CN103291584B - 低温泵、低温泵的再生方法及低温泵的控制装置 - Google Patents
低温泵、低温泵的再生方法及低温泵的控制装置 Download PDFInfo
- Publication number
- CN103291584B CN103291584B CN201310059563.3A CN201310059563A CN103291584B CN 103291584 B CN103291584 B CN 103291584B CN 201310059563 A CN201310059563 A CN 201310059563A CN 103291584 B CN103291584 B CN 103291584B
- Authority
- CN
- China
- Prior art keywords
- temperature
- cryopump
- plate
- cooling table
- heating process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000011069 regeneration method Methods 0.000 title claims abstract description 42
- 238000001816 cooling Methods 0.000 claims abstract description 145
- 238000010438 heat treatment Methods 0.000 claims abstract description 79
- 230000008929 regeneration Effects 0.000 claims abstract description 32
- 238000012546 transfer Methods 0.000 claims description 14
- 238000005259 measurement Methods 0.000 claims description 6
- 235000019628 coolness Nutrition 0.000 abstract 1
- 238000004904 shortening Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 43
- 238000000034 method Methods 0.000 description 26
- 230000005855 radiation Effects 0.000 description 18
- 230000004888 barrier function Effects 0.000 description 16
- 230000008569 process Effects 0.000 description 13
- 238000010926 purge Methods 0.000 description 13
- 238000013461 design Methods 0.000 description 8
- 238000009833 condensation Methods 0.000 description 5
- 230000005494 condensation Effects 0.000 description 5
- 238000000265 homogenisation Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000010792 warming Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000002309 gasification Methods 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000001172 regenerating effect Effects 0.000 description 2
- 239000002594 sorbent Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000005476 size effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
- A47J37/00—Baking; Roasting; Grilling; Frying
- A47J37/06—Roasters; Grills; Sandwich grills
- A47J37/067—Horizontally disposed broiling griddles
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
- A47J27/00—Cooking-vessels
- A47J27/002—Construction of cooking-vessels; Methods or processes of manufacturing specially adapted for cooking-vessels
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
- A47J37/00—Baking; Roasting; Grilling; Frying
- A47J37/06—Roasters; Grills; Sandwich grills
- A47J37/07—Roasting devices for outdoor use; Barbecues
- A47J37/0786—Accessories
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Food Science & Technology (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012037239A JP5808691B2 (ja) | 2012-02-23 | 2012-02-23 | クライオポンプ、及びクライオポンプの再生方法 |
| JP2012-037239 | 2012-02-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103291584A CN103291584A (zh) | 2013-09-11 |
| CN103291584B true CN103291584B (zh) | 2016-02-03 |
Family
ID=49001350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310059563.3A Active CN103291584B (zh) | 2012-02-23 | 2013-02-25 | 低温泵、低温泵的再生方法及低温泵的控制装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9415325B2 (https=) |
| JP (1) | JP5808691B2 (https=) |
| KR (1) | KR101440714B1 (https=) |
| CN (1) | CN103291584B (https=) |
| TW (1) | TWI534349B (https=) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6253464B2 (ja) * | 2014-03-18 | 2017-12-27 | 住友重機械工業株式会社 | クライオポンプ、及びクライオポンプの再生方法 |
| JP6410590B2 (ja) | 2014-12-17 | 2018-10-24 | 住友重機械工業株式会社 | コールドトラップ及びコールドトラップの制御方法 |
| CN104806500A (zh) * | 2015-04-23 | 2015-07-29 | 安徽万瑞冷电科技有限公司 | 一种低温泵再生控制器 |
| JP6534358B2 (ja) | 2016-03-22 | 2019-06-26 | 住友重機械工業株式会社 | クライオポンプ、クライオポンプ制御装置及びクライオポンプ制御方法 |
| KR20180061742A (ko) * | 2016-11-30 | 2018-06-08 | 재단법인 한국섬유기계융합연구원 | 크라이오 펌프용 극저온 온도 제어 시스템 |
| JP6734817B2 (ja) * | 2017-06-23 | 2020-08-05 | 住友重機械工業株式会社 | クライオポンプ及びクライオポンプ制御方法 |
| JP6929601B2 (ja) * | 2018-02-21 | 2021-09-01 | 住友重機械工業株式会社 | クライオポンプ |
| TWI796604B (zh) * | 2019-10-29 | 2023-03-21 | 日商住友重機械工業股份有限公司 | 低溫泵、低溫泵系統及低溫泵的運轉開始方法 |
| KR102536330B1 (ko) * | 2022-09-08 | 2023-05-26 | 크라이오에이치앤아이(주) | 크라이오 펌프의 재생 방법 |
| KR102554000B1 (ko) * | 2022-09-08 | 2023-07-18 | 크라이오에이치앤아이(주) | 크라이오 펌프 시스템 |
| KR102541712B1 (ko) * | 2022-10-17 | 2023-06-13 | 크라이오에이치앤아이(주) | 크라이오 펌프를 통한 진공 배기 방법 |
| JP2024080450A (ja) * | 2022-12-02 | 2024-06-13 | キオクシア株式会社 | 半導体装置冷却装置 |
| JP2024085232A (ja) * | 2022-12-14 | 2024-06-26 | 住友重機械工業株式会社 | クライオポンプおよびクライオポンプ再生方法 |
| KR102661608B1 (ko) * | 2023-09-25 | 2024-05-02 | 크라이오에이치앤아이(주) | 크라이오 펌프 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4667477A (en) * | 1985-03-28 | 1987-05-26 | Hitachi, Ltd. | Cryopump and method of operating same |
| JPS634380U (https=) | 1986-06-27 | 1988-01-12 | ||
| US6318093B2 (en) * | 1988-09-13 | 2001-11-20 | Helix Technology Corporation | Electronically controlled cryopump |
| JPH0295779A (ja) * | 1988-09-30 | 1990-04-06 | Aisin Seiki Co Ltd | クライオポンプの再生方法 |
| US5211022A (en) * | 1991-05-17 | 1993-05-18 | Helix Technology Corporation | Cryopump with differential pumping capability |
| JPH08135570A (ja) * | 1994-11-11 | 1996-05-28 | Ebara Corp | クライオポンプ及びコールドトラップ |
| JPH0861232A (ja) * | 1994-08-24 | 1996-03-08 | Ebara Corp | クライオポンプの再生方法及び再生装置 |
| DE69528913T2 (de) * | 1994-04-28 | 2003-09-04 | Ebara Corp., Tokio/Tokyo | Kryopumpe |
| JP3022200B2 (ja) | 1994-08-30 | 2000-03-15 | 三洋電機株式会社 | クライオポンプの再生方法 |
| US5687575A (en) * | 1996-04-29 | 1997-11-18 | Regents Of The University Of California | Miniature thermo-electric cooled cryogenic pump |
| JPH11141460A (ja) * | 1997-11-11 | 1999-05-25 | Daikin Ind Ltd | クライオポンプの再生装置およびクライオポンプの再生方法 |
| JP2000018158A (ja) * | 1998-06-30 | 2000-01-18 | Daikin Ind Ltd | クライオポンプおよびクライオポンプによるキセノンガスの凝縮方法 |
| US6116032A (en) * | 1999-01-12 | 2000-09-12 | Applied Materials, Inc. | Method for reducing particulate generation from regeneration of cryogenic vacuum pumps |
| US6257001B1 (en) * | 1999-08-24 | 2001-07-10 | Lucent Technologies, Inc. | Cryogenic vacuum pump temperature sensor |
| JP2004027866A (ja) | 2002-06-21 | 2004-01-29 | Aisin Seiki Co Ltd | クライオポンプ装置及びクライオポンプ装置の運転方法 |
| KR100782913B1 (ko) * | 2003-11-28 | 2007-12-07 | 스미도모쥬기가이고교 가부시키가이샤 | 물의 재생방법 및 장치 |
| JP4150745B2 (ja) * | 2006-05-02 | 2008-09-17 | 住友重機械工業株式会社 | クライオポンプ及びその再生方法 |
| JP2008035604A (ja) * | 2006-07-27 | 2008-02-14 | Sumitomo Heavy Ind Ltd | Ｇｍ冷凍機、パルス管冷凍機、クライオポンプ、ｍｒｉ装置、超電導磁石装置、ｎｍｒ装置および半導体冷却用冷凍機 |
| KR101279184B1 (ko) * | 2008-09-30 | 2013-06-26 | 캐논 아네르바 가부시키가이샤 | 진공 배기 시스템, 진공 배기 시스템의 운전 방법, 냉동기, 진공 배기 펌프, 냉동기의 운전 방법, 2단식 냉동기의 운전 제어 방법, 크라이오 펌프의 운전 제어 방법, 2단식 냉동기, 크라이오 펌프, 기판 처리 장치, 전자 디바이스의 제조 방법 |
| JP5084794B2 (ja) | 2009-07-22 | 2012-11-28 | 住友重機械工業株式会社 | クライオポンプ、及びクライオポンプの監視方法 |
-
2012
- 2012-02-23 JP JP2012037239A patent/JP5808691B2/ja active Active
- 2012-12-14 TW TW101147462A patent/TWI534349B/zh active
-
2013
- 2013-01-04 KR KR1020130000885A patent/KR101440714B1/ko active Active
- 2013-02-20 US US13/771,858 patent/US9415325B2/en active Active
- 2013-02-25 CN CN201310059563.3A patent/CN103291584B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130097094A (ko) | 2013-09-02 |
| US9415325B2 (en) | 2016-08-16 |
| US20130219924A1 (en) | 2013-08-29 |
| TW201335482A (zh) | 2013-09-01 |
| CN103291584A (zh) | 2013-09-11 |
| KR101440714B1 (ko) | 2014-09-17 |
| JP5808691B2 (ja) | 2015-11-10 |
| TWI534349B (zh) | 2016-05-21 |
| JP2013170568A (ja) | 2013-09-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |