TWI560887B - Structure and method for sram finfet device - Google Patents
Structure and method for sram finfet deviceInfo
- Publication number
- TWI560887B TWI560887B TW103136328A TW103136328A TWI560887B TW I560887 B TWI560887 B TW I560887B TW 103136328 A TW103136328 A TW 103136328A TW 103136328 A TW103136328 A TW 103136328A TW I560887 B TWI560887 B TW I560887B
- Authority
- TW
- Taiwan
- Prior art keywords
- finfet device
- sram finfet
- sram
- finfet
- Prior art date
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- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823814—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
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Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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US14/262,378 US9721955B2 (en) | 2014-04-25 | 2014-04-25 | Structure and method for SRAM FinFET device having an oxide feature |
Publications (2)
Publication Number | Publication Date |
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TW201541644A TW201541644A (zh) | 2015-11-01 |
TWI560887B true TWI560887B (en) | 2016-12-01 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW103136328A TWI560887B (en) | 2014-04-25 | 2014-10-21 | Structure and method for sram finfet device |
Country Status (5)
Country | Link |
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US (4) | US9721955B2 (zh) |
KR (1) | KR101672602B1 (zh) |
CN (1) | CN105023923B (zh) |
DE (1) | DE102015104604A1 (zh) |
TW (1) | TWI560887B (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9721955B2 (en) | 2014-04-25 | 2017-08-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and method for SRAM FinFET device having an oxide feature |
US9490340B2 (en) | 2014-06-18 | 2016-11-08 | Globalfoundries Inc. | Methods of forming nanowire devices with doped extension regions and the resulting devices |
US9431512B2 (en) * | 2014-06-18 | 2016-08-30 | Globalfoundries Inc. | Methods of forming nanowire devices with spacers and the resulting devices |
US9960273B2 (en) * | 2015-11-16 | 2018-05-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuit structure with substrate isolation and un-doped channel |
US9627540B1 (en) * | 2015-11-30 | 2017-04-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9882051B1 (en) | 2016-09-15 | 2018-01-30 | Qualcomm Incorporated | Fin field effect transistors (FETs) (FinFETs) employing dielectric material layers to apply stress to channel regions |
US10134760B2 (en) * | 2017-01-10 | 2018-11-20 | International Business Machines Corporation | FinFETs with various fin height |
US10411020B2 (en) | 2017-08-31 | 2019-09-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Using three or more masks to define contact-line-blocking components in FinFET SRAM fabrication |
US10276718B2 (en) | 2017-08-31 | 2019-04-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | FinFET having a relaxation prevention anchor |
US11404423B2 (en) * | 2018-04-19 | 2022-08-02 | Taiwan Semiconductor Manufacturing Co., Ltd | Fin-based strap cell structure for improving memory performance |
US11257908B2 (en) * | 2018-10-26 | 2022-02-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Transistors with stacked semiconductor layers as channels |
US10818674B2 (en) | 2019-03-07 | 2020-10-27 | Globalfoundries Inc. | Structures and SRAM bit cells integrating complementary field-effect transistors |
US11133224B2 (en) * | 2019-09-27 | 2021-09-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor structure and method for forming the same |
Citations (3)
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US20120193751A1 (en) * | 2011-01-28 | 2012-08-02 | Toshiba America Electronic Components, Inc. | Semiconductor device and method of manufacturing |
US20130122672A1 (en) * | 2010-07-30 | 2013-05-16 | Monolithic 3D Inc. | Semiconductor device and structure |
TW201409713A (zh) * | 2012-08-31 | 2014-03-01 | Samsung Electronics Co Ltd | 半導體裝置及其製造方法 |
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KR100338783B1 (en) | 2000-10-28 | 2002-06-01 | Samsung Electronics Co Ltd | Semiconductor device having expanded effective width of active region and fabricating method thereof |
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