TWI627682B - 用於控制層疊晶片的位置之技術 - Google Patents

用於控制層疊晶片的位置之技術 Download PDF

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Publication number
TWI627682B
TWI627682B TW103134753A TW103134753A TWI627682B TW I627682 B TWI627682 B TW I627682B TW 103134753 A TW103134753 A TW 103134753A TW 103134753 A TW103134753 A TW 103134753A TW I627682 B TWI627682 B TW I627682B
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assembly
semiconductor die
semiconductor
vertical
steps
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TW103134753A
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Chinese (zh)
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TW201526122A (zh
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麥克 戴林格
爾 霍金斯
懷恩 周
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奧瑞可國際公司
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    • H10W72/241—Dispositions, e.g. layouts
    • H10W72/244—Dispositions, e.g. layouts relative to underlying supporting features, e.g. bond pads, RDLs or vias
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Wire Bonding (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Die Bonding (AREA)
TW103134753A 2013-10-21 2014-10-06 用於控制層疊晶片的位置之技術 TWI627682B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/059,302 US9209165B2 (en) 2013-10-21 2013-10-21 Technique for controlling positions of stacked dies
US14/059,302 2013-10-21

Publications (2)

Publication Number Publication Date
TW201526122A TW201526122A (zh) 2015-07-01
TWI627682B true TWI627682B (zh) 2018-06-21

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US (1) US9209165B2 (enExample)
EP (1) EP3061131B1 (enExample)
JP (1) JP6534386B2 (enExample)
KR (1) KR102174120B1 (enExample)
CN (1) CN105659382B (enExample)
TW (1) TWI627682B (enExample)
WO (1) WO2015060978A1 (enExample)

Families Citing this family (10)

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Publication number Priority date Publication date Assignee Title
US9698093B2 (en) * 2015-08-24 2017-07-04 Nxp Usa,Inc. Universal BGA substrate
WO2017111952A1 (en) 2015-12-22 2017-06-29 Intel Corporation Ultra small molded module integrated with die by module-on-wafer assembly
US10234626B2 (en) * 2016-02-08 2019-03-19 Skorpios Technologies, Inc. Stepped optical bridge for connecting semiconductor waveguides
CN108878398B (zh) * 2017-05-16 2020-07-21 晟碟半导体(上海)有限公司 包括导电凸块互连的半导体器件
KR20190052957A (ko) * 2017-11-09 2019-05-17 에스케이하이닉스 주식회사 다이 오버시프트 지시 패턴을 포함하는 반도체 패키지
CN109979825A (zh) * 2017-12-15 2019-07-05 胡志良 阵列批次式封装元件晶粒的电路元件制作方法
US20190279962A1 (en) * 2018-03-09 2019-09-12 Oracle International Corporation Method and apparatus for stacking warped chips to assemble three-dimensional integrated circuits
KR20200055853A (ko) 2018-11-13 2020-05-22 삼성디스플레이 주식회사 큐디 글래스 에이징 장치 및 그것의 에이징 방법
WO2020132937A1 (zh) * 2018-12-26 2020-07-02 深圳市兴华炜科技有限公司 一种smt精密定位计算方法及相关产品
US20230247795A1 (en) 2022-01-28 2023-08-03 The Research Foundation For The State University Of New York Regenerative preheater for phase change cooling applications

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120049376A1 (en) * 2010-09-01 2012-03-01 Oracle International Corporation Manufacturing fixture for a ramp-stack chip package

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5239447A (en) * 1991-09-13 1993-08-24 International Business Machines Corporation Stepped electronic device package
JPH06291248A (ja) * 1993-04-05 1994-10-18 Toshiba Corp 半導体装置
JP2004228117A (ja) * 2003-01-20 2004-08-12 Idea System Kk 半導体装置および半導体パッケージ
JP2009027067A (ja) * 2007-07-23 2009-02-05 Alps Electric Co Ltd 半導体装置の製造方法および半導体装置
JP2011040418A (ja) * 2007-12-18 2011-02-24 Alps Electric Co Ltd 半導体装置およびその製造方法
KR100997787B1 (ko) * 2008-06-30 2010-12-02 주식회사 하이닉스반도체 적층 반도체 패키지 및 이의 제조 방법
US8227904B2 (en) * 2009-06-24 2012-07-24 Intel Corporation Multi-chip package and method of providing die-to-die interconnects in same
US8476749B2 (en) 2009-07-22 2013-07-02 Oracle America, Inc. High-bandwidth ramp-stack chip package
US8290319B2 (en) * 2010-08-25 2012-10-16 Oracle America, Inc. Optical communication in a ramp-stack chip package
US8283766B2 (en) * 2010-09-02 2012-10-09 Oracle America, Inc Ramp-stack chip package with static bends
JP2013138177A (ja) * 2011-11-28 2013-07-11 Elpida Memory Inc 半導体装置の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120049376A1 (en) * 2010-09-01 2012-03-01 Oracle International Corporation Manufacturing fixture for a ramp-stack chip package

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CN105659382A (zh) 2016-06-08
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