TWI619899B - Vacuum valve - Google Patents

Vacuum valve Download PDF

Info

Publication number
TWI619899B
TWI619899B TW103136568A TW103136568A TWI619899B TW I619899 B TWI619899 B TW I619899B TW 103136568 A TW103136568 A TW 103136568A TW 103136568 A TW103136568 A TW 103136568A TW I619899 B TWI619899 B TW I619899B
Authority
TW
Taiwan
Prior art keywords
piston
primary side
valve stem
side passage
valve
Prior art date
Application number
TW103136568A
Other languages
English (en)
Chinese (zh)
Other versions
TW201533357A (zh
Inventor
Tsuyoshi Tanikawa
Michio Yamaji
Tadayuki Yakushijin
Keisuke Ishibashi
Yasumasa Yanagida
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of TW201533357A publication Critical patent/TW201533357A/zh
Application granted granted Critical
Publication of TWI619899B publication Critical patent/TWI619899B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/02—Check valves with guided rigid valve members
    • F16K15/06—Check valves with guided rigid valve members with guided stems
    • F16K15/063—Check valves with guided rigid valve members with guided stems the valve being loaded by a spring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/18—Check valves with actuating mechanism; Combined check valves and actuated valves
    • F16K15/182—Check valves with actuating mechanism; Combined check valves and actuated valves with actuating mechanism
    • F16K15/1826—Check valves which can be actuated by a pilot valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1226—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston the fluid circulating through the piston
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/024—Controlling the inlet pressure, e.g. back-pressure regulator
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/04—Control of fluid pressure without auxiliary power
    • G05D16/06—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule
    • G05D16/0616—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a bellow
    • G05D16/0619—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a bellow acting directly on the obturator
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/14—Control of fluid pressure with auxiliary non-electric power
    • G05D16/18—Control of fluid pressure with auxiliary non-electric power derived from an external source
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7876—With external means for opposing bias
    • Y10T137/7877—With means for retaining external means in bias opposing position
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7878—With bias adjustment indicator

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Power Engineering (AREA)
  • Fluid-Driven Valves (AREA)
  • Details Of Valves (AREA)
  • Safety Valves (AREA)
TW103136568A 2013-10-30 2014-10-23 Vacuum valve TWI619899B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013225175 2013-10-30

Publications (2)

Publication Number Publication Date
TW201533357A TW201533357A (zh) 2015-09-01
TWI619899B true TWI619899B (zh) 2018-04-01

Family

ID=53003787

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103136568A TWI619899B (zh) 2013-10-30 2014-10-23 Vacuum valve

Country Status (8)

Country Link
US (1) US9920857B2 (ja)
JP (1) JP6349324B2 (ja)
KR (1) KR101809809B1 (ja)
CN (1) CN105452742B (ja)
IL (1) IL242932B (ja)
SG (1) SG11201509861PA (ja)
TW (1) TWI619899B (ja)
WO (1) WO2015064170A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9541104B2 (en) * 2014-01-16 2017-01-10 Ge Oil & Gas Pressure Control Lp Inertially stable actuator with telescoping supply port
JP6527684B2 (ja) * 2014-10-31 2019-06-05 株式会社フジキン バルブ、流体制御装置、半導体制御装置、および半導体製造方法
US9764671B2 (en) * 2015-05-07 2017-09-19 Caterpillar Inc. Unloading relief valve
CN111742170B (zh) * 2018-02-22 2022-07-15 斯瓦戈洛克公司 具有流动调整机构的流动控制装置
KR102063226B1 (ko) * 2018-09-11 2020-01-07 주식회사 비엠티 서보 밸브
JP7227770B2 (ja) * 2019-01-11 2023-02-22 Ckd株式会社 複合弁
US11542964B2 (en) 2019-10-11 2023-01-03 Swagelok Company Arrangements and methods for controlled flow rate of pneumatic actuated valves

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5392807A (en) * 1993-02-17 1995-02-28 Aquamatic, Inc. Fluid pressure actuated flow control valve
US20060065868A1 (en) * 2004-09-28 2006-03-30 Strong Warren N Diaphragm valve

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3115068A (en) * 1962-09-11 1963-12-24 Rockwell Mfg Co Valve operating mechanism
US4444216A (en) * 1982-01-15 1984-04-24 Koomey, Inc. Pressure reducing and regulating valve
JPH0453496Y2 (ja) * 1989-03-24 1992-12-16
GB8911719D0 (en) 1989-05-22 1989-07-05 Smith Kline French Lab Compounds
JP3330839B2 (ja) 1997-03-18 2002-09-30 シーケーディ株式会社 真空圧力制御システム
JP4428594B2 (ja) * 2000-01-21 2010-03-10 シーケーディ株式会社 減圧弁
JP3618286B2 (ja) * 2000-09-07 2005-02-09 Ｓｍｃ株式会社 スムース排気弁
JP4640887B2 (ja) * 2000-12-28 2011-03-02 株式会社キッツエスシーティー 流体制御弁
TWI324664B (en) * 2004-02-10 2010-05-11 Fujikin Kk Fluid controller
KR101159136B1 (ko) 2005-03-01 2012-06-25 후지쿠라 고무 코교 가부시끼가이샤 미소유량조절기구를 가진 상폐밸브
CN201218344Y (zh) * 2008-06-17 2009-04-08 吴江市东吴机械有限责任公司 一种直动式稳压安全阀
JP5455601B2 (ja) * 2009-12-16 2014-03-26 株式会社テイエルブイ 真空破壊弁
JP5613420B2 (ja) * 2010-02-05 2014-10-22 株式会社フジキン 流体制御器
JP5597468B2 (ja) * 2010-07-27 2014-10-01 株式会社フジキン エアオペレートバルブ
JP5551650B2 (ja) 2011-04-28 2014-07-16 Ｃｋｄ株式会社 液垂れ防止バルブ
CN202927169U (zh) * 2012-10-05 2013-05-08 启东市波峰测功器厂 溢流阀

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5392807A (en) * 1993-02-17 1995-02-28 Aquamatic, Inc. Fluid pressure actuated flow control valve
US20060065868A1 (en) * 2004-09-28 2006-03-30 Strong Warren N Diaphragm valve

Also Published As

Publication number Publication date
TW201533357A (zh) 2015-09-01
WO2015064170A1 (ja) 2015-05-07
US9920857B2 (en) 2018-03-20
IL242932B (en) 2018-07-31
JP6349324B2 (ja) 2018-06-27
KR20160007654A (ko) 2016-01-20
US20160230906A1 (en) 2016-08-11
SG11201509861PA (en) 2015-12-30
KR101809809B1 (ko) 2017-12-15
CN105452742B (zh) 2017-09-12
CN105452742A (zh) 2016-03-30
JPWO2015064170A1 (ja) 2017-03-09

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