CN107884417A - A kind of substrate edges check machine and marginal check method - Google Patents
A kind of substrate edges check machine and marginal check method Download PDFInfo
- Publication number
- CN107884417A CN107884417A CN201711308331.1A CN201711308331A CN107884417A CN 107884417 A CN107884417 A CN 107884417A CN 201711308331 A CN201711308331 A CN 201711308331A CN 107884417 A CN107884417 A CN 107884417A
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- substrate
- edges
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- edge
- scan module
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- 239000000758 substrate Substances 0.000 title claims abstract description 99
- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000012546 transfer Methods 0.000 claims abstract description 23
- 238000007689 inspection Methods 0.000 claims abstract description 13
- 238000009434 installation Methods 0.000 claims abstract description 13
- 230000007547 defect Effects 0.000 claims description 10
- 238000001514 detection method Methods 0.000 abstract description 6
- 238000005516 engineering process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N2021/8909—Scan signal processing specially adapted for inspection of running sheets
- G01N2021/891—Edge discrimination, e.g. by signal filtering
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- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention discloses a kind of substrate edges check machine and marginal check method, including support, support to be provided with：Transferred unit, for transferring substrate in the first direction；Rotating part, it is installed in move portion, for rotary plate, the long side direction of substrate and short side direction is rotated to first direction respectively；Scan module, the top edge and lower edge of two parallel edges for scanning the substrate in transfer state；And installation portion, it is fixed on support, scan module is installed on installation portion；Wherein, when the long side of substrate moves along the first direction, scan module is used for the top edge and lower edge for scanning two long sides；When the short side of substrate moves along the first direction, scan module is used for the top edge and lower edge for scanning two short sides.The present invention switches the long side of substrate, on short side to transfer direction by rotating part, adjusts the position of scan module, to make up the range difference of long short side, can carry out the frontier inspection up and down on the side of substrate four simultaneously, substantially increase detection efficiency.
Description
Technical field
The present invention relates to inspecting substrate technical field, more particularly to a kind of substrate side marginal check machine and edge inspection method.
Background technology
The preparation of display panel is needed by multiple processes, the carrying between processing procedure process and each operation by multiple processes
Process, the general display panels such as transmission are had by substrate or the flexible base board processing procedure of other materials, in above process substrate edges
The defects of damaged, sliver or pollution may occur, and these defects can produce significant impact to flat-panel monitor quality, therefore
Need to check that substrate edges whether there is defect.
Existing substrate edges check device can only carry out the upper frontier inspection on substrate-parallel side or lower frontier inspection, it is impossible to while to four
It is relatively low that side carries out frontier inspection, detection efficiency up and down.
In view of it is above-mentioned the defects of, the design people, be actively subject to research and innovation, to found a kind of substrate edges check machine
And marginal check method, make it with more the value in industry.
The content of the invention
, can be to long side and short side it is an object of the invention to propose a kind of substrate edges check machine and marginal check method
The different substrate of size carries out the frontier inspection up and down on four sides simultaneously, to improve detection efficiency.
To use following technical scheme up to this purpose, the present invention：
A kind of substrate edges check machine, including support, the support are provided with：
Transferred unit, for transferring substrate in the first direction；
Rotating part, it is installed in the move portion, for rotary plate, makes long side direction and the short side side of substrate respectively
To rotation to the first direction；
Scan module, the top edge and lower edge of two parallel edges for scanning the substrate in transfer state；And
Installation portion, it is fixed on the support, the scan module is installed on the installation portion；
Wherein, when first direction described in the long edge of substrate moves, the scan module is used for the top for scanning two long sides
Edge and lower edge；When the short side of substrate moves along the first direction, the top edge that the scan module is used to scan two short sides is with
Edge.
Further, the transferred unit includes two parallel slide rails being arranged on the support and two cunnings
The first straight line module that support that rail is slidably connected, the driving support move along two slide rails；Wherein, the slide rail edge
First direction is set.
Further, the rotating part includes installation rotating disk on the bracket, is fixed on the rotating disk and with institute
State the substrate mounting table of rotating disk rotation.
Further, the rotatable angle of the rotating disk is 90 ° -270 °.
Further, the installation portion includes the portal frame and lower bracket being fixed on the support, wherein the dragon
Door frame is located at the top of the substrate in being transferred along the first direction, and the lower bracket is located at along first direction transfer
Substrate lower section.
Further, the scan module includes：
Two upper shooting parts, are installed on the portal frame, for scanning the substrate in being transferred along the first direction
Two parallel edges top edge；
Two lower shooting parts, are installed in the lower cage, and two lower shooting parts are used to scanning along described the
The lower edge of two parallel edges of the substrate in the transfer of one direction.
Further, it is each provided with two second straight line modules in the portal frame and the lower bracket, each described the
Two straight line modules are connected with the upper shooting part and the lower shooting part respectively, and drive the upper shooting part and described
Lower shooting part moves along the second direction perpendicular to the first direction.
Further, the axial centre of the longitudinal center line of the upper shooting part camera lens and the lower shooting part camera lens
Line is misaligned.
The substrate edges inspection method of the present invention, this method is by judging to enter line scan to substrate edges the figure to obtain
As checking that substrate edges whether there is defect, step is included：
S1 transfers substrate in the first direction；
The top edge and lower edge of two parallel edges of substrate of the S2 scan modules scanning in transfer state；
S3 complete to the boundary scan of two parallel edges of substrate after, by substrate be rotated by 90 ° or 270 ° and towards third direction move
Send；The third direction is opposite to the first direction；
S4 adjusts the position of scan module, scan module is scanned the other two parallel of the substrate in transfer state
The top edge and lower edge on side.
Further, in addition to step：According to the scan image of the scan module, judge the edge of the substrate is S5
No existing defects.
Beneficial effects of the present invention are：By on the long side of rotating part switching substrate, short side to transfer direction, passing through adjustment
The position of scan module, to make up the range difference of long short side, so as to carry out the frontier inspection up and down on the side of substrate four simultaneously, greatly improve
Detection efficiency.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram for the marginal check machine that the specific embodiment of the invention provides.
In figure：11- slide rails, 12- supports, 13- first straight line modules, 21- rotating disks, 22- substrate mounting tables, image on 31-
Part, shooting part under 32-, 41- second straight line modules, 51- supports, 52- portal frames, 53- lower brackets.
Embodiment
Further illustrate technical scheme below in conjunction with the accompanying drawings and by embodiment.
As shown in figure 1, the marginal check machine of the present invention includes support 51, support 51 is provided with transferred unit, rotating part, scanning
Module and installation portion, wherein, transferred unit is used to transfer substrate in the first direction；Rotating part is installed in move portion, for rotating
Substrate, the long side direction of substrate and short side direction is set to rotate to first direction respectively；Scan module is used to scan in transfer shape
The top edge and lower edge of two parallel edges of the substrate of state；Installation portion is fixed on support, and scan module is installed on installation portion；Its
In, when the long side of substrate moves along the first direction, scan module is used for the top edge and lower edge for scanning two long sides；Substrate it is short
While when moving along the first direction, scan module is used for the top edge and lower edge for scanning two short sides.
Specifically, transferred unit includes two parallel slide rails 11 being arranged on support 51 and two slide rails 11 are slided and connected
The first straight line module 13 that support 12, the driving arm 12 connect moves along two slide rails 11, wherein, slide rail 11 is set in the first direction
Put.
Further, rotating part includes the rotating disk 21 being arranged on support 12, the substrate mounting table 22 rotated with rotating disk 21,
21 rotatable angle of rotating disk is 90 ° -270 °.
In an embodiment, installation portion includes the portal frame 52 being fixed on support 51 and lower bracket 53, wherein, gantry
The top of substrate of the frame 52 in transferring in the first direction, lower bracket 53 is under the substrate in transfer in the first direction
Side.
In a specific embodiment, scan module includes two upper shooting parts 31 and two lower shooting parts 32, two
Upper shooting part 31 is installed on portal frame 52, the top of two parallel edges for scanning the substrate in transferring in the first direction
Edge, two lower shooting parts 32 are installed in lower bracket 53, and two lower shooting parts 32 are used to scan to be transferred in the first direction
In substrate two parallel edges lower edge；Such substrate run in the first direction can once complete two parallel edges up and down
The scanning at edge；Substrate is rotated by 90 ° the scanning for returning to the lower edges for completing two other parallel edges in opposite direction, efficiency
It is greatly improved.
It is preferred that the longitudinal center line of the longitudinal center line of the upper camera lens of shooting part 31 and the lower camera lens of shooting part 32 does not weigh
Close, in case the camera lens of upper shooting part 31 and the lower camera lens of shooting part 32 cause image-capture because of location overlap generation optical interference
It is abnormal.
For convenience of the positions of two upper shooting parts 31 and two lower shooting parts 32 of adjustment, the present invention portal frame 52 with
Be each provided with two second straight line modules 41 in lower bracket 53, each second straight line module 41 respectively with upper shooting part 31 and under
Shooting part 32 connects, and drives upper shooting part 31 and lower shooting part 32 along the second direction shifting perpendicular to first direction
It is dynamic.
In addition, in order to facilitate the mobile marginal check machine, the bottom of support 51 is provided with roller.
The present invention can be detected to the top edge of the parallel edges of substrate two, passed through by setting two upper shooting parts 31
Two lower shooting parts 32 are set, the lower edge of the parallel edges of substrate two can be detected；Because of substrate long side and short side dimension not
One, by setting rotating part, in the long side of changeable substrate, short side to transfer direction, by adjusting the position of scan module, with
The range difference of long short side is made up, so as to carry out the frontier inspection up and down on the side of substrate four simultaneously, substantially increases detection efficiency.
Present invention also offers the method that substrate edges inspection is carried out using above-mentioned marginal check machine, this method passes through judgement
The image for entering line scan to substrate edges and obtaining checks that substrate edges whether there is defect, includes step：
S1 transfers substrate in the first direction；
The top edge and lower edge of two parallel edges of substrate of the S2 scan modules scanning in transfer state；
S3 complete to the boundary scan of two parallel edges of substrate after, by substrate be rotated by 90 ° or 270 ° and towards third direction move
Send；The third direction is opposite to the first direction；
S4 adjusts the position of scan module, scan module is scanned the other two parallel of the substrate in transfer state
The top edge and lower edge on side.
Further, in addition to step：According to the scan image of the scan module, judge the edge of the substrate is S5
No existing defects.
To sum up, the present invention switches the long side of substrate, on short side to transfer direction by rotating part, by adjusting scan module
Position, to make up the range difference of long short side, so as to carry out the frontier inspection up and down on the side of substrate four simultaneously, substantially increase detection effect
Rate.
The technical principle of the present invention is described above in association with specific embodiment.These descriptions are intended merely to explain the present invention's
Principle, and limiting the scope of the invention can not be construed in any way.Based on explanation herein, the technology of this area
Personnel would not require any inventive effort the other embodiments that can associate the present invention, and these modes are fallen within
Within protection scope of the present invention.
Claims (10)
1. a kind of substrate edges check machine, it is characterised in that including support, the support is provided with：
Transferred unit, for transferring substrate in the first direction；
Rotating part, it is installed in the move portion, for rotary plate, makes long side direction and the short side direction rotation of substrate respectively
Go to the first direction；
Scan module, the top edge and lower edge of two parallel edges for scanning the substrate in transfer state；And
Installation portion, it is fixed on the support, the scan module is installed on the installation portion；
Wherein, described in the long edge of substrate first direction move when, the scan module be used for scan two long sides top edge and
Lower edge；When the short side of substrate moves along the first direction, the scan module is used for the top edge and lower edge for scanning two short sides.
2. substrate edges check machine according to claim 1, it is characterised in that the transferred unit includes being arranged on the machine
Two parallel slide rails on seat, the support being slidably connected with two slide rails, the driving support are along two slide rails
Mobile first straight line module；Wherein, the slide rail is set in the first direction.
3. substrate edges check machine according to claim 2, it is characterised in that the rotating part includes being arranged on the branch
Rotating disk on frame, the substrate mounting table for being fixed on the rotating disk and being rotated with the rotating disk.
4. substrate edges check machine according to claim 3, it is characterised in that the rotatable angle of rotating disk be 90 °-
270°。
5. substrate edges check machine according to claim 1, it is characterised in that the installation portion includes being fixed on the machine
Portal frame and lower bracket on seat, wherein the portal frame is located at the top of the substrate in being transferred along the first direction, institute
State the lower section for the substrate that lower bracket is located in being transferred along the first direction.
6. substrate edges check machine according to claim 5, it is characterised in that the scan module includes：
Two upper shooting parts, are installed on the portal frame, for scanning two of the substrate in being transferred along the first direction
The top edge of parallel edges；
Two lower shooting parts, are installed in the lower cage, and two lower shooting parts are used to scan along the first party
The lower edge of two parallel edges of the substrate into transfer.
7. substrate edges check machine according to claim 6, it is characterised in that on the portal frame and the lower bracket
Be each provided with two second straight line modules, each second straight line module respectively with the upper shooting part and the lower image pickup part
Part connects, and drives the upper shooting part and the lower shooting part to be moved along the second direction perpendicular to the first direction
It is dynamic.
8. substrate edges check machine according to claim 6, it is characterised in that in the axial direction of the upper shooting part camera lens
The longitudinal center line of heart line and the lower shooting part camera lens is misaligned.
9. a kind of substrate edges inspection method, it is characterised in that this method is by judging to enter line scan to substrate edges to obtain
Image check that substrate edges whether there is defect, include step：
S1 transfers substrate in the first direction；
The top edge and lower edge of two parallel edges of substrate of the S2 scan modules scanning in transfer state；
S3 complete to the boundary scan of two parallel edges of substrate after, by substrate be rotated by 90 ° or 270 ° and towards third direction transfer；Institute
It is opposite to the first direction to state third direction；
S4 adjusts the position of scan module, scan module is scanned other two parallel edges of the substrate in transfer state
Top edge and lower edge.
10. substrate edges inspection method according to claim 9, it is characterised in that also including step：S5 is swept according to
The scan image of module is retouched, judges that the edge of the substrate whether there is defect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711308331.1A CN107884417A (en) | 2017-12-11 | 2017-12-11 | A kind of substrate edges check machine and marginal check method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711308331.1A CN107884417A (en) | 2017-12-11 | 2017-12-11 | A kind of substrate edges check machine and marginal check method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107884417A true CN107884417A (en) | 2018-04-06 |
Family
ID=61773930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711308331.1A Pending CN107884417A (en) | 2017-12-11 | 2017-12-11 | A kind of substrate edges check machine and marginal check method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107884417A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110308113A (en) * | 2019-07-04 | 2019-10-08 | 中南林业科技大学 | A kind of comprehensive overturning torispherical fruit device near infrared spectrum detection |
| CN115231237A (en) * | 2022-06-16 | 2022-10-25 | 苏州镁伽科技有限公司 | Panel reinspects auxiliary system and patrols limit and examines equipment |
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| CN1537227A (en) * | 2001-11-20 | 2004-10-13 | 三星宝石工业株式会社 | Inspecting method for end faces of brittle-material-made substrate and device therefor |
| KR20050055883A (en) * | 2003-12-09 | 2005-06-14 | 삼성코닝정밀유리 주식회사 | Apparatus for inspecting a glass substrate and method thereof |
| CN101086444A (en) * | 2006-06-07 | 2007-12-12 | K.C.科技股份有限公司 | Glass substrate edge checking device and method |
| TW200916760A (en) * | 2007-10-02 | 2009-04-16 | Nat Kaohsiung University Of Applied Scienses | Edge measuring apparatus for a glass substrate |
| KR100915691B1 (en) * | 2008-03-04 | 2009-09-08 | 주식회사 케이엔제이 | Inspection apparatus flat display pannel and inspection method thereby |
| JP3195722U (en) * | 2013-11-19 | 2015-01-29 | オーボテック リミテッド | Flat board inspection system |
| CN104460060A (en) * | 2014-12-05 | 2015-03-25 | 深圳鼎晶光电有限公司 | Optical detection equipment and method for liquid crystal display modules |
| CN207528645U (en) * | 2017-12-11 | 2018-06-22 | 苏州精濑光电有限公司 | A kind of substrate edges check machine |
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2017
- 2017-12-11 CN CN201711308331.1A patent/CN107884417A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1537227A (en) * | 2001-11-20 | 2004-10-13 | 三星宝石工业株式会社 | Inspecting method for end faces of brittle-material-made substrate and device therefor |
| KR20050055883A (en) * | 2003-12-09 | 2005-06-14 | 삼성코닝정밀유리 주식회사 | Apparatus for inspecting a glass substrate and method thereof |
| CN101086444A (en) * | 2006-06-07 | 2007-12-12 | K.C.科技股份有限公司 | Glass substrate edge checking device and method |
| TW200916760A (en) * | 2007-10-02 | 2009-04-16 | Nat Kaohsiung University Of Applied Scienses | Edge measuring apparatus for a glass substrate |
| KR100915691B1 (en) * | 2008-03-04 | 2009-09-08 | 주식회사 케이엔제이 | Inspection apparatus flat display pannel and inspection method thereby |
| JP3195722U (en) * | 2013-11-19 | 2015-01-29 | オーボテック リミテッド | Flat board inspection system |
| CN104460060A (en) * | 2014-12-05 | 2015-03-25 | 深圳鼎晶光电有限公司 | Optical detection equipment and method for liquid crystal display modules |
| CN207528645U (en) * | 2017-12-11 | 2018-06-22 | 苏州精濑光电有限公司 | A kind of substrate edges check machine |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110308113A (en) * | 2019-07-04 | 2019-10-08 | 中南林业科技大学 | A kind of comprehensive overturning torispherical fruit device near infrared spectrum detection |
| CN110308113B (en) * | 2019-07-04 | 2021-06-22 | 中南林业科技大学 | A quasi-spherical fruit device of all-round upset for near infrared spectrum detects |
| CN115231237A (en) * | 2022-06-16 | 2022-10-25 | 苏州镁伽科技有限公司 | Panel reinspects auxiliary system and patrols limit and examines equipment |
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