KR102158968B1 - 액침 부재 및 노광 장치 - Google Patents

액침 부재 및 노광 장치 Download PDF

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Publication number
KR102158968B1
KR102158968B1 KR1020147031457A KR20147031457A KR102158968B1 KR 102158968 B1 KR102158968 B1 KR 102158968B1 KR 1020147031457 A KR1020147031457 A KR 1020147031457A KR 20147031457 A KR20147031457 A KR 20147031457A KR 102158968 B1 KR102158968 B1 KR 102158968B1
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substrate
liquid
liquid immersion
path
disposed
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Korean (ko)
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KR20150005603A (ko
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유이치 시바자키
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가부시키가이샤 니콘
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Microscoopes, Condenser (AREA)
KR1020147031457A 2012-04-10 2013-03-15 액침 부재 및 노광 장치 Active KR102158968B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261622235P 2012-04-10 2012-04-10
US61/622,235 2012-04-10
US13/793,667 US9323160B2 (en) 2012-04-10 2013-03-11 Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium
US13/793,667 2013-03-11
PCT/JP2013/058454 WO2013153939A1 (en) 2012-04-10 2013-03-15 Liquid immersion member and exposure apparatus

Publications (2)

Publication Number Publication Date
KR20150005603A KR20150005603A (ko) 2015-01-14
KR102158968B1 true KR102158968B1 (ko) 2020-09-23

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US (4) US9323160B2 (https=)
EP (1) EP2836875B1 (https=)
JP (3) JP6245179B2 (https=)
KR (1) KR102158968B1 (https=)
CN (2) CN104350425B (https=)
HK (2) HK1204682A1 (https=)
TW (3) TWI698720B (https=)
WO (1) WO2013153939A1 (https=)

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CN109856922B (zh) * 2017-11-30 2020-11-13 上海微电子装备（集团）股份有限公司 浸没流体控制装置、浸没式光刻系统与回收控制方法
KR102649164B1 (ko) 2017-12-15 2024-03-20 에이에스엠엘 네델란즈 비.브이. 유체 핸들링 구조체, 리소그래피 장치, 유체 핸들링 구조체를 사용하는 방법 및 리소그래피 장치를 사용하는 방법
JP6575629B2 (ja) * 2018-04-04 2019-09-18 株式会社ニコン 露光装置及び露光方法、並びにデバイス製造方法
CN112650028B (zh) * 2020-12-25 2024-02-09 浙江启尔机电技术有限公司 一种改善浸没流场压力特性的浸液供给回收装置

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JP2009239286A (ja) 2008-03-27 2009-10-15 Nikon Corp 液浸システム、露光装置、露光方法、及びデバイス製造方法
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Also Published As

Publication number Publication date
JP6245179B2 (ja) 2017-12-13
KR20150005603A (ko) 2015-01-14
US9810999B2 (en) 2017-11-07
TW201928530A (zh) 2019-07-16
CN104350425B (zh) 2017-11-28
JP2015515738A (ja) 2015-05-28
EP2836875A1 (en) 2015-02-18
CN104350425A (zh) 2015-02-11
EP2836875B1 (en) 2020-11-18
US9323160B2 (en) 2016-04-26
TWI698720B (zh) 2020-07-11
US10139736B2 (en) 2018-11-27
CN107728434B (zh) 2020-04-03
US10520828B2 (en) 2019-12-31
HK1204090A1 (en) 2015-11-06
TWI658335B (zh) 2019-05-01
JP6569717B2 (ja) 2019-09-04
US20130265555A1 (en) 2013-10-10
TW201804261A (zh) 2018-02-01
US20160223915A1 (en) 2016-08-04
JP2018022198A (ja) 2018-02-08
HK1204682A1 (en) 2015-11-27
US20190056672A1 (en) 2019-02-21
TWI611270B (zh) 2018-01-11
US20180039186A1 (en) 2018-02-08
CN107728434A (zh) 2018-02-23
JP2019191613A (ja) 2019-10-31
HK1245901A1 (zh) 2018-08-31
WO2013153939A1 (en) 2013-10-17
TW201344376A (zh) 2013-11-01

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