TWI587097B - 照明裝置、曝光設備、調整方法及製造物品的方法 - Google Patents

照明裝置、曝光設備、調整方法及製造物品的方法 Download PDF

Info

Publication number
TWI587097B
TWI587097B TW104118491A TW104118491A TWI587097B TW I587097 B TWI587097 B TW I587097B TW 104118491 A TW104118491 A TW 104118491A TW 104118491 A TW104118491 A TW 104118491A TW I587097 B TWI587097 B TW I587097B
Authority
TW
Taiwan
Prior art keywords
light
light source
source units
optical system
illumination
Prior art date
Application number
TW104118491A
Other languages
English (en)
Chinese (zh)
Other versions
TW201600936A (zh
Inventor
米山義邦
昼間健太郎
大阪昇
Original Assignee
佳能股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 佳能股份有限公司 filed Critical 佳能股份有限公司
Publication of TW201600936A publication Critical patent/TW201600936A/zh
Application granted granted Critical
Publication of TWI587097B publication Critical patent/TWI587097B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70133—Measurement of illumination distribution, in pupil plane or field plane

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW104118491A 2014-06-17 2015-06-08 照明裝置、曝光設備、調整方法及製造物品的方法 TWI587097B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014124752A JP6362095B2 (ja) 2014-06-17 2014-06-17 照明装置、露光装置、調整方法、及び、物品の製造方法

Publications (2)

Publication Number Publication Date
TW201600936A TW201600936A (zh) 2016-01-01
TWI587097B true TWI587097B (zh) 2017-06-11

Family

ID=54836065

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104118491A TWI587097B (zh) 2014-06-17 2015-06-08 照明裝置、曝光設備、調整方法及製造物品的方法

Country Status (5)

Country Link
US (1) US9632423B2 (enExample)
JP (1) JP6362095B2 (enExample)
KR (1) KR101850584B1 (enExample)
CN (1) CN105278258B (enExample)
TW (1) TWI587097B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202016103819U1 (de) * 2016-07-14 2017-10-20 Suss Microtec Lithography Gmbh Lichtquellenanordnung für ein Belichtungssystem sowie Fotolithografie-Belichtungssystem
CN107179653B (zh) * 2017-07-20 2018-10-19 武汉华星光电技术有限公司 一种曝光机及其发光装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5305054A (en) * 1991-02-22 1994-04-19 Canon Kabushiki Kaisha Imaging method for manufacture of microdevices
US20100259740A1 (en) * 2009-04-13 2010-10-14 Canon Kabushiki Kaisha Exposure method, exposure apparatus, and device manufacturing method

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2899026B2 (ja) 1989-11-27 1999-06-02 株式会社日立製作所 マーク検出装置
JP2890892B2 (ja) * 1991-04-30 1999-05-17 キヤノン株式会社 露光装置及びそれを用いた素子製造方法
JP2633091B2 (ja) * 1991-02-22 1997-07-23 キヤノン株式会社 像投影方法、回路製造方法及び投影露光装置
CN1045103C (zh) 1994-06-18 1999-09-15 兰州炼油化工总厂三星公司 一种烷基水杨酸盐润滑油添加剂
JP2000075496A (ja) * 1998-08-31 2000-03-14 Canon Inc 冷却機構を有する光源、光源装置及びこれを用いた露光装置
JP2000098099A (ja) * 1998-09-21 2000-04-07 Nikon Corp Ｘ線照明装置及びｘ線投影露光装置
US6704090B2 (en) * 2000-05-11 2004-03-09 Nikon Corporation Exposure method and exposure apparatus
JP2001326171A (ja) * 2000-05-18 2001-11-22 Canon Inc 照明装置
EP1280008B2 (en) 2001-07-27 2011-09-14 Canon Kabushiki Kaisha Illumination system, projection exposure apparatus and device manufacturing method
JP2004063988A (ja) * 2002-07-31 2004-02-26 Canon Inc 照明光学系、当該照明光学系を有する露光装置及びデバイス製造方法
JP4086582B2 (ja) * 2002-08-06 2008-05-14 キヤノン株式会社 照明装置及び露光装置
JP2004079254A (ja) * 2002-08-13 2004-03-11 Canon Inc 光源装置及び露光装置
JP4470558B2 (ja) * 2004-03-31 2010-06-02 ウシオ電機株式会社 光照射装置
TWI401538B (zh) 2007-03-28 2013-07-11 Orc Mfg Co Ltd Exposure drawing device
EP3617588B1 (en) * 2007-04-12 2021-03-24 Nikon Corporation Discharge lamp, connecting cable. light source apparatus, and exposure apparatus
JP4990416B2 (ja) 2010-08-23 2012-08-01 三菱電機株式会社 投写型表示装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5305054A (en) * 1991-02-22 1994-04-19 Canon Kabushiki Kaisha Imaging method for manufacture of microdevices
US20100259740A1 (en) * 2009-04-13 2010-10-14 Canon Kabushiki Kaisha Exposure method, exposure apparatus, and device manufacturing method

Also Published As

Publication number Publication date
TW201600936A (zh) 2016-01-01
JP6362095B2 (ja) 2018-07-25
CN105278258A (zh) 2016-01-27
CN105278258B (zh) 2017-10-24
KR20150144711A (ko) 2015-12-28
JP2016004921A (ja) 2016-01-12
US9632423B2 (en) 2017-04-25
US20150362843A1 (en) 2015-12-17
KR101850584B1 (ko) 2018-04-19

Similar Documents

Publication Publication Date Title
TWI498663B (zh) 照明光學裝置、曝光裝置以及元件製造方法
JP6086267B2 (ja) 照明光学系、照明方法、露光装置、およびデバイス製造方法
JP6651124B2 (ja) 照明光学系、露光装置、およびデバイス製造方法
TW200839460A (en) Exposure apparatus and semiconductor device fabrication method
TWI662376B (zh) Exposure device, exposure method, and article manufacturing method
KR102212855B1 (ko) 조명 광학계, 리소그래피 장치, 및 물품 제조 방법
TWI587097B (zh) 照明裝置、曝光設備、調整方法及製造物品的方法
KR101662882B1 (ko) 노광 장치 및 물품의 제조 방법
JP5388019B2 (ja) 露光照明装置及び露光パターンの位置ずれ調整方法
JP6139870B2 (ja) 露光方法、露光装置および物品の製造方法
US20200004013A1 (en) Light homogenizing elements with corrective features
TW201433826A (zh) 照明光學系統、曝光裝置、以及裝置之製造方法
TWI805936B (zh) 曝光裝置及物品之製造方法
JP5239829B2 (ja) 照明光学系、露光装置及びデバイスの製造方法
TWI668522B (zh) Illumination optical system, exposure device, and article manufacturing method
JP5239830B2 (ja) 照明光学系、露光装置及びデバイスの製造方法
CN114303101B (zh) 曝光装置以及物品的制造方法
US8982325B2 (en) Microlithographic projection exposure apparatus
JP2001110706A (ja) 照明装置、露光装置、露光方法及びマイクロデバイスの製造方法
WO2018051642A1 (ja) 照明装置、露光装置及び物品の製造方法
JP2009145452A (ja) 光照射装置
JP2007180290A (ja) Ｅｕｖ露光装置
JP2017198759A (ja) 照明装置、照明方法、露光装置、およびデバイス製造方法
JP2014134655A (ja) カラーフィルタ用露光装置及びカラーフィルタの製造方法