TWI641813B - 光學濾波器及光譜儀及用於獲得沿著一光學路徑傳播之一光束之一光譜之方法 - Google Patents

光學濾波器及光譜儀及用於獲得沿著一光學路徑傳播之一光束之一光譜之方法 Download PDF

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Publication number
TWI641813B
TWI641813B TW104103308A TW104103308A TWI641813B TW I641813 B TWI641813 B TW I641813B TW 104103308 A TW104103308 A TW 104103308A TW 104103308 A TW104103308 A TW 104103308A TW I641813 B TWI641813 B TW I641813B
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Taiwan
Prior art keywords
optical filter
filter
optical
downstream
upstream
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TW104103308A
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English (en)
Chinese (zh)
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TW201531674A (zh
Inventor
科提斯Ｒ 魯嘉
班傑明Ｆ 凱琴
寶拉 史密斯
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美商唯亞威方案公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1213—Filters in general, e.g. dichroic, band
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1213—Filters in general, e.g. dichroic, band
    • G01J2003/1221—Mounting; Adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1226—Interference filters
    • G01J2003/1234—Continuously variable IF [CVIF]; Wedge type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G01J2003/2813—2D-array

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
TW104103308A 2014-01-31 2015-01-30 光學濾波器及光譜儀及用於獲得沿著一光學路徑傳播之一光束之一光譜之方法 TWI641813B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201461934547P 2014-01-31 2014-01-31
US61/934,547 2014-01-31

Publications (2)

Publication Number Publication Date
TW201531674A TW201531674A (zh) 2015-08-16
TWI641813B true TWI641813B (zh) 2018-11-21

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TW104103308A TWI641813B (zh) 2014-01-31 2015-01-30 光學濾波器及光譜儀及用於獲得沿著一光學路徑傳播之一光束之一光譜之方法
TW107135212A TWI692622B (zh) 2014-01-31 2015-01-30 光學濾波器及用於獲得沿著一光學路徑傳播之一光束之一光譜之方法

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Country Status (8)

Country Link
US (2) US9625628B2 (enExample)
EP (1) EP3100078B1 (enExample)
JP (3) JP6490700B2 (enExample)
KR (2) KR102351001B1 (enExample)
CN (2) CN109520618B (enExample)
CA (1) CA2938443C (enExample)
TW (2) TWI641813B (enExample)
WO (1) WO2015116756A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11283232B2 (en) 2019-11-28 2022-03-22 Industrial Technology Research Institute Power-measuring protection method and laser protection system

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9733124B2 (en) * 2013-04-18 2017-08-15 BMG LABTECH, GmbH Microplate reader with linear variable filter
CA2938443C (en) 2014-01-31 2021-01-26 Viavi Solutions Inc. An optical filter and spectrometer
JP6473367B2 (ja) * 2015-03-31 2019-02-20 三菱重工業株式会社 ガス分析システム
US9945790B2 (en) 2015-08-05 2018-04-17 Viavi Solutions Inc. In-situ spectral process monitoring
US10048127B2 (en) 2015-08-05 2018-08-14 Viavi Solutions Inc. Optical filter and spectrometer
US9939587B2 (en) 2015-08-28 2018-04-10 Samsung Electronics Co., Ltd. On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer
DE102016218578A1 (de) * 2016-09-27 2018-03-29 Robert Bosch Gmbh Optische Sensorvorrichtung, Verfahren zum Einstellen einer spektralen Auflösung einer optischen Sensorvorrichtung und spektrales Messverfahren
WO2018113939A1 (en) * 2016-12-21 2018-06-28 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Optical system
WO2018113938A1 (en) * 2016-12-21 2018-06-28 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Optical system
JP6806603B2 (ja) * 2017-03-17 2021-01-06 倉敷紡績株式会社 分光フィルタおよび分光測光装置
KR102364854B1 (ko) 2017-07-26 2022-02-18 삼성전자주식회사 광 필터를 포함하는 광 분광기
WO2019027724A1 (en) * 2017-08-02 2019-02-07 The Charles Stark Draper Laboratory, Inc. OPTICAL FILTER PASSE-BANDE
CN111149347B (zh) 2017-10-11 2021-08-06 富士胶片株式会社 摄像装置及图像处理装置
KR20200095547A (ko) * 2017-12-13 2020-08-10 트리나미엑스 게엠베하 분광계 장치 및 시스템
JP7630991B2 (ja) * 2017-12-13 2025-02-18 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 分光計装置および分光計システム
JP2019132607A (ja) * 2018-01-29 2019-08-08 株式会社Ｊｖｃケンウッド 分光器
US10962822B2 (en) * 2018-06-06 2021-03-30 Viavi Solutions Inc. Liquid-crystal selectable bandpass filter
WO2020033518A1 (en) * 2018-08-08 2020-02-13 Arizona Board Of Regents On Behalf Of The University Of Arizona Apertureless confocal microscopy devices and methods
US12092836B2 (en) * 2018-10-26 2024-09-17 Viavi Solutions Inc. Optical element and optical system
US12285216B2 (en) * 2019-06-10 2025-04-29 Nikon Corporation Measurement device
KR102762430B1 (ko) * 2019-07-16 2025-02-05 에이엠에스 인터내셔널 에이쥐 박막 디바이스를 이용하는 광 파장 스펙트럼의 재구축
EP4017363A4 (en) * 2019-08-20 2023-08-02 Profusa, Inc. OPTICAL FILTER DEVICE, SYSTEM AND METHOD FOR IMPROVED OPTICAL REJECTION OF OUT-OF-BAND WAVELENGTHS
CN110530782B (zh) * 2019-09-25 2024-05-07 迈克医疗电子有限公司 消除旁瓣信号干扰的光学系统及方法
US11226234B2 (en) * 2020-01-22 2022-01-18 Applied Materials, Inc. Spectrum shaping devices and techniques for optical characterization applications
TWI730862B (zh) 2020-08-03 2021-06-11 國立陽明交通大學 製造具厚度變化的薄膜的方法
CN114569099B (zh) 2020-11-30 2025-08-05 精工爱普生株式会社 检测装置和测量装置
JP2022086227A (ja) * 2020-11-30 2022-06-09 セイコーエプソン株式会社 検出装置および測定装置
CN113093322B (zh) * 2021-03-30 2023-03-28 联合微电子中心有限责任公司 Cmos图像传感器、干涉型滤光片及其制备方法
TWI819414B (zh) * 2021-11-24 2023-10-21 財團法人工業技術研究院 光電感測系統及其方法
KR102694137B1 (ko) * 2021-11-25 2024-08-13 (주)티에스테크 선형 가변 밴드패스 필터를 이용한 유해물질 혼합가스의 검출 장치
US12467790B2 (en) 2022-02-18 2025-11-11 Oto Photonics Inc. Spectrometer
WO2024261151A1 (en) * 2023-06-23 2024-12-26 Karlsruher Institut für Technologie Method of fabricating continuously variable optical filters via inkjet printing
CN119355942B (zh) * 2024-12-26 2025-03-28 苏州镁伽科技有限公司 一种光源耦合系统、方法、设备及存储介质

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5166755A (en) * 1990-05-23 1992-11-24 Nahum Gat Spectrometer apparatus
US6700690B1 (en) * 2000-10-02 2004-03-02 Ocean Optics, Inc. Tunable variable bandpass optical filter
CN102741671A (zh) * 2009-11-30 2012-10-17 Imec公司 用于光谱成像系统的集成电路

Family Cites Families (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4389096A (en) * 1977-12-27 1983-06-21 Matsushita Electric Industrial Co., Ltd. Image display apparatus of liquid crystal valve projection type
JPS5760231A (en) 1980-09-29 1982-04-12 Hitachi Ltd Multi-wavelength spectrometer
SE445389B (sv) 1982-06-28 1986-06-16 Geotronics Ab Forfarande och anordning for att erhalla metdata fran en kemisk process
DE3719806A1 (de) 1987-06-13 1988-12-22 Basf Ag Fiberoptischer sensor
DE69023875T2 (de) 1989-09-29 1996-05-15 Waters Investments Ltd Vorrichtung zum Messen der Lichtabsorption oder Fluoreszenz in flüssigen Proben.
US5144498A (en) * 1990-02-14 1992-09-01 Hewlett-Packard Company Variable wavelength light filter and sensor system
US5218473A (en) * 1990-07-06 1993-06-08 Optical Coating Laboratories, Inc. Leakage-corrected linear variable filter
US5272518A (en) * 1990-12-17 1993-12-21 Hewlett-Packard Company Colorimeter and calibration system
JPH04276527A (ja) 1991-03-04 1992-10-01 Nippon Steel Corp 炉内温度計
US5872655A (en) 1991-07-10 1999-02-16 Optical Coating Laboratory, Inc. Monolithic linear variable filter and method of manufacture
JP3375147B2 (ja) * 1992-05-26 2003-02-10 浜松ホトニクス株式会社 半導体光検出装置
US5784158A (en) * 1995-11-22 1998-07-21 Lastek Laboratories Pty. Ltd. Broad spectrum spectrometer apparatus
JPH10213482A (ja) * 1997-01-28 1998-08-11 Minolta Co Ltd 色彩測定装置
US5949082A (en) 1998-03-23 1999-09-07 Datex-Ohmeda, Inc. Ceramic radiation source assembly with metalized seal for gas spectrometer
US6075611A (en) 1998-05-07 2000-06-13 Schlumberger Technology Corporation Methods and apparatus utilizing a derivative of a fluorescene signal for measuring the characteristics of a multiphase fluid flow in a hydrocarbon well
JP3844886B2 (ja) 1998-07-28 2006-11-15 富士通株式会社 光フィルタの製造方法
US6057925A (en) * 1998-08-28 2000-05-02 Optical Coating Laboratory, Inc. Compact spectrometer device
EP1252500A2 (en) 1999-07-16 2002-10-30 Textron Systems Corporation Integrated optics block for spectroscopy
US6836325B2 (en) 1999-07-16 2004-12-28 Textron Systems Corporation Optical probes and methods for spectral analysis
CN1409818A (zh) * 1999-11-19 2003-04-09 乔宾伊冯公司 小型光谱荧光计
AU2001240121B2 (en) 2000-03-10 2005-06-23 Textron Systems Corporation Optical probes and methods for spectral analysis
US8565860B2 (en) 2000-08-21 2013-10-22 Biosensors International Group, Ltd. Radioactive emission detector equipped with a position tracking system
JP2002247455A (ja) * 2001-02-20 2002-08-30 Kureha Chem Ind Co Ltd 撮像部材及び撮像装置
JP2002268120A (ja) * 2001-03-14 2002-09-18 Kureha Chem Ind Co Ltd 光学的機能フィルター部材及び撮像装置
US6785002B2 (en) * 2001-03-16 2004-08-31 Optical Coating Laboratory, Inc. Variable filter-based optical spectrometer
JP2002277326A (ja) 2001-03-19 2002-09-25 Nireco Corp 分光測光装置
US7126682B2 (en) 2001-04-11 2006-10-24 Rio Grande Medical Technologies, Inc. Encoded variable filter spectrometer
US6909548B2 (en) 2001-06-13 2005-06-21 Jds Uniphase Inc. Optical filter using a linear variable filter with elliptical beam geometry
DE10204963A1 (de) 2002-02-06 2003-08-14 Isco Inc Fotometrische Sonde für Untersuchungen an Flüssigkeiten sowie Verfahren hierfür
IL159249A0 (en) 2002-04-23 2004-06-01 Small packaged spectroscopic sensor unit
US6958693B2 (en) 2002-05-24 2005-10-25 Procter & Gamble Company Sensor device and methods for using same
US20040004551A1 (en) 2002-07-08 2004-01-08 Early Gay M. Fluid management system
US20060228089A1 (en) 2003-01-12 2006-10-12 Makoto Shimokozono Variable wavelength optical filter
US7061607B2 (en) 2003-05-02 2006-06-13 United Technologies Corporation Engine spectrometer probe and method of use
JP2005043092A (ja) 2003-07-23 2005-02-17 Kazumoto Onodera 濁水特性測定装置、水質改良剤注入装置および浄水装置
US7459713B2 (en) 2003-08-14 2008-12-02 Microptix Technologies, Llc Integrated sensing system approach for handheld spectral measurements having a disposable sample handling apparatus
CA2581735A1 (en) * 2003-09-26 2005-04-07 Tidal Photonics, Inc. Apparatus and methods relating to enhanced spectral measurement systems
WO2005106415A1 (en) * 2004-04-30 2005-11-10 X-Rite, Incorporated Color measurement engine with parallel detectors
US7423258B2 (en) 2005-02-04 2008-09-09 Baker Hughes Incorporated Method and apparatus for analyzing a downhole fluid using a thermal detector
US7460247B1 (en) * 2005-05-23 2008-12-02 Sandia Corporation Full spectrum optical safeguard
US7420663B2 (en) 2005-05-24 2008-09-02 Bwt Property Inc. Spectroscopic sensor on mobile phone
US7530265B2 (en) 2005-09-26 2009-05-12 Baker Hughes Incorporated Method and apparatus for elemental analysis of a fluid downhole
US7372039B2 (en) 2005-12-20 2008-05-13 Ecolab Inc. Near UV absorption spectrometer and method for using the same
US20080285165A1 (en) * 2007-05-14 2008-11-20 Wu Kuohua Angus Thin film filter system and method
FI20075622A0 (fi) 2007-09-07 2007-09-07 Valtion Teknillinen Spektrometri ja menetelmä liikkuvan näytteen mittaukseen
JP2009145224A (ja) * 2007-12-14 2009-07-02 Konica Minolta Sensing Inc 測光装置
JP2009271046A (ja) * 2008-04-08 2009-11-19 Sony Corp 光計測装置及び計測用光学系
JP2009276691A (ja) * 2008-05-16 2009-11-26 Nippon Shinku Kogaku Kk 光学素子及びその製造方法
GB0809252D0 (en) 2008-05-21 2008-06-25 Ntnu Technology Transfer As Underwater hyperspectral imaging
US20100208348A1 (en) * 2008-08-22 2010-08-19 Carestream Health, Inc. Tunable spectral filtration device
US8203769B2 (en) * 2008-10-10 2012-06-19 Xerox Corporation In-line linear variable filter based spectrophotometer
US8314991B2 (en) * 2008-10-31 2012-11-20 Cpfilms Inc. Variable transmission composite interference filter
US7987712B2 (en) 2008-12-10 2011-08-02 Rosemount Aerospace Inc. High temperature seal assembly for optical sensor
US9207348B2 (en) 2009-05-28 2015-12-08 Westerngeco L.L.C Collision avoidance for instrumented probes deployed from a seismic vessel
JP5736672B2 (ja) 2010-06-03 2015-06-17 株式会社ニコン 光学部品及び分光測光装置
CN101900905A (zh) 2010-07-20 2010-12-01 友达光电股份有限公司 触控式液晶显示器
JP5810512B2 (ja) 2010-11-12 2015-11-11 セイコーエプソン株式会社 光学装置
US8476574B1 (en) * 2011-03-31 2013-07-02 Mutoh Industries Ltd. Method of deconvolution of spectral data
WO2012147878A1 (ja) 2011-04-27 2012-11-01 株式会社メニコン 細胞培養器
US9459143B2 (en) 2011-06-24 2016-10-04 Shimadzu Corporation Spectroscopic device
JP5643172B2 (ja) * 2011-10-17 2014-12-17 株式会社小松製作所 受光部のスペックル軽減機能を有する分光器
WO2013065035A1 (en) 2011-11-03 2013-05-10 Verifood Ltd. Low-cost spectrometry system for end-user food analysis
WO2013064510A1 (en) 2011-11-04 2013-05-10 Imec Spectral camera with mosaic of filters for each image pixel
US8861106B2 (en) 2011-12-02 2014-10-14 Raytheon Company Variable monochromatic uniform calibration source
EP2610607B1 (en) 2011-12-27 2019-10-30 HORIBA, Ltd. Gas analyzing apparatus
CN103185637A (zh) 2011-12-28 2013-07-03 上海丰汇医学科技有限公司 用于生化分析仪上的分光光度计的光学系统
US9297749B2 (en) 2012-03-27 2016-03-29 Innovative Science Tools, Inc. Optical analyzer for identification of materials using transmission spectroscopy
JP5988690B2 (ja) 2012-05-18 2016-09-07 浜松ホトニクス株式会社 分光センサ
CN102944305B (zh) 2012-11-12 2014-08-13 北京航空航天大学 一种快照式高通量的光谱成像方法和光谱成像仪
WO2014089120A1 (en) 2012-12-07 2014-06-12 Integrated Plasmonics Corporation Plasmonic spectroscopic sensor and cuvette therefor
CN103278861A (zh) 2013-05-16 2013-09-04 浙江大学 水下高光谱成像系统
EP4006542B1 (en) 2013-08-02 2025-10-01 Verifood Ltd. Spectrometer comprising sample illuminator
JP2016537618A (ja) 2013-10-04 2016-12-01 マッセー ユニヴァーシティ Ｉｎ−ｓｉｔｕ型光学センサ
US20150153156A1 (en) * 2013-12-03 2015-06-04 Mvm Electronics, Inc. High spatial and spectral resolution snapshot imaging spectrometers using oblique dispersion
CA2938443C (en) 2014-01-31 2021-01-26 Viavi Solutions Inc. An optical filter and spectrometer
US20150219484A1 (en) 2014-02-03 2015-08-06 Joseph Dehner Sight glass assembly
WO2015157442A1 (en) 2014-04-09 2015-10-15 Nch Corporation System and method for detecting biofilm growth in water systems
US10048127B2 (en) 2015-08-05 2018-08-14 Viavi Solutions Inc. Optical filter and spectrometer
US9945790B2 (en) 2015-08-05 2018-04-17 Viavi Solutions Inc. In-situ spectral process monitoring

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5166755A (en) * 1990-05-23 1992-11-24 Nahum Gat Spectrometer apparatus
US6700690B1 (en) * 2000-10-02 2004-03-02 Ocean Optics, Inc. Tunable variable bandpass optical filter
CN102741671A (zh) * 2009-11-30 2012-10-17 Imec公司 用于光谱成像系统的集成电路

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11283232B2 (en) 2019-11-28 2022-03-22 Industrial Technology Research Institute Power-measuring protection method and laser protection system

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