TWI589792B - Static pressure gas bearings - Google Patents
Static pressure gas bearings Download PDFInfo
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- TWI589792B TWI589792B TW105108828A TW105108828A TWI589792B TW I589792 B TWI589792 B TW I589792B TW 105108828 A TW105108828 A TW 105108828A TW 105108828 A TW105108828 A TW 105108828A TW I589792 B TWI589792 B TW I589792B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/005—Guide rails or tracks for a linear bearing, i.e. adapted for movement of a carriage or bearing body there along
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
- F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/72—Sealings
- F16C33/74—Sealings of sliding-contact bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
- F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
- F16J15/0806—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing characterised by material or surface treatment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
- F16J15/0818—Flat gaskets
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2202/00—Solid materials defined by their properties
- F16C2202/02—Mechanical properties
- F16C2202/08—Resilience, elasticity, super-elasticity
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2223/00—Surface treatments; Hardening; Coating
- F16C2223/30—Coating surfaces
- F16C2223/60—Coating surfaces by vapour deposition, e.g. PVD, CVD
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2300/00—Application independent of particular apparatuses
- F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
- F16C2300/62—Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions
Description
本發明係有關一種在真空環境下使用之靜壓氣體軸承。
對於在真空環境下使用之軸承要求不污染真空腔室內部。作為該種軸承,已知有靜壓氣體軸承。靜壓氣體軸承構成為,藉由從設置於滑塊內之空氣墊噴出壓縮氣體而使滑塊能夠相對於導引軸圓滑地移動。靜壓氣體軸承如滾動軸承或線性導件般具有不會產生潤滑油或從滑動面產生微細塵土之優點。
在藉由板材的接合來形成滑塊之情況下,防止供給至滑塊內之壓縮氣體從板材彼此的接合面洩漏係非常重要,以防止真空腔室內的真空度大幅降低。例如,專利文獻1中記載有在由頂板、底板、側板構成之移動體的板的間隙中塗佈氣密保持性較高的溶劑之技術。並且,專利文獻2中記載有在用螺栓將頂板、底板及側板緊固而成之移動體的緊固面封裝黏接劑作為密封劑並使其硬化之技術。
專利文獻1:日本特開2004-28214號公報
專利文獻2:日本特開2002-333022號公報
如專利文獻1,在板的間隙中塗佈溶劑之情況下,存在因溶劑的經年劣化而導致密封效果下降,或者劣化之溶劑從間隙中脫離而成為微細的塵土之問題。並且,如專利文獻2,若用黏接劑黏接板彼此,則存在很難為了維修或調整而分解移動體之問題。
本發明係鑑於該種狀況而完成者,其目的為提供一種在真空環境下使用之靜壓氣體軸承,用以減少或防止氣體從構成滑塊之板狀構件的接合面洩漏之技術。
本發明的一樣態係靜壓氣體軸承,其具備:導引軸;及容納導引軸且能夠沿軸向移動之筒狀的滑塊。滑塊藉由緊固複數個板狀構件而構成,在板狀構件彼此的接合面存在由彈性率小於板狀構件且柔軟的材料構成之膜。
依該樣態,在緊固板狀構件彼此時,透過比板狀構件柔軟的膜被壓扁而填補接合面的間隙,因此無需使用黏接劑或溶劑等,僅藉由緊固就能夠減少或防止氣體從接合面洩漏。
板狀構件可以由陶瓷製作,膜可以藉由鋁蒸鍍而形成。據此,能夠輕鬆地在板狀構件的接合面形成膜。
另外,將以上要件的任意組合及本發明的要件及表現在裝置、方法、系統等之間相互替換者,作為本發明的樣態也是有效的。
依本發明,在真空環境下使用之靜壓氣體軸承中,能夠減少或防止氣體從構成滑塊之板狀構件的接合面洩漏。
10‧‧‧靜壓氣體軸承
12‧‧‧導引軸
20‧‧‧滑塊
20A~20D‧‧‧板狀構件
22‧‧‧螺栓
24‧‧‧膜
第1圖係本發明的一實施形態之靜壓氣體軸承的概略立體圖。
第2圖係構成靜壓氣體軸承之滑塊的立體圖。
第3圖係說明靜壓氣體軸承的動作原理之圖。
第4圖係表示空氣從一實施例之滑塊中之洩漏量之圖表。
以下,對各圖式所示之相同或等同的構成要件、構件標註相同符號,並適當省略重複之說明。並且,為了方便理解,適當擴大、縮小顯示出各圖式中之構件的尺寸。並且,各圖式中,省略表示在說明實施形態時不重要的構件的一部分。
第1圖係本發明的一實施形態之靜壓氣體軸承10的概略立體圖。靜壓氣體軸承10由如下構件構成:沿一方向延伸之導引軸12;及內部容納導引軸12且能夠順著導引軸12沿軸向移動之筒狀的滑塊20。導引軸12的兩端由腳架14支撐。
滑塊20以具有微小的間隙之方式安裝於導引軸12上。詳細內容如後文所述,藉由從設置於滑塊20的內部之空氣墊噴出壓縮氣體(例如空氣),滑塊20能夠沿著導引軸12圓滑地移動。
靜壓氣體軸承10例如在電子束曝光裝置等於真空腔室內動作之裝置中使用於移動台的驅動。在與電子束曝光裝置一同使用之情況下,若靜壓氣體軸承為磁性體,則有可能對電子束的軌道帶來影響,因此導引軸12、腳架14及滑塊20由非磁性體材料例如陶瓷形成。
與例如使用滾動軸承或線性導件之滑塊相比,靜壓氣體軸承10不會產生潤滑油等溶劑或從滑動面產生微細塵土,因此尤其適合在真空環境下使用。
第2圖係滑塊20的立體圖。滑塊20係剖面為長方形的筒狀,藉由組合四片板狀構件20A~20D而構成。板狀構件彼此藉由複數個螺栓22被緊固。在裝配靜壓氣體軸承10時,在板狀構件彼此的緊固中需要進行微調,以便在導引軸12與滑塊20的內面之間形成所希望之間隙。
在各板狀構件20A~20D的內側,亦即與導引軸12相對之面形成有複數個空氣墊30。空氣墊30噴出從未圖
示之供氣系統供給之高壓氣體,並在與導引軸12之間的微小間隙中形成高壓的氣體層,藉此使滑塊20從導引軸12浮起。
在各板狀構件20A~20D的兩端,以包圍複數個空氣墊30之方式形成有差動排氣用的排氣槽34、36。排氣槽34、36分別與排氣泵(未圖示)連接,向外部排出滑塊20的內部空間的氣體。藉此,防止壓縮氣體從導引軸12與滑塊20之間的間隙中漏出而防止真空腔室內的真空度降低。另外,該種滑塊的構造已眾所周知,因此本說明書中省略更進一步的詳細說明。
第3圖係說明組裝有靜壓氣體軸承10之氣壓致動器的動作原理之圖。如圖所示,隔壁42固定於導引軸12上,該隔壁將形成於滑塊20的內部之空氣伺服室40在軸向上區隔為兩個伺服室40A、40B。在兩個伺服室40A、40B分別連接有用於實現向各伺服室送出或送入壓縮氣體之供氣系統17A、17B。供氣系統17A、17B分別具備伺服閥16A、16B及壓縮氣體供給源18A、18B。
若向空氣墊30供給壓縮空氣,則滑塊20相對於導引軸12稍微浮起。在此,例如若向伺服室40A供給壓縮空氣之同時,從伺服室40B排出壓縮空氣,則隔壁42作為活塞用,使得滑塊20向圖中的左方向移動。如此一來,藉由控制伺服閥16A、16B的開度,能夠使滑塊20相對於導引軸12移動至任意的位置。該種氣壓致動器的動作原理已眾所周知,因此本說明書中省略更進一步的詳細說
明。
返回到第2圖,由於作為構成滑塊20之各板狀構件的材料之陶瓷硬度較高且加工精確度及加工成本的問題,無法使板狀構件的接合面形成完全平滑之面。因此,從板狀構件的接合面,如第2圖中箭頭所示,從滑塊20內向外產生氣體的洩漏。若該氣體的洩漏量較大,則真空腔室內的真空度降低,從而無法確保既定的真空度。
因此,本實施形態中,使由彈性率小於板狀構件的材料且柔軟的材料構成之膜24存在於構成滑塊20之板狀構件20A~20D的接合面。若如此,則在藉由螺栓22緊固板狀構件彼此時,接合面的膜24被壓扁而填補接合面的微細凹凸,因此能夠減少氣體從接合面之洩漏量。膜24例如藉由鋁蒸鍍而形成為佳。藉由利用蒸鍍,能夠輕鬆地在接合面形成膜。
另外,膜的材料只要係彈性率小於滑塊材料(本實施形態中為陶瓷)且柔軟的材料,並且能夠在接合面形成均勻的膜者,則並不限於鋁。並且,亦可以利用蒸鍍以外的方法來形成膜。例如,可以藉由鈦蒸鍍或鍍鋅來在板狀構件的接合面形成膜,亦可以使鋁薄膜或樹脂片材等存在於板狀構件的接合面。
為了確認上述實施形態的效果,對三種供試體A~C實施從滑塊的板狀構件的接合面之洩漏量之比較試驗。供
試體A係僅藉由螺栓緊固而裝配之滑塊。供試體B係板狀構件的接合面的表面粗糙度小於供試體A且僅藉由螺栓緊固而裝配之滑塊。供試體C係板狀構件的接合面的表面粗糙度與供試體B相同,並且在接合面形成鋁蒸鍍膜之後,藉由螺栓緊固而裝配之滑塊。
在該試驗中,測定將如上構成之靜壓氣體軸承10設置於真空腔室內並向滑塊20的內部空間賦予壓縮空氣時從板狀構件的接合面之空氣洩漏量。
第4圖係表示該試驗結果之圖表。圖表的橫軸表示滑塊的內部空間的空氣壓,圖表的縱軸表示從滑塊的板狀構件的接合面之空氣洩漏量。由第4圖可理解,確認了在板狀構件的接合面實施了鋁蒸鍍之供試體C中,與僅進行螺栓緊固之供試體A、B相比,從接合面之洩漏量大幅減少。
進而,對於裝配滑塊後鬆弛螺栓之後再次重新緊固螺栓之滑塊,亦進行了同樣的試驗。在該情況下,與第4圖同樣地亦確認了與供試體A、B相比,在板狀構件的接合面實施了鋁蒸鍍之供試體C,從接合面之洩漏量大幅減少。
如以上說明,依本實施形態,藉由使由彈性率小於板狀構件的材料且柔軟的材料構成之膜存在於構成滑塊之板狀構件彼此的接合面,在緊固板狀構件彼此時透過比板狀構件柔軟的膜被壓扁而填補接合面的間隙,因此無需使用黏接劑或溶劑等,僅藉由緊固就能夠減少或防止氣體從接
合面之洩漏。
由於不使用黏接劑,即使在裝配一次滑塊之後,亦能夠為了維修或調整而分解或再裝配滑塊。並且,由於不使用溶劑,還能夠避免因溶劑的經年劣化而導致密封效果下降及產生微細塵土之問題。
以上,對實施形態之靜壓氣體軸承的構造進行了說明。該實施形態為例示,本領域技術人員應該理解可對其各構成要件的組合進行各種變形例,並且該種變形例亦包含於本發明的範圍內。
實施形態中,對靜壓氣體軸承由非磁性體、尤其由陶瓷製作之情況進行了敘述,但本發明亦可以適用於由磁性體構成之靜壓氣體軸承。
實施形態中,對靜壓氣體軸承的導引軸及滑塊具有長方形的剖面形狀之情況進行了敘述,但本發明亦可以適用於具備具有任意的剖面形狀之導引軸及滑塊之靜壓氣體軸承。
實施形態中,對組裝有靜壓氣體軸承之氣壓致動器進行了說明,但本發明無論有無致動器,都可以適用於任意的靜壓氣體軸承。
20‧‧‧滑塊
20A、20B、20C、20D‧‧‧板狀構件
22‧‧‧螺栓
24‧‧‧膜
30‧‧‧空氣墊
34、36‧‧‧排氣槽
Claims (2)
- 一種靜壓氣體軸承,其係在真空環境下使用之靜壓氣體軸承,具備:導引軸;及容納該導引軸且能夠沿軸向移動之筒狀的滑塊,其特徵為:前述滑塊藉由緊固複數個板狀構件而構成,在前述板狀構件彼此的接合面存在由彈性率小於板狀構件且柔軟的材料構成之膜。
- 如申請專利範圍第1項所述之靜壓氣體軸承,其中,前述板狀構件由陶瓷製作,前述膜藉由鋁蒸鍍而形成。
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CN108547870B (zh) * | 2018-05-09 | 2019-03-29 | 哈尔滨工业大学 | 一种带有非等深节流腔的气浮支承导向装置 |
CN111894978B (zh) * | 2020-07-22 | 2022-04-26 | 南通理工学院 | 平面支承主动磁悬浮装置 |
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US3263025A (en) * | 1963-07-30 | 1966-07-26 | Varian Associates | Demountable metal-to-ceramic seal |
JPH07109217B2 (ja) * | 1986-01-31 | 1995-11-22 | 京セラ株式会社 | 静圧気体直線案内装置 |
JPH0221328U (zh) * | 1988-07-28 | 1990-02-13 | ||
JPH03242386A (ja) * | 1990-02-21 | 1991-10-29 | Toshiba Ceramics Co Ltd | セラミック部材と金属部材の接合構造 |
JP3106474B2 (ja) * | 1990-02-21 | 2000-11-06 | 日本精工株式会社 | 静圧気体軸受 |
JPH09324272A (ja) * | 1996-03-31 | 1997-12-16 | Furontetsuku:Kk | シール装置 |
JP2002333022A (ja) * | 2001-03-09 | 2002-11-22 | Toto Ltd | 静圧気体軸受 |
JP2004028214A (ja) | 2002-06-26 | 2004-01-29 | Kyocera Corp | 静圧気体軸受 |
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CN203730559U (zh) * | 2014-02-19 | 2014-07-23 | 日本精工株式会社 | 静压气体轴承 |
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