TWI588501B - Temperature control device of electronic components testing and classification machine and its application temperature control method - Google Patents
Temperature control device of electronic components testing and classification machine and its application temperature control method Download PDFInfo
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Description
本發明尤指其提供一種可使第一批次之電子元件在執行測試作業時即可確保其在預設的溫度範圍內,進而有效提升可靠度之電子元件測試分類機之溫控裝置及其應用之溫控方法。 In particular, the present invention provides a temperature control device for an electronic component test sorter that enables the first batch of electronic components to ensure that they are within a preset temperature range while performing a test operation, thereby effectively improving reliability. Temperature control method for application.
按,現今科技在不斷研發與創新下,以往必需由許多大型電子電路結合才能完成之工作已完全由積體電路(integrated circuit,簡稱IC)所取代,由於IC在生產過程中乃經過多道的加工程序,因此為了確保產品品質,業者於IC製作完成後,均會執行電路測試作業,以檢測出IC於製作過程中,是否遭受損壞,進而檢測出不良品。 According to the current research and development and innovation, the work that must be completed by many large-scale electronic circuits has been completely replaced by integrated circuits (ICs), because ICs are multi-channel in the production process. Processing procedures, therefore, in order to ensure product quality, the manufacturer will perform circuit test operations after the IC is completed to detect whether the IC has been damaged during the manufacturing process, and then detect defective products.
IC在執行電路測試作業時,主要係將IC電性連結至測試機,而由測試機所內建的測試程式對該IC執行測試作業,然而為了使IC的測試作業達到自動化供料、測試及分類收料,設備業者即設計出一種測試分類機,該測試分類機主要係設有供料裝置、載送裝置及分類收料裝置,並於測試區內裝設由封測業者所提供之測試機,另該測試分類機設有一中央控制單元,該中央控制單元係訊號連結於該測試機,而由該測試機提供測試結果的訊號至中央控制單元,再由該中央控制單元控制各裝置自動化供料、測試及分類收料;亦即設備業者所製作之測試分類機係概屬於硬體的設備,封測業者所提供之測試機則概屬於軟體的設備,將軟體設備的測試機連結裝設於測試分類機上,該測試分類機即可依據測試機所提供的測 試結果訊號,自動化的進行供料、測試及分類收料作業,因此前述主要係說明測試分類機與測試機的區別。如前所述,測試機係由封測業者所提供,而測試機內建有許多的測試程式及測試訊息,由於這些資訊牽涉許多的商業機密,因此封測業者通常不會將這些資訊開放提供給設備業者所製作之測試分類機,導致設備業者僅能就有限的資訊盡可能的製作出符合封測業者需求之測試分類機,使得測試作業的過程中仍難免產生一些誤測的情形。 When the IC performs the circuit test operation, it mainly connects the IC to the test machine, and the test program built in the test machine performs the test operation on the IC. However, in order to automate the test and test of the IC test, For the classification and receiving, the equipment manufacturer designed a test sorting machine. The test sorting machine mainly has a feeding device, a carrying device and a sorting and receiving device, and installs a test provided by the packaging tester in the test area. And the test sorting machine is provided with a central control unit, the central control unit is connected to the test machine, and the test machine provides the test result signal to the central control unit, and then the central control unit controls the automation of each device. Feeding, testing and sorting and receiving; that is, the testing and sorting machine produced by the equipment manufacturer is a hardware device, and the testing machine provided by the packaging and testing company is a software device, and the testing device of the software device is connected. Based on the test sorter, the test sorter can be based on the test provided by the test machine. Test result signals, automated feeding, testing and sorting and receiving operations, so the above mainly describes the difference between the test sorter and the test machine. As mentioned earlier, the test machine is provided by the tester. There are many test programs and test messages built into the test machine. Since this information involves many trade secrets, the test and test industry usually does not provide such information. The test sorting machine produced by the equipment manufacturer can cause the equipment manufacturer to produce the test sorting machine that meets the requirements of the packaging and testing industry as much as possible for the limited information, so that some mis-testing situations are still inevitable during the testing operation.
以電子元件的測試溫度而言,不同的電子元件可能應用在高溫的作業環境,也可能應用在低溫的作業環境,因此在執行測試作業時,必須使電子元件模擬在實際的作業環境下,而在預設的溫度範圍內執行測試,也因此測試分類機必須另設有溫控裝置,以使電子元件在預設的溫度範圍內執行熱測作業或冷測作業。然而,電子元件又可區分內部溫度(Tj)及表面溫度(Tc),在測試作業的溫控過程中,封測業者係以電子元件的內部溫度(Tj)作為預設的溫度範圍標準,而電子元件的內部溫度(Tj)則又必須透過測試機的電性連結才能讀取獲得,當封測業者之測試機沒有開放提供電子元件的內部溫度(Tj)時,設備業者所製作之測試分類機僅能藉由溫控裝置之感溫器接觸電子元件的表面,才能讀取電子元件的表面溫度(Tc),並根據電子元件的表面溫度(Tc)來推估其內部溫度(Tj)是否在預設的溫度範圍內,而這樣的方式在測試機本身的溫度與電子元件的溫度具有很大的溫差而加劇熱傳導效應時,即經常導致電子元件的內部溫度(Tj)無法在預設的溫度範圍內,這種情形常見於第一批次電子元件的測試作業。 In terms of the test temperature of electronic components, different electronic components may be used in a high-temperature working environment or in a low-temperature working environment. Therefore, when performing test operations, the electronic components must be simulated in an actual working environment. The test is performed within a preset temperature range, and therefore the test sorter must be provided with a temperature control device to enable the electronic component to perform thermal or cold test operations within a preset temperature range. However, the electronic component can distinguish between the internal temperature (Tj) and the surface temperature (Tc). During the temperature control of the test operation, the tester uses the internal temperature (Tj) of the electronic component as the preset temperature range standard. The internal temperature (Tj) of the electronic component must be read through the electrical connection of the tester. When the tester's tester does not open the internal temperature (Tj) of the electronic component, the test classification produced by the equipment manufacturer. The machine can only read the surface temperature (Tc) of the electronic component by the temperature sensor of the temperature control device, and can estimate the internal temperature (Tj) according to the surface temperature (Tc) of the electronic component. In the preset temperature range, when the temperature of the test machine itself has a large temperature difference with the temperature of the electronic component to aggravate the heat conduction effect, the internal temperature (Tj) of the electronic component is often prevented from being preset. This situation is common in the testing of the first batch of electronic components in the temperature range.
請參閱第1圖所示,設備業者所製作之測試分類機係設有一可由驅動源驅動升降之壓取臂21,於該壓取臂21頭端則裝設有致冷晶片22,於加熱模式時,電流方向係使致冷晶片22 之下方放熱端產生熱面,上方則為吸熱端,藉由致冷晶片22通電所產生的熱面,即可與電子元件30進行冷熱交換;另於壓取臂21之端部係設有吸嘴23及凸設有一感溫器24,該感溫器24係藉由彈簧25的推頂而凸伸出壓取臂21之端部,並以線路將訊號連結至訊號轉換器26,訊號轉換器26再連結於中央控制單元27,該中央控制單元27並連結至一電源供應器28,該電源供應器28係可控制輸出至致冷晶片22之電流量,而調整控制致冷晶片22之輸出功率,藉以控制致冷晶片22之加熱程度;一可與電子元件30電性連結之測試座40,該測試座40係電性連結於封測業者所提供之測試機41,該測試機41再訊號連結至測試分類機之中央控制單元27,而由該測試機41提供測試結果的訊號至中央控制單元27,再由該中央控制單元27控制各裝置自動化供料、測試及分類收料。當壓取臂21取放及下壓電子元件30於測試座40執行測試作業時,感溫器24藉由彈簧25之彈力係可保持接觸於電子元件30之表面,並將所感測到電子元件30之表面溫度(Tc)訊號傳輸至訊號轉換器26,訊號轉換器26將溫度訊號轉換後再傳輸至中央控制單元27,中央控制單元27於接收該溫度訊號後即與預設的溫度範圍進行比對運算,並將比對運算後所獲致之溫差值轉換為致冷晶片22所需的電流量,再由電源供應器28輸出所需的電流量至致冷晶片22,而調整控制致冷晶片22之輸出功率(P),進而藉以控制致冷晶片22之加熱程度。如前所述,封測業者係以電子元件30的內部溫度(Tj)作為預設的溫度範圍標準,而電子元件30的內部溫度(Tj)則又必須透過測試機41的讀取才能獲得,當封測業者之測試機41沒有開放提供電子元件30的內部溫度(Tj)時,設備業者所製作之測試分類機僅能藉由感溫器24讀取電子元件的表面溫度(Tc)來推估其內部溫度 (Tj)是否在預設的溫度範圍內,而這樣的方式卻常在第一批次電子元件的測試作業中發生誤測的情形,例如,預設的溫度範圍在130±10℃,雖然致冷晶片22可以將電子元件30的表面溫度(Tc)加熱在130±10℃的溫度範圍內,但因測試機41於初始測試時其本身的溫度大約只有在15~25℃間,因此電子元件30的內部溫度(Tj)將會大量的透過測試座40熱傳導至測試機41,從而導致電子元件30的內部溫度(Tj)低於預設的溫度範圍130±10℃,由於電子元件30的內部溫度(Tj)低於預設的溫度範圍,此時測試機41即會對中央控制單元27發出為不良品的訊號,而將該電子元件30收置於不良品區,實際上該電子元件30並非真正的不良品,只不過是內部溫度(Tj)因熱傳導至測試機41而導致低於預設的溫度範圍,而這種誤測的情形必須一直到測試機41經熱傳導升溫至相當的程度後,才能使後續電子元件的熱傳導降低,後續電子元件的內部溫度(Tj)也才會趨近於表面溫度(Tc)而獲得改善,一般而言,大約經過3、4顆第一批次電子元件的測試後,這種誤測的情形即可獲得改善,由於該前3、4顆第一批次電子元件並非真正的不良品,因此最後再將該前3、4顆第一批次電子元件重新測試,如此即影響測試分類機的測試產能。 Referring to FIG. 1 , the test classification machine manufactured by the equipment manufacturer is provided with a pressing arm 21 that can be driven to be lifted and lowered by a driving source, and a cooling chip 22 is mounted at the head end of the pressing arm 21 in the heating mode. The current direction is such that the cooling wafer 22 The lower end of the heat generating end generates a hot surface, and the upper side is a heat absorbing end. The hot surface generated by energizing the cold wafer 22 can be exchanged with the electronic component 30 for cold and heat exchange; and the end of the pressing arm 21 is provided with a suction. A temperature sensor 24 is protruded from the mouth 23 and protruded from the end of the pressing arm 21 by the pushing of the spring 25, and the signal is connected to the signal converter 26 by a line, and the signal is converted. The device 26 is further coupled to a central control unit 27, which is coupled to a power supply 28 that controls the amount of current output to the cooled wafer 22 and adjusts the control of the cooled wafer 22 The output power is used to control the degree of heating of the cooling chip 22; a test socket 40 electrically connected to the electronic component 30, the test socket 40 is electrically connected to the testing machine 41 provided by the tester, the testing machine 41 The re-signal number is linked to the central control unit 27 of the test sorter, and the test machine 41 provides the test result signal to the central control unit 27, and the central control unit 27 controls the devices to automatically supply, test and sort the receipt. When the pressing arm 21 picks up and lowers the electronic component 30 to perform the testing operation on the test socket 40, the temperature sensor 24 can maintain contact with the surface of the electronic component 30 by the elastic force of the spring 25, and the electronic component is sensed. The surface temperature (Tc) signal of 30 is transmitted to the signal converter 26, and the signal converter 26 converts the temperature signal to the central control unit 27, and the central control unit 27 performs the temperature signal with the preset temperature range. The operation is compared, and the temperature difference obtained after the comparison operation is converted into the amount of current required to cool the wafer 22, and then the power supply 28 outputs the required amount of current to the cooled wafer 22, and the control is controlled to be cooled. The output power (P) of the wafer 22 is used to control the degree of heating of the cooled wafer 22. As described above, the sealer uses the internal temperature (Tj) of the electronic component 30 as a preset temperature range standard, and the internal temperature (Tj) of the electronic component 30 must be read by the tester 41 to obtain it. When the tester 41 of the tester does not open the internal temperature (Tj) of the electronic component 30, the tester made by the equipment manufacturer can only push the surface temperature (Tc) of the electronic component by the temperature sensor 24 to push Estimate its internal temperature (Tj) is within the preset temperature range, and this method is often misdetected in the test operation of the first batch of electronic components, for example, the preset temperature range is 130 ± 10 ° C, although The cold wafer 22 can heat the surface temperature (Tc) of the electronic component 30 within a temperature range of 130±10 ° C, but since the test machine 41 has its own temperature of about 15 to 25 ° C during the initial test, the electronic component The internal temperature (Tj) of 30 is thermally conducted to the test machine 41 through a large amount of heat through the test socket 40, thereby causing the internal temperature (Tj) of the electronic component 30 to be lower than the preset temperature range of 130 ± 10 ° C due to the interior of the electronic component 30. When the temperature (Tj) is lower than the preset temperature range, the test machine 41 sends a signal to the central control unit 27 as a defective product, and the electronic component 30 is placed in the defective product area. Actually, the electronic component 30 is actually disposed. It is not a true defective product, but the internal temperature (Tj) is lower than the preset temperature range due to heat conduction to the test machine 41, and such misdetection must be continued until the test machine 41 is heated to a considerable extent by heat conduction. After that, the subsequent electronic elements can be made The heat transfer is reduced, and the internal temperature (Tj) of the subsequent electronic components is also improved by approaching the surface temperature (Tc). Generally, after about 3 or 4 tests of the first batch of electronic components, this The situation of misdetection can be improved. Since the first three or four first batch electronic components are not really defective, the first three or four first batch electronic components are finally retested, thus affecting Test the test machine's test capacity.
有鑑於此,本發明人遂以其多年從事相關行業的研發與製作經驗,針對目前所面臨之問題深入研究,經過長期努力之研究與試作,終究研創出一種可使第一批次之電子元件在執行測試作業時有效提升可靠度,進而有效避免因誤測而重新測試的問題,此即為本發明之設計宗旨。 In view of this, the inventor has been engaged in research and development and production experience of related industries for many years, and has conducted in-depth research on the problems currently faced. After long-term efforts and trials, he has finally developed an electronic component that can make the first batch. It is the design aim of the present invention to effectively improve the reliability when performing the test operation, thereby effectively avoiding the problem of retesting due to misdetection.
本發明之目的一,係提供一種電子元件測試分類機之溫控裝置及其應用之溫控方法,該溫控裝置包括有對電子元件進行 預溫手段之第一溫控裝置,以及對測試座進行預溫手段之第二溫控裝置,該第一溫控裝置係使第一批次之電子元件的表面溫度預溫至超出預設的溫度值10%~60%,該第二溫控裝置則係使該測試座預溫至超出預設的溫度值10%~60%;藉此,當第一批次之電子元件在執行測試作業時,即不會因熱傳導至測試機而導致該電子元件的內部溫度無法控制在預設的溫度範圍內,進而有效提升第一批次之電子元件執行測試作業的可靠度。 A first object of the present invention is to provide a temperature control device for an electronic component test sorting machine and a temperature control method thereof, wherein the temperature control device includes performing electronic components a first temperature control device for pre-heating means, and a second temperature control device for pre-warming the test socket, the first temperature control device pre-heating the surface temperature of the first batch of electronic components beyond a preset The temperature value is 10%~60%, and the second temperature control device pre-heats the test stand to exceed the preset temperature value by 10%~60%; thereby, when the first batch of electronic components are performing the test operation When the heat is transmitted to the test machine, the internal temperature of the electronic component cannot be controlled within a preset temperature range, thereby effectively improving the reliability of the first batch of electronic components to perform the test operation.
本發明之目的二,係提供一種電子元件測試分類機之溫控裝置及其應用之溫控方法,其主要係使第一批次之電子元件在執行測試作業時即可確保其內部溫度在預設的溫度範圍內,進而避免因誤測而須重新測試的情形,達到有效提升測試產能之效益。 A second object of the present invention is to provide a temperature control device for an electronic component test sorting machine and a temperature control method thereof, which are mainly for enabling the first batch of electronic components to ensure that the internal temperature thereof is in advance when performing a test operation. Within the temperature range set, to avoid the need to re-test due to mis-testing, to achieve the benefits of effectively improving test capacity.
21‧‧‧壓取臂 21‧‧‧Press arm
22‧‧‧致冷晶片 22‧‧‧Cold wafer
23‧‧‧吸嘴 23‧‧‧ nozzle
24‧‧‧感溫器 24‧‧‧temperature sensor
25‧‧‧彈簧 25‧‧‧ Spring
26‧‧‧訊號轉換器 26‧‧‧Signal Converter
27‧‧‧中央控制單元 27‧‧‧Central Control Unit
28‧‧‧電源供應器 28‧‧‧Power supply
30‧‧‧電子元件 30‧‧‧Electronic components
40‧‧‧測試座 40‧‧‧ test seat
41‧‧‧測試機 41‧‧‧Testing machine
50‧‧‧供料裝置 50‧‧‧Feeding device
51‧‧‧料盤 51‧‧‧Tray
60‧‧‧收料裝置 60‧‧‧ receiving device
61‧‧‧料盤 61‧‧‧Tray
70‧‧‧輸送裝置 70‧‧‧Conveyor
71‧‧‧第一移料機構 71‧‧‧First Transfer Mechanism
711‧‧‧第一移料器 711‧‧‧First mover
72‧‧‧轉載機構 72‧‧‧Reloading agency
721‧‧‧第一供料載台 721‧‧‧First feeding stage
722‧‧‧第二供料載台 722‧‧‧Second feed stage
723‧‧‧第一收料載台 723‧‧‧First receiving platform
724‧‧‧第二收料載台 724‧‧‧Second receiving platform
725‧‧‧第一壓取臂 725‧‧‧First press arm
726‧‧‧第二壓取臂 726‧‧‧second press arm
727‧‧‧吸嘴 727‧‧ ‧ nozzle
728‧‧‧吸嘴 728‧‧‧ nozzle
73‧‧‧第二移料機構 73‧‧‧Second transfer mechanism
731‧‧‧第二移料器 731‧‧‧Second shifter
80‧‧‧測試裝置 80‧‧‧Testing device
81‧‧‧測試電路板 81‧‧‧Test circuit board
82‧‧‧測試座 82‧‧‧ test seat
90‧‧‧預溫盤 90‧‧‧Preheating plate
91‧‧‧致冷晶片 91‧‧‧Chilled wafer
92‧‧‧感溫器 92‧‧‧temperature sensor
921‧‧‧彈簧 921‧‧ ‧ spring
93‧‧‧訊號轉換器 93‧‧‧Signal Converter
94‧‧‧電源供應器 94‧‧‧Power supply
95‧‧‧封閉容室 95‧‧‧Closed room
96‧‧‧溫度流體供應管路 96‧‧‧temperature fluid supply line
100‧‧‧中央控制單元 100‧‧‧Central Control Unit
110‧‧‧測試機 110‧‧‧Tester
120‧‧‧電子元件 120‧‧‧Electronic components
第1圖:習知電子元件測試分類機之溫控架構示意圖。 Figure 1: Schematic diagram of the temperature control architecture of the conventional electronic component test classification machine.
第2圖:本發明電子元件測試分類機之配置示意圖。 Figure 2: Schematic diagram of the configuration of the electronic component test sorter of the present invention.
第3圖:本發明電子元件測試分類機之溫控架構示意圖。 Figure 3: Schematic diagram of the temperature control architecture of the electronic component test sorter of the present invention.
第4圖:本發明電子元件測試分類機之溫控流程示意圖。 Figure 4: Schematic diagram of the temperature control process of the electronic component test sorting machine of the present invention.
第5圖:本發明電子元件測試分類機之溫控作動示意圖(一)。 Figure 5: Schematic diagram of the temperature control operation of the electronic component test sorter of the present invention (1).
第6圖:本發明電子元件測試分類機之溫控作動示意圖(二)。 Figure 6: Schematic diagram of the temperature control operation of the electronic component test sorter of the present invention (2).
第7圖:本發明電子元件測試分類機之溫控作動示意圖(三)。 Figure 7: Schematic diagram of the temperature control operation of the electronic component test sorter of the present invention (3).
為使 貴審查委員對本發明作更進一步之瞭解,茲舉較佳實施例並配合圖式,詳述如后:請參閱第2、3圖,本發明之電子元件測試分類機包含有供料裝置50、收料裝置60、輸送裝置70、測試裝置80、溫控裝置及中央控制單元100,該供料裝置50係配置於機台 上,用以容納至少一待測之電子元件,於本實施例中,供料裝置50係配置有至少一盛裝待測電子元件之料盤51;該收料裝置60係配置於機台上,用以容納至少一完測之電子元件,於本實施例中,係設有複數個可盛裝不同等級完測電子元件之料盤61;該測試裝置80係設有具測試座82之測試電路板81,測試座82內係具有探針並電性連結於封測業者所提供之測試機110;該輸送裝置70係配置於機台上,並設有至少一具移料器之移料機構,用以移載電子元件,於本實施例中,該輸送裝置70係包含有第一移料機構71、轉載機構72及第二移料機構73,該第一移料機構71係設有至少一第一移料器711,用以於供料裝置50及轉載機構72間移載待測之電子元件,該第二移料機構73係設有至少一第二移料器731,用以於轉載機構72及收料裝置60間移載完測之電子元件,該轉載機構72係於測試裝置80的二側分別設有第一供料載台721、第二供料載台722、第一收料載台723、第二收料載台724,用以於第一移料機構71及第二移料機構73間載送待測/完測之電子元件,另為了將第一供料載台721、第二供料載台722上待測之電子元件轉載於測試座82,以及將測試座82內完測之電子元件轉載於第一收料載台723、第二收料載台724,於測試座82的前後方分別設有第一壓取臂725及第二壓取臂726,該第一壓取臂725及第二壓取臂726除了分別設有吸嘴727、728取放轉載電子元件外,於電子元件轉載於測試座82內時,亦可下壓電子元件,使電子元件確保電性連結於測試座82內的探針,而使測試機110利用其內建之測試程式對該電子元件執行測試作業,並將測試結果傳輸至中央控制單元100,由中央控制單元100依據測試結果控制各裝置作動,由於該電子元件測試分類機供、收料的動作流程已為習知技術,且 非為本案之重點,因此不予贅述;該溫控裝置係包括有對電子元件進行預溫手段之第一溫控裝置,以及對測試座82進行預溫手段之第二溫控裝置,該第一溫控裝置係以第一溫度產生器及感溫器對電子元件進行預溫手段,該第一溫度產生器可為設置於機台上之預溫盤90,使待測之電子元件在放置於測試座82前先於預溫盤90上預溫,該第一溫度產生器或可為設置於第一供料載台721及第二供料載台722上之加熱器,使第一供料載台721及第二供料載台722在轉載過程中預溫待測之電子元件,該第一溫度產生器或可為設置於第一壓取臂725及第二壓取臂726上之加熱器,使第一壓取臂725及第二壓取臂726在轉載時預溫待測之電子元件,於本實施例中(以第一壓取臂725為例,第二壓取臂726係相同於第一壓取臂725),該第一溫度產生器係為設置於第一壓取臂725之致冷晶片91(如第3圖所示),另該感溫器92則設於第一壓取臂725的下方,該感溫器92並可藉由彈簧921的推頂而凸伸出第一壓取臂725的端部,以感測電子元件的表面溫度,該感溫器92另以線路將訊號連結至訊號轉換器93,訊號轉換器93再連結於中央控制單元100,該中央控制單元100並連結至一電源供應器94,該電源供應器94係可控制輸出至致冷晶片91之電流量,而調整控制致冷晶片91之輸出功率,藉以控制致冷晶片91之冷熱程度;另該第二溫控裝置係以第二溫度產生器對測試座82進行預溫手段,該第二溫度產生器可為設置於測試座82之加熱器,使測試座82於置入電子元件前先予以預溫,該第二溫度產生器或可為設置於第一壓取臂725之加熱器,使測試座82於置入電子元件前,先以第一壓取臂725上之加熱器下壓測試座82內之探針,而對測試座82予以預溫,該第二溫度產生器或可為設置於測試座82周測之封閉容室95,並於該封閉容 室95內連結溫度流體供應管路96,而使測試座82於置入電子元件前先注入溫度流體予以預溫(如第3圖所示)。 In order to make the reviewer further understand the present invention, the preferred embodiment and the drawings are described in detail as follows: Please refer to Figures 2 and 3, the electronic component test sorting machine of the present invention comprises a feeding device. 50, the receiving device 60, the conveying device 70, the testing device 80, the temperature control device and the central control unit 100, the feeding device 50 is arranged on the machine In the present embodiment, the feeding device 50 is provided with at least one tray 51 for holding the electronic component to be tested; the receiving device 60 is disposed on the machine table. In the present embodiment, a plurality of trays 61 capable of holding different levels of electronic components are provided; the test device 80 is provided with a test circuit board having a test socket 82. 81. The test stand 82 has a probe and is electrically connected to the test machine 110 provided by the tester. The transport device 70 is disposed on the machine and is provided with at least one shifting mechanism of the shifter. In the present embodiment, the transport device 70 includes a first transfer mechanism 71, a transfer mechanism 72, and a second transfer mechanism 73. The first transfer mechanism 71 is provided with at least one The first shifter 711 is configured to transfer the electronic component to be tested between the feeding device 50 and the transfer mechanism 72, and the second transfer mechanism 73 is provided with at least one second shifter 731 for reprinting The electronic component is transferred between the mechanism 72 and the receiving device 60, and the transfer mechanism 72 is tested. Two sides of the device 80 are respectively provided with a first feeding stage 721, a second feeding stage 722, a first receiving stage 723 and a second receiving stage 724 for the first moving mechanism 71 and The second transfer mechanism 73 carries the electronic components to be tested/completed, and the electronic components to be tested on the first supply carrier 721 and the second supply carrier 722 are reprinted on the test block 82, and The electronic components that are completed in the test socket 82 are transferred to the first receiving stage 723 and the second receiving stage 724, and the first pressing arm 725 and the second pressing arm 726 are respectively disposed at the front and rear of the testing seat 82. The first pressing arm 725 and the second pressing arm 726 are respectively provided with the suction nozzles 727 and 728 for picking up and transferring electronic components. When the electronic components are transferred into the test socket 82, the electronic components can be pressed down. The electronic component ensures electrical connection to the probe in the test socket 82, and causes the test machine 110 to perform a test operation on the electronic component using its built-in test program, and transmits the test result to the central control unit 100, which is controlled by the central control unit. 100 controls the operation of each device according to the test result, because the electronic component tests the movement of the sorting machine Process known as learning technology, and It is not the focus of this case, so it will not be described; the temperature control device includes a first temperature control device for pre-warming electronic components, and a second temperature control device for pre-warming the test socket 82. A temperature control device pre-temperatures the electronic component with a first temperature generator and a temperature sensor, and the first temperature generator can be a pre-warm disk 90 disposed on the machine, so that the electronic component to be tested is placed The temperature is pre-warmed on the preheating plate 90 before the test socket 82. The first temperature generator may be a heater disposed on the first feeding stage 721 and the second feeding stage 722 to make the first supply The material stage 721 and the second supply stage 722 pre-warm the electronic components to be tested during the reloading process, and the first temperature generators may be disposed on the first pressing arm 725 and the second pressing arm 726. The heater causes the first pressing arm 725 and the second pressing arm 726 to pre-warm the electronic component to be tested during the reloading. In the present embodiment, the first pressing arm 725 is taken as an example, and the second pressing arm 726 is used as an example. The same as the first pressing arm 725), the first temperature generator is a cooling chip 91 disposed on the first pressing arm 725 (such as the third The temperature sensor 92 is disposed under the first pressure-receiving arm 725, and the temperature sensor 92 can protrude from the end of the first pressure-receiving arm 725 by pushing the spring 921. To sense the surface temperature of the electronic component, the temperature sensor 92 further connects the signal to the signal converter 93, and the signal converter 93 is connected to the central control unit 100, and the central control unit 100 is coupled to a power supply. 94, the power supply 94 is capable of controlling the amount of current output to the cooling chip 91, and adjusting the output power of the controlled cooling chip 91 to control the degree of cold and heat of the cooling chip 91; and the second temperature control device The second temperature generator pre-temperatures the test socket 82. The second temperature generator can be a heater disposed on the test socket 82, and the test socket 82 is pre-warmed before being placed in the electronic component. The generator may be a heater disposed on the first pressure-receiving arm 725 to press the probe in the test socket 82 with the heater on the first pressure-receiving arm 725 before the test socket 82 is placed in the electronic component. And the test seat 82 is pre-warmed, and the second temperature generator may be set in the test The test chamber is closed for 82 weeks, and the closed chamber 95 is closed. The chamber 95 is connected to the temperature fluid supply line 96, and the test socket 82 is pre-warmed by injecting a temperature fluid (as shown in Fig. 3) before being placed in the electronic component.
請參閱第4、5圖,以電子元件執行測試作業的預設溫度範圍130±10℃為例,由於測試機110於初始測試時其本身的溫度大約只有在15~25℃間,為了避免第一批次電子元件會透過測試座82大量的熱傳導至測試機110,而導致第一批次電子元件的內部溫度(Tj)低於預設的溫度範圍130±10℃,因此本發明係先對測試座82進行預溫手段,使該測試座82預溫至超出預設的溫度值10%~60%;於本實施例中,該測試座82的預溫手段係以中央控制單元100控制第二溫控裝置之第二溫度產生器開啟溫度流體供應管路96,以將溫度流體注入於封閉容室95內,使該測試座82預溫至超出預設的溫度值10%~60%。 Please refer to Figures 4 and 5 for the preset temperature range of 130±10 °C for electronic components to perform test operations. Since the test machine 110 itself is only about 15~25°C during the initial test, in order to avoid the first A batch of electronic components will conduct a large amount of heat through the test socket 82 to the testing machine 110, causing the internal temperature (Tj) of the first batch of electronic components to be lower than a preset temperature range of 130±10 ° C. Therefore, the present invention is first The test stand 82 performs a pre-warming method to pre-warm the test stand 82 to a preset temperature value of 10% to 60%. In the embodiment, the pre-heating means of the test stand 82 is controlled by the central control unit 100. The second temperature generator of the second temperature control device turns on the temperature fluid supply line 96 to inject the temperature fluid into the closed chamber 95 to preheat the test socket 82 to a preset temperature value of 10% to 60%.
請參閱第4、6圖,當測試座82開始預溫後,接著本發明即對第一批次電子元件120進行預溫手段,使該第一批次電子元件120的表面溫度預溫至超出預設的溫度值10%~60%;於本實施例中,該第一批次電子元件120的預溫手段,係於該第一批次電子元件120置入於測試座82前,以中央控制單元100控制第一溫控裝置之第一溫度產生器對第一批次電子元件120進行預溫,該中央控制單元100係控制第一壓取臂725轉載吸取該第一批次電子元件120時,同時使致冷晶片91作動加熱該第一批次電子元件120,由於該感溫器92係可感測該第一批次電子元件120的表面溫度,並將感測訊號透過訊號轉換器93傳輸至中央控制單元100,由中央控制單元100控制電源供應器94輸出至致冷晶片91之電流量,而調整控制致冷晶片91之輸出功率,藉以控制致冷晶片91加熱該第一批次電子元件120的表面溫度至超出預設的溫度值10%~60%(大約160℃)。 Referring to FIGS. 4 and 6, after the test socket 82 starts to be pre-warmed, the present invention then pre-warms the first batch of electronic components 120 to pre-temperature the surface temperature of the first batch of electronic components 120. The preset temperature value is 10% to 60%. In this embodiment, the pre-heating means of the first batch of electronic components 120 is performed before the first batch of electronic components 120 are placed in the test socket 82. The control unit 100 controls the first temperature generator of the first temperature control device to pre-warm the first batch of electronic components 120, and the central control unit 100 controls the first crimping arm 725 to reload the first batch of electronic components 120. At the same time, the cooling chip 91 is simultaneously activated to heat the first batch of electronic components 120, because the temperature sensor 92 senses the surface temperature of the first batch of electronic components 120, and transmits the sensing signals to the signal converter. 93 is transmitted to the central control unit 100, and the central control unit 100 controls the amount of current output from the power supply 94 to the chilled wafer 91, and adjusts the output power of the control chilled wafer 91, thereby controlling the chilled wafer 91 to heat the first batch. The surface temperature of the sub-electronic component 120 is super Predetermined temperature value of 10 to 60% (about 160 ℃).
請參閱第4、7圖,當第一壓取臂725將該預溫後之第一批次電子元件120置入於測試座82後,該第一批次電子元件120即將該超出預設溫度值的熱能傳導至測試座82及測試機110;藉此,本發明由於第二溫控裝置之第二溫度產生器已經預溫測試座82,且該第一溫控裝置之第一溫度產生器也使第一批次電子元件120的部分熱能傳導至測試座82,因此不僅可使測試座82及測試機110升溫至趨近於電子元件執行測試作業的預設溫度範圍130±10℃,且可使該第一批次電子元件120的內部溫度控制在預設溫度範圍130±10℃內,使得該第一批次電子元件120即可在預設溫度範圍內執行測試作業,進而可有效提升該第一批次電子元件120執行測試作業的可靠度,從而避免因誤測而須重新測試的情形,達到有效提升測試產能之效益。本發明當第一批次電子元件完成測試作業,並使該測試座82及測試機110升溫至趨近於電子元件執行測試作業的預設溫度範圍130±10℃後,該中央控制單元100即控制第一溫控裝置之電源供應器94的電流量,而調整降低致冷晶片91之輸出功率,藉以控制致冷晶片91加熱後續批次之電子元件的表面溫度至預設溫度範圍130±10℃,由於該測試座82及測試機110已升溫至趨近於電子元件執行測試作業的預設溫度範圍130±10℃,因此該後續批次之電子元件的熱能不會被大量的傳導至測試座82及測試機110,進而該後續批次之電子元件即可以趨近於預設溫度範圍130±10℃的表面溫度執行測試作業。 Referring to FIGS. 4 and 7, after the first pressing arm 725 places the pre-warmed first batch of electronic components 120 into the test socket 82, the first batch of electronic components 120 is about to exceed the preset temperature. The value of thermal energy is conducted to the test socket 82 and the testing machine 110; thereby, the second temperature generator of the second temperature control device has pre-warmed the test socket 82, and the first temperature generator of the first temperature control device Also transferring a portion of the thermal energy of the first batch of electronic components 120 to the test socket 82, thereby not only allowing the test socket 82 and the tester 110 to heat up to a preset temperature range of 130 ± 10 ° C that is close to the electronic component performing the test operation, and The internal temperature of the first batch of electronic components 120 can be controlled within a preset temperature range of 130±10° C., so that the first batch of electronic components 120 can perform test operations within a preset temperature range, thereby effectively improving The first batch of electronic components 120 performs the reliability of the test operation, thereby avoiding the situation of being retested due to misdetection, thereby achieving the benefit of effectively improving the test capacity. According to the present invention, when the first batch of electronic components completes the test operation and the test block 82 and the test machine 110 are heated up to a preset temperature range of 130 ± 10 ° C which is close to the electronic component performing the test operation, the central control unit 100 Controlling the amount of current of the power supply 94 of the first temperature control device, and adjusting the output power of the cooled wafer 91, thereby controlling the temperature of the surface of the electronic component of the subsequent batch of the cooled wafer 91 to a preset temperature range of 130±10 °C, since the test socket 82 and the test machine 110 have warmed up to a preset temperature range of 130±10 ° C which is close to the electronic component performing the test operation, the thermal energy of the electronic components of the subsequent batch is not transmitted to the test in a large amount. The block 82 and the test machine 110, and in turn the electronic components of the subsequent batch, can perform test operations approaching a surface temperature of a preset temperature range of 130 ± 10 °C.
綜上說明,本發明測試分類機之溫控裝置,不僅可分別對電子元件及測試座進行預溫手段,使得第一批次之電子元件在執行測試作業時即可確保在預設的溫度範圍內,且藉由中央控制單元的控制,亦可使後續批次之電子元件保持在預設的溫度範圍內, 進而有效提升測試產能,實為一深具實用性及進步性之設計,然未見有相同之產品及刊物公開,從而允符發明專利申請要件,爰依法提出申請。 In summary, the temperature control device of the test sorting machine of the present invention can not only pre-warm the electronic component and the test stand separately, so that the first batch of electronic components can ensure the preset temperature range when performing the test operation. Internally, and controlled by the central control unit, the electronic components of the subsequent batch can also be maintained within a preset temperature range. In order to effectively improve the test capacity, it is a practical and progressive design. However, the same products and publications are not disclosed, so that the requirements for invention patent applications are allowed, and the application is filed according to law.
725‧‧‧第一壓取臂 725‧‧‧First press arm
726‧‧‧第二壓取臂 726‧‧‧second press arm
727‧‧‧吸嘴 727‧‧ ‧ nozzle
728‧‧‧吸嘴 728‧‧‧ nozzle
81‧‧‧測試電路板 81‧‧‧Test circuit board
82‧‧‧測試座 82‧‧‧ test seat
91‧‧‧致冷晶片 91‧‧‧Chilled wafer
92‧‧‧感溫器 92‧‧‧temperature sensor
93‧‧‧訊號轉換器 93‧‧‧Signal Converter
94‧‧‧電源供應器 94‧‧‧Power supply
95‧‧‧封閉容室 95‧‧‧Closed room
96‧‧‧溫度流體供應管路 96‧‧‧temperature fluid supply line
100‧‧‧中央控制單元 100‧‧‧Central Control Unit
110‧‧‧測試機 110‧‧‧Tester
120‧‧‧電子元件 120‧‧‧Electronic components
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WO2023168893A1 (en) * | 2022-03-11 | 2023-09-14 | 杭州长川科技股份有限公司 | Chip temperature regulating method |
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