TWI498454B - 鍍覆觸媒及方法 - Google Patents
鍍覆觸媒及方法 Download PDFInfo
- Publication number
- TWI498454B TWI498454B TW102100011A TW102100011A TWI498454B TW I498454 B TWI498454 B TW I498454B TW 102100011 A TW102100011 A TW 102100011A TW 102100011 A TW102100011 A TW 102100011A TW I498454 B TWI498454 B TW I498454B
- Authority
- TW
- Taiwan
- Prior art keywords
- solution
- acid
- polymer
- monomer
- noble metal
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J31/00—Catalysts comprising hydrides, coordination complexes or organic compounds
- B01J31/02—Catalysts comprising hydrides, coordination complexes or organic compounds containing organic compounds or metal hydrides
- B01J31/06—Catalysts comprising hydrides, coordination complexes or organic compounds containing organic compounds or metal hydrides containing polymers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/1803—Pretreatment of the material to be coated of metallic material surfaces or of a non-specific material surfaces
- C23C18/1824—Pretreatment of the material to be coated of metallic material surfaces or of a non-specific material surfaces by chemical pretreatment
- C23C18/1837—Multistep pretreatment
- C23C18/1841—Multistep pretreatment with use of metal first
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/1803—Pretreatment of the material to be coated of metallic material surfaces or of a non-specific material surfaces
- C23C18/1824—Pretreatment of the material to be coated of metallic material surfaces or of a non-specific material surfaces by chemical pretreatment
- C23C18/1837—Multistep pretreatment
- C23C18/1844—Multistep pretreatment with use of organic or inorganic compounds other than metals, first
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/1851—Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material
- C23C18/1872—Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material by chemical pretreatment
- C23C18/1886—Multistep pretreatment
- C23C18/1889—Multistep pretreatment with use of metal first
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/1851—Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material
- C23C18/1872—Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material by chemical pretreatment
- C23C18/1886—Multistep pretreatment
- C23C18/1893—Multistep pretreatment with use of organic or inorganic compounds other than metals, first
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
- C23C18/2046—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
- C23C18/2073—Multistep pretreatment
- C23C18/208—Multistep pretreatment with use of metal first
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
- C23C18/2046—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
- C23C18/2073—Multistep pretreatment
- C23C18/2086—Multistep pretreatment with use of organic or inorganic compounds other than metals, first
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/28—Sensitising or activating
- C23C18/30—Activating or accelerating or sensitising with palladium or other noble metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/70—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using melts
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/422—Plated through-holes or plated via connections characterised by electroless plating method; pretreatment therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0307—Providing micro- or nanometer scale roughness on a metal surface, e.g. by plating of nodules or dendrites
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0703—Plating
- H05K2203/072—Electroless plating, e.g. finish plating or initial plating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemically Coating (AREA)
- Catalysts (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Description
本發明係關於一種包括貴金屬奈米粒子之觸媒溶液。更詳而言之,本發明係關於一種包括藉由特定化合物安定化之貴金屬奈米粒子的觸媒溶液,其係有用於對在電子裝置之製造中使用的非導電基板進行無電金屬鍍覆以及裝飾性塗覆。
無電金屬沉積或鍍覆係有用於在無電源之存在下,將金屬或金屬混合物沉積於非導電表面或介電表面上。於非導電基板或介電基板上鍍覆可用於寬範圍之應用,包括裝飾性鍍覆及電子裝置製造。一種主要應用係印刷電路板之製造。將金屬無電沉積於基板上往往需要對該基板表面預處理或敏化,以使該表面對該沉積製程具有催化性。業經發展多種方法以催化該基板。
US 3,011,920揭露用以藉由將基板浸潤於膠體觸媒溶液中而催化該基板的方法,該觸媒溶液係藉由鈀離子與亞錫離子形成鈀-錫膠體而製備。該方法需要在催化該基板表面之後進行加速步驟,從而曝露該觸媒核心。US 3,904,792揭露了改良膠體鈀-錫觸媒,其係提供於較不酸
性之環境的觸媒。部份鹽酸以該酸之另一可溶性鹽替換。此等鈀-錫觸媒系統係存在大量局限性。該觸媒膠體之外殼(SnCl4
)2-
很容易被氧化,因此,該等觸媒粒子成長為大尺寸並急劇地失去其催化性表面積。
US 4,725,314揭露於水溶液中製備催化性吸附質的製程,其係使用有機懸浮劑以保護該膠體之最大維度不超過500埃。聚乙烯基吡咯烷酮可用作有機懸浮劑。
因為鈀之高成本,頗為可觀之嘗試業經聚焦於發展非貴重金屬觸媒系統之上。US 3,993,799揭露了使用非貴重金屬水合氧化物膠體來處理非導電基板,之後還原塗覆於該基板上之該水合氧化物,以達成對於後續之無電鍍覆的至少某種程度的活化。US 6,645,557揭露了一種形成導電金屬層的方法,其係藉由將非導電表面與含有亞錫鹽之水溶液接觸以形成敏化表面,之後將該敏化表面與含有銀鹽且具有自約5至約10之範圍內之pH的水溶液接觸以形成經催化之表面。JP 10229280A揭露了一種觸媒溶液,其係由硝酸銀或硫酸銅,以及陰離子界面活性劑如聚氧乙烯十二烷基醚硫酸鈉及還原劑如硼氫化鈉構成。JP 11241170A揭露了一種非鈀觸媒,其係包括鐵鹽、鎳鹽、鈷鹽及銀鹽之至少一者,與陰離子界面活性劑與還原劑協同使用。JP 200144242A揭露了一種用於製備具有高導電性之高分散膠體金屬溶液的製造方法,其係含有至少一個胺基及一個羧基。US 7,166,152揭露了一種銀膠體系預處理溶液,其係包含三種成份:(i)銀膠體粒子;(ii)選自具有
可於該溶液中將銀離子還原為銀金屬之電勢之金屬離子的一種或多種離子;以及,(iii)選自羥基羧酸根離子、縮合磷酸根離子及胺羧酸根離子之一種或多種離子。
通常,膠體銀奈米粒子之水溶液係不含錫的觸媒。他們比彼等包括亞錫離子之系統安定得多,亞錫離子於空氣攪動下容易氧化為錫(IV)。與鈀系統相比,此等膠體銀觸媒系統將降低成本且受不安定之貴金屬的影響較低。此等膠體銀觸媒系統亦於無電鍍覆製程中顯示有發展前途之催化特性而不必犧牲互連可靠性。
因此,所欲者係同時具有浴安定性、吸附能力及催化活性的膠體觸媒系統。
一種溶液,係包括貴金屬奈米粒子及聚合物,該聚合物係自單體聚合而得,該單體包含至少一種具有兩個或更多個羧基或羧酸鹽基之單體。
一種用於將金屬無電鍍覆於非導電表面之製程,該製程係包括下述步驟:經待鍍覆之基板浸漬於包括貴金屬奈米粒子及聚合物的溶液中,該聚合物係自單體聚合而得,該單體包含至少一種具有兩個或更多個羧基或羧酸鹽基之單體;以及在不使用加速步驟下,施行該基板之無電鍍覆。
本發明之發明人現已發現,包括藉由特定類型之聚合物安定化之貴金屬奈米粒子且不含錫的貴金屬膠體觸媒系統,於無電鍍覆中,係顯示良好之安定性及有
發展前途之催化活性,該聚合物係自單體聚合而得,該單體包含至少一種具有兩個或更多個羧基或羧酸鹽基之單體。此外,此等膠體系統係具有寬操作窗口,亦即,透過寬pH範圍有效工作,因此,其有用於工業操作中。
如本說明書通篇所使用者,除非其內容係明確另行指出者,下列縮寫係具有下述意義:g=公克;mg=毫克;ml=毫升;L=公升;m=公尺;min.=分鐘;s=秒;h=小時;ppm=每百萬份之份數;M=莫耳濃度;g/L=公克/公升;cm=公分;mmol=毫莫耳;rpm=每分鐘轉數;Ag=銀;Cu=銅;PAA=聚丙烯酸;以及,PESA=聚環氧琥珀酸。
如本說明書通篇所使用者,詞語「沉積」與「鍍覆」可互換地使用。本說明書通篇中,詞語「催化」與「活化」可互換地使用。本說明書通篇中,詞語「包含貴金屬奈米粒子之溶液」與「觸媒溶液」可互換地使用。
本發明係提供用於無電鍍覆之溶液,其係包含貴金屬奈米粒子以及自單體聚合的聚合物,該單體包括至少一種具有兩個或多個羧基或羧酸鹽基之單體。於本發明中使用之聚合物係自單體聚合而得,該單體包括至少一種具有兩個或多個羧基或羧酸鹽基之單體。換言之,該聚合物係至少自不飽和聚羧酸或其鹽聚合而得,且該聚合
物係於該聚合物之重複單元內具有至少兩個羧基或羧酸鹽基。該聚合物可係不飽和聚羧酸或其鹽與另一可聚合單體的共聚物。聚羧酸或其鹽的實例係包括馬來酸、富馬酸及伊康酸及其鹽。較佳係使用馬來酸。如後文所示,與含有自具有一個羧基之單體(如聚丙烯酸)聚合之聚合物的溶液相比,於本發明中使用之聚合物係獲得安定觸媒溶液以及寬範圍之pH的良好結果。於本發明中使用之聚合物與自具有一個羧基之單體聚合的聚合物之間的差異為,含有彼等聚合物之溶液的pKa。與具有一個pKa(pKa=~4.58)之包含聚丙烯酸的溶液相比,含有用於本發明之聚合物的溶液係具有至少兩個pKa值。
儘管不欲受縛於理論,咸信,本發明之聚合物係用作緩衝劑以及貴金屬奈米粒子之安定劑,故包含於本發明中使用之聚合物的溶液係於寬pH範圍具有更佳之膠體觸媒之反應性與安定性的平衡,且本發明之聚合物之獨特的含氧骨架可能亦對於寬pH範圍中奈米吸附有貢獻。
較佳地,於本發明中使用之聚合物係於主鏈或聚合物骨架中具有氧原子作為醚鍵。包含此等聚合物之溶液係於寬pH範圍內具有特別高催化活性并維持其安定性。
該聚合物之分子量(Mw)係400至1,000,000,更佳係800至10,000。Mw越高,則該膠體之安定性越佳,但將犧牲催化活性,亦即,可能導致極差之催
化活性。
自單體(包括至少一種具有兩個或多個羧基或羧酸鹽基之單體)聚合之聚合物的實例係包括聚馬來酸、丙烯酸與馬來酸之共聚物、甲基丙烯酸與馬來酸之共聚物、膦酸與馬來酸之共聚物、丙烯酸與檸康酸之共聚物、膦酸與檸康酸之共聚物、以及磺酸與馬來酸之共聚物。
自單體(包括至少一種具有兩個或多個羧基或羧酸鹽基之單體)聚合且復於其主鏈中含有氧原子作為醚鍵之聚合物的實例係包括聚環氧琥珀酸、聚[氧基[1-羧基-1-羧甲基-1,2-乙二基]]、膦酸與環氧琥珀酸之共聚物。
該聚合物之量,以觸媒溶液之總量為基準計,較佳係0.05至20 g/L,更佳係1.0至4.0 g/L。
本發明之溶液的貴金屬奈米粒子係由任何貴金屬提供只要該金屬可作為觸媒使用。貴金屬之實例係銀、金、鉑、鈀、銠、釕、銥及鋨。較佳係該貴金屬為銀。可使用貴金屬之混合物,如銀與鈀之混合物。貴金屬奈米粒子之量係,以該溶液之重量為基準計,10至2,0000 ppm,較佳100至10,000 ppm,最佳200至5,000 ppm。
視需要,本發明可包括常規用於無電鍍覆觸媒組成物中之各種佐劑的一者或多者,如界面活性劑、緩衝劑、錯合劑及pH調節劑(conditioner)。pH調節劑可包括鹼如,但不限於,氫氧化鈉及氫氧化鉀,以及簡單酸如,但不限於,硫酸、草酸、醋酸、檸檬酸及其他簡單羧酸。pH調節劑之量及選擇係以目標pH值為準。
於本發明中使用之溶劑較佳係水,如自來水或DI水。任何其他溶劑如醇或溶劑之混合物可用於本發明中,只要該溶劑可與水混合即可。
典型地,本發明之溶液係具有3至10之pH。本發明之溶液的較佳pH係取決於奈米粒子製備過程中聚合物及還原劑的類型及量。較佳地,典型之本發明之溶液係具有大於5之pH,更佳地,該pH係6至9,再更佳地,該pH係鹼性,亦即,其係具有大於7至9之pH。
本發明之溶液係有用於作為將待鍍覆材質之非導電表面予以無電鍍覆之觸媒的奈米粒子的安定溶液。較佳地,本發明之溶液不形成肉眼可見之沉澱物。更佳地,本發明之溶液不在加速老化測試以及加速存儲壽命測試之後形成肉眼可見之沉澱物。加速老化測試係將該溶液於40℃浴中於鼓氣下存儲一個月而施行,加速存儲壽命測試係於-20℃及60℃施行48小時。
本發明之溶液可藉由將貴金屬離子、聚合物及還原劑於溶液中組合而製備。較佳地,製備本發明之溶液的方法為:(a)製備包括貴金屬離子及自單體聚合之聚合物的溶液,該單體包含至少一種具有兩個或更多個羧基或羧酸鹽基之單體,以及,(b)於攪拌下將還原劑加入該溶液中。
於本發明中使用之貴金屬離子係由任何貴金屬源提供,只要該貴金屬可溶於溶劑即可。可將有機酸或無機酸與貴金屬源併用,以幫助該貴金屬溶解於溶液
中。貴金屬元素係選自上揭之彼等,如銀、金、鉑、鈀、銠、釕、銥及鋨。且如上揭者,較佳之貴金屬元素係銀。
較佳之貴金屬離子源係貴金屬之有機鹽或無機鹽。較佳之貴金屬離子源的實例係包括,金屬硝酸鹽、金屬亞硝酸鹽、金屬鹵化物、金屬氧化物、金屬醋酸鹽、金屬硫酸鹽、金屬亞硫酸鹽、金屬氰化物、金屬葡萄糖酸鹽、金屬氟硼酸鹽、金屬烷基磺酸鹽、金屬硫代硫酸鹽及金屬硫氰酸鹽。金屬鹽之實例係包括,而不限於,硝酸銀、醋酸銀、硫酸銀、甲磺酸銀、對甲苯磺酸銀、苯甲酸銀、磷酸銀、三氟醋酸銀、氯化鈀(II)、氯化鈀(IV)、氯化金及氯化釕。
該等貴金屬離子之量係取決於該金屬鹽之溶解度以及貴金屬奈米粒子於本發明之溶液中的所欲濃度。舉例而言,銀鹽可以,以觸媒溶液之總量為基準計,0.01至100 g/L,較佳0.1至10 g/L,更佳0.1至5.0 g/L的量使用。
用於還原該等貴金屬離子之還原劑係任何能將所溶解之貴金屬離子還原為經還原之貴金屬形式而不形成會干擾該觸媒溶液之催化性能之副產物的彼等還原劑。較佳之還原劑係二甲基胺基硼烷、硼氫化鈉、肼、次磷酸鈉、水合肼、抗壞血酸、異抗壞血酸、羥胺硫酸鹽、甲酸及甲醛。
還原劑之量可係足以還原所欲之貴金屬離子的任何之量。還原劑之較佳量可藉由貴金屬的倍數定
之,如0.5至2倍於貴金屬離子之莫耳數。典型地,以該觸媒溶液中金屬濃度之總量以及對該反應中所使用之還原劑的選擇為基準,該量係0.01至10 g/L,更佳係0.05至5 g/L。
製備本發明之溶液的方法為,(a)製備包含貴金屬離子及自單體聚合之聚合物的溶液,該單體包含至少一種具有兩個或更多個羧基或羧酸鹽基之單體,以及,(b)於攪拌該溶液下將還原劑加入該溶液中。
該方法之第一步係製備包括貴金屬離子及自單體聚合之聚合物之溶液,該單體包含至少一種具有兩個或更多個羧基或羧酸鹽基之單體。包括該等貴金屬離子及聚合物之溶液可藉由任何方法製備。舉例而言,將該聚合物溶解於溶劑如水中,隨後將貴金屬之鹽或貴金屬鹽之水溶液加入該溶液中;或將貴金屬離子溶解於溶劑中,隨後將該聚合物或該聚合物之溶液加入該溶液中。
該方法之第二步係將還原劑加入該溶液中伴隨。於此步驟中使用之還原劑的量係足以形成所欲之貴金屬奈米粒子的任何量。
還原劑係於攪拌下加入上述溶液中。於強烈攪拌條件下,該等金屬離子可被還原為金屬並快速形成大量作為粒子進一步生長之種子的奈米晶體。若攪拌不充分,則粒子尺寸可能不均勻,且某些粒子可能生長得較大且可能容易沉澱。換言之,強烈攪拌允許於較窄粒子尺寸分佈內形成較小之奈米粒子。典型之混合速率可係自200
至1000 rpm。
於第二步中,該溶液之溫度係10至40℃,典型係室溫左右或20℃。
儘管不欲受縛於理論,本發明之發明人相信,於本發明之聚合物之存在下形成安定之貴金屬奈米粒子的機制係如下述者:通常,該等奈米粒子係由於布朗運動、對流、重力及其他力而有彼此聚集為膠體之趨勢,其可導致該膠體之凝集以及去安定化。膠體之靜電安定化及立體安定化係膠體安定化之兩種常見機制。於聚合物之存在下,如是製備之奈米粒子可藉由該等聚合性分子所環繞,且該等聚合性分子產生用以對抗平衡粒子間之凡得瓦力的斥力。
用於製備膠體性觸媒溶液之較佳方法為製備包括1至5 g/L之銀離子及1至5 g/L之聚環氧琥珀酸的溶液,隨後於20至40℃之強烈攪拌或200至1,000 rpm加入10至80 mmol/L之二甲基胺基硼烷。
含有貴金屬奈米粒子及自單體(包括至少一種具有兩個或更多個羧基或羧酸鹽基之單體)聚合之聚合物的溶液(本發明之膠體性觸媒)可用於印刷電路板的無電鍍覆製程中。通孔係藉由鑽孔或衝孔或該技藝中已知之任何其他方法形成於印刷電路板中。於形成該等通孔之後,以水及傳統之有機溶液沖洗該板以進行清潔及去油脂,將該等通孔壁進行表面去汙之後使用該板。典型地,該等通孔壁之表面去汙係以溶劑溶脹劑之施用為始。
任何之傳統溶劑溶脹劑可用以將該等通孔進行表面去汙。溶劑溶脹劑係包括,但不限於,二醇醚類及其相應之醚醋酸酯類。可使用傳統量的二醇醚類及其相應之醚醋酸酯類。此等溶劑溶脹劑係該技藝中習知者。可商購之溶劑溶脹劑係包括,但不限於,CIRCUPOSIT CONDITIONERTM
3302、CIRCUPOSIT HOLE PREPTM
3303及CIRCUPOSIT HOLE PREPTM
4120溶液,其全部可自羅門哈斯電子材料公司(Rohm and Haas Electronic Materials,Marlborough,MA)獲得。
視需要,以水沖洗該等通孔。隨後將促進劑施用至該等通孔。可使用傳統之促進劑。此等促進劑係包括硫酸、鉻酸、鹼性高錳酸鹽或電漿蝕刻劑。典型係使用鹼性高錳酸鹽作為該促進劑。可商購之促進劑之一實例為可自羅門哈斯電子材料公司購得之CIRCUPOSIT PROMOTERTM
4130溶液。
視需要,再次以水沖洗此等通孔。隨後將中和劑施用至該等通孔以中和該促進劑留下之任何殘質。可使用傳統之中和劑。典型地,該中和劑係含有一種或多種胺類之鹼性水溶液,或3 wt%過氧化物及3 wt%硫酸的溶液。視需要,以水沖洗該等通孔,並乾燥該印刷電路板。
於表面去汙之後,可將酸性或鹼性調節劑施用至該等通孔。可使用傳統之調節劑。此等調節劑可包括一種或多種陽離子性界面活性劑、非離子性界面活性劑、錯合劑及pH調整劑或緩衝劑。可商購之酸性調節劑
係包括,但不限於,可自羅門哈斯電子材料公司購得之CIRCUPOSIT CONDITIONERTM
3320及CIRCUPOSIT CONDITIONERTM
3327溶液。適宜之鹼性調節劑係包括,但不限於,含有一種或多種四級胺類或多胺類之鹼性界面活性劑水溶液。可商購之鹼性界面活性劑係包括,但不限於,可自羅門哈斯電子材料公司購得之CIRCUPOSIT CONDITIONERTM
231、3325、813及860溶液。視需要,該等通孔係於調節之後以水沖洗。
於調節之後進行該等通孔之微蝕刻。可使用傳統之微蝕刻組成物。微蝕刻係設計為在經暴露之銅上提供微粗糙化之銅表面,如內層及表面蝕刻,以提升後續之所沉積之無電鍍覆及電鍍的黏著。微蝕刻劑係包括,但不限於,60 g/L至120 g/L過硫酸鈉或氧單過硫酸鈉或氧單過硫酸鉀及2%硫酸混合物,或通用硫酸/過氧化氫。可商購之微蝕刻組成物的實例係包括可自羅門哈斯電子材料公司購得之CIRCUPOSIT MICROETCHTM
3330溶液。視需要,以水沖洗該等通孔。
隨後將預浸塗液施用至經微蝕刻之通孔。可使用任何之能移除銅表面上之銅氧化物而不干擾該觸媒溶液的酸性溶液。預浸塗液之實例係包括草酸、醋酸、抗壞血酸、酚酸、磷酸、硼酸、及其鹽。視需要,以冷水沖洗該等通孔。
隨後,將上揭之觸媒,亦即,包括貴金屬奈米粒子之溶液,施用至該等通孔。隨後,使用鹼性無電
鍍覆組成物以銅鍍覆該等通孔之壁。可使用任何之傳統無電鍍覆浴。可商購之無電銅鍍覆浴係包括,但不限於,可自羅門哈斯電子材料公司購得之CIRCUPOSITTM
880無電銅鍍覆溶液。
將銅沉積於該等通孔之壁上之後,視需要以水沖洗該等通孔。視需要,可將抗鏽(anti-tarnish)組成物施用至沉積於該等通孔壁上之金屬上。可施用傳統之抗鏽組成物。抗鏽組成物之實例係包括可自羅門哈斯電子材料公司之ANTI TARNISHTM
7130及CUPRATECTM
3組成物。該等通孔可視需要以溫度超過30℃之熱水沖洗,隨後,可乾燥該等板。
下述實施例係欲以進一步詳細揭示本發明但並非欲以限制其範疇。
藉由觀察根據下述之製程進行之測試片的無電銅鍍覆來評估觸媒之特性。使用來自盛益公司(Shengyi)之傳統FR-4層壓體、SY-1141(正常Tg)作為測試片。對於表面覆蓋率測試,係使用裸層壓體。對於背光測試,係使用具有銅內層之Cu包覆層壓體。
(1)將該測試片切割為1×6 cm2
小片,藉由SiC#240粒子砂磨其邊緣,隨後於RO(反透(Reverse Osmosis))水中清潔若干次並吹乾。
(2)透過表1中顯示之溶脹、氧化、中和、調節及微蝕刻
步驟進行處理。
(3)將該測試片於40℃各種pH(揭示於每一實施例中,2.9至10.9)的觸媒溶液中浸漬10分鐘。以去離子水洗滌該測試片。
(4)於35或40℃進行無電銅鍍覆15分鐘而鍍覆該測試片。
使用下述定義之鍍覆覆蓋率分級評分進行該測試片之鍍覆覆蓋率測試。
全覆蓋:測試片之表面上超過95%之面積被鍍覆。
高:測試片之表面上超過75%但低於95%之面積被鍍覆。
中:測試片之表面上超過50%但低於75%之面積被鍍覆。
低:測試片之表面上超過5%但低於50%之面積被鍍覆。
無覆蓋:測試片之表面上低於5%之面積被鍍覆。
根據下述製程施行背光測試。
將來自每一板之1 mm厚的橫截面置於傳統光學顯微鏡下,設定為透射模式之50x放大。藉由將在該顯微鏡下觀察到之光的量與歐洲背光分級標準(European backlight Grading Scale,0至5)比較而確定銅沉積之數量。若未觀察到光,該切面完全黑暗,其係歸為背光等級之5.0級。這表明完全之銅覆蓋。若光穿透整個截面而無任何暗域,這表明非常少或無銅金屬沉積於該壁上,該截面係歸為0級。若截面具有某些暗域以及光域,他們與標準相比歸為0與5之間。
藉由下述ICD測試(互連缺陷測試)量測鍍覆之可靠性。
將含有至少30個孔徑為1 mm的孔之經鑽孔之MLB(多層板)測試片切割。藉由SiC紙以Grit#240打
磨該測試片邊緣。於RO水中進行若干次超音波清潔。該製程係自表面去汙運行至PTH(經鍍覆之通孔),並最終至銅電鍍。將該測試片每一邊緣之任何的Cu打磨除去。將該測試片於125℃烘烤6 h。該測試片於乾燥室中冷卻。或者,於288℃進行焊劑浸塗10秒,於室溫冷卻110秒。重複該循環6次。
於該測試片上預形成微截面,且該截面係於蝕刻之前進行ICD研究。計數互連區域內之缺陷的數目並以比率計算之。
以氨溶液(20 ml銨溶液、20 ml水及10滴過氧化氫)蝕刻該測試片。證實該ICD上缺陷的數目。
加速老化測試係施行如下:製備固定體積為50 mL之濃縮觸媒工作浴,隨後藉由將該溶液在維持於40℃之浴溫下進行空氣鼓泡7天或數週以進行加速老化測試。其後,使用此等加速老化觸媒實行覆蓋率測試及背光測試,以驗證催化活性是否丟失。同時,亦實行其他相關測試如紫外-可見吸收性。
步驟1:稱量3.3 g之聚環氧琥珀酸(Mw=400至1,500),隨後於攪拌下將其與3,000 ml之去離子水於5公升之燒杯內混合。於攪拌下將5 g之硝酸銀加入該溶液中。
步驟2:於使用磁力攪拌器以500 rpm強烈
攪拌下,將15 ml之新鮮製備之2.0 mol/L二甲基胺基硼烷(DMAB)快速加入上述溶液中。再攪拌超過2 h。
如觸媒製備實施例1中所述製備Ag-PESA觸媒溶液,但將硝酸銀改為表2中所示之不同的銀鹽。
對實施例1至4之觸媒溶液施行效能測試。使用200 ppm之每種觸媒溶液(Ag-PESA系統)。結果係顯示於表2中。
此等觸媒係於pH=4與pH=7之間顯示高背光測試結果,因此具有寬操作窗口。
於加速老化測試(AAT)之前及之後對實施例1之觸媒施行覆蓋率測試劑背光測試。使用200 ppm之觸媒溶液(Ag-PESA系統)。結果係顯示於表3及表4中。
「Init.Time」係意指起始時間。其係於裸層壓體上達成可觀測之無電銅沉積所需的時間。其係藉由該層壓體自黃色至不透明之顏色變化而確定。
「空洞類型」係顯示無電銅沉積缺陷。沉
積之狀態係藉由下述等級分類。
TAG:玻璃周圍之薄鍍覆
STAG:輕微之玻璃周圍的薄鍍覆
TOG:玻璃上之薄銅鍍覆
STOG:輕微之玻璃上之薄銅鍍覆
TGV:橫向玻璃空洞
GTV:玻璃尖端空洞
ROP:珠狀之環
SROP:輕微之珠狀之環
「形態」係顯示玻璃纖維上所沉積之無電銅的形態,其係藉由使用光學顯微鏡於前光照明(front-light illumination)模式下予以確定。分級係顯示如下。
VR-gl:玻璃纖維上非常粗糙
R-gl:玻璃纖維上粗糙
sR-gl:玻璃纖維上略顯粗糙
如觸媒製備實施例1中所述製備Ag-CP5觸媒溶液,但將PESA改為丙烯酸與馬來酸之共聚物的鈉鹽(Mw=70,000,Sokalan CP5,BSAF chemical company),且每一組分之濃度係如表5中顯示者改變。
對實施例10中製備之觸媒溶液施行效能測試。使用270 ppm之觸媒溶液(Ag-CP5系統)。結果係顯示於表6中。
該觸媒係於pH 2.9與pH 5.0之間顯示高背光測試結果,因此其係具有寬操作窗口。
如實施例1中所述者製備Ag-PAA溶液,但將PESA改為聚丙烯酸(Mw=100,000,35%水溶液,來自Aldrich),且每一組分之濃度係如表7中顯示者改變。
對比較例1之觸媒施行效能測試。使用270 ppm之觸媒溶液(Ag-PAA系統)。結果係顯示於表8中。
該觸媒係於pH 3.5與pH 4.5之間顯示高背光測試結果,因此其寬操作窗口係窄於實施例1至4及實施例10中者。
如觸媒製備實施例1中所述者製備Ag-檸檬鹽的溶液,但將PESA改為檸檬酸鹽。於pH 3、6、9及12施行效能測試。僅於pH=9時進行之測試顯示大於pH 4之背光測試結果,因此,該觸媒之操作窗口係窄於實施例1至4及實施例10之結果。
如實施例中揭露者以及與比較例對比,與含有其他成份之溶液相比,本發明之溶液(包含貴金屬奈米粒子以及自單體聚合之聚合物的溶液,該單體包括至少一種具有兩個或更多個羧基或羧酸鹽基之單體)係於寬範圍之pH值具有高吸附能力以及催化活性,以及良好之浴安定性。特別地,含有Ag奈米粒子及聚環氧琥珀酸鈉鹽之溶液係具有更高之吸附劑催化活性、更寬之操作窗口(於寬pH範圍內有效)以及良好之浴安定性。此外,含有Ag奈米粒子及聚環氧琥珀酸鈉鹽之溶液並不含可能存在環境問題之氮原子及含磷基,故該溶液係綠色溶液。
Claims (8)
- 一種包含貴金屬奈米粒子及聚合物之溶液,該聚合物係自單體聚合而得,該單體包含至少一種具有兩個或更多個羧基或羧酸鹽基之單體。
- 如申請專利範圍第1項所述之溶液,其中,該聚合物係於其主鏈中具有氧原子作為醚鍵。
- 如申請專利範圍第2項所述之溶液,其中,該聚合物係聚環氧琥珀酸或其鹽。
- 如申請專利範圍第1項所述之溶液,其中,該聚合物係聚馬來酸,或藉由馬來酸與選自丙烯酸、甲基丙烯酸、膦酸及磺酸之其他可聚合單體聚合而得的聚合物。
- 如申請專利範圍第1項所述之溶液,其中,該聚合物係包含丙烯酸及檸康酸、或膦酸及檸康酸之單體。
- 如申請專利範圍第1項所述之溶液,其中,該貴金屬係銀、金、鉑、鈀、銠、釕、銥或鋨。
- 一種製備包含貴金屬奈米粒子及自單體聚合之聚合物之溶液的方法,該單體包含至少一種具有兩個或更多個羧基或羧酸鹽基之單體,該方法係包含:a)製備包含貴金屬離子及自單體聚合之聚合物的溶液,該單體包含至少一種具有兩個或更多個羧基或羧酸鹽基之單體;以及b)將還原劑加入該溶液中,並攪拌該溶液。
- 一種將金屬無電鍍覆於非導電表面上之製程,該製程係包含下列步驟: a)將待鍍覆之基板浸漬於如申請專利範圍第1項所述之溶液中,b)在不使用加速步驟下,施行該基板之無電鍍覆。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161582264P | 2011-12-31 | 2011-12-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201335424A TW201335424A (zh) | 2013-09-01 |
TWI498454B true TWI498454B (zh) | 2015-09-01 |
Family
ID=47563114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW102100011A TWI498454B (zh) | 2011-12-31 | 2013-01-02 | 鍍覆觸媒及方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9227182B2 (zh) |
EP (1) | EP2610365B1 (zh) |
JP (1) | JP6081200B2 (zh) |
KR (1) | KR101992876B1 (zh) |
CN (1) | CN103276375B (zh) |
TW (1) | TWI498454B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2610366A3 (en) | 2011-12-31 | 2014-07-30 | Rohm and Haas Electronic Materials LLC | Plating catalyst and method |
US10066299B2 (en) * | 2013-02-24 | 2018-09-04 | Rohm And Haas Electronic Materials Llc | Plating catalyst and method |
JP5648232B1 (ja) * | 2013-06-21 | 2015-01-07 | Dic株式会社 | 無電解めっき用触媒、これを用いた金属皮膜及びその製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1211334A2 (en) * | 2000-11-28 | 2002-06-05 | Ebara Corporation | Electroless Ni-B plating liquid, electronic device and method for manufacturing the same |
US20040086646A1 (en) * | 2000-11-01 | 2004-05-06 | Mariola Brandes | Method for electroless metal plating |
CN101469420A (zh) * | 2007-04-16 | 2009-07-01 | 上村工业株式会社 | 化学镀金方法及电子部件 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3011920A (en) | 1959-06-08 | 1961-12-05 | Shipley Co | Method of electroless deposition on a substrate and catalyst solution therefor |
US3904792A (en) | 1972-02-09 | 1975-09-09 | Shipley Co | Catalyst solution for electroless metal deposition on a substrate |
US4004051A (en) * | 1974-02-15 | 1977-01-18 | Crown City Plating Company | Aqueous noble metal suspensions for one stage activation of nonconductors for electroless plating |
US3993799A (en) | 1974-10-04 | 1976-11-23 | Surface Technology, Inc. | Electroless plating process employing non-noble metal hydrous oxide catalyst |
PH23907A (en) * | 1983-09-28 | 1989-12-18 | Rohm & Haas | Catalytic process and systems |
US4719145A (en) * | 1983-09-28 | 1988-01-12 | Rohm And Haas Company | Catalytic process and systems |
US4725314A (en) | 1984-05-07 | 1988-02-16 | Shipley Company Inc. | Catalytic metal of reduced particle size |
US4652311A (en) * | 1984-05-07 | 1987-03-24 | Shipley Company Inc. | Catalytic metal of reduced particle size |
US6325910B1 (en) * | 1994-04-08 | 2001-12-04 | Atotch Deutschland Gmbh | Palladium colloid solution and its utilization |
JP3890542B2 (ja) | 1997-02-17 | 2007-03-07 | 奥野製薬工業株式会社 | プリント配線板の製造方法 |
JP3826544B2 (ja) | 1998-02-27 | 2006-09-27 | 奥野製薬工業株式会社 | 無電解めっき用触媒組成物 |
JP4558934B2 (ja) * | 1998-10-29 | 2010-10-06 | 住友金属鉱山株式会社 | 抗菌剤 |
JP2001044242A (ja) | 1999-07-26 | 2001-02-16 | Matsushita Electric Ind Co Ltd | フリップチップ実装装置及び方法 |
US6645557B2 (en) | 2001-10-17 | 2003-11-11 | Atotech Deutschland Gmbh | Metallization of non-conductive surfaces with silver catalyst and electroless metal compositions |
JP4143385B2 (ja) * | 2002-03-05 | 2008-09-03 | 株式会社大和化成研究所 | 無電解めっきの触媒付与のための前処理液、該液を使用する前処理方法、該方法を使用して製造した無電解めっき皮膜及び(又は)めっき被覆体 |
SG106070A1 (en) * | 2002-04-23 | 2004-09-30 | Agency Science Tech & Res | Method for elelctroless deposition of a metal layer on selected portions of a substrate |
US7166152B2 (en) | 2002-08-23 | 2007-01-23 | Daiwa Fine Chemicals Co., Ltd. | Pretreatment solution for providing catalyst for electroless plating, pretreatment method using the solution, and electroless plated film and/or plated object produced by use of the method |
US8383014B2 (en) * | 2010-06-15 | 2013-02-26 | Cabot Corporation | Metal nanoparticle compositions |
US7718710B2 (en) * | 2006-03-17 | 2010-05-18 | Headwaters Technology Innovation, Llc | Stable concentrated metal colloids and methods of making same |
DE102006017696A1 (de) * | 2006-04-15 | 2007-10-18 | Bayer Technology Services Gmbh | Verfahren zur Herstellung von Metallpartikeln, hieraus hergestellte Metallpartikel und deren Verwendung |
DE102007037079A1 (de) * | 2006-10-25 | 2008-04-30 | Bayer Materialscience Ag | Silberhaltige wässrige Formulierung und ihre Verwendung zur Herstellung von elektrisch leitenden oder spiegelnden Beschichtungen |
US20110014473A1 (en) * | 2007-01-31 | 2011-01-20 | Ying Jackie Y | Polymer-coated nanoparticles |
US7922939B2 (en) * | 2008-10-03 | 2011-04-12 | The Board Of Trustees Of The University Of Illinois | Metal nanoparticle inks |
JP5661273B2 (ja) * | 2008-11-26 | 2015-01-28 | 三ツ星ベルト株式会社 | 金属コロイド粒子及びそのペースト並びにその製造方法 |
JP5458758B2 (ja) * | 2009-09-11 | 2014-04-02 | 上村工業株式会社 | 触媒付与溶液並びにこれを用いた無電解めっき方法及びダイレクトプレーティング方法 |
EP2610366A3 (en) * | 2011-12-31 | 2014-07-30 | Rohm and Haas Electronic Materials LLC | Plating catalyst and method |
US10066299B2 (en) * | 2013-02-24 | 2018-09-04 | Rohm And Haas Electronic Materials Llc | Plating catalyst and method |
-
2012
- 2012-12-28 EP EP12199767.0A patent/EP2610365B1/en active Active
- 2012-12-31 US US13/732,271 patent/US9227182B2/en active Active
- 2012-12-31 KR KR1020120158387A patent/KR101992876B1/ko active IP Right Grant
- 2012-12-31 CN CN201210599284.1A patent/CN103276375B/zh not_active Expired - Fee Related
-
2013
- 2013-01-02 TW TW102100011A patent/TWI498454B/zh not_active IP Right Cessation
- 2013-01-04 JP JP2013000100A patent/JP6081200B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040086646A1 (en) * | 2000-11-01 | 2004-05-06 | Mariola Brandes | Method for electroless metal plating |
EP1211334A2 (en) * | 2000-11-28 | 2002-06-05 | Ebara Corporation | Electroless Ni-B plating liquid, electronic device and method for manufacturing the same |
CN101469420A (zh) * | 2007-04-16 | 2009-07-01 | 上村工业株式会社 | 化学镀金方法及电子部件 |
Also Published As
Publication number | Publication date |
---|---|
US20130171366A1 (en) | 2013-07-04 |
EP2610365A3 (en) | 2014-08-06 |
JP2013151749A (ja) | 2013-08-08 |
US9227182B2 (en) | 2016-01-05 |
KR20130079298A (ko) | 2013-07-10 |
CN103276375B (zh) | 2016-08-03 |
EP2610365A2 (en) | 2013-07-03 |
EP2610365B1 (en) | 2020-02-26 |
CN103276375A (zh) | 2013-09-04 |
TW201335424A (zh) | 2013-09-01 |
JP6081200B2 (ja) | 2017-02-15 |
KR101992876B1 (ko) | 2019-06-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI498453B (zh) | 鍍覆觸媒及方法 | |
TWI482877B (zh) | 鍍覆催化劑及方法 | |
TWI526573B (zh) | 用於無電金屬化之安定催化劑 | |
TWI629374B (zh) | 無電極電鍍的方法 | |
TW201235507A (en) | Plating catalyst and method | |
TWI567233B (zh) | 以含有嘧啶衍生物之鹼性安定性催化劑無電金屬化介電質 | |
US20170152600A1 (en) | Plating catalyst and method | |
JP2017160541A (ja) | 安定化された銀触媒および方法 | |
TWI614372B (zh) | 無電極電鍍的方法 | |
TWI617700B (zh) | 無電極電鍍的方法 | |
TWI498454B (zh) | 鍍覆觸媒及方法 | |
TWI622642B (zh) | 鍍覆催化劑及方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |