TWI534349B - Cryogenic pump, cryogenic pump regeneration method and cryogenic pump control device - Google Patents

Cryogenic pump, cryogenic pump regeneration method and cryogenic pump control device Download PDF

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Publication number
TWI534349B
TWI534349B TW101147462A TW101147462A TWI534349B TW I534349 B TWI534349 B TW I534349B TW 101147462 A TW101147462 A TW 101147462A TW 101147462 A TW101147462 A TW 101147462A TW I534349 B TWI534349 B TW I534349B
Authority
TW
Taiwan
Prior art keywords
temperature
stage
plate
cryopump
temperature sensor
Prior art date
Application number
TW101147462A
Other languages
English (en)
Chinese (zh)
Other versions
TW201335482A (zh
Inventor
Tsutomu Fukuda
Original Assignee
Sumitomo Heavy Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries filed Critical Sumitomo Heavy Industries
Publication of TW201335482A publication Critical patent/TW201335482A/zh
Application granted granted Critical
Publication of TWI534349B publication Critical patent/TWI534349B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J37/00—Baking; Roasting; Grilling; Frying
    • A47J37/06—Roasters; Grills; Sandwich grills
    • A47J37/067—Horizontally disposed broiling griddles
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J27/00—Cooking-vessels
    • A47J27/002—Construction of cooking-vessels; Methods or processes of manufacturing specially adapted for cooking-vessels
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J37/00—Baking; Roasting; Grilling; Frying
    • A47J37/06—Roasters; Grills; Sandwich grills
    • A47J37/07—Roasting devices for outdoor use; Barbecues
    • A47J37/0786—Accessories
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
TW101147462A 2012-02-23 2012-12-14 Cryogenic pump, cryogenic pump regeneration method and cryogenic pump control device TWI534349B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012037239A JP5808691B2 (ja) 2012-02-23 2012-02-23 クライオポンプ、及びクライオポンプの再生方法

Publications (2)

Publication Number Publication Date
TW201335482A TW201335482A (zh) 2013-09-01
TWI534349B true TWI534349B (zh) 2016-05-21

Family

ID=49001350

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101147462A TWI534349B (zh) 2012-02-23 2012-12-14 Cryogenic pump, cryogenic pump regeneration method and cryogenic pump control device

Country Status (5)

Country Link
US (1) US9415325B2 (https=)
JP (1) JP5808691B2 (https=)
KR (1) KR101440714B1 (https=)
CN (1) CN103291584B (https=)
TW (1) TWI534349B (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6253464B2 (ja) * 2014-03-18 2017-12-27 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの再生方法
JP6410590B2 (ja) 2014-12-17 2018-10-24 住友重機械工業株式会社 コールドトラップ及びコールドトラップの制御方法
CN104806500A (zh) * 2015-04-23 2015-07-29 安徽万瑞冷电科技有限公司 一种低温泵再生控制器
JP6534358B2 (ja) 2016-03-22 2019-06-26 住友重機械工業株式会社 クライオポンプ、クライオポンプ制御装置及びクライオポンプ制御方法
KR20180061742A (ko) * 2016-11-30 2018-06-08 재단법인 한국섬유기계융합연구원 크라이오 펌프용 극저온 온도 제어 시스템
JP6734817B2 (ja) * 2017-06-23 2020-08-05 住友重機械工業株式会社 クライオポンプ及びクライオポンプ制御方法
JP6929601B2 (ja) * 2018-02-21 2021-09-01 住友重機械工業株式会社 クライオポンプ
TWI796604B (zh) * 2019-10-29 2023-03-21 日商住友重機械工業股份有限公司 低溫泵、低溫泵系統及低溫泵的運轉開始方法
KR102536330B1 (ko) * 2022-09-08 2023-05-26 크라이오에이치앤아이(주) 크라이오 펌프의 재생 방법
KR102554000B1 (ko) * 2022-09-08 2023-07-18 크라이오에이치앤아이(주) 크라이오 펌프 시스템
KR102541712B1 (ko) * 2022-10-17 2023-06-13 크라이오에이치앤아이(주) 크라이오 펌프를 통한 진공 배기 방법
JP2024080450A (ja) * 2022-12-02 2024-06-13 キオクシア株式会社 半導体装置冷却装置
JP2024085232A (ja) * 2022-12-14 2024-06-26 住友重機械工業株式会社 クライオポンプおよびクライオポンプ再生方法
KR102661608B1 (ko) * 2023-09-25 2024-05-02 크라이오에이치앤아이(주) 크라이오 펌프

Family Cites Families (20)

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Publication number Priority date Publication date Assignee Title
US4667477A (en) * 1985-03-28 1987-05-26 Hitachi, Ltd. Cryopump and method of operating same
JPS634380U (https=) 1986-06-27 1988-01-12
US6318093B2 (en) * 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
JPH0295779A (ja) * 1988-09-30 1990-04-06 Aisin Seiki Co Ltd クライオポンプの再生方法
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
JPH08135570A (ja) * 1994-11-11 1996-05-28 Ebara Corp クライオポンプ及びコールドトラップ
JPH0861232A (ja) * 1994-08-24 1996-03-08 Ebara Corp クライオポンプの再生方法及び再生装置
DE69528913T2 (de) * 1994-04-28 2003-09-04 Ebara Corp., Tokio/Tokyo Kryopumpe
JP3022200B2 (ja) 1994-08-30 2000-03-15 三洋電機株式会社 クライオポンプの再生方法
US5687575A (en) * 1996-04-29 1997-11-18 Regents Of The University Of California Miniature thermo-electric cooled cryogenic pump
JPH11141460A (ja) * 1997-11-11 1999-05-25 Daikin Ind Ltd クライオポンプの再生装置およびクライオポンプの再生方法
JP2000018158A (ja) * 1998-06-30 2000-01-18 Daikin Ind Ltd クライオポンプおよびクライオポンプによるキセノンガスの凝縮方法
US6116032A (en) * 1999-01-12 2000-09-12 Applied Materials, Inc. Method for reducing particulate generation from regeneration of cryogenic vacuum pumps
US6257001B1 (en) * 1999-08-24 2001-07-10 Lucent Technologies, Inc. Cryogenic vacuum pump temperature sensor
JP2004027866A (ja) 2002-06-21 2004-01-29 Aisin Seiki Co Ltd クライオポンプ装置及びクライオポンプ装置の運転方法
KR100782913B1 (ko) * 2003-11-28 2007-12-07 스미도모쥬기가이고교 가부시키가이샤 물의 재생방법 및 장치
JP4150745B2 (ja) * 2006-05-02 2008-09-17 住友重機械工業株式会社 クライオポンプ及びその再生方法
JP2008035604A (ja) * 2006-07-27 2008-02-14 Sumitomo Heavy Ind Ltd Ｇｍ冷凍機、パルス管冷凍機、クライオポンプ、ｍｒｉ装置、超電導磁石装置、ｎｍｒ装置および半導体冷却用冷凍機
KR101279184B1 (ko) * 2008-09-30 2013-06-26 캐논 아네르바 가부시키가이샤 진공 배기 시스템, 진공 배기 시스템의 운전 방법, 냉동기, 진공 배기 펌프, 냉동기의 운전 방법, 2단식 냉동기의 운전 제어 방법, 크라이오 펌프의 운전 제어 방법, 2단식 냉동기, 크라이오 펌프, 기판 처리 장치, 전자 디바이스의 제조 방법
JP5084794B2 (ja) 2009-07-22 2012-11-28 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの監視方法

Also Published As

Publication number Publication date
KR20130097094A (ko) 2013-09-02
US9415325B2 (en) 2016-08-16
US20130219924A1 (en) 2013-08-29
TW201335482A (zh) 2013-09-01
CN103291584B (zh) 2016-02-03
CN103291584A (zh) 2013-09-11
KR101440714B1 (ko) 2014-09-17
JP5808691B2 (ja) 2015-11-10
JP2013170568A (ja) 2013-09-02

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