TWI611270B - 液浸構件、曝光裝置、曝光方法、元件製造方法、程式、及記錄媒體 - Google Patents

液浸構件、曝光裝置、曝光方法、元件製造方法、程式、及記錄媒體 Download PDF

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Publication number
TWI611270B
TWI611270B TW102109578A TW102109578A TWI611270B TW I611270 B TWI611270 B TW I611270B TW 102109578 A TW102109578 A TW 102109578A TW 102109578 A TW102109578 A TW 102109578A TW I611270 B TWI611270 B TW I611270B
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Taiwan
Prior art keywords
substrate
liquid
liquid immersion
exposure
patent application
Prior art date
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TW102109578A
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English (en)
Chinese (zh)
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TW201344376A (zh
Inventor
柴崎祐一
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尼康股份有限公司
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Publication of TW201344376A publication Critical patent/TW201344376A/zh
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Microscoopes, Condenser (AREA)
TW102109578A 2012-04-10 2013-03-19 液浸構件、曝光裝置、曝光方法、元件製造方法、程式、及記錄媒體 TWI611270B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201261622235P 2012-04-10 2012-04-10
US61/622,235 2012-04-10
US13/793,667 2013-03-11
US13/793,667 US9323160B2 (en) 2012-04-10 2013-03-11 Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium

Publications (2)

Publication Number Publication Date
TW201344376A TW201344376A (zh) 2013-11-01
TWI611270B true TWI611270B (zh) 2018-01-11

Family

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Family Applications (3)

Application Number Title Priority Date Filing Date
TW102109578A TWI611270B (zh) 2012-04-10 2013-03-19 液浸構件、曝光裝置、曝光方法、元件製造方法、程式、及記錄媒體
TW106132812A TWI658335B (zh) 2012-04-10 2013-03-19 液浸構件、曝光裝置、曝光方法、元件製造方法、程式、及記錄媒體
TW108109504A TWI698720B (zh) 2012-04-10 2013-03-19 液浸構件、曝光裝置、曝光方法、元件製造方法、程式、及記錄媒體

Family Applications After (2)

Application Number Title Priority Date Filing Date
TW106132812A TWI658335B (zh) 2012-04-10 2013-03-19 液浸構件、曝光裝置、曝光方法、元件製造方法、程式、及記錄媒體
TW108109504A TWI698720B (zh) 2012-04-10 2013-03-19 液浸構件、曝光裝置、曝光方法、元件製造方法、程式、及記錄媒體

Country Status (8)

Country Link
US (4) US9323160B2 (https=)
EP (1) EP2836875B1 (https=)
JP (3) JP6245179B2 (https=)
KR (1) KR102158968B1 (https=)
CN (2) CN107728434B (https=)
HK (2) HK1204682A1 (https=)
TW (3) TWI611270B (https=)
WO (1) WO2013153939A1 (https=)

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KR102206979B1 (ko) 2016-09-12 2021-01-25 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치를 위한 유체 처리 구조물
CN110268334B (zh) 2017-02-03 2024-10-29 Asml荷兰有限公司 曝光设备
CN109856922B (zh) * 2017-11-30 2020-11-13 上海微电子装备（集团）股份有限公司 浸没流体控制装置、浸没式光刻系统与回收控制方法
CN118584764A (zh) 2017-12-15 2024-09-03 Asml荷兰有限公司 流体处置结构、光刻设备、以及使用流体处置结构的方法
JP6575629B2 (ja) * 2018-04-04 2019-09-18 株式会社ニコン 露光装置及び露光方法、並びにデバイス製造方法
CN117742084A (zh) * 2020-12-25 2024-03-22 浙江启尔机电技术有限公司 一种改善浸没流场压力特性的浸液供给回收装置

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Also Published As

Publication number Publication date
TWI658335B (zh) 2019-05-01
HK1204090A1 (en) 2015-11-06
US20180039186A1 (en) 2018-02-08
EP2836875A1 (en) 2015-02-18
JP6245179B2 (ja) 2017-12-13
JP6569717B2 (ja) 2019-09-04
US10139736B2 (en) 2018-11-27
WO2013153939A1 (en) 2013-10-17
US9323160B2 (en) 2016-04-26
JP2019191613A (ja) 2019-10-31
HK1245901A1 (zh) 2018-08-31
HK1204682A1 (en) 2015-11-27
KR102158968B1 (ko) 2020-09-23
CN107728434A (zh) 2018-02-23
US10520828B2 (en) 2019-12-31
US20190056672A1 (en) 2019-02-21
TW201344376A (zh) 2013-11-01
CN107728434B (zh) 2020-04-03
US20160223915A1 (en) 2016-08-04
US9810999B2 (en) 2017-11-07
TW201928530A (zh) 2019-07-16
JP2015515738A (ja) 2015-05-28
CN104350425A (zh) 2015-02-11
EP2836875B1 (en) 2020-11-18
TWI698720B (zh) 2020-07-11
TW201804261A (zh) 2018-02-01
CN104350425B (zh) 2017-11-28
JP2018022198A (ja) 2018-02-08
KR20150005603A (ko) 2015-01-14
US20130265555A1 (en) 2013-10-10

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