TWI633001B - Resin molding device and method thereof, film transport roller and film supply device for resin molding device - Google Patents
Resin molding device and method thereof, film transport roller and film supply device for resin molding device Download PDFInfo
- Publication number
- TWI633001B TWI633001B TW106110036A TW106110036A TWI633001B TW I633001 B TWI633001 B TW I633001B TW 106110036 A TW106110036 A TW 106110036A TW 106110036 A TW106110036 A TW 106110036A TW I633001 B TWI633001 B TW I633001B
- Authority
- TW
- Taiwan
- Prior art keywords
- roller
- release film
- mold
- resin
- resin molding
- Prior art date
Links
- 229920005989 resin Polymers 0.000 title claims abstract description 238
- 239000011347 resin Substances 0.000 title claims abstract description 238
- 238000000465 moulding Methods 0.000 title claims abstract description 166
- 238000000034 method Methods 0.000 title claims abstract description 39
- 230000007246 mechanism Effects 0.000 claims abstract description 149
- 238000004804 winding Methods 0.000 claims abstract description 30
- 238000010438 heat treatment Methods 0.000 claims description 10
- 230000037303 wrinkles Effects 0.000 abstract description 27
- 239000000758 substrate Substances 0.000 description 96
- 239000000463 material Substances 0.000 description 57
- 235000012431 wafers Nutrition 0.000 description 45
- 230000032258 transport Effects 0.000 description 35
- 238000003860 storage Methods 0.000 description 24
- 239000004065 semiconductor Substances 0.000 description 23
- 238000005538 encapsulation Methods 0.000 description 15
- 239000012530 fluid Substances 0.000 description 13
- 238000000748 compression moulding Methods 0.000 description 12
- 230000007723 transport mechanism Effects 0.000 description 9
- 238000001721 transfer moulding Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 7
- 238000003825 pressing Methods 0.000 description 7
- 239000000047 product Substances 0.000 description 7
- 230000008569 process Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- -1 polytetrafluoroethylene Polymers 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 235000014443 Pyrus communis Nutrition 0.000 description 2
- 229920006311 Urethane elastomer Polymers 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- RJGDLRCDCYRQOQ-UHFFFAOYSA-N anthrone Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3CC2=C1 RJGDLRCDCYRQOQ-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/22—Component parts, details or accessories; Auxiliary operations
- B29C39/36—Removing moulded articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
- B29C37/0067—Using separating agents during or after moulding; Applying separating agents on preforms or articles, e.g. to prevent sticking to each other
- B29C37/0075—Using separating agents during or after moulding; Applying separating agents on preforms or articles, e.g. to prevent sticking to each other using release sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/02—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles
- B29C39/04—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles using movable moulds not applied
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/22—Component parts, details or accessories; Auxiliary operations
- B29C39/26—Moulds or cores
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/22—Component parts, details or accessories; Auxiliary operations
- B29C39/38—Heating or cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016-067078 | 2016-03-30 | ||
JP2016067078A JP6506717B2 (ja) | 2016-03-30 | 2016-03-30 | 樹脂成形装置、樹脂成形方法、フィルム搬送用ローラ及び樹脂成形装置用フィルム供給装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201733769A TW201733769A (zh) | 2017-10-01 |
TWI633001B true TWI633001B (zh) | 2018-08-21 |
Family
ID=60007632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106110036A TWI633001B (zh) | 2016-03-30 | 2017-03-24 | Resin molding device and method thereof, film transport roller and film supply device for resin molding device |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6506717B2 (ko) |
KR (1) | KR102026520B1 (ko) |
CN (1) | CN107275232A (ko) |
TW (1) | TWI633001B (ko) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6854784B2 (ja) * | 2018-01-15 | 2021-04-07 | Towa株式会社 | 樹脂成形装置及び樹脂成形品製造方法 |
JP7145576B2 (ja) * | 2018-08-24 | 2022-10-03 | 株式会社Subaru | 複合材賦形装置及び複合材賦形方法 |
JP7134926B2 (ja) * | 2019-07-10 | 2022-09-12 | Towa株式会社 | 樹脂成形装置、及び樹脂成形品の製造方法 |
JP6869304B2 (ja) * | 2019-09-17 | 2021-05-12 | Jx金属株式会社 | インサート成形品および、インサート成形品の製造方法 |
CN112978431A (zh) * | 2021-02-04 | 2021-06-18 | 芯笙半导体科技(上海)有限公司 | 基于树脂成型的除静电薄膜处理设备 |
JP7230160B1 (ja) * | 2021-12-01 | 2023-02-28 | Towa株式会社 | 樹脂成形装置及び樹脂成形品の製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201532776A (zh) * | 2013-12-26 | 2015-09-01 | Towa Corp | 樹脂封裝方法及樹脂封裝裝置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06329276A (ja) * | 1993-05-19 | 1994-11-29 | Matsushita Electric Ind Co Ltd | シート材給送装置 |
JP3595793B2 (ja) * | 2001-12-04 | 2004-12-02 | 株式会社サイネックス | 樹脂封止装置 |
JP2004039823A (ja) * | 2002-07-03 | 2004-02-05 | Nec Yamagata Ltd | 半導体樹脂封止装置及びその方法 |
JP4585321B2 (ja) * | 2005-01-12 | 2010-11-24 | アピックヤマダ株式会社 | 樹脂モールド装置及び樹脂モールド方法 |
KR100609605B1 (ko) | 2005-03-30 | 2006-08-08 | 주식회사지엠피 | 라미네이터 |
KR20070048034A (ko) * | 2005-11-03 | 2007-05-08 | 엘지전자 주식회사 | 테이프 제품의 검사장치 |
JP2007250681A (ja) * | 2006-03-14 | 2007-09-27 | Matsushita Electric Ind Co Ltd | 半導体樹脂封止装置及びリリースフィルムの供給方法 |
JP4135769B2 (ja) | 2006-09-27 | 2008-08-20 | 東レ株式会社 | 間欠式フィルム成形装置および成形方法 |
KR101000776B1 (ko) * | 2008-07-24 | 2010-12-15 | 세크론 주식회사 | 전자 부품 몰딩 장치 |
KR101101669B1 (ko) * | 2009-12-01 | 2011-12-30 | 삼성전기주식회사 | 전자부품 제조장치 및 전자부품 제조방법 |
JP2013155007A (ja) * | 2012-01-31 | 2013-08-15 | Toyota Motor Corp | 搬送ローラ |
JP6298719B2 (ja) * | 2014-06-09 | 2018-03-20 | Towa株式会社 | 樹脂封止装置及び樹脂封止方法 |
-
2016
- 2016-03-30 JP JP2016067078A patent/JP6506717B2/ja active Active
-
2017
- 2017-01-23 KR KR1020170010286A patent/KR102026520B1/ko active IP Right Grant
- 2017-03-10 CN CN201710141418.8A patent/CN107275232A/zh active Pending
- 2017-03-24 TW TW106110036A patent/TWI633001B/zh active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201532776A (zh) * | 2013-12-26 | 2015-09-01 | Towa Corp | 樹脂封裝方法及樹脂封裝裝置 |
Also Published As
Publication number | Publication date |
---|---|
KR20170113022A (ko) | 2017-10-12 |
CN107275232A (zh) | 2017-10-20 |
TW201733769A (zh) | 2017-10-01 |
KR102026520B1 (ko) | 2019-09-27 |
JP6506717B2 (ja) | 2019-04-24 |
JP2017183443A (ja) | 2017-10-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI633001B (zh) | Resin molding device and method thereof, film transport roller and film supply device for resin molding device | |
TWI689396B (zh) | 成形模具、成形裝置及成形品的製造方法 | |
JP6525580B2 (ja) | 樹脂成形装置及び樹脂成形方法 | |
JP6560498B2 (ja) | 樹脂封止方法及び樹脂成形品の製造方法 | |
KR20180115253A (ko) | 수지 밀봉 장치 및 수지 밀봉 방법 및 수지 밀봉용의 성형형 | |
TW201448074A (zh) | 樹脂成型裝置以及樹脂成型方法 | |
TWI613059B (zh) | 樹脂成形裝置及樹脂成形方法以及成形模具 | |
JP6180206B2 (ja) | 樹脂封止方法および圧縮成形装置 | |
KR101998942B1 (ko) | 수지 성형 장치 및 수지 성형 방법 | |
JP2014231185A (ja) | 樹脂モールド装置および樹脂モールド方法 | |
US20230073604A1 (en) | Resin-sealing method | |
CN107685412B (zh) | 成型模、树脂成型装置及树脂成型品的制造方法 | |
JP7134926B2 (ja) | 樹脂成形装置、及び樹脂成形品の製造方法 | |
JP7465829B2 (ja) | 樹脂成形品の製造方法、成形型及び樹脂成形装置 | |
TW202249128A (zh) | 樹脂密封裝置以及樹脂密封方法 | |
JP2000210987A (ja) | 樹脂モ―ルド装置及びこれに用いるモ―ルド金型 | |
JP2015056467A (ja) | 半導体装置の製造方法、半導体製造装置、および樹脂封止用シート状樹脂 | |
TW201932273A (zh) | 成型模、樹脂成型裝置及樹脂成型品的製造方法 | |
TW202231443A (zh) | 樹脂成型裝置及樹脂成型品的製造方法 | |
TWI791250B (zh) | 樹脂洩漏防止用部件、樹脂洩漏防止用部件供給機構、樹脂成型裝置及樹脂成型品的製造方法 | |
WO2023105841A1 (ja) | 樹脂封止装置及び封止金型 | |
WO2023062885A1 (ja) | 圧縮成形装置 | |
JP2008284732A (ja) | 圧縮成形装置 |