JP5808691B2 - クライオポンプ、及びクライオポンプの再生方法 - Google Patents

クライオポンプ、及びクライオポンプの再生方法 Download PDF

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Publication number
JP5808691B2
JP5808691B2 JP2012037239A JP2012037239A JP5808691B2 JP 5808691 B2 JP5808691 B2 JP 5808691B2 JP 2012037239 A JP2012037239 A JP 2012037239A JP 2012037239 A JP2012037239 A JP 2012037239A JP 5808691 B2 JP5808691 B2 JP 5808691B2
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Japan
Prior art keywords
temperature
stage
panel
temperature sensor
cryopump
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JP2012037239A
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English (en)
Japanese (ja)
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JP2013170568A5 (https=
JP2013170568A (ja
Inventor
福田　奨
奨 福田
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Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
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Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2012037239A priority Critical patent/JP5808691B2/ja
Priority to TW101147462A priority patent/TWI534349B/zh
Priority to KR1020130000885A priority patent/KR101440714B1/ko
Priority to US13/771,858 priority patent/US9415325B2/en
Priority to CN201310059563.3A priority patent/CN103291584B/zh
Publication of JP2013170568A publication Critical patent/JP2013170568A/ja
Publication of JP2013170568A5 publication Critical patent/JP2013170568A5/ja
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    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J37/00—Baking; Roasting; Grilling; Frying
    • A47J37/06—Roasters; Grills; Sandwich grills
    • A47J37/067—Horizontally disposed broiling griddles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J27/00—Cooking-vessels
    • A47J27/002—Construction of cooking-vessels; Methods or processes of manufacturing specially adapted for cooking-vessels
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J37/00—Baking; Roasting; Grilling; Frying
    • A47J37/06—Roasters; Grills; Sandwich grills
    • A47J37/07—Roasting devices for outdoor use; Barbecues
    • A47J37/0786—Accessories
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

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  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2012037239A 2012-02-23 2012-02-23 クライオポンプ、及びクライオポンプの再生方法 Active JP5808691B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012037239A JP5808691B2 (ja) 2012-02-23 2012-02-23 クライオポンプ、及びクライオポンプの再生方法
TW101147462A TWI534349B (zh) 2012-02-23 2012-12-14 Cryogenic pump, cryogenic pump regeneration method and cryogenic pump control device
KR1020130000885A KR101440714B1 (ko) 2012-02-23 2013-01-04 크라이오펌프, 크라이오펌프의 재생방법, 크라이오펌프의 제어장치
US13/771,858 US9415325B2 (en) 2012-02-23 2013-02-20 Cryopump, method of regenerating cryopump, and control device for cryopump
CN201310059563.3A CN103291584B (zh) 2012-02-23 2013-02-25 低温泵、低温泵的再生方法及低温泵的控制装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012037239A JP5808691B2 (ja) 2012-02-23 2012-02-23 クライオポンプ、及びクライオポンプの再生方法

Publications (3)

Publication Number Publication Date
JP2013170568A JP2013170568A (ja) 2013-09-02
JP2013170568A5 JP2013170568A5 (https=) 2013-11-28
JP5808691B2 true JP5808691B2 (ja) 2015-11-10

Family

ID=49001350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012037239A Active JP5808691B2 (ja) 2012-02-23 2012-02-23 クライオポンプ、及びクライオポンプの再生方法

Country Status (5)

Country Link
US (1) US9415325B2 (https=)
JP (1) JP5808691B2 (https=)
KR (1) KR101440714B1 (https=)
CN (1) CN103291584B (https=)
TW (1) TWI534349B (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6253464B2 (ja) * 2014-03-18 2017-12-27 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの再生方法
JP6410590B2 (ja) 2014-12-17 2018-10-24 住友重機械工業株式会社 コールドトラップ及びコールドトラップの制御方法
CN104806500A (zh) * 2015-04-23 2015-07-29 安徽万瑞冷电科技有限公司 一种低温泵再生控制器
JP6534358B2 (ja) 2016-03-22 2019-06-26 住友重機械工業株式会社 クライオポンプ、クライオポンプ制御装置及びクライオポンプ制御方法
KR20180061742A (ko) * 2016-11-30 2018-06-08 재단법인 한국섬유기계융합연구원 크라이오 펌프용 극저온 온도 제어 시스템
JP6734817B2 (ja) * 2017-06-23 2020-08-05 住友重機械工業株式会社 クライオポンプ及びクライオポンプ制御方法
JP6929601B2 (ja) * 2018-02-21 2021-09-01 住友重機械工業株式会社 クライオポンプ
TWI796604B (zh) * 2019-10-29 2023-03-21 日商住友重機械工業股份有限公司 低溫泵、低溫泵系統及低溫泵的運轉開始方法
KR102536330B1 (ko) * 2022-09-08 2023-05-26 크라이오에이치앤아이(주) 크라이오 펌프의 재생 방법
KR102554000B1 (ko) * 2022-09-08 2023-07-18 크라이오에이치앤아이(주) 크라이오 펌프 시스템
KR102541712B1 (ko) * 2022-10-17 2023-06-13 크라이오에이치앤아이(주) 크라이오 펌프를 통한 진공 배기 방법
JP2024080450A (ja) * 2022-12-02 2024-06-13 キオクシア株式会社 半導体装置冷却装置
JP2024085232A (ja) * 2022-12-14 2024-06-26 住友重機械工業株式会社 クライオポンプおよびクライオポンプ再生方法
KR102661608B1 (ko) * 2023-09-25 2024-05-02 크라이오에이치앤아이(주) 크라이오 펌프

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US4667477A (en) * 1985-03-28 1987-05-26 Hitachi, Ltd. Cryopump and method of operating same
JPS634380U (https=) 1986-06-27 1988-01-12
US6318093B2 (en) * 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
JPH0295779A (ja) * 1988-09-30 1990-04-06 Aisin Seiki Co Ltd クライオポンプの再生方法
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
JPH08135570A (ja) * 1994-11-11 1996-05-28 Ebara Corp クライオポンプ及びコールドトラップ
JPH0861232A (ja) * 1994-08-24 1996-03-08 Ebara Corp クライオポンプの再生方法及び再生装置
DE69528913T2 (de) * 1994-04-28 2003-09-04 Ebara Corp., Tokio/Tokyo Kryopumpe
JP3022200B2 (ja) 1994-08-30 2000-03-15 三洋電機株式会社 クライオポンプの再生方法
US5687575A (en) * 1996-04-29 1997-11-18 Regents Of The University Of California Miniature thermo-electric cooled cryogenic pump
JPH11141460A (ja) * 1997-11-11 1999-05-25 Daikin Ind Ltd クライオポンプの再生装置およびクライオポンプの再生方法
JP2000018158A (ja) * 1998-06-30 2000-01-18 Daikin Ind Ltd クライオポンプおよびクライオポンプによるキセノンガスの凝縮方法
US6116032A (en) * 1999-01-12 2000-09-12 Applied Materials, Inc. Method for reducing particulate generation from regeneration of cryogenic vacuum pumps
US6257001B1 (en) * 1999-08-24 2001-07-10 Lucent Technologies, Inc. Cryogenic vacuum pump temperature sensor
JP2004027866A (ja) 2002-06-21 2004-01-29 Aisin Seiki Co Ltd クライオポンプ装置及びクライオポンプ装置の運転方法
KR100782913B1 (ko) * 2003-11-28 2007-12-07 스미도모쥬기가이고교 가부시키가이샤 물의 재생방법 및 장치
JP4150745B2 (ja) * 2006-05-02 2008-09-17 住友重機械工業株式会社 クライオポンプ及びその再生方法
JP2008035604A (ja) * 2006-07-27 2008-02-14 Sumitomo Heavy Ind Ltd Ｇｍ冷凍機、パルス管冷凍機、クライオポンプ、ｍｒｉ装置、超電導磁石装置、ｎｍｒ装置および半導体冷却用冷凍機
KR101279184B1 (ko) * 2008-09-30 2013-06-26 캐논 아네르바 가부시키가이샤 진공 배기 시스템, 진공 배기 시스템의 운전 방법, 냉동기, 진공 배기 펌프, 냉동기의 운전 방법, 2단식 냉동기의 운전 제어 방법, 크라이오 펌프의 운전 제어 방법, 2단식 냉동기, 크라이오 펌프, 기판 처리 장치, 전자 디바이스의 제조 방법
JP5084794B2 (ja) 2009-07-22 2012-11-28 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの監視方法

Also Published As

Publication number Publication date
KR20130097094A (ko) 2013-09-02
US9415325B2 (en) 2016-08-16
US20130219924A1 (en) 2013-08-29
TW201335482A (zh) 2013-09-01
CN103291584B (zh) 2016-02-03
CN103291584A (zh) 2013-09-11
KR101440714B1 (ko) 2014-09-17
TWI534349B (zh) 2016-05-21
JP2013170568A (ja) 2013-09-02

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