TWI545681B - A substrate supporting device, a substrate transfer mechanism, a polarizing film bonding device, and a liquid crystal display device manufacturing system having the same - Google Patents
A substrate supporting device, a substrate transfer mechanism, a polarizing film bonding device, and a liquid crystal display device manufacturing system having the same Download PDFInfo
- Publication number
- TWI545681B TWI545681B TW100110817A TW100110817A TWI545681B TW I545681 B TWI545681 B TW I545681B TW 100110817 A TW100110817 A TW 100110817A TW 100110817 A TW100110817 A TW 100110817A TW I545681 B TWI545681 B TW I545681B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- polarizing film
- supporting
- support
- transfer mechanism
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims description 3225
- 230000007246 mechanism Effects 0.000 title claims description 1194
- 238000012546 transfer Methods 0.000 title claims description 643
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 79
- 238000004519 manufacturing process Methods 0.000 title claims description 71
- 230000032258 transport Effects 0.000 claims description 395
- 230000007723 transport mechanism Effects 0.000 claims description 227
- 230000002441 reversible effect Effects 0.000 claims description 168
- 238000004804 winding Methods 0.000 claims description 50
- 238000010030 laminating Methods 0.000 claims description 44
- 239000012530 fluid Substances 0.000 claims description 41
- 230000007547 defect Effects 0.000 claims description 37
- 238000007689 inspection Methods 0.000 claims description 37
- 238000011144 upstream manufacturing Methods 0.000 claims description 27
- 230000008859 change Effects 0.000 claims description 25
- 238000004140 cleaning Methods 0.000 claims description 17
- 230000000712 assembly Effects 0.000 claims description 16
- 238000000429 assembly Methods 0.000 claims description 16
- 238000001179 sorption measurement Methods 0.000 claims description 11
- 238000011084 recovery Methods 0.000 claims description 5
- 239000002313 adhesive film Substances 0.000 claims 1
- 239000011295 pitch Substances 0.000 claims 1
- 239000010408 film Substances 0.000 description 671
- 230000000694 effects Effects 0.000 description 110
- 238000012545 processing Methods 0.000 description 105
- 238000004904 shortening Methods 0.000 description 49
- 238000000034 method Methods 0.000 description 21
- 238000010586 diagram Methods 0.000 description 20
- 230000002950 deficient Effects 0.000 description 18
- 230000008569 process Effects 0.000 description 13
- 230000009471 action Effects 0.000 description 11
- 238000005520 cutting process Methods 0.000 description 11
- 239000012790 adhesive layer Substances 0.000 description 10
- 239000007888 film coating Substances 0.000 description 10
- 238000009501 film coating Methods 0.000 description 10
- 238000005406 washing Methods 0.000 description 8
- 239000013585 weight reducing agent Substances 0.000 description 8
- 230000008901 benefit Effects 0.000 description 7
- 230000006870 function Effects 0.000 description 6
- 230000003993 interaction Effects 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000012790 confirmation Methods 0.000 description 4
- 230000003028 elevating effect Effects 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 241000251468 Actinopterygii Species 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005034 decoration Methods 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 102000003939 Membrane transport proteins Human genes 0.000 description 1
- 108090000301 Membrane transport proteins Proteins 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000009061 membrane transport Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
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- 230000001360 synchronised effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/18—Handling of layers or the laminate
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133308—Support structures for LCD panels, e.g. frames or bezels
- G02F1/133325—Assembling processes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133528—Polarisers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
- B32B2457/202—LCD, i.e. liquid crystal displays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Liquid Crystal (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Polarising Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010079455 | 2010-03-30 | ||
| JP2010099858 | 2010-04-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201214605A TW201214605A (en) | 2012-04-01 |
| TWI545681B true TWI545681B (zh) | 2016-08-11 |
Family
ID=44711764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100110817A TWI545681B (zh) | 2010-03-30 | 2011-03-29 | A substrate supporting device, a substrate transfer mechanism, a polarizing film bonding device, and a liquid crystal display device manufacturing system having the same |
Country Status (5)
| Country | Link |
|---|---|
| JP (3) | JP5079114B2 (enExample) |
| KR (1) | KR101894104B1 (enExample) |
| CN (2) | CN103941438B (enExample) |
| TW (1) | TWI545681B (enExample) |
| WO (1) | WO2011122006A1 (enExample) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011059836A2 (en) | 2009-10-29 | 2011-05-19 | Trustees Of Dartmouth College | T cell receptor-deficient t cell compositions |
| JP5808577B2 (ja) * | 2011-05-27 | 2015-11-10 | 日東電工株式会社 | 液晶パネルの反転装置 |
| KR20150004802A (ko) * | 2012-04-03 | 2015-01-13 | 스미또모 가가꾸 가부시키가이샤 | 광학 표시 디바이스의 생산 시스템 |
| CN104583847B (zh) * | 2012-09-07 | 2018-04-13 | 住友化学株式会社 | 光学构件贴合体的制造装置 |
| JP6126396B2 (ja) * | 2013-02-07 | 2017-05-10 | 三星ダイヤモンド工業株式会社 | 基板加工装置 |
| JP5616494B1 (ja) * | 2013-07-04 | 2014-10-29 | 日東電工株式会社 | 積層体基板の形成方法および装置 |
| KR101788367B1 (ko) * | 2013-11-29 | 2017-10-19 | 시바우라 메카트로닉스 가부시끼가이샤 | 기판 접합 장치, 표시 패널 제조 장치 및 표시 패널 제조 방법 |
| CN103708713A (zh) * | 2013-12-26 | 2014-04-09 | 深圳市华星光电技术有限公司 | 夹持机构、液晶面板切割机以及液晶面板切割工艺 |
| JP6522667B2 (ja) * | 2014-02-20 | 2019-05-29 | インテヴァック インコーポレイテッド | 基板両面処理システム及び方法 |
| CN104401767B (zh) * | 2014-11-14 | 2017-03-15 | 广州兴森快捷电路科技有限公司 | Pcb转角传输装置及方法 |
| CN105158936B (zh) * | 2015-08-28 | 2019-05-03 | 深圳市华星光电技术有限公司 | 机械臂组件及移动玻璃基板以进行基板组合的方法 |
| KR101745268B1 (ko) | 2016-06-20 | 2017-06-08 | 주식회사 엘지화학 | 패널 반전 장치, 광학 표시 소자의 제조 시스템 및 방법 |
| TWI614822B (zh) * | 2016-06-29 | 2018-02-11 | All Ring Tech Co Ltd | 基板檢查方法及裝置 |
| JP6820189B2 (ja) * | 2016-12-01 | 2021-01-27 | 東京エレクトロン株式会社 | 接合装置、接合システム、接合方法、プログラム及びコンピュータ記憶媒体 |
| JP6468540B2 (ja) * | 2017-05-22 | 2019-02-13 | キヤノントッキ株式会社 | 基板搬送機構、基板載置機構、成膜装置及びそれらの方法 |
| JP6626158B2 (ja) * | 2018-06-11 | 2019-12-25 | 日東電工株式会社 | 遮へい部材を備えた貼合装置 |
| KR102463088B1 (ko) | 2019-01-11 | 2022-11-02 | 동우 화인켐 주식회사 | 광학 필름 접합 방법 및 접합 장치 |
| CN112731697B (zh) * | 2021-01-04 | 2022-09-27 | 河北光兴半导体技术有限公司 | 液晶显示面板的加工系统及其加工方法 |
| CN114300409B (zh) * | 2021-12-31 | 2025-05-16 | 绍兴同芯成集成电路有限公司 | 一种超薄晶圆置入凹槽型载盘的方法 |
| JP7527048B1 (ja) * | 2023-06-13 | 2024-08-02 | 株式会社新川 | 基板搬送装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62143437A (ja) * | 1985-12-18 | 1987-06-26 | Hitachi Ltd | ウエハハンドリング装置 |
| JP3897133B2 (ja) * | 1997-02-26 | 2007-03-22 | 富士フイルム株式会社 | 基板反転方法及び装置 |
| JP4545996B2 (ja) * | 2001-07-03 | 2010-09-15 | 株式会社アイテック | ロボットハンドの駆動装置 |
| KR20040002796A (ko) * | 2002-06-28 | 2004-01-07 | 후지 샤신 필름 가부시기가이샤 | 편광판 점착방법 및 그 장치 |
| JP2005037417A (ja) * | 2002-06-28 | 2005-02-10 | Fuji Photo Film Co Ltd | 偏光板貼合方法及び装置 |
| JP4340788B2 (ja) * | 2003-04-22 | 2009-10-07 | シャープ株式会社 | 基板への偏光板貼付装置 |
| JP2005037471A (ja) * | 2003-07-16 | 2005-02-10 | Dainippon Printing Co Ltd | 有機ｅｌディスプレイ用光学フィルター及びこれを用いた有機ｅｌディスプレイ |
| JP4307510B1 (ja) * | 2007-12-27 | 2009-08-05 | 日東電工株式会社 | 光学表示装置の製造システム及び製造方法 |
| CN101676770B (zh) * | 2008-09-19 | 2011-12-28 | 北京京东方光电科技有限公司 | 液晶面板移载装置及方法 |
| JP4628488B1 (ja) * | 2009-05-15 | 2011-02-09 | 日東電工株式会社 | 光学表示装置の製造システム及び製造方法 |
-
2011
- 2011-03-28 JP JP2011071218A patent/JP5079114B2/ja not_active Expired - Fee Related
- 2011-03-28 JP JP2011071219A patent/JP5079115B2/ja not_active Expired - Fee Related
- 2011-03-28 JP JP2011071220A patent/JP5170912B2/ja not_active Expired - Fee Related
- 2011-03-29 CN CN201410181685.4A patent/CN103941438B/zh not_active Expired - Fee Related
- 2011-03-29 CN CN201180017386.1A patent/CN102834771B/zh not_active Expired - Fee Related
- 2011-03-29 WO PCT/JP2011/001872 patent/WO2011122006A1/ja not_active Ceased
- 2011-03-29 TW TW100110817A patent/TWI545681B/zh not_active IP Right Cessation
- 2011-03-29 KR KR1020127016939A patent/KR101894104B1/ko not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN102834771A (zh) | 2012-12-19 |
| JP2011242753A (ja) | 2011-12-01 |
| JP5079114B2 (ja) | 2012-11-21 |
| JP5170912B2 (ja) | 2013-03-27 |
| KR101894104B1 (ko) | 2018-08-31 |
| WO2011122006A1 (ja) | 2011-10-06 |
| CN103941438B (zh) | 2017-04-12 |
| JP2011243955A (ja) | 2011-12-01 |
| KR20130055557A (ko) | 2013-05-28 |
| TW201214605A (en) | 2012-04-01 |
| CN102834771B (zh) | 2015-08-26 |
| JP5079115B2 (ja) | 2012-11-21 |
| JP2011243954A (ja) | 2011-12-01 |
| CN103941438A (zh) | 2014-07-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |