TWI352197B - Edge measuring apparatus for glass substrate - Google Patents

Edge measuring apparatus for glass substrate Download PDF

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Publication number
TWI352197B
TWI352197B TW96136863A TW96136863A TWI352197B TW I352197 B TWI352197 B TW I352197B TW 96136863 A TW96136863 A TW 96136863A TW 96136863 A TW96136863 A TW 96136863A TW I352197 B TWI352197 B TW I352197B
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Taiwan
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rod body
movable seat
slider
glass substrate
sliding
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TW96136863A
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Chinese (zh)
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TW200916760A (en
Inventor
Quang Cherng Hsu
Chi Ming Lin
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Univ Nat Kaohsiung Applied Sci
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Publication of TWI352197B publication Critical patent/TWI352197B/en

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1352197 ' ~ΪΤ〇 年 3 月 9 日 九、發明說明: -- 【發明所屬之技術領域】 本發明係關於一種破璃基板邊緣檢測裝置,特別是關 、 於利用四個镇測元件同時掃描-基板之周緣,以檢測該基 板之周緣是否受損’進而提升檢測效率之玻璃基板邊緣檢 測裝置。 【先前技術】 一般玻璃基板係作為顯示器之製作基材,例如:液晶 顯不器(LCD)或電I板顯示li(PDP),玻璃基板在切割後必 . 須檢測玻璃基板邊緣是否有破損的情形,另外顯示器在製 作的過程中,由於需要頻繁的移動以對該玻璃基板進行各 種處理程序,例如:洗淨程序及塗膜程序等,也可能在進 行處理的過程中造成部份該玻璃基板之邊緣產生破損因 此,在玻璃基板切割後及一個處理程序結束進入下一個處 理私序刚,該玻璃基板必須進行其邊緣之檢測以便預先 檢測出有邊緣毀損之該坡璃基板。 為解決上述問題’本領域提出了一些習用之玻璃基板 - 邊緣檢測裝置,如中華民國公告第1273233號「面板裂片 後缺陷檢測裝置以及檢測方法」發明專利,如第丄圖所示 ’其包含一載台部8及一影像擷取部9,該載台部8可經 &轉動的方式改變位於該载台部8上之一面板8〇相對該影 像摘取部9的位置,該载台部8之底端另設有一線性滑台 81 ’以便該載台部8可沿該線性滑台81作一直線移動;該 影像操取部9設有-滑執體9卜至少一第一掃描體92及 —7 — 丄叫197 100年3月9日修正替換本 至少一第二掃描體93,該滑軌體91位於該载台部8之一 側,且該滑執體91之軌道方向垂直於該線性滑°台81之轨 道方向,該第一掃描體92及第二掃描體93可滑動的對應 設置於該滑軌體91上。 當利用習用坡璃基板邊緣檢測裝置對該面板8〇進行 檢測時’該第-掃描體92及第二掃描體93係沿著該滑轨 體W對應移動至與該硫80的二短邊相對應切齊之位置 ;接著該載台部8沿著該線性滑台81往滑_ 91的方向 移動’並通賴滑軌體91之下方,以便該第—掃描體% ^第二掃描體93對該面板8〇之二短邊作掃描檢測;完成 掃描後,該載台部8帶動該面板8〇旋轉9〇度 8〇之二長邊平行該線性滑台81的移動路徑;_了再_欠 體92及第二掃描體93,使其二者對應移 ^至與該©板8〇之二長邊相對應域之位置 性滑:81往該滑軌體91的方向二: 二二一掃描檢測’藉此完成該面板 一般而言’上述㈣玻璃基板邊緣檢 _。之二邊緣作侦測’再藉由該載台部 8〇’以便再對該面板80之另外二邊緣作_,=面: 可,完Γ面板8°四個邊緣的掃描檢:二致 大f田降低其檢舰率;另外,由於必須 Γ = Ζ段之掃描偵測’故其所需的‘二板會較 大導致無法縮減該習用玻璃基板邊緣檢測裝置 一 8 — 丄7 積。基於上述相,其確 璃基板邊緣檢戦置。’、進-步改良上述習用玻 載平’本發明改良上述之缺點,其係藉由在-承 口側設置四偵測元件’並將各該·師 ίΓ= ’藉由調整該四滑台以使該四债測元件分二 該基板:邊緣::邊緣葬並同時驅動各該四·】單元以對 ,以提高32^#此減少基板邊緣檢測所需的時間 【發明内容】 /發月之主要目的係提供—種玻璃基板邊緣檢測裝置 其係利用在—承載平台之—側面設置四躺元件,藉由 各該伽j元件同時掃描該基板之四個邊緣,使得本發明具 有提升檢測效率之功效。 x八 本發明之次要目的係提供一種玻璃基板邊緣檢測裝置 ,其係利用四滑台對應一基板之四個邊緣大小作線性移動 ’且該四滑台在-機台上的位置可隨基板的大小作調整, 使得本發明具有提高使用範圍之功效。 本發明之另一目的係提供一種玻璃基板邊緣檢測裝置 ’其係利用四滑台對應一基板之四個邊緣作線性移動,所 需的移動空間較小,使得本發明具有提高空間使用效率之 功效。 根據本發明之玻璃基板邊緣檢測裝置,其包含一機台 、四滑台、四偵測單元、數個傳動組件及數個驅動單元, 該機台設有一承載平台,該承載平台係用來放置一基板; —9 — 1352197 月 9 該四滑台設置於該承載平台之—_且制 邊緣,該四侧單元分別可滑_對應設置於各該滑台; 各該傳動組件料接且帶動各該㈣單元在各該滑台上 動;各該驅動單元連接各該滑台,以用來帶動各該滑台相 對在該機台上移動,且圍繞形成一檢測範圍,其中該數個· 傳動組件係帶動各該偵測單元分別沿該檢測範圍之各邊緣 移動’藉此可利用四個偵測元件同時掃描該基板之四個邊 緣,以提升基板邊緣檢測的效率。 【實施方式】 ▲為讓本發明之上収其他目的、特徵及優點能更明顯 易懂’下文特舉本發明之較佳實施例,並配合所附圖式, 作詳細說明如下: 清參照第2圖所示,本發明較佳實施例之玻璃基板 2測裝置係包含—機台〔未繪示〕、—承載平台卜 二台21〜24、四偵測單元3及數個驅動單元4、4,。該機 叹有一承載平台1;該四滑台21〜24係設置於該承載平台 之一側面,其中相鄰之該滑台2卜22係相互堆疊設置且 接該驅動單元4 ’而該滑台23、24係相互堆纽置且連 該驅動單元4’ ;各該偵測單元3分別可滑動的對應設置 各該滑台21〜24;本實施例中較佳係設置二驅動單元4、 、,該一驅動單元4、4,位於該機台上且對應設置於該承 平〇1之對角位置,該二驅動單元4、4,係連接並帶動 該α台21〜24相對該機台移動’圍繞形成一檢測範圍, 且各該偵測單元3係分別沿該檢測範圍之各邊緣移動。 々丄97 100午3月9日修正替換本 外,各該滑台21〜24與機台相對應之侧面分別設有一支稽 件6,以用來辅助各該滑台21〜24在該機台上的移動。 請參照第2及3圖所示,本發明較佳實施例之玻璃基 板邊緣檢測裝置之承載平台1係位於該機台之中央位置, 用來承載待檢測之至少一基板7,該基板7為一四方形板 體,具有四個側邊。該四滑台21〜24係分別對應該基板7 之四個側邊而圍繞形成一四方形輪廓,各該滑台21〜24具 有相同的構造且分別設有一第一端211、221、231、241及 第一、212、222、232、242 ’其中該滑台22位於該滑 台21與驅動單元4之間,且該滑台21之第一端211設置 於》亥滑台22之第一端222,而該滑台24位於該滑台23與 驅動單元4’之間,且該滑台23之第一端231設置於該滑 σ 24之第一端242 ’各該滑台21〜24在水平方向上係相互 垂直,其中該滑台21與滑台23在2方向上係平行對應, 該滑台22與滑台24在Ζ方向上亦平行對應,且該滑台^21 與滑台23在Ζ方向與該滑台22與滑台24保持一適當距 離。 胃 各該滑台21〜24分別設有一傳動組件’該傳動組件係 由一桿體 213、223、233 及 243、一滑塊 214、224、234 及244與一動力源215、225、235及245組成,其中該桿 體213之表面具有螺、纹,該滑塊214可滑動的連結於該桿 體213,且該滑塊214亦連結於該偵測單元3之一側,使 該,測單元3可沿著該桿體213滑動;該動力源215連接 該桿體213之-端’以帶動該桿體213.旋轉。其他該滑台 —11 — 9 曰修 22、23、24之傳動組件亦具有相同的構造 傳動組件可選自各種能驅動二個體作相對移動之裝置^ 如:齒輪、皮帶及電動虹等傳動方式,藉此,各該偵測單 元3可藉由該傳動組件的帶動於各該滑台21〜24上作滑動 ’以便對應掃描該基板7之四個邊緣。 - 請參照第2及3圖所示’本發明較佳實施例之玻璃基 板邊緣檢測裝置之偵測單元3分別設置於各該滑台21、22 、23、24之-適當位置,各該偵測單元3較佳係二置於各 該滑台2卜22、23、24靠近該承載平台工之縱向平面,該 偵測單元3可選自一感光耦合元件型〔Charge c〇叩led Device ’ CCD〕或一補充性氧化金屬半導體型〔1352197 '~ March 9th, ninth, ninth invention, invention: (Technical field of invention) The present invention relates to a glass substrate edge detecting device, in particular, for simultaneously scanning with four town measuring elements - A glass substrate edge detecting device that improves the detection efficiency by detecting the periphery of the substrate to detect whether the periphery of the substrate is damaged. [Prior Art] Generally, a glass substrate is used as a substrate for manufacturing a display, such as a liquid crystal display (LCD) or an electric I plate display li (PDP). The glass substrate must be cut after cutting. In other cases, during the manufacturing process, due to frequent movements to perform various processing procedures on the glass substrate, such as a cleaning process and a coating process, it is also possible to cause a part of the glass substrate during the processing. The edge is damaged. Therefore, after the glass substrate is cut and a processing procedure is completed and the next processing is performed, the glass substrate must be subjected to edge detection to detect the edge substrate damaged in advance. In order to solve the above problems, some conventional glass substrate-edge detection devices have been proposed in the art, such as the invention patent of "Plane crack detection device and detection method" of the Republic of China Announcement No. 1273233, as shown in the figure, which includes a a stage portion 8 and an image capturing portion 9 that can change the position of the panel 8 on the stage portion 8 relative to the image capturing portion 9 by rotating the table portion 8 The bottom end of the portion 8 is further provided with a linear sliding table 81' so that the loading portion 8 can be moved along the linear sliding table 81; the image capturing portion 9 is provided with a sliding body 9 and at least one first scanning body. 92 and - 7 - Howling 197 On March 9, 100, the at least one second scanning body 93 is replaced, and the sliding rail body 91 is located on one side of the stage portion 8, and the track direction of the sliding body 91 is vertical. The first scanning body 92 and the second scanning body 93 are slidably disposed on the sliding rail body 91 in the track direction of the linear sliding table 81. When the panel 8 is detected by the conventional glass substrate edge detecting device, the first scanning body 92 and the second scanning body 93 are correspondingly moved along the sliding rail body W to the two short sides of the sulfur 80. Corresponding to the position of the alignment; then the stage portion 8 moves along the linear slide table 81 in the direction of the slide _91 and passes under the slide rail body 91 so that the first scan body % ^ the second scan body 93 Scanning detection is performed on the short side of the panel 8 ;; after the scanning is completed, the stage 8 drives the panel 8 to rotate 9 〇 8 〇 2 long parallel to the movement path of the linear slide 81; _ owing body 92 and second scanning body 93, so that the two are correspondingly moved to the positional sliding corresponding to the two long sides of the slab 8 :: 81 toward the direction of the sliding rail 91: two A scan detection 'by this completion of the panel in general' above (four) glass substrate edge inspection _. The edge of the second side is detected 'by the stage portion 8' to make the other two edges of the panel 80 _, = face: Yes, the scanning of the panel 8° four edges is completed: Erzhida f field reduces its inspection rate; in addition, because the scan detection of the Γ = Ζ section is required, the required two boards will be larger, which makes it impossible to reduce the conventional glass substrate edge detection device. Based on the above phase, the edge of the substrate is inspected. ', step-by-step improvement of the above-mentioned conventional glass-bearing flat' The present invention improves the above-mentioned disadvantages by providing four detecting elements on the side of the socket and by adjusting each of the four slides So that the four debt measuring components are divided into two substrates: edge:: edge burying and simultaneously driving each of the four units to correct the time required to reduce the edge detection of the substrate. [Summary of the invention] The main purpose of the invention is to provide a glass substrate edge detecting device which is provided with four lying elements on the side of the carrying platform, and simultaneously scans the four edges of the substrate by each of the gamma elements, so that the invention has improved detection efficiency. The effect. The eighth object of the present invention is to provide a glass substrate edge detecting device which uses a four-slide table to linearly move corresponding to the four edge sizes of a substrate, and the position of the four-slide table on the machine table can follow the substrate. The size is adjusted to make the invention have the effect of improving the scope of use. Another object of the present invention is to provide a glass substrate edge detecting device that uses a four-slide table to linearly move corresponding to four edges of a substrate, and requires less moving space, so that the present invention has the effect of improving space use efficiency. . The glass substrate edge detecting device according to the present invention comprises a machine table, four sliding tables, four detecting units, a plurality of transmission components and a plurality of driving units, wherein the machine platform is provided with a carrying platform for placing a substrate; -9 - 1352197 month 9 The four slides are disposed on the carrying platform - and the edges are respectively slidably arranged corresponding to each of the sliding tables; each of the transmission components is connected and driven The (4) unit is moved on each of the sliding tables; each of the driving units is connected to each of the sliding tables for driving the sliding tables relative to the moving table, and forming a detection range, wherein the plurality of transmissions The component drives each of the detecting units to move along each edge of the detection range, respectively, thereby simultaneously scanning four edges of the substrate by using four detecting elements to improve the efficiency of substrate edge detection. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In order to make the other objects, features and advantages of the present invention more comprehensible, the following detailed description of the preferred embodiments of the present invention 2 shows that the glass substrate 2 measuring device of the preferred embodiment of the present invention comprises a machine (not shown), a bearing platform 2 21 to 24, a four detecting unit 3 and a plurality of driving units 4, 4,. The machine sighs a carrying platform 1; the four sliding tables 21-24 are disposed on one side of the carrying platform, wherein the adjacent sliding blocks 2 and 22 are stacked on each other and connected to the driving unit 4' and the sliding table 23, 24 are mutually stacked and connected to the driving unit 4'; each of the detecting units 3 is slidably corresponding to each of the sliding tables 21 to 24; in this embodiment, the second driving unit 4, The driving units 4, 4 are located on the machine table and correspondingly disposed at diagonal positions of the bearing plate 1. The two driving units 4, 4 are connected to drive the α stages 21 to 24 to move relative to the machine table. 'A detection range is formed around, and each of the detection units 3 moves along each edge of the detection range. 々丄97 100 noon on March 9th, the slides 21~24 are respectively provided with a piece 6 on the side corresponding to the machine table to assist each of the slide tables 21~24 in the machine. The movement on the stage. Referring to Figures 2 and 3, the carrier platform 1 of the glass substrate edge detecting device of the preferred embodiment of the present invention is located at a central position of the machine table for carrying at least one substrate 7 to be inspected, and the substrate 7 is A square plate with four sides. The four slides 21 to 24 respectively form a square contour corresponding to the four sides of the substrate 7, and each of the slides 21 to 24 has the same structure and is respectively provided with a first end 211, 221, 231, 241 and first, 212, 222, 232, 242 ' wherein the sliding table 22 is located between the sliding table 21 and the driving unit 4, and the first end 211 of the sliding table 21 is disposed at the first of the "sliding table 22" The sliding end 24 is located between the sliding table 23 and the driving unit 4', and the first end 231 of the sliding table 23 is disposed at the first end 242 of the sliding σ 24 It is perpendicular to each other in the horizontal direction, wherein the slide table 21 and the slide table 23 are in parallel in two directions, the slide table 22 and the slide table 24 are also parallelly aligned in the x direction, and the slide table 21 and the slide table 23 maintains an appropriate distance from the slide table 22 and the slide table 24 in the weir direction. Each of the slides 21 to 24 is provided with a transmission assembly respectively. The transmission assembly is composed of a rod 213, 223, 233 and 243, a slider 214, 224, 234 and 244 and a power source 215, 225, 235 and a 245, wherein the surface of the rod body 213 has a thread and a groove, the slider 214 is slidably coupled to the rod body 213, and the slider 214 is also coupled to one side of the detecting unit 3, so that the measurement The unit 3 is slidable along the rod body 213; the power source 215 is connected to the end end of the rod body 213 to drive the rod body 213. to rotate. Others of the sliding table—11—9 The repairing components of the repairing 22, 23, and 24 also have the same structure. The transmission component can be selected from various devices capable of driving two individuals for relative movement, such as gears, belts, and electric rainbows. Therefore, each of the detecting units 3 can be slid on each of the sliding stages 21 to 24 by the driving assembly to correspondingly scan the four edges of the substrate 7. - Referring to Figures 2 and 3, the detecting unit 3 of the glass substrate edge detecting device of the preferred embodiment of the present invention is disposed at an appropriate position of each of the sliding tables 21, 22, 23, and 24, respectively. The measuring unit 3 is preferably placed in the longitudinal plane of each of the sliding tables 2, 22, 23, and 24, and the detecting unit 3 can be selected from a photosensitive coupling element type [Charge c〇叩led Device ' CCD] or a complementary oxidized metal semiconductor type [

Complementary Metal-Oxide Semiconductor,CMOS〕之數 位攝影器材,以用來掃描該基板7之四個邊緣的破損情形 〇 請參照第2及3圖所示,本發明較佳實施例之玻璃基 板邊緣檢測裝置之二驅動單元4、4,係用來帶動該滑台 21〜24在機台上移動’以便使各該偵測單元3對應至該基 板7之四個邊緣,該驅動單元4、4,可選自各種能驅動二 個體作相對移動之裝置,在本實施例中該二驅動單元4、4’ ' 分別設有一第一活動座41、41’及一第二活動座42、42’, 其中該第二活動座42係堆疊設置於第一活動座41之一侧 ,該第一活動座41係垂直於該第二活動座42,該第一活 動座41設有一桿體411、一滑塊〔未繪示〕及一動力源412 ,第二活動座42亦設有一桿體421、一滑塊〔未繪示〕及Complementary Metal-Oxide Semiconductor, CMOS] digital photographic equipment for scanning the four edges of the substrate 7 for damage, please refer to Figures 2 and 3, the glass substrate edge detecting device of the preferred embodiment of the present invention The driving units 4 and 4 are used to drive the sliding tables 21 to 24 to move on the machine table so that the detecting units 3 correspond to the four edges of the substrate 7. The driving units 4 and 4 can be In the embodiment, the two driving units 4, 4'' are respectively provided with a first movable seat 41, 41' and a second movable seat 42, 42', wherein The second movable seat 42 is disposed on one side of the first movable seat 41. The first movable base 41 is perpendicular to the second movable base 42. The first movable base 41 is provided with a rod 411 and a slider. [not shown] and a power source 412, the second movable seat 42 is also provided with a rod body 421, a slider (not shown) and

—12 — 1352197 _年3月9日修正替換本 -動力源422’該第一活動座41的滑塊可 桿體4U,且該第一活動座41之滑塊亦連結該第二^動座〆 42之-側,使該第二活動座42可沿著該桿體4ιι移動; 該動力源412連接該桿體411之一端,以帶動該桿體川 旋轉。 該驅動單元4,亦同樣設有一桿體411,、一滑塊〔未 繪示〕及一動力源412,,第二活動座42,設有一桿體421, 、一滑塊〔未繪示〕及—動力源422,,該第—活動座41, 之滑塊可滑動的連結於該桿體411,,域第—活動座Μ, 之滑塊亦連結該第二活動座42,之—側,使該第二活動座 42’可沿著該桿體411,移動;該動力源412,連接該桿體仙 之:端’以帶動該桿體411,旋轉。另外,該第一活動座Μ 之桿體411在水平方向上係與該第二活動座42之桿體421 形成相互垂直,錢置於該驅動單it 4之其中—滑二21 在水平方向上與該第—活動座41之桿體彡絲互 ’以致設置於該驅動單^之另—滑台22則與該第二活動 座42之浦421形餘互垂直。該驅鮮元 同的設置方式。 明參照第2至5圖所示,當本發明較佳實施例進行檢 測玻璃基板邊緣時,首_由該驅動單元4、4,的調整, 使該滑台叫4於機台上移動至靠近該基板7,如第2至3 圖=不,直到各軸測單元3對應至該基板7之四個邊緣 =背的位置,調整各該勤】軍元3所職的祕點為各邊 緣之一端’藉此完成各該滑台21〜24之定位。另外,隨著 ~ 13 — 1352197 100年3月9日修正替換本 該基板7到、的”,亦· 上的位置,以便對應至該基板7 # σ 度,且由㈣μ 21 23 姐,提昇使用裕 .23相對於滑台22與滑台24 二::持一適當距離,故當各該滑台21〜24相對移 動罪近時,不會造成碰撞。接著藉 、235、245 漏1^ ^ 該動力源 215、225 ㈣測早元3於各該滑台21〜Μ上作順 時針或逆時針方向的移動’如第 元3係沿著板7之_邊 财斯貞測早 灣料㈣,各該偵測單元3 自邊緣之-知掃描至另一端後,則完成該 測。另外,雖然該基板7之四個邊緣^長二^邊緣檢 在不衫曰知描功效的情況下藉由該動力源215、225、况 、245改變各職尋元3在各騎台21〜24 測單元3能於―固定時間内完成對it 7之邊緣檢測,以提高基板邊緣檢側之效率。 如上所述’她於習驗璃基板邊緣檢職 檢測方可完成該面板8〇四個邊緣的掃福檢測,以 =降低錄測效率,另外由於必須要轉動該面板8〇 此仃—階段之掃描侧,會有所需的迴轉空間也較大 等缺點’本發明藉由設置四個镇測單元3,以同時對該基 板7之四個邊緣作掃描’且該滑台21〜24僅需透過驅^ 元4、4,的帶動作線性移動,並依據該基板7的大小對應 至該基板7之四個邊緣,所需的空間較小故其確實可提 升檢測之效率並提高空間的利用率。 雖然本發明已利用上述較佳實施例揭示,然其並非用 1352197 100年3月9日修正替換本 以限定本發明,任何熟習此技藝者在不脫離本發明之精神 和範圍之内,相對上述實施例進行各種更動與修改仍屬本 發明所保護之技術範疇,因此本發明之保護範圍當視後附 之申請專利範圍所界定者為準。 —15 — ⑽年3月9日修正替換本 【圖式簡單說明】 第1圖:習用玻璃基板邊緣檢測裝置之立體圖。 ^第2圖:本發明較佳實施例之玻璃基板邊緣檢測裝置之 定位前的立體圖。 第3圖:本發明較佳實施例之玻璃基板邊緣檢測裝置之 - 定位後的立體圖。 第4圖:本發明較佳實施例之玻璃基板邊緣檢測裝置之 定位後的上視圖。 第5圖:本發明第二實施例之玻璃基板邊緣檢測裝置之 檢測時的上視圖。 【主要元件符號說明】 1 承載平台 21 滑台 211 第一端 212 第二端 213 桿體 214 滑塊 215 動力源 22 滑台 221 第一端 222 第二端 223 桿體 224 滑塊 225 動力源 23 滑台 231 第一端 232 第二端 233 桿體 234 滑塊 235 動力源 24 滑台 241 第〆端 242 第二端 243 样體 244 滑塊 1352197 _ 100年3月9日修正替換本 245 動力源 3 偵測單元 4 驅動單元 4, 驅動單元 41 第一活動座 411 桿體 412 動力源 41, 第一活動座 41Γ桿體 412, 動力源 42 第二活動座 421 桿體 422 動力源 42, 第二活動座 421, 桿體 422, 動力源 6 支撐桿 7 基板 8 載台部 80 面板 81 線性滑台 9 影像擷取部 91 滑軌體 92 第一掃描部 93 第二掃描部 17 ——12 — 1352197 _August 9th, the replacement of the present-power source 422' the slider of the first movable seat 41 can be a rod 4U, and the slider of the first movable seat 41 is also connected to the second movable seat The side of the crucible 42 is such that the second movable seat 42 can be moved along the rod body 4; the power source 412 is connected to one end of the rod body 411 to drive the shaft body to rotate. The driving unit 4 is also provided with a rod body 411, a slider (not shown) and a power source 412, and a second movable seat 42 provided with a rod body 421 and a slider (not shown). And a power source 422, the slider of the first movable seat 41 is slidably coupled to the rod body 411, and the slider of the first movable seat is connected to the second movable seat 42 The second movable seat 42' can be moved along the rod body 411; the power source 412 is connected to the rod body: the end 'to drive the rod body 411 and rotate. In addition, the rod body 411 of the first movable seat is formed perpendicular to the rod body 421 of the second movable seat 42 in the horizontal direction, and the money is placed in the driving unit it 4 - the sliding 21 is horizontally The stalks of the first movable seat 41 are mutually perpendicular to the 421 shape of the second movable seat 42. The same way of setting up the fresh element. Referring to Figures 2 to 5, when the preferred embodiment of the present invention performs the detection of the edge of the glass substrate, the adjustment of the first drive unit 4, 4 causes the slide table 4 to move closer to the machine table. The substrate 7, as shown in the second to third figures = no, until each of the axonometric units 3 corresponds to the four edges of the substrate 7 = the position of the back, and the secret points of each of the diligent military units 3 are adjusted for each edge. One end 'by this completes the positioning of each of the slides 21-24. In addition, as the ~ 13 - 1352197 March 9th, 100th, replace the position of the substrate 7 to ", in order to correspond to the substrate 7 # σ degree, and by (4) μ 21 23 sister, upgrade use Yu.23 is opposite to the sliding table 22 and the sliding table 24:: an appropriate distance, so when each of the sliding tables 21~24 is relatively close to the movement, no collision will occur. Then borrow, 235, 245 leak 1 ^ ^ The power source 215, 225 (4) the early element 3 moves in the clockwise or counterclockwise direction on each of the sliding tables 21~Μ, such as the third element along the board 7 边边斯贞测早湾料(四) After the detection unit 3 scans from the edge to the other end, the measurement is completed. In addition, although the four edges of the substrate 7 are long and the edge detection is borrowed, the image is borrowed. The power source 215, 225, condition 245 changes the job finder 3 in each of the riding stages 21 to 24, and the measuring unit 3 can complete the edge detection of the it 7 in a fixed time to improve the efficiency of the edge detection side of the substrate. As mentioned above, she can complete the sweep detection of the four edges of the panel at the edge inspection of the glass substrate to reduce the recording efficiency. In addition, since it is necessary to rotate the panel 8 to the scanning side of the stage, there is a disadvantage that the required turning space is also large, and the present invention provides the four ballasting units 3 to simultaneously simultaneously the substrate 7. The four edges are scanned 'and the slides 21 to 24 are only required to move linearly through the driving action of the driving elements 4, 4, and corresponding to the four edges of the substrate 7 according to the size of the substrate 7, the required space Smaller, it does improve the efficiency of detection and increase the utilization of space. Although the present invention has been disclosed using the above-described preferred embodiments, it is not a modification of the present invention by the use of the revised version of 1352197 on March 9, 100, The present invention is not limited to the spirit and scope of the present invention, and various modifications and changes to the above-described embodiments are still within the technical scope of the present invention. Therefore, the scope of the present invention is defined by the scope of the appended claims. (15) Correction and replacement of this document on March 9th, 10th [Simplified description of the drawings] Fig. 1 is a perspective view of a conventional glass substrate edge detecting device. ^Fig. 2: Glass base of a preferred embodiment of the present invention A perspective view of the edge detecting device before positioning. Fig. 3 is a perspective view of the glass substrate edge detecting device of the preferred embodiment of the present invention. Fig. 4 is a view showing the positioning of the glass substrate edge detecting device of the preferred embodiment of the present invention. Fig. 5 is a top view of the glass substrate edge detecting device according to the second embodiment of the present invention. [Main component symbol description] 1 carrier platform 21 slide table 211 first end 212 second end 213 rod Body 214 Slider 215 Power source 22 Slide table 221 First end 222 Second end 223 Rod body 224 Slider 225 Power source 23 Slide table 231 First end 232 Second end 233 Rod body 234 Slider 235 Power source 24 Slide table 241 second end 242 second end 243 sample 244 slider 1352197 _ March 9 correction replacement 245 power source 3 detection unit 4 drive unit 4, drive unit 41 first movable seat 411 rod body 412 power source 41, first movable seat 41 mast body 412, power source 42 second movable seat 421 rod body 422 power source 42, second movable seat 421, rod body 422, power source 6 support rod 7 substrate 8 Stage 80 Panel 81 Linear slide 9 Image capture unit 91 Slide rail 92 First scanning unit 93 Second scanning unit 17 —

Claims (1)

十、申請專利範圍: 100年3月9 曰修正替換本 一種玻璃基板邊緣檢測裝置,其包含: 機台,其設有一承載平台; 四滑台,分別設置於該承载平台之外周; 四偵測單元,其分別可滑動的對應設置於該四滑a . 數個傳動組件’纽置於各騎台,且連接並 偵測單元沿著各該滑台滑動;及 ^ 數個驅動單元’其連接並帶動各該滑台相對該機台移動 且圍繞形成一檢測範圍; 射該數個傳動組件係帶動各該偵測單元分別沿該檢 測範圍之各邊緣移動。 Λ 2 其令該相鄰之二滑台相互堆疊設置且連結該驅動單元 ,該另外二滑台亦相互堆疊設置且連結該另一驅動單元 ,且該四滑台在水平方向上相互垂直。 、依申請專利範圍第2項所述之玻璃基板邊緣檢測裝置 ’其中該二驅動單元分別設有—第—活動座及一第二活 動座’且該第二活動座堆疊設置於第—活動座之一側, “驅動單元對應設置於該承載平台之對角位置。 依^明專利朗第3項所述之玻璃基板邊緣檢測裝置 ,其中該第一活動座設有一桿體、一滑塊及一動力源, 該滑塊可滑動的連結於該桿體,且該滑塊亦連結該第二 i動座之—側’使該第二活動座沿著該桿體移動;該動 力源,接該桿體之—端,以帶動該桿體旋轉。 >依申明專利範圍第4項所述之玻璃基板邊緣檢測裝置 替換本 其中該第二活動座設有一桿體、一滑塊及一動力源, 該滑塊可滑動的連結於該桿體’且該滑塊亦連結於該驅 動單元上之其中一滑台,使該滑台沿著該桿體移動〔該 動力源連接該桿體之一端,以帶動該桿體旋轉。 6、 依申請專利範圍第5項所述之玻璃基板邊緣檢測裝置 ,其中該第一活動座之桿體在水平方向上與該第二活動 座之桿體形成相互垂直’且設置於該驅動單元之其中一 滑台在水平方向上與該第一活動座之桿體形成相互垂 直’以致設置於該驅動單元之另一滑台則與該第二活動 座之桿體形成相互垂直。 7、 依申请專利範圍第1項所述之玻璃基板邊緣檢測裝置 ,其中該傳動組件設有一桿體、一滑塊及一動力源,該 滑塊可滑動的連結於該桿體,且該滑塊亦連結於該其中 一偵測單元,使該偵測單元沿著該桿體移動;該動力源 連接該桿體之一端,以帶動該桿體旋轉。X. Patent application scope: March 19, 100 曰 Amendment and replacement of a glass substrate edge detecting device, comprising: a machine platform provided with a carrying platform; four sliding tables respectively disposed outside the carrying platform; The unit is slidably correspondingly disposed on the four-slide a. a plurality of transmission components are placed on each of the riding platforms, and the connecting and detecting unit slides along each of the sliding tables; and a plurality of driving units are connected And driving each of the sliding tables relative to the machine to move around and forming a detection range; and the plurality of transmission components are driven to move the detection units respectively along the edges of the detection range. Λ 2, the adjacent two sliding stages are stacked on each other and connected to the driving unit, and the other two sliding stages are also stacked on each other and connected to the other driving unit, and the four sliding stages are perpendicular to each other in the horizontal direction. The glass substrate edge detecting device according to claim 2, wherein the two driving units are respectively provided with a first movable seat and a second movable seat, and the second movable seat is stacked on the first movable seat. In one side, the driving unit is disposed at a diagonal position of the carrying platform. The glass substrate edge detecting device according to the third aspect of the invention, wherein the first movable seat is provided with a rod body and a slider. a power source, the slider is slidably coupled to the rod body, and the slider is also coupled to the side of the second i-motion seat to move the second movable seat along the rod body; the power source is connected The end of the rod body is used to drive the rod body to rotate. The glass substrate edge detecting device according to claim 4 of the present invention is replaced by a rod body, a slider and a power. The slider is slidably coupled to the rod body and the slider is also coupled to one of the sliding blocks of the driving unit to move the sliding table along the rod body (the power source is connected to the rod body) One end to drive the rod to rotate. The glass substrate edge detecting device according to Item 5, wherein the rod of the first movable seat is perpendicular to the rod body of the second movable seat in a horizontal direction and is disposed on one of the driving units. The sliding table is perpendicular to the rod body of the first movable seat in the horizontal direction, so that the other sliding table disposed on the driving unit is perpendicular to the rod body of the second movable seat. 7. According to the patent application scope The glass substrate edge detecting device of the first aspect, wherein the transmission component is provided with a rod body, a slider and a power source, the slider is slidably coupled to the rod body, and the slider is also coupled to the rod body a detecting unit moves the detecting unit along the rod body; the power source is connected to one end of the rod body to drive the rod body to rotate.
TW96136863A 2007-10-02 2007-10-02 Edge measuring apparatus for glass substrate TWI352197B (en)

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Publication number Priority date Publication date Assignee Title
TWI822675B (en) * 2017-04-18 2023-11-21 美商康寧公司 Substrate edge test apparatus, system, and method

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CN107884417A (en) * 2017-12-11 2018-04-06 苏州精濑光电有限公司 A kind of substrate edges check machine and marginal check method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI822675B (en) * 2017-04-18 2023-11-21 美商康寧公司 Substrate edge test apparatus, system, and method

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