examine the LCD screen, detection mechanism is used for detecting the LCD screen, unloading mechanism is used for snatching to examine the LCD screen edge of examining in the mechanism the unloading of frame lateral shifting.
2. The large-sized liquid crystal display AOI automatic inspection machine according to claim 1, wherein: the method is characterized in that: the automatic feeding device is characterized in that a stabilizing plate is arranged on the base and made of marble, a mounting frame is arranged on the stabilizing plate, a feeding mechanism and a discharging mechanism are arranged on the mounting frame relatively, the feeding mechanism and the discharging mechanism comprise a first transverse moving module, a first transverse moving table, a first lifting module, a first lifting table and a grabbing assembly, the first transverse moving module is fixedly arranged on the front side of the mounting frame and used for driving the first transverse moving table to transversely move, the first lifting module is arranged on the first transverse moving table and used for driving the first lifting table to lift, and the grabbing assembly is rotatably arranged at the lifting end of the first lifting assembly.
3. The large-sized liquid crystal display AOI automatic inspection machine according to claim 2, wherein: the method is characterized in that: the improved lifting device is characterized in that a connecting frame is arranged on the first lifting table, a rotary column used for installing the grabbing assembly is arranged on the connecting frame in a rotating mode, the rotary column is driven by a rotating motor, the grabbing assembly comprises a grabbing base frame and suction nozzles, adjusting base rods are arranged at two ends of the grabbing base frame, sliding ports are formed in the adjusting base rods, sliding rods are arranged on the sliding ports in a sliding mode, the sliding rods are arranged on the sliding ports in a locking mode through locking positions, adjusting ports are formed in the grabbing base frame and the sliding rods, and a plurality of suction nozzles are arranged on the adjusting ports in a sliding mode and pass through the locking positions.
4. The large-sized liquid crystal display AOI automatic inspection machine according to claim 2, wherein: the inspection mechanism comprises a longitudinal moving module, a longitudinal moving platform, a rotating platform, a direct-drive motor and a carrying platform, wherein the longitudinal moving module is fixedly arranged on the stabilizing plate and used for driving the longitudinal moving platform to longitudinally move, the rotating platform is arranged on the longitudinal moving platform, the carrying platform is rotatably arranged on the rotating platform and is driven by the direct-drive motor to be provided with a suction hole.
5. The large-sized liquid crystal display AOI automatic inspection machine according to claim 2, wherein: the detection mechanism comprises a second transverse moving module, a second transverse moving table, a second lifting module, a detection frame, a detection camera and a laser range finder, wherein a stabilizing frame is arranged on the stabilizing plate and made of marble, the second transverse moving module is fixedly arranged on the stabilizing frame and used for driving the second transverse moving table to transversely move, the second lifting module is fixedly arranged on the second transverse moving table and used for driving the detection frame to lift, and the detection frame is provided with the detection camera and the laser range finder.
6. The large-sized liquid crystal display AOI automatic inspection machine according to claim 2, wherein: the device comprises a mounting frame, a CCD positioning camera and an image processing module, and is characterized by further comprising a visual positioning mechanism, wherein the visual positioning mechanism comprises a third transverse moving module, a third transverse moving table, the CCD positioning camera and the image processing module, the third transverse moving module is fixedly arranged on the mounting frame and used for driving the third transverse moving table to transversely move, the CCD positioning camera is arranged on the third transverse moving table and used for acquiring information of a liquid crystal screen on the carrying table and sending the information to the image processing module to obtain coordinate information of the liquid crystal screen to be detected on the carrying table.
7. The large-sized liquid crystal display AOI automatic inspection machine according to claim 2, wherein: the liquid crystal display panel is characterized by further comprising an ion fan for removing static electricity on the surface of the liquid crystal display screen, a connecting plate is arranged on the bottom side of the mounting frame, hinged plates for being hinged to the connecting plate are arranged on two sides of the ion fan, and a plurality of air outlets are transversely formed in the ion fan.
8. The large-sized liquid crystal display AOI automatic inspection machine according to claim 1, wherein: still include substandard product conveying mechanism, substandard product conveying mechanism is including carrying bed frame, rotary rod, delivery wheel, tensioning rod, conveyor belt and conveyor motor, carry the bed frame to set firmly on the frame, carry the bed frame both ends to rotate and be equipped with the rotary rod, be located on the transport bed frame the inboard rotation in rotary rod below is equipped with the tensioning rod, equal axial is equipped with a plurality of on rotary rod and the tensioning rod the delivery wheel, conveyor belt sets up be used for carrying substandard product LCD screen on the delivery wheel, one of them a set of rotary rod with conveyor motor's output shaft is connected, be equipped with the belt layer board on the transport bed frame.
CN202110019647.9A 2021-01-07 2021-01-07 Automatic large-size liquid crystal display AOI inspection machine Active CN112782879B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114939539A (en) * 2022-05-30 2022-08-26 厦门福信光电集成有限公司 Intelligent detection equipment for wafer surface defects
CN114985288A (en) * 2022-05-30 2022-09-02 厦门福信光电集成有限公司 Intelligent discharging equipment for detecting surface defects of wafers
CN115016155A (en) * 2022-05-17 2022-09-06 厦门特仪科技有限公司 LCM module detecting system based on AOI
CN115180388A (en) * 2022-07-29 2022-10-14 厦门福信光电集成有限公司 Automatic detection equipment for large-size display module line

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11183863A (en) * 1997-12-22 1999-07-09 Micronics Japan Co Ltd Inspection device for substrate to be measured
CN207718108U (en) * 2017-12-22 2018-08-10 东莞市速美达自动化有限公司 A kind of liquid crystal display lights detection device
CN108594494A (en) * 2018-06-14 2018-09-28 广东速美达自动化股份有限公司 One kind detecting assembly line automatically without FPC liquid crystal displays
CN110908156A (en) * 2019-12-24 2020-03-24 厦门福信光电集成有限公司 Automatic detection equipment for liquid crystal display line AOI

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11183863A (en) * 1997-12-22 1999-07-09 Micronics Japan Co Ltd Inspection device for substrate to be measured
CN207718108U (en) * 2017-12-22 2018-08-10 东莞市速美达自动化有限公司 A kind of liquid crystal display lights detection device
CN108594494A (en) * 2018-06-14 2018-09-28 广东速美达自动化股份有限公司 One kind detecting assembly line automatically without FPC liquid crystal displays
CN110908156A (en) * 2019-12-24 2020-03-24 厦门福信光电集成有限公司 Automatic detection equipment for liquid crystal display line AOI

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115016155A (en) * 2022-05-17 2022-09-06 厦门特仪科技有限公司 LCM module detecting system based on AOI
CN115016155B (en) * 2022-05-17 2024-03-15 厦门特仪科技有限公司 LCM module detecting system based on AOI
CN114939539A (en) * 2022-05-30 2022-08-26 厦门福信光电集成有限公司 Intelligent detection equipment for wafer surface defects
CN114985288A (en) * 2022-05-30 2022-09-02 厦门福信光电集成有限公司 Intelligent discharging equipment for detecting surface defects of wafers
CN114939539B (en) * 2022-05-30 2024-03-05 厦门福信光电集成有限公司 Intelligent wafer surface defect detection equipment
CN115180388A (en) * 2022-07-29 2022-10-14 厦门福信光电集成有限公司 Automatic detection equipment for large-size display module line

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