TWI596686B - 基板處理方法 - Google Patents

基板處理方法 Download PDF

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Publication number
TWI596686B
TWI596686B TW101114651A TW101114651A TWI596686B TW I596686 B TWI596686 B TW I596686B TW 101114651 A TW101114651 A TW 101114651A TW 101114651 A TW101114651 A TW 101114651A TW I596686 B TWI596686 B TW I596686B
Authority
TW
Taiwan
Prior art keywords
substrate
fluid nozzle
moving
moving speed
center
Prior art date
Application number
TW101114651A
Other languages
English (en)
Chinese (zh)
Other versions
TW201308479A (zh
Inventor
王新明
宮崎充
松下邦政
Original Assignee
荏原製作所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荏原製作所股份有限公司 filed Critical 荏原製作所股份有限公司
Publication of TW201308479A publication Critical patent/TW201308479A/zh
Application granted granted Critical
Publication of TWI596686B publication Critical patent/TWI596686B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0414—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B08B3/024—Cleaning by means of spray elements moving over the surface to be cleaned

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
TW101114651A 2011-06-16 2012-04-25 基板處理方法 TWI596686B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011133842A JP5712061B2 (ja) 2011-06-16 2011-06-16 基板処理方法及び基板処理ユニット

Publications (2)

Publication Number Publication Date
TW201308479A TW201308479A (zh) 2013-02-16
TWI596686B true TWI596686B (zh) 2017-08-21

Family

ID=47328455

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101114651A TWI596686B (zh) 2011-06-16 2012-04-25 基板處理方法

Country Status (5)

Country Link
US (1) US9165799B2 (https=)
JP (1) JP5712061B2 (https=)
KR (1) KR101801987B1 (https=)
CN (1) CN102825020B (https=)
TW (1) TWI596686B (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130321749A1 (en) * 2012-06-01 2013-12-05 Shenzhen China Star Optoelectronics Technology Co., Ltd. Liquid Crystal Display Device
JP6183705B2 (ja) * 2013-01-15 2017-08-23 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法および基板処理装置
JP6797526B2 (ja) * 2014-11-11 2020-12-09 株式会社荏原製作所 基板洗浄装置
WO2016076303A1 (ja) * 2014-11-11 2016-05-19 株式会社荏原製作所 基板洗浄装置
JP6335103B2 (ja) * 2014-11-14 2018-05-30 株式会社荏原製作所 基板保持装置
JP6401021B2 (ja) * 2014-11-18 2018-10-03 株式会社荏原製作所 基板洗浄装置、基板処理装置、および基板洗浄方法
CN104607420B (zh) * 2015-01-15 2016-08-17 山东大学 小尺寸kdp晶体表面磁-射流清洗装置及清洗工艺
JP2017204495A (ja) * 2016-05-09 2017-11-16 株式会社荏原製作所 基板洗浄装置
KR102338647B1 (ko) 2016-05-09 2021-12-13 가부시키가이샤 에바라 세이사꾸쇼 기판 세정 장치
CN106548971A (zh) * 2016-10-11 2017-03-29 武汉新芯集成电路制造有限公司 一种湿法单片清洗机台的卡盘
US11342202B2 (en) 2018-08-17 2022-05-24 Taiwan Semiconductor Manufacturing Co., Ltd. Automated wafer cleaning
CN111326440B (zh) * 2018-12-17 2022-09-16 辛耘企业股份有限公司 基板处理装置
CN110112084A (zh) * 2019-05-22 2019-08-09 长江存储科技有限责任公司 半导体器件清洗装置
CN110571175A (zh) * 2019-09-17 2019-12-13 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） 摆臂控制方法、装置、系统及晶片加工设备
JP7437499B2 (ja) * 2019-11-01 2024-02-22 エーシーエム リサーチ （シャンハイ） インコーポレーテッド 基板の洗浄方法及び洗浄装置
US12198944B2 (en) 2020-11-11 2025-01-14 Applied Materials, Inc. Substrate handling in a modular polishing system with single substrate cleaning chambers
US11728185B2 (en) 2021-01-05 2023-08-15 Applied Materials, Inc. Steam-assisted single substrate cleaning process and apparatus
CN114713545B (zh) * 2022-03-16 2023-04-28 南京芯视元电子有限公司 一种硅基液晶清洗装置及清洗方法
JP7849214B2 (ja) * 2022-04-25 2026-04-21 株式会社ディスコ ウェーハの加工装置と洗浄装置及び洗浄方法
US12525468B2 (en) 2022-12-30 2026-01-13 Applied Materials, Inc. Integrated clean and dry module for cleaning a substrate
CN120861491B (zh) * 2025-09-28 2025-11-25 南通优睿半导体有限公司 一种芯片贴装基板的清洗夹具及其使用方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1147700A (ja) * 1997-07-30 1999-02-23 Matsushita Electric Ind Co Ltd 基板の洗浄方法
US20100154826A1 (en) * 2008-12-19 2010-06-24 Tokyo Electron Limited System and Method For Rinse Optimization

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JPS56125842A (en) * 1980-03-06 1981-10-02 Nec Corp Injection-type cleaning device
JPS62173718A (ja) * 1986-01-28 1987-07-30 Toshiba Corp 半導体ウエハの洗浄方法
JPH09148295A (ja) * 1995-11-27 1997-06-06 Dainippon Screen Mfg Co Ltd 回転式基板処理装置
US6260562B1 (en) * 1997-10-20 2001-07-17 Dainippon Screen Mfg. Co., Ltd. Substrate cleaning apparatus and method
JPH11307492A (ja) 1998-04-20 1999-11-05 Tokyo Electron Ltd 基板洗浄装置
JP3974340B2 (ja) * 2001-03-16 2007-09-12 大日本スクリーン製造株式会社 基板洗浄方法および基板洗浄装置
JP2005093694A (ja) 2003-09-17 2005-04-07 Dainippon Screen Mfg Co Ltd 基板処理方法およびその装置
KR101277614B1 (ko) 2006-03-22 2013-06-21 가부시키가이샤 에바라 세이사꾸쇼 기판처리장치 및 기판처리방법
JP2007311439A (ja) * 2006-05-17 2007-11-29 Dainippon Screen Mfg Co Ltd 基板処理方法および基板処理装置
JP2009059876A (ja) * 2007-08-31 2009-03-19 Panasonic Corp 基板処理方法
JP5744382B2 (ja) 2008-07-24 2015-07-08 株式会社荏原製作所 基板処理装置および基板処理方法
JP5294944B2 (ja) 2009-03-31 2013-09-18 株式会社荏原製作所 基板の洗浄方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1147700A (ja) * 1997-07-30 1999-02-23 Matsushita Electric Ind Co Ltd 基板の洗浄方法
US20100154826A1 (en) * 2008-12-19 2010-06-24 Tokyo Electron Limited System and Method For Rinse Optimization

Also Published As

Publication number Publication date
JP2013004705A (ja) 2013-01-07
KR101801987B1 (ko) 2017-12-28
KR20120139573A (ko) 2012-12-27
JP5712061B2 (ja) 2015-05-07
CN102825020B (zh) 2017-03-01
TW201308479A (zh) 2013-02-16
US9165799B2 (en) 2015-10-20
CN102825020A (zh) 2012-12-19
US20120318304A1 (en) 2012-12-20

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