TWI504885B - 圖案檢查裝置及圖案檢查方法 - Google Patents

圖案檢查裝置及圖案檢查方法 Download PDF

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Publication number
TWI504885B
TWI504885B TW102148142A TW102148142A TWI504885B TW I504885 B TWI504885 B TW I504885B TW 102148142 A TW102148142 A TW 102148142A TW 102148142 A TW102148142 A TW 102148142A TW I504885 B TWI504885 B TW I504885B
Authority
TW
Taiwan
Prior art keywords
light
pattern
image
light source
transparent substrate
Prior art date
Application number
TW102148142A
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English (en)
Chinese (zh)
Other versions
TW201439523A (zh
Inventor
Nariaki Fujiwara
Original Assignee
Screen Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd filed Critical Screen Holdings Co Ltd
Publication of TW201439523A publication Critical patent/TW201439523A/zh
Application granted granted Critical
Publication of TWI504885B publication Critical patent/TWI504885B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW102148142A 2013-02-15 2013-12-25 圖案檢查裝置及圖案檢查方法 TWI504885B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013028217A JP2014157086A (ja) 2013-02-15 2013-02-15 パターン検査装置

Publications (2)

Publication Number Publication Date
TW201439523A TW201439523A (zh) 2014-10-16
TWI504885B true TWI504885B (zh) 2015-10-21

Family

ID=51309226

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102148142A TWI504885B (zh) 2013-02-15 2013-12-25 圖案檢查裝置及圖案檢查方法

Country Status (4)

Country Link
JP (1) JP2014157086A (ko)
KR (1) KR101588937B1 (ko)
CN (1) CN103995003B (ko)
TW (1) TWI504885B (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016070730A (ja) * 2014-09-29 2016-05-09 株式会社Ｓｃｒｅｅｎホールディングス 画像取得装置および画像取得方法
CN107250774B (zh) 2014-12-19 2020-07-31 株式会社佐竹 谷粒品级判别装置
JP6435847B2 (ja) * 2014-12-19 2018-12-12 株式会社サタケ 穀粒品位判別装置
JP6435856B2 (ja) * 2014-12-26 2018-12-12 株式会社サタケ 穀粒品位判別装置
JP6435858B2 (ja) * 2014-12-26 2018-12-12 株式会社サタケ 穀粒品位判別装置
JP6496159B2 (ja) * 2015-02-23 2019-04-03 株式会社Ｓｃｒｅｅｎホールディングス パターン検査装置およびパターン検査方法
EP3761772A4 (en) * 2018-02-26 2021-04-28 Koh Young Technology Inc COMPONENT MOUNT STATUS INSPECTION PROCESS, PRINTED CIRCUIT BOARD INSPECTION APPARATUS AND COMPUTER READABLE RECORDING MEDIA
CN108267461A (zh) * 2018-03-05 2018-07-10 福建省福联集成电路有限公司 一种可变光路的光学显微镜检测设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW402686B (en) * 1998-01-22 2000-08-21 Applied Materials Inc Optical inspection method and apparatus
CN101887030A (zh) * 2009-05-15 2010-11-17 圣戈本玻璃法国公司 用于检测透明基板表面和/或其内部的缺陷的方法及系统
TWI349772B (en) * 2007-11-08 2011-10-01 Chunghwa Picture Tubes Ltd Testing method

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0843047A (ja) * 1994-08-02 1996-02-16 Toshiba Fa Syst Eng Kk 光学検査装置
JP3418054B2 (ja) * 1996-02-16 2003-06-16 三井金属鉱業株式会社 配線パターン線幅測定装置
IL118872A (en) * 1996-07-16 2000-06-01 Orbot Instr Ltd Optical inspection method and apparatus
JP3378795B2 (ja) * 1998-03-27 2003-02-17 シャープ株式会社 表示装置の検査装置および検査方法
JP2001305074A (ja) * 2000-04-19 2001-10-31 Dainippon Printing Co Ltd 板状ワークの検査方法及び装置
JP4304690B2 (ja) * 2002-12-27 2009-07-29 国際技術開発株式会社 テープ部材の検査装置
JP2005024386A (ja) * 2003-07-02 2005-01-27 Ushio Inc 配線パターン検査装置
JP4403777B2 (ja) * 2003-11-07 2010-01-27 ウシオ電機株式会社 配線パターン検査装置及び方法
KR20070048034A (ko) * 2005-11-03 2007-05-08 엘지전자 주식회사 테이프 제품의 검사장치
JP2008267851A (ja) * 2007-04-17 2008-11-06 Ushio Inc パターン検査装置およびパターン検査方法
JP2010048745A (ja) * 2008-08-25 2010-03-04 Asahi Glass Co Ltd 欠陥検査システムおよび欠陥検査方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW402686B (en) * 1998-01-22 2000-08-21 Applied Materials Inc Optical inspection method and apparatus
TWI349772B (en) * 2007-11-08 2011-10-01 Chunghwa Picture Tubes Ltd Testing method
CN101887030A (zh) * 2009-05-15 2010-11-17 圣戈本玻璃法国公司 用于检测透明基板表面和/或其内部的缺陷的方法及系统

Also Published As

Publication number Publication date
KR20140103027A (ko) 2014-08-25
CN103995003A (zh) 2014-08-20
TW201439523A (zh) 2014-10-16
CN103995003B (zh) 2017-04-19
KR101588937B1 (ko) 2016-01-26
JP2014157086A (ja) 2014-08-28

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