TWI604693B - 振動元件、振動器、振盪器、電子機器及移動體 - Google Patents
振動元件、振動器、振盪器、電子機器及移動體 Download PDFInfo
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- TWI604693B TWI604693B TW103108513A TW103108513A TWI604693B TW I604693 B TWI604693 B TW I604693B TW 103108513 A TW103108513 A TW 103108513A TW 103108513 A TW103108513 A TW 103108513A TW I604693 B TWI604693 B TW I604693B
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- Prior art keywords
- vibrating
- arm
- length
- vibrating element
- vibration
- Prior art date
Links
- 230000007423 decrease Effects 0.000 claims description 6
- 239000013078 crystal Substances 0.000 description 27
- 230000000694 effects Effects 0.000 description 20
- 239000000758 substrate Substances 0.000 description 19
- 238000005452 bending Methods 0.000 description 12
- 238000006073 displacement reaction Methods 0.000 description 11
- 239000000853 adhesive Substances 0.000 description 10
- 230000001070 adhesive effect Effects 0.000 description 10
- 238000004088 simulation Methods 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000011651 chromium Substances 0.000 description 8
- 241000251131 Sphyrna Species 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- 230000033001 locomotion Effects 0.000 description 7
- 230000006870 function Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000000470 constituent Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 241000251468 Actinopterygii Species 0.000 description 1
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
- H03H9/215—Crystal tuning forks consisting of quartz
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Oscillators With Electromechanical Resonators (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013052489A JP6349622B2 (ja) | 2013-03-14 | 2013-03-14 | 振動素子、振動子、発振器、電子機器および移動体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201440427A TW201440427A (zh) | 2014-10-16 |
| TWI604693B true TWI604693B (zh) | 2017-11-01 |
Family
ID=51504865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103108513A TWI604693B (zh) | 2013-03-14 | 2014-03-11 | 振動元件、振動器、振盪器、電子機器及移動體 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US9344058B2 (enExample) |
| JP (1) | JP6349622B2 (enExample) |
| KR (1) | KR20140113383A (enExample) |
| CN (2) | CN104052426B (enExample) |
| TW (1) | TWI604693B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6349622B2 (ja) * | 2013-03-14 | 2018-07-04 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
| JP6155897B2 (ja) * | 2013-06-24 | 2017-07-05 | セイコーエプソン株式会社 | 振動片、振動子、電子デバイス、電子機器及び移動体 |
| KR101724488B1 (ko) * | 2015-12-11 | 2017-04-07 | 현대자동차 주식회사 | Mems 공진기 |
| JP2019102826A (ja) * | 2017-11-28 | 2019-06-24 | 京セラ株式会社 | 音叉型水晶振動素子及び圧電デバイス |
| CN108309236B (zh) * | 2018-01-15 | 2021-08-27 | 新绎健康科技有限公司 | 人体平衡评估方法及系统 |
| US10732195B2 (en) | 2018-01-26 | 2020-08-04 | Honeywell International Inc. | Vibrating beam accelerometer |
| WO2020213213A1 (ja) * | 2019-04-18 | 2020-10-22 | 株式会社村田製作所 | 共振装置及び共振装置製造方法 |
| CN114826183A (zh) * | 2021-01-29 | 2022-07-29 | 精工爱普生株式会社 | 振动元件的制造方法 |
| CN115629268B (zh) * | 2022-12-19 | 2023-03-28 | 天津伍嘉联创科技发展股份有限公司 | 一种测试音叉石英谐振器晶体参数的方法及系统 |
Family Cites Families (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2057473C2 (de) | 1970-11-23 | 1982-04-08 | Hoechst Ag, 6000 Frankfurt | Lichtempfindliches Gemisch |
| JPS52129395A (en) * | 1976-04-23 | 1977-10-29 | Seiko Instr & Electronics Ltd | Tuner fork type peizoelectric resonatpr |
| JPH01236808A (ja) | 1988-03-17 | 1989-09-21 | Matsushima Kogyo Co Ltd | 捩水晶振動子 |
| JP3135317B2 (ja) | 1991-11-08 | 2001-02-13 | セイコーインスツルメンツ株式会社 | 捩り水晶振動子 |
| US6894428B2 (en) * | 2001-01-15 | 2005-05-17 | Seiko Epson Corporation | Vibrating piece, vibrator, oscillator, and electronic device |
| JP2004266765A (ja) * | 2003-03-04 | 2004-09-24 | Seiko Epson Corp | 音叉型振動片及び圧電デバイス |
| JP4356366B2 (ja) | 2003-06-10 | 2009-11-04 | セイコーエプソン株式会社 | 圧電振動片、圧電振動片の製造方法および圧電振動子、圧電振動子を搭載した電子機器 |
| JP4026074B2 (ja) * | 2003-06-30 | 2007-12-26 | 有限会社ピエデック技術研究所 | 水晶振動子と水晶ユニットと水晶発振器 |
| JP4265499B2 (ja) | 2004-05-12 | 2009-05-20 | セイコーエプソン株式会社 | 圧電振動片および圧電デバイス |
| JP4548148B2 (ja) | 2005-02-24 | 2010-09-22 | セイコーエプソン株式会社 | 圧電振動片および圧電デバイス |
| JP4414987B2 (ja) * | 2006-07-27 | 2010-02-17 | 日本電波工業株式会社 | 圧電振動子の製造方法、圧電振動子及び電子部品 |
| ATE453954T1 (de) | 2007-07-19 | 2010-01-15 | Eta Sa Mft Horlogere Suisse | Piezoelektrischer resonator mit optimierten bewegungsfähigkeiten |
| JP4539708B2 (ja) * | 2007-11-02 | 2010-09-08 | エプソントヨコム株式会社 | 圧電振動片、圧電振動子および加速度センサ |
| WO2009116523A1 (ja) * | 2008-03-18 | 2009-09-24 | シチズンホールディングス株式会社 | 圧電デバイス |
| JP5175128B2 (ja) * | 2008-04-04 | 2013-04-03 | 日本電波工業株式会社 | 音叉型圧電振動片および圧電デバイス |
| JP4594412B2 (ja) | 2008-05-22 | 2010-12-08 | 日本電波工業株式会社 | 圧電振動片および圧電デバイス |
| JP5135566B2 (ja) * | 2008-10-14 | 2013-02-06 | 有限会社ピエデック技術研究所 | 水晶振動子と水晶ユニットと水晶発振器及びそれらの製造方法 |
| JP4709260B2 (ja) * | 2008-10-16 | 2011-06-22 | 日本電波工業株式会社 | 圧電振動片および圧電デバイス |
| JP5509647B2 (ja) * | 2009-03-26 | 2014-06-04 | セイコーエプソン株式会社 | 振動片 |
| JP4609586B2 (ja) * | 2009-06-10 | 2011-01-12 | セイコーエプソン株式会社 | 圧電振動片、圧電振動片の製造方法および圧電振動子、圧電振動子を搭載した電子機器 |
| JP5341647B2 (ja) | 2009-07-10 | 2013-11-13 | リバーエレテック株式会社 | 圧電振動片、圧電振動子及び圧電発振器 |
| JP5565154B2 (ja) | 2009-09-11 | 2014-08-06 | セイコーエプソン株式会社 | 振動片、振動子、発振器、および電子機器 |
| JP5565163B2 (ja) * | 2009-10-08 | 2014-08-06 | セイコーエプソン株式会社 | 振動片、振動子、発振器、および電子機器 |
| JP5789914B2 (ja) * | 2010-02-05 | 2015-10-07 | セイコーエプソン株式会社 | 音叉型圧電振動片及び圧電デバイス |
| US8283988B2 (en) * | 2010-02-25 | 2012-10-09 | Seiko Epson Corporation | Resonator element, resonator, oscillator, and electronic device |
| US20110227658A1 (en) * | 2010-03-16 | 2011-09-22 | Seiko Epson Corporation | Resonator element, piezoelectric device, and electronic device |
| US8692632B2 (en) * | 2010-03-17 | 2014-04-08 | Seiko Epson Corporation | Resonator element, resonator, oscillator, and electronic device |
| JP5504999B2 (ja) | 2010-03-17 | 2014-05-28 | セイコーエプソン株式会社 | 振動片、振動子、発振器 |
| JP2012129904A (ja) | 2010-12-17 | 2012-07-05 | Seiko Epson Corp | 電子機器 |
| JP5062784B2 (ja) * | 2010-03-31 | 2012-10-31 | 日本電波工業株式会社 | 音叉型圧電振動片及び圧電デバイス |
| JP5123987B2 (ja) | 2010-05-28 | 2013-01-23 | 日本電波工業株式会社 | 圧電デバイス、および圧電デバイスの周波数調整方法 |
| JP2011250228A (ja) | 2010-05-28 | 2011-12-08 | Nippon Dempa Kogyo Co Ltd | 圧電デバイス、および圧電デバイスの周波数調整方法 |
| EP2395661A1 (fr) | 2010-06-10 | 2011-12-14 | The Swatch Group Research and Development Ltd. | Résonateur thermocompensé aux premier et second ordres |
| JP2012039226A (ja) | 2010-08-04 | 2012-02-23 | Nippon Dempa Kogyo Co Ltd | 音叉型の圧電振動片および圧電デバイス |
| TW201242246A (en) * | 2011-02-25 | 2012-10-16 | Seiko Epson Corp | Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, vibration gyro element, vibration gyro sensor, and electronic apparatus |
| JP5912557B2 (ja) * | 2011-03-29 | 2016-04-27 | 日本電波工業株式会社 | 音叉型圧電振動片及び圧電デバイス |
| JP5584728B2 (ja) | 2012-05-18 | 2014-09-03 | 日本電波工業株式会社 | 音叉型圧電振動片および振動デバイス |
| JP6349622B2 (ja) * | 2013-03-14 | 2018-07-04 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
| JP6281254B2 (ja) * | 2013-11-16 | 2018-02-21 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
-
2013
- 2013-03-14 JP JP2013052489A patent/JP6349622B2/ja active Active
-
2014
- 2014-03-10 US US14/202,596 patent/US9344058B2/en active Active
- 2014-03-10 KR KR1020140027722A patent/KR20140113383A/ko not_active Withdrawn
- 2014-03-11 CN CN201410087903.8A patent/CN104052426B/zh active Active
- 2014-03-11 TW TW103108513A patent/TWI604693B/zh active
- 2014-03-11 CN CN201810861640.XA patent/CN109067379B/zh active Active
-
2016
- 2016-04-25 US US15/137,419 patent/US9654083B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN109067379B (zh) | 2022-05-17 |
| JP2014179803A (ja) | 2014-09-25 |
| US9654083B2 (en) | 2017-05-16 |
| US9344058B2 (en) | 2016-05-17 |
| KR20140113383A (ko) | 2014-09-24 |
| TW201440427A (zh) | 2014-10-16 |
| CN109067379A (zh) | 2018-12-21 |
| CN104052426B (zh) | 2018-08-10 |
| CN104052426A (zh) | 2014-09-17 |
| US20160277005A1 (en) | 2016-09-22 |
| JP6349622B2 (ja) | 2018-07-04 |
| US20140265736A1 (en) | 2014-09-18 |
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