TWI555583B - 鍍膜方法與鍍膜設備 - Google Patents
鍍膜方法與鍍膜設備 Download PDFInfo
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- TWI555583B TWI555583B TW099130123A TW99130123A TWI555583B TW I555583 B TWI555583 B TW I555583B TW 099130123 A TW099130123 A TW 099130123A TW 99130123 A TW99130123 A TW 99130123A TW I555583 B TWI555583 B TW I555583B
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Classifications
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- B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
- B05D7/04—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber to surfaces of films or sheets
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/06—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying two different liquids or other fluent materials, or the same liquid or other fluent material twice, to the same side of the work
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
- H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2252/00—Sheets
- B05D2252/02—Sheets of indefinite length
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Chemical Vapour Deposition (AREA)
- Coating Apparatus (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP09169668A EP2292339A1 (en) | 2009-09-07 | 2009-09-07 | Coating method and coating apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201113098A TW201113098A (en) | 2011-04-16 |
| TWI555583B true TWI555583B (zh) | 2016-11-01 |
Family
ID=41531217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW099130123A TWI555583B (zh) | 2009-09-07 | 2010-09-07 | 鍍膜方法與鍍膜設備 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US9539615B2 (enExample) |
| EP (2) | EP2292339A1 (enExample) |
| JP (1) | JP5623531B2 (enExample) |
| KR (1) | KR101776790B1 (enExample) |
| CN (1) | CN102574156B (enExample) |
| CA (1) | CA2773520A1 (enExample) |
| IN (1) | IN2012DN01946A (enExample) |
| RU (1) | RU2012113315A (enExample) |
| TW (1) | TWI555583B (enExample) |
| WO (1) | WO2011028119A1 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9777365B2 (en) | 2011-11-29 | 2017-10-03 | Itn Energy Systems, Inc. | Multi-zone modular coater |
| EP2626144A1 (en) | 2012-02-07 | 2013-08-14 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Roll to roll manufacturing system having a clean room deposition zone and a separate processing zone |
| JP6055295B2 (ja) * | 2012-11-29 | 2016-12-27 | 東レエンジニアリング株式会社 | 両面薄膜形成装置 |
| CN103878093A (zh) * | 2012-12-24 | 2014-06-25 | 鸿富锦精密工业（深圳）有限公司 | 胶带的制造方法及其采用的设备 |
| EP3034182A1 (en) | 2014-12-17 | 2016-06-22 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Coating system and coating method |
| FR3035122B1 (fr) * | 2015-04-20 | 2017-04-28 | Coating Plasma Ind | Procede de traitement de surface d'un film en mouvement et installation pour la mise en oeuvre de ce procede |
| US10099250B2 (en) * | 2015-06-17 | 2018-10-16 | The Boeing Company | Light-curable material applicator and associated methods |
| CN107265152B (zh) * | 2017-06-09 | 2019-08-16 | 浙江汇锋薄膜科技有限公司 | 一种导电薄膜的制备设备上的放料张紧装置 |
| EP3479908A1 (en) * | 2017-11-03 | 2019-05-08 | A & R Carton OY | Method of and coating application unit for applying a coating on a web of material |
| KR101863260B1 (ko) * | 2018-01-17 | 2018-06-04 | 차천용 | 친환경 점착제 도포장치 |
| KR101863259B1 (ko) * | 2018-01-17 | 2018-06-04 | 차천용 | 점착제 도포장치 |
| US20240189861A1 (en) | 2021-05-06 | 2024-06-13 | Basf Coatings Gmbh | Multilayer barrier film, its manufacture and use in photovoltaic applications |
| PL246621B1 (pl) * | 2021-07-22 | 2025-02-17 | Siec Badawcza Lukasiewicz Instytut Tech Eksploatacji W Radomiu | System przewijania materiału ciągłego (taśma, drut) |
| WO2024126566A1 (en) | 2022-12-14 | 2024-06-20 | Basf Coatings Gmbh | Multilayer barrier film coated polymeric substrate, its manufacture and use in electronic devices |
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| WO2004097846A2 (en) * | 2003-04-25 | 2004-11-11 | Sigma Laboratories Of Arizona, Inc. | Porous materials functionalized by vacuum deposition |
| TW200844250A (en) * | 2006-05-08 | 2008-11-16 | Applied Materials Inc | Apparatus and method for coating substrates with approximate process isolation |
| TW200916816A (en) * | 2007-10-12 | 2009-04-16 | Hon Hai Prec Ind Co Ltd | Apparatus and method for coating lens |
| WO2009069974A2 (en) * | 2007-11-29 | 2009-06-04 | Lg Chem, Ltd. | Coating composition and coating film having enhanced abrasion resistance and fingerprint traces removability |
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-
2009
- 2009-09-07 EP EP09169668A patent/EP2292339A1/en not_active Withdrawn
-
2010
- 2010-09-06 CN CN201080047302.4A patent/CN102574156B/zh not_active Expired - Fee Related
- 2010-09-06 IN IN1946DEN2012 patent/IN2012DN01946A/en unknown
- 2010-09-06 EP EP10757311A patent/EP2475467A1/en not_active Withdrawn
- 2010-09-06 KR KR1020127009073A patent/KR101776790B1/ko not_active Expired - Fee Related
- 2010-09-06 WO PCT/NL2010/050560 patent/WO2011028119A1/en not_active Ceased
- 2010-09-06 CA CA2773520A patent/CA2773520A1/en not_active Abandoned
- 2010-09-06 US US13/394,271 patent/US9539615B2/en not_active Expired - Fee Related
- 2010-09-06 JP JP2012527840A patent/JP5623531B2/ja not_active Expired - Fee Related
- 2010-09-06 RU RU2012113315/05A patent/RU2012113315A/ru not_active Application Discontinuation
- 2010-09-07 TW TW099130123A patent/TWI555583B/zh not_active IP Right Cessation
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| WO2004097846A2 (en) * | 2003-04-25 | 2004-11-11 | Sigma Laboratories Of Arizona, Inc. | Porous materials functionalized by vacuum deposition |
| TW200844250A (en) * | 2006-05-08 | 2008-11-16 | Applied Materials Inc | Apparatus and method for coating substrates with approximate process isolation |
| TW200916816A (en) * | 2007-10-12 | 2009-04-16 | Hon Hai Prec Ind Co Ltd | Apparatus and method for coating lens |
| WO2009069974A2 (en) * | 2007-11-29 | 2009-06-04 | Lg Chem, Ltd. | Coating composition and coating film having enhanced abrasion resistance and fingerprint traces removability |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20120101344A (ko) | 2012-09-13 |
| CN102574156A (zh) | 2012-07-11 |
| US9539615B2 (en) | 2017-01-10 |
| KR101776790B1 (ko) | 2017-09-19 |
| IN2012DN01946A (enExample) | 2015-08-21 |
| JP5623531B2 (ja) | 2014-11-12 |
| CN102574156B (zh) | 2014-10-01 |
| EP2292339A1 (en) | 2011-03-09 |
| TW201113098A (en) | 2011-04-16 |
| US20120276299A1 (en) | 2012-11-01 |
| JP2013503972A (ja) | 2013-02-04 |
| WO2011028119A1 (en) | 2011-03-10 |
| CA2773520A1 (en) | 2011-03-10 |
| EP2475467A1 (en) | 2012-07-18 |
| RU2012113315A (ru) | 2013-10-20 |
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| Date | Code | Title | Description |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |