TWI563700B - Method of forming a magnetic tunnel junction device - Google Patents

Method of forming a magnetic tunnel junction device

Info

Publication number
TWI563700B
TWI563700B TW102111606A TW102111606A TWI563700B TW I563700 B TWI563700 B TW I563700B TW 102111606 A TW102111606 A TW 102111606A TW 102111606 A TW102111606 A TW 102111606A TW I563700 B TWI563700 B TW I563700B
Authority
TW
Taiwan
Prior art keywords
forming
tunnel junction
magnetic tunnel
junction device
magnetic
Prior art date
Application number
TW102111606A
Other languages
English (en)
Other versions
TW201330340A (zh
Inventor
Xia Li
Original Assignee
Qualcomm Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm Inc filed Critical Qualcomm Inc
Publication of TW201330340A publication Critical patent/TW201330340A/zh
Application granted granted Critical
Publication of TWI563700B publication Critical patent/TWI563700B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/10—Magnetoresistive devices
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165—Auxiliary circuits
    • G11C11/1659—Cell access
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • G11C11/5607—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using magnetic storage elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/30—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
    • H01F41/302—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F41/308—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices lift-off processes, e.g. ion milling, for trimming or patterning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/01—Manufacture or treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C2211/00—Indexing scheme relating to digital stores characterized by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C2211/56—Indexing scheme relating to G11C11/56 and sub-groups for features not covered by these groups
    • G11C2211/561—Multilevel memory cell aspects
    • G11C2211/5615—Multilevel magnetic memory cell using non-magnetic non-conducting interlayer, e.g. MTJ
TW102111606A 2008-03-07 2009-03-05 Method of forming a magnetic tunnel junction device TWI563700B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/044,596 US7781231B2 (en) 2008-03-07 2008-03-07 Method of forming a magnetic tunnel junction device

Publications (2)

Publication Number Publication Date
TW201330340A TW201330340A (zh) 2013-07-16
TWI563700B true TWI563700B (en) 2016-12-21

Family

ID=40650166

Family Applications (2)

Application Number Title Priority Date Filing Date
TW102111606A TWI563700B (en) 2008-03-07 2009-03-05 Method of forming a magnetic tunnel junction device
TW098107169A TWI393281B (zh) 2008-03-07 2009-03-05 形成磁通道接面裝置之方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW098107169A TWI393281B (zh) 2008-03-07 2009-03-05 形成磁通道接面裝置之方法

Country Status (11)

Country Link
US (4) US7781231B2 (zh)
EP (1) EP2263236B1 (zh)
JP (1) JP5259742B2 (zh)
KR (1) KR101251365B1 (zh)
CN (1) CN101960530B (zh)
BR (1) BRPI0909053B1 (zh)
CA (1) CA2716999C (zh)
MX (1) MX2010009811A (zh)
RU (1) RU2461082C2 (zh)
TW (2) TWI563700B (zh)
WO (1) WO2009114293A1 (zh)

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US9087981B2 (en) 2013-02-08 2015-07-21 Taiwan Semiconductor Manufacturing Company, Ltd. Methods of forming a magnetic tunnel junction device
US9166153B2 (en) * 2013-02-08 2015-10-20 Taiwan Semiconductor Manufacturing Company, Ltd. System and process to remove film from semiconductor devices
US9130156B2 (en) 2013-02-08 2015-09-08 Taiwan Semiconductor Manufacturing Company, Ltd. Process to remove film from semiconductor devices
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US9406875B2 (en) 2013-12-17 2016-08-02 Qualcomm Incorporated MRAM integration techniques for technology scaling
US9349772B2 (en) * 2014-04-25 2016-05-24 Globalfoundries Singapore Pte. Ltd. Methods for fabricatingintegrated circuits with spin torque transfer magnetic randomaccess memory (STT-MRAM) including a passivation layer formed along lateral sidewalls of a magnetic tunnel junction of the STT-MRAM
US9281168B2 (en) * 2014-06-06 2016-03-08 Everspin Technologies, Inc. Reducing switching variation in magnetoresistive devices
JP6523666B2 (ja) 2014-12-02 2019-06-05 東芝メモリ株式会社 磁気記憶素子および磁気メモリ
US9847473B2 (en) * 2015-04-16 2017-12-19 Taiwan Semiconductor Manufacturing Co., Ltd. MRAM structure for process damage minimization
CN104795489A (zh) * 2015-04-20 2015-07-22 北京航空航天大学 一种新型的四端磁存储器件
WO2017052627A1 (en) * 2015-09-25 2017-03-30 Intel Corporation Strained perpendicular magnetic tunnel junction devices
US9905751B2 (en) 2015-10-20 2018-02-27 Taiwan Semiconductor Manufacturing Company, Ltd. Magnetic tunnel junction with reduced damage
US9614003B1 (en) * 2015-10-21 2017-04-04 Globalfoundries Inc. Method of forming a memory device structure and memory device structure
US9711713B1 (en) 2016-01-15 2017-07-18 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor structure, electrode structure and method of forming the same
US11099155B2 (en) * 2016-04-04 2021-08-24 King Abdullah University Of Science And Technology Corrosion detection of nanowires by magnetic sensors
JP6374452B2 (ja) * 2016-08-04 2018-08-15 株式会社東芝 磁気メモリ
US9960207B1 (en) * 2016-10-13 2018-05-01 Globalfoundries Inc. Spin-selective electron relay
US10403424B2 (en) 2017-06-09 2019-09-03 Texas Instruments Incorporated Method to form magnetic core for integrated magnetic devices
US10276783B2 (en) * 2017-06-09 2019-04-30 Sandisk Technologies Llc Gate voltage controlled perpendicular spin orbit torque MRAM memory cell
WO2019005163A1 (en) * 2017-06-30 2019-01-03 Intel Corporation CAPACITIVE ELECTRODE FOR MEMORY APPLICATIONS AND METHODS OF MANUFACTURE
US10630296B2 (en) * 2017-09-12 2020-04-21 iCometrue Company Ltd. Logic drive with brain-like elasticity and integrality based on standard commodity FPGA IC chips using non-volatile memory cells
US10879077B2 (en) 2017-10-30 2020-12-29 Taiwan Semiconductor Manufacturing Company Ltd. Planarization apparatus and planarization method thereof
US10446206B2 (en) * 2017-11-28 2019-10-15 Taiwan Semiconductor Manufacturing Co., Ltd. Vertical memory cells and memory devices using the same
CN113016033A (zh) * 2018-11-20 2021-06-22 华为技术有限公司 磁隧道结、磁电阻随机存储器、芯片及制备方法
US11043251B2 (en) * 2018-11-30 2021-06-22 Taiwan Semiconductor Manufacturing Company, Ltd. Magnetic tunnel junction device and method of forming same
US11723283B2 (en) * 2020-05-11 2023-08-08 Applied Materials, Inc. Spin-orbit torque MRAM structure and manufacture thereof
RU2753803C1 (ru) * 2021-01-28 2021-08-23 Общество С Ограниченной Ответственностью "Крокус Наноэлектроника" (Ооо "Крокус Наноэлектроника") Способ создания самоориентируемого магнитного сенсора
US20220406992A1 (en) * 2021-06-17 2022-12-22 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor Memory Device And Method Of Forming The Same

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US20060033133A1 (en) * 2004-08-13 2006-02-16 Taiwan Semiconductor Manufacturing Company, Ltd. MRAM cell having shared configuration
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US20070178608A1 (en) * 2006-01-27 2007-08-02 Jijun Sun Magnetic tunnel junction device with improved barrier layer

Also Published As

Publication number Publication date
JP2011515837A (ja) 2011-05-19
WO2009114293A1 (en) 2009-09-17
US7781231B2 (en) 2010-08-24
CN101960530B (zh) 2015-04-22
KR101251365B1 (ko) 2013-04-05
TW201330340A (zh) 2013-07-16
US8680592B2 (en) 2014-03-25
EP2263236A1 (en) 2010-12-22
RU2010140917A (ru) 2012-04-20
US20140273288A1 (en) 2014-09-18
CA2716999A1 (en) 2009-09-17
BRPI0909053A2 (pt) 2020-06-23
US20130062716A1 (en) 2013-03-14
US20100219493A1 (en) 2010-09-02
KR20100117146A (ko) 2010-11-02
MX2010009811A (es) 2010-09-30
CN101960530A (zh) 2011-01-26
CA2716999C (en) 2015-05-26
JP5259742B2 (ja) 2013-08-07
US9368718B2 (en) 2016-06-14
US8766384B2 (en) 2014-07-01
US20090224341A1 (en) 2009-09-10
EP2263236B1 (en) 2016-03-30
BRPI0909053B1 (pt) 2021-01-12
TWI393281B (zh) 2013-04-11
WO2009114293A8 (en) 2011-02-03
TW201001767A (en) 2010-01-01
RU2461082C2 (ru) 2012-09-10

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