KR101440714B1 - 크라이오펌프, 크라이오펌프의 재생방법, 크라이오펌프의 제어장치 - Google Patents

크라이오펌프, 크라이오펌프의 재생방법, 크라이오펌프의 제어장치 Download PDF

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KR101440714B1
KR101440714B1 KR1020130000885A KR20130000885A KR101440714B1 KR 101440714 B1 KR101440714 B1 KR 101440714B1 KR 1020130000885 A KR1020130000885 A KR 1020130000885A KR 20130000885 A KR20130000885 A KR 20130000885A KR 101440714 B1 KR101440714 B1 KR 101440714B1
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temperature
panel
stage
temperature sensor
cryo
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Korean (ko)
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KR20130097094A (ko
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츠토무 후쿠다
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스미도모쥬기가이고교 가부시키가이샤
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J37/00—Baking; Roasting; Grilling; Frying
    • A47J37/06—Roasters; Grills; Sandwich grills
    • A47J37/067—Horizontally disposed broiling griddles
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J27/00—Cooking-vessels
    • A47J27/002—Construction of cooking-vessels; Methods or processes of manufacturing specially adapted for cooking-vessels
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J37/00—Baking; Roasting; Grilling; Frying
    • A47J37/06—Roasters; Grills; Sandwich grills
    • A47J37/07—Roasting devices for outdoor use; Barbecues
    • A47J37/0786—Accessories
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

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  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR1020130000885A 2012-02-23 2013-01-04 크라이오펌프, 크라이오펌프의 재생방법, 크라이오펌프의 제어장치 Active KR101440714B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012037239A JP5808691B2 (ja) 2012-02-23 2012-02-23 クライオポンプ、及びクライオポンプの再生方法
JPJP-P-2012-037239 2012-02-23

Publications (2)

Publication Number Publication Date
KR20130097094A KR20130097094A (ko) 2013-09-02
KR101440714B1 true KR101440714B1 (ko) 2014-09-17

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Application Number Title Priority Date Filing Date
KR1020130000885A Active KR101440714B1 (ko) 2012-02-23 2013-01-04 크라이오펌프, 크라이오펌프의 재생방법, 크라이오펌프의 제어장치

Country Status (5)

Country Link
US (1) US9415325B2 (https=)
JP (1) JP5808691B2 (https=)
KR (1) KR101440714B1 (https=)
CN (1) CN103291584B (https=)
TW (1) TWI534349B (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180061742A (ko) * 2016-11-30 2018-06-08 재단법인 한국섬유기계융합연구원 크라이오 펌프용 극저온 온도 제어 시스템
KR102541712B1 (ko) * 2022-10-17 2023-06-13 크라이오에이치앤아이(주) 크라이오 펌프를 통한 진공 배기 방법
KR102661608B1 (ko) * 2023-09-25 2024-05-02 크라이오에이치앤아이(주) 크라이오 펌프

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* Cited by examiner, † Cited by third party
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JP6253464B2 (ja) * 2014-03-18 2017-12-27 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの再生方法
JP6410590B2 (ja) 2014-12-17 2018-10-24 住友重機械工業株式会社 コールドトラップ及びコールドトラップの制御方法
CN104806500A (zh) * 2015-04-23 2015-07-29 安徽万瑞冷电科技有限公司 一种低温泵再生控制器
JP6534358B2 (ja) 2016-03-22 2019-06-26 住友重機械工業株式会社 クライオポンプ、クライオポンプ制御装置及びクライオポンプ制御方法
JP6734817B2 (ja) * 2017-06-23 2020-08-05 住友重機械工業株式会社 クライオポンプ及びクライオポンプ制御方法
JP6929601B2 (ja) * 2018-02-21 2021-09-01 住友重機械工業株式会社 クライオポンプ
TWI796604B (zh) * 2019-10-29 2023-03-21 日商住友重機械工業股份有限公司 低溫泵、低溫泵系統及低溫泵的運轉開始方法
KR102536330B1 (ko) * 2022-09-08 2023-05-26 크라이오에이치앤아이(주) 크라이오 펌프의 재생 방법
KR102554000B1 (ko) * 2022-09-08 2023-07-18 크라이오에이치앤아이(주) 크라이오 펌프 시스템
JP2024080450A (ja) * 2022-12-02 2024-06-13 キオクシア株式会社 半導体装置冷却装置
JP2024085232A (ja) * 2022-12-14 2024-06-26 住友重機械工業株式会社 クライオポンプおよびクライオポンプ再生方法

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KR20060113716A (ko) * 2003-11-28 2006-11-02 스미도모쥬기가이고교 가부시키가이샤 물의 재생방법 및 장치
US20110016890A1 (en) 2009-07-22 2011-01-27 Sumitomo Heavy Industries, Ltd. Cryopump and method of monitoring cryopump

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US4667477A (en) * 1985-03-28 1987-05-26 Hitachi, Ltd. Cryopump and method of operating same
JPS634380U (https=) 1986-06-27 1988-01-12
US6318093B2 (en) * 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
JPH0295779A (ja) * 1988-09-30 1990-04-06 Aisin Seiki Co Ltd クライオポンプの再生方法
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
JPH08135570A (ja) * 1994-11-11 1996-05-28 Ebara Corp クライオポンプ及びコールドトラップ
JPH0861232A (ja) * 1994-08-24 1996-03-08 Ebara Corp クライオポンプの再生方法及び再生装置
DE69528913T2 (de) * 1994-04-28 2003-09-04 Ebara Corp., Tokio/Tokyo Kryopumpe
JP3022200B2 (ja) 1994-08-30 2000-03-15 三洋電機株式会社 クライオポンプの再生方法
US5687575A (en) * 1996-04-29 1997-11-18 Regents Of The University Of California Miniature thermo-electric cooled cryogenic pump
JPH11141460A (ja) * 1997-11-11 1999-05-25 Daikin Ind Ltd クライオポンプの再生装置およびクライオポンプの再生方法
JP2000018158A (ja) * 1998-06-30 2000-01-18 Daikin Ind Ltd クライオポンプおよびクライオポンプによるキセノンガスの凝縮方法
US6116032A (en) * 1999-01-12 2000-09-12 Applied Materials, Inc. Method for reducing particulate generation from regeneration of cryogenic vacuum pumps
US6257001B1 (en) * 1999-08-24 2001-07-10 Lucent Technologies, Inc. Cryogenic vacuum pump temperature sensor
JP2004027866A (ja) 2002-06-21 2004-01-29 Aisin Seiki Co Ltd クライオポンプ装置及びクライオポンプ装置の運転方法
JP4150745B2 (ja) * 2006-05-02 2008-09-17 住友重機械工業株式会社 クライオポンプ及びその再生方法
JP2008035604A (ja) * 2006-07-27 2008-02-14 Sumitomo Heavy Ind Ltd Ｇｍ冷凍機、パルス管冷凍機、クライオポンプ、ｍｒｉ装置、超電導磁石装置、ｎｍｒ装置および半導体冷却用冷凍機
KR101279184B1 (ko) * 2008-09-30 2013-06-26 캐논 아네르바 가부시키가이샤 진공 배기 시스템, 진공 배기 시스템의 운전 방법, 냉동기, 진공 배기 펌프, 냉동기의 운전 방법, 2단식 냉동기의 운전 제어 방법, 크라이오 펌프의 운전 제어 방법, 2단식 냉동기, 크라이오 펌프, 기판 처리 장치, 전자 디바이스의 제조 방법

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060113716A (ko) * 2003-11-28 2006-11-02 스미도모쥬기가이고교 가부시키가이샤 물의 재생방법 및 장치
US20110016890A1 (en) 2009-07-22 2011-01-27 Sumitomo Heavy Industries, Ltd. Cryopump and method of monitoring cryopump

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180061742A (ko) * 2016-11-30 2018-06-08 재단법인 한국섬유기계융합연구원 크라이오 펌프용 극저온 온도 제어 시스템
KR102541712B1 (ko) * 2022-10-17 2023-06-13 크라이오에이치앤아이(주) 크라이오 펌프를 통한 진공 배기 방법
WO2024085434A1 (ko) * 2022-10-17 2024-04-25 크라이오에이치앤아이(주) 크라이오 펌프를 통한 진공 배기 방법
KR102661608B1 (ko) * 2023-09-25 2024-05-02 크라이오에이치앤아이(주) 크라이오 펌프

Also Published As

Publication number Publication date
KR20130097094A (ko) 2013-09-02
US9415325B2 (en) 2016-08-16
US20130219924A1 (en) 2013-08-29
TW201335482A (zh) 2013-09-01
CN103291584B (zh) 2016-02-03
CN103291584A (zh) 2013-09-11
JP5808691B2 (ja) 2015-11-10
TWI534349B (zh) 2016-05-21
JP2013170568A (ja) 2013-09-02

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