TWI497828B - 具有環形腔及/或偏置腔中之積體式孔徑耦合微帶天線的射頻積體電路封裝 - Google Patents

具有環形腔及/或偏置腔中之積體式孔徑耦合微帶天線的射頻積體電路封裝 Download PDF

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TWI497828B
TWI497828B TW098111568A TW98111568A TWI497828B TW I497828 B TWI497828 B TW I497828B TW 098111568 A TW098111568 A TW 098111568A TW 98111568 A TW98111568 A TW 98111568A TW I497828 B TWI497828 B TW I497828B
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package
ground plane
substrate layer
antenna
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Johannes A G Akkermans
Brian A Floyd
Duixian Liu
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    • H01Q21/06Arrays of individually energised antenna units similarly polarised and spaced apart
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    • H01Q21/065Patch antenna array
    • GPHYSICS
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    • H01Q9/00Electrically-short antennas having dimensions not more than twice the operating wavelength and consisting of conductive active radiating elements
    • H01Q9/04Resonant antennas
    • H01Q9/0407Substantially flat resonant element parallel to ground plane, e.g. patch antenna
    • H01Q9/045Substantially flat resonant element parallel to ground plane, e.g. patch antenna with particular feeding means
    • H01Q9/0457Substantially flat resonant element parallel to ground plane, e.g. patch antenna with particular feeding means electromagnetically coupled to the feed line
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    • H01L2224/10Bump connectors; Manufacturing methods related thereto
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    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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Description

具有環形腔及/或偏置腔中之積體式孔徑耦合微帶天線的射頻積體電路封裝
本發明概言之係關於通信電路,且更具體而言,係關於射頻(RF)積體電路(IC)封裝。
在無線網路中,藉由將天線附連至接收機或發射機以向網路之其他元件或自網路之其他元件輻射所需訊號,達成裝置間之連接及通信。在諸如毫米波無線電等無線通信系統中,通常將離散組件以低整合度組裝在一起。該等系統通常利用昂貴且笨重之波導及封裝級或電路板級微帶結構,互連各半導體及其所需之發射機天線或接收機天線來組裝。隨著近來半導體技術及封裝工程之進步,該等無線電通信系統之尺寸日益減小。對於諸如無線通用串列匯流排(USB)等應用,工作距離極限約為1米,且在60GHz下約為7dBi之單一天線將提供所必需的天線增益。對於點對點應用中長達10米(例如無線視訊)或更長(例如雷達)之距離而言,端視應用而定,需要高達30dBi的天線增益。然而,用於無線視訊應用之高增益天線具有極窄之波束寬度,因此對於消費者而言,天線很難對準。因此,需要具有輻射圖案可操縱陣列,例如相控陣列。相控陣列亦廣泛用於軍用雷達中。然而,由於所涉及之組件昂貴及勞動力成本高,具有積體式天線或相控陣列之RF晶片之封裝極為困難且非常昂貴。
本發明之原理提供用於構建在例如環形及/或偏置腔中具有積體式孔徑耦合微帶天線之RF IC封裝之技術。
在一例示性具體實施例中,根據本發明之一態樣,一種射頻積體電路晶片封裝具有N個積體式孔徑耦合微帶天線,N至少為2,該封裝包括N個大致平面之微帶以及至少一個大致平面之接地平面,該至少一個大致平面之接地平面向內與該等N個大致平面之微帶間隔開且大體上平行於該等N個大致平面之微帶。該接地平面中形成有至少N個耦合孔徑狹槽,且該等狹槽大體上與該等微帶相對。該封裝亦包括:N條饋線,其向內與該接地平面間隔開且大體上平行於該接地平面;至少一個射頻晶片,其向內與該等饋線間隔開且耦接至該等饋線及該接地平面;以及一第一基板層,其向內與該等饋線間隔開。該第一基板層形成有一晶片容置腔,且該晶片位於該晶片容置腔中。一額外元件包括一第二基板層,該第二基板層置於該接地平面與一由該微帶所界定之平面間之一區域中。該微帶形成於一第一金屬層中,該接地平面形成於一第二金屬層中,且該第二基板層界定一天線腔。該等N個大致平面之微帶即位於該天線腔中。
視需要,一島在該腔內形成於該第二基板層中,藉此界定該腔之一環形形狀,且該等N個大致平面之微帶位於該環形形狀中。該島大體上與該晶片容置腔相對。
在另一可選方法中,當以平面中觀察時,該天線腔與該晶片容置腔間隔開(偏置),以便在將該晶片插入該晶片容置腔內期間所引起之負載實質上遠離該天線腔而支撐。
在另一態樣中,提供一種製造一射頻積體電路晶片封裝之方法,該射頻積體電路晶片封裝具有N個積體式孔徑耦合微帶天線,N至少為2,該方法包括以下步驟:提供一上述種類之封裝(不具有晶片),該封裝具有上述之可選島;以及將至少一個射頻晶片插入該腔內,其中該島支撐因該晶片插入該腔內所引起之負載。
在又一態樣中,提供一種製造一射頻積體電路晶片封裝之方法,該射頻積體電路晶片封裝具有N個積體式孔徑耦合微帶天線,N至少為2,該方法包括以下步驟:提供一上述種類之封裝(不具有晶片),該封裝具有上述之可選偏置腔組態;以及將至少一個射頻晶片插入該腔內,以便在將該晶片插入該晶片容置腔內期間所引起之負載實質上遠離該天線腔而支撐。
本發明之一或多個具體實施例適用於自動製程,且減少先前封裝天線所涉及之組件數量。
結合附圖閱讀下文對本發明之說明性具體實施例之詳細說明,本發明之該等及其他目的、特徵及優點將變得一目了然。
本發明之一或多個具體實施例提供用於具有在毫米波(mmWave)範圍運作之積體式天線及相控陣列之低成本封裝之設備及方法。具有積體式天線之一例示性發明封裝係基於一多層式印刷電路板(PCB)。該封裝包含例如一用於構建高效能天線或天線陣列之矩形或環形腔及用於容納毫米波射頻(RF)積體電路晶片之另一腔。本發明之一或多個具體實施例亦提供用於以下各項之技術:克服製作內腔之困難且避免了採用毫米波頻率之絲焊技術的需要。本發明之封裝技術之具體實施例係與PCB製造製程相關,且可用於具有積體式天線或天線陣列之封裝。
本發明之實例由此提供具有積體式天線或平面相控陣列之低成本封裝;具體而言,用於毫米波及以上頻率之具有積體式天線或平面相控陣列之晶片封裝。
具有積體式天線之典型晶片封裝具有三個主要部件:(i)RF晶片,(ii)一或多個天線,及(iii)封裝載體(且在某些實例中,用於保護該封裝之封裝蓋或罩或封裝材料)。本發明之一或多個具體實施例提供一種封裝,該封裝具有多個高效能天線、一用於覆晶安裝一RF晶片之介面及一用於將該封裝覆晶安裝至一印刷電路母板之介面。
第1圖顯示根據本發明之一態樣,一例示性封裝100之一剖面圖。應注意,為清楚起見,在所有圖中皆省略了剖面線。該封裝總共具有七層,包括基板及結合層。對於毫米波應用,尤其對於頻率高於60GHz之應用,在設計過程中須考量結合薄膜及/或層之厚度。根據本文之教示,天線及封裝領域之一般技術者將得知如何將該厚度考量在內以及如何採用高精度PCB製造技術來實施本發明之具體實施例。封裝100亦具有若干金屬層。具體而言,存在一最外基板102。其內側緊接著係一金屬層,用於微帶天線之微帶104。基板102及微帶天線104(第1圖中僅繪示了單一天線,但如下文所述,亦可提供更多天線)內側係一結合薄膜層106、另一基板層108及另一結合薄膜層109。結合薄膜109內側之另一金屬層用於微帶天線之接地平面110。接地平面上之狹槽113用於孔徑耦合微帶天線之孔徑。接地平面110亦用於如下文所述使輻射元件(微帶)104與饋線及RF晶片分隔開。
另一基板112係自接地平面110向內。另一金屬層係自基板112向內,且用以構建天線饋線114、用於RF晶片連接(較佳係為覆晶/C4(「受控塌陷晶片連接」)類型之連接)之焊墊116、118、120及通往一或多個通孔(例如通孔124)之互連線122(適當時),互連線122係位於自形成饋線114之金屬層向內之另一結合薄膜層126及自結合薄膜126向內之又一基板128中。再一金屬層提供用於訊號、控制、電源及通往PCB母板(為清楚起見,在圖中省略了PCB母板)之接地連接之所有焊墊。焊墊可包括藉由接地通孔140與接地平面110互連之接地焊墊130以及一或多個訊號、電源及控制焊墊,所述訊號、電源及控制焊墊由藉由通孔124連接到互連線122及隔離焊墊142之焊墊132例示。該等通孔可為(例如)經鍍覆之通孔。亦可提供封裝焊墊134。端視微帶天線之設計而定,亦可在與焊墊130、132、134相同之金屬層上構建一可選之反射器144。在如下文所述之某些實例中,反射器144為嵌入式的。
為實施覆晶方法,晶片162較佳具有直接連接至晶片連接焊墊116、118、120之複數個焊點。
為增強微帶天線之頻寬,微帶可懸空或者以一泡棉材料支撐,在低頻應用中,該泡棉材料具有接近於1之介電常數。然而,在毫米波頻率下,尤其對於封裝應用而言,懸空或以泡棉支撐之微帶並不可行。因此,在本發明之一或多個具體實施例中,可於封裝中構建一空氣腔150。為避免在PCB製程期間因熱氣體所引發之問題,可利用通氣孔152。該等孔可被設計成使其對天線效能影響極小。舉例而言,孔152可位於腔150之中間附近或者靠近腔150之邊緣,且可在充分通氣之情況下製作得相對較小。端視所用製造製程而定,該等通氣孔可如第1圖所示位於模腔150之頂部(最上部分)或者如下文所述位於腔之側面。
接地平面110亦用於經由通孔(例如通孔140)形成接地連接,且經由通孔及隔離焊墊(例如帶有隔離焊墊142之通孔124,表示一種帶隔離焊墊之通孔,其可用於訊號、電源或控制功能)形成訊號、電源及控制連接。從製造觀點看,隔離焊墊係有益的且能增強可靠性,乃因在不使用隔離焊墊時難以達成局部通孔(即例如通孔124等不完全延伸貫穿某一結構之通孔)中之可靠性。
在基板128及結合薄膜126中實現一開放式晶片容置腔或插座。該插座用以容納RF晶片162。該晶片藉由覆晶結合貼裝至該封裝。
應注意,所有毫米波組件(天線、功率放大器、低雜訊放大器等)皆處於封裝100中。通孔124、140用以傳遞DC或低得多的低頻訊號。
封裝100可藉由球柵陣列(BGA)而有利地貼裝至母板(未圖示)。
第2圖顯示一具體實施例200,其大體上類似於具體實施例100,除了反射器144係由反射器144內部之另一結合層170及結合層170內部之另一基板172封裝。類似項目具有相同之參考編號,故不再予以贅述。於本具體實施例中,在基板172及結合層170中亦形成晶片容置插座160。
第3圖顯示一具體實施例300,其大體上類似於具體實施例200,除了通氣孔352沿層108之側面穿透延伸以使腔150通氣。類似項目具有相同之參考編號,故不再予以贅述。
第4圖呈現其中以封裝材料402封裝晶片162之下視圖400。晶片可被局部地或完全地封裝,例如以便阻擋濕氣。複數個外側焊墊404可對應於例如貼裝焊墊、熱傳導焊墊或接地焊墊(例如焊墊130),而複數個內側焊墊406可對應於例如訊號焊墊、控制焊墊或電源焊墊(例如焊墊132)。在第4圖中,不存在反射器或者反射器為嵌入式的。第5圖顯示視圖500,該視圖類似於視圖400,但係具有反射器144之封裝(例如第1圖之封裝)之視圖。類似項目具有相同之參考編號,故不再予以贅述。
第6圖顯示具有一2×2平面相控陣列佈局之例示性封裝600。在每一列上可具有多於兩個天線。該基本2×2陣列可用以形成大得多的陣列。除具有第一饋線114之第一天線微帶104外,其亦包含具有對應之第二、第三及第四饋線608、610、612之第二、第三及第四天線微帶602、604、606。各該饋線連接至如上所述之晶片162。儘管為便於說明起見,第6圖中顯示該等饋線終止於微帶處,然而應瞭解,當在上視圖或下視圖中觀察時,該等饋線可交疊對應之微帶,且當在如第1-3圖所示之剖面圖中觀察時與對應之微帶及耦合孔徑相間隔(舉例而言,饋線之一端經過微帶之中央(第17圖)或位於中央(第18圖)。饋線之另一端恰好經過RF晶片之邊緣)。
因此,應瞭解,本發明之態樣包括具有一用於RF晶片之插座以及一平面天線之封裝。在一或多個實例中,該RF晶片係為貼裝至封裝之覆晶。內腔可用以改良微帶頻寬。通氣孔可用以在PCB製造製程中移除熱氣體。該封裝可藉由BGA貼裝至PCB母板上。該封裝可構建一平面相控陣列。
在第1圖-第6圖之論述中,應瞭解,大體而言,根據本發明之一態樣之孔徑耦合微帶天線封裝可包括至少一個大致平面之微帶,例如微帶104。其亦包括至少一個大致平面之接地平面,例如平面110,其向內與大致平面之微帶104間隔開且大體上平行於微帶104。接地平面中形成有至少一個耦合孔徑狹槽,例如狹槽113。狹槽113大體上與微帶104相對。至少一條饋線(例如饋線114)向內與接地平面110間隔開且大體上平行於接地平面110。至少一個射頻晶片(例如晶片162)向內與饋線114間隔開且耦接至饋線114及接地平面110。亦包含一第一基板層,例如由結合薄膜126及基板128所形成者,其向內與饋線114間隔開。第一基板層形成有一晶片容置腔,例如腔160。晶片162位於晶片容置腔160中。
根據本文之說明,熟習PCB及天線技術者可實施本發明之具體實施例。可使用材料之非限制性實例包括熱固性塑膠/陶瓷/織造玻璃或類似積層體(例如可得自Rogers Corporation of Rogers、Connecticut USA之Rogers RO4000系列材料(及其他相容材料)),以及用於金屬層之銅(在焊墊或其他外露表面上可能鍍金)。類似技術可用於所有所繪示具體實施例,包括第1圖-第18圖。
應瞭解,較佳地,本發明之具體實施例(例如100、200及300)提供一完整封裝,而非僅提供與晶片及其他封裝分離之微帶天線。
應注意,可例如利用經鍍覆之通孔形成例如124、140等通孔。
本發明之具體實施例亦可包括置於接地平面110與由微帶104所界定平面間之一區域中之一第二基板層,例如由基板108及結合薄膜106、109所形成者。微帶104可有利地形成於一第一金屬層中,且接地平面110可有利地形成於一第二金屬層中。
在一或多個具體實施例中,一第三基板層(例如由基板112所形成者)置於接地平面110與饋線114間之一區域中。饋線114可有利地形成於一第三金屬層中。此外,根據本發明之具體實施例之一或多個封裝可包括至少一通孔,例如通孔190,該至少一通孔形成於第三基板層112中且耦接至接地平面110。複數個晶片連接焊墊(例如焊墊116、118、120)可形成於第三金屬層中。該等晶片連接焊墊至少其中之一(例如118)可耦接至第三基板層中之至少一通孔190。該等晶片連接焊墊將晶片耦接至饋線114(焊墊120)、通孔190(焊墊118)及通孔124(焊墊116)。
本發明之一或多個具體實施例可包括一或多個訊號焊墊、一或多個控制焊墊及一或多個電源焊墊(所有該等焊墊皆由焊墊132加以例示),以及一或多個接地焊墊(例如130)。訊號焊墊、電源焊墊及接地焊墊有利地形成於一第四金屬層中。如本文所述,視需要可提供封裝焊墊134。
在一或多個具體實施例中亦包含至少一接地通孔,例如140,用於耦接接地平面110與接地焊墊130。該至少一接地通孔140在一不與饋線114相交之區域中穿過第一及第三基板層(例如基板112、結合薄膜126及基板128)。一或多個具體實施例包括大體上與接地平面110共面形成之電源隔離焊墊、訊號隔離焊墊及控制隔離焊墊至少其中之一,例如隔離焊墊142。類似地,至少一電源通孔耦接電源隔離焊墊及電源焊墊,且穿過第一及第三基板層。此外,至少一控制通孔耦接控制隔離焊墊及控制焊墊,且穿過第一及第三基板層。如本文所述,焊墊132、通孔124及隔離焊墊142係用以例示可提供電源功能、訊號功能及控制功能之焊墊、通孔及隔離焊墊元件。
如本文所述,在某些實例中,一反射器(例如144)向內與第三基板層間隔開且大致與耦合孔徑狹槽113相對。該反射器可位於第一基板層之一內表面(例如基板128之最內表面)上。該反射器可如第1圖所示外露,或者如第2及3圖所示為嵌入式的-在此種情形中,封裝可包括一向內與反射器144間隔開之第四基板層,例如由結合薄膜170及基板172所形成者。該反射器可因而嵌於第一與第四基板層之間。
有利地,第二基板層(例如由薄膜106、109及基板108所形成者)中形成有一空氣腔,例如腔150。空氣腔150位於微帶104與接地平面110中之耦合孔徑狹槽113之間。較佳地,該空氣腔形成為與一通氣孔(例如通氣孔152或352)連通。在如第3圖所示之後一情形中,通氣孔352形成於第二基板層中;具體而言,形成於基板108中。在前一情形中,通氣孔152形成於向外與微帶104間隔開之另一基板層中,例如由基板102所形成者。微帶形成於該另一基板層102中,且通氣孔形成於該另一基板層102中。
如參照第6圖所述,在本發明之一或多個具體實施例中,構建二或更多個微帶以形成一平面相控陣列。因此,大體而言,上述微帶104可被稱為第一微帶,且上述饋線114為第一饋線。接地平面可形成有一或多個額外耦合孔徑狹槽,比如狹槽113。該封裝可包括向外與接地平面間隔開之一或多個額外之大致平面微帶,例如微帶602、604、606。該等額外狹槽可大體上與額外微帶相對。該封裝亦可包括向內與接地平面間隔開且大體上平行於接地平面之一或多個額外饋線,例如線608、610、614。該至少一射頻晶片162耦接至該(該等)額外饋線,且第一微帶及該(該等)額外微帶經排列形成一平面相控陣列。在相控陣列具體實施例中可採用單個具有多個狹槽之大接地平面。一相控陣列可包括大於或等於2之任意數量之微帶;然而,較佳該數量為2的乘方,例如2、4、8、16、32等等。
對於陣列應用而言,天線元件之間距約為自由空間波長之一半(例如在60GHz時為2.5毫米)。因此,構建多個天線腔頗具挑戰性,乃因腔壁會過薄。下文將參照第7圖-第18圖來論述用於解決該問題之本發明的具體實施例。一或多個此種具體實施例有利地減少在陣列情形中製造之難度。
第7圖及第8圖分別顯示一具有積體式天線之例示性封裝具體實施例之下視圖及剖面圖。與前述圖式中所示元件相似之元件具有相同之參考符號。如第8圖所示,該封裝具有與第3圖中之已有封裝相同之「堆疊」(為清楚起見,省略了焊墊及通孔)。然而,存在一用於所有天線之矩形環形腔750,以幫助使天線具有寬頻寬及高效率。亦存在一中央島702,以支撐封裝罩102,從而使罩不會下垂。島702之所以可取,還在於在晶片162之貼裝過程中封裝將不會變形。藉由此種組態,可具有多於一個天線環(如第9圖及第11圖所示)且天線饋線114可極短。島702可包括層106、108、109,且可例如藉由在該等層中鑽製腔750而形成。第9圖及第10圖類似於第7圖及第8圖,但具有一用於容納更多天線之更大腔750。
第11圖及第12圖分別顯示另一具有積體式天線之例示性封裝具體實施例之下視圖及剖面圖。此處,採用一圓形環形腔750。在至少某些實例中,圓形環形腔750可較第7圖-第10圖所示之矩形環形腔更易於製造(乃因圓形形狀往往更易於銑製)。在該具體實施例中,島702亦為圓形。第13圖及第14圖類似於第11圖及第12圖,但具有一較小之腔750,用於容納更少之天線。模擬顯示,在至少某些實例中,圓形陣列較矩形陣列具有略佳之輻射圖案。
對於較小之陣列,可採用一偏置或並排式組態,如第15圖及第16圖所示。RF晶片162通常遠小於天線陣列。因此,該組態將不會使封裝尺寸增大很多。然而,饋線114將長於第7圖-第14圖所示之組態,因此第15圖及第16圖之方法對於小陣列應用而言較佳。使腔160中之晶片162自天線腔750偏置可防止當晶片162安裝於腔160中時出現不可取之偏轉及應力,乃因腔160上方之層102、106、108、109、110、112提供支撐且因此在腔750中不需要島。偏置情形中之天線輻射圖案亦略大於環形腔情形中之圖案,乃因陣列得到完全填充。然而,在至少某些情形中,在偏置情形中,陣列饋線之設計更具挑戰性,對於更大陣列尤其如此。
第17圖-第18圖顯示第一(接收機)及第二(發射機)十六天線元件相控組態。在第17圖及第18圖中,如在其他例示性島具體實施例中一樣,腔750被界定於層106、108、109中,且具有島1702及外部1704。對於第17圖及第18圖之組態,封裝尺寸僅為28毫米×28毫米,高度(指向頁面內)為46密耳(應注意,46密耳=0.046英吋=1.17毫米)。在第17圖中,RF晶片162需要使用共面波導(CPW)饋送天線,因此存在十六條通往CPW過渡區1902之微帶。晶片162駐存於晶片腔160中。亦應注意饋線114、反射器144及接地平面狹槽113。第17圖之組態採用每一微帶一個接地平面狹槽,而第18圖之組態則採用每一微帶104兩個接地平面狹槽113。亦應注意,第17圖及第18圖係為下視圖,其中為便於例示起見,未使用虛線(隱藏線)。腔160中之晶片162位於島1702下方,正如第7-14圖所示。
因此本發明之一或多個具體實施例提供一種封裝,該封裝具有一用於RF晶片162之插座160以及一用於平面天線陣列之內腔750。天線腔750可例如係為一圓形或矩形環,或者對於並排式組態而言為一大的腔(後者之一實例顯示於第15圖及第16圖中)。該封裝之具體實施例可構建一平面相控陣列,較佳無需使用用於RF饋送之通孔,且在一或多個具體實施例中,具有一大體上相等、相對較短之饋線長度。若需要一相對較大之相控陣列,則可藉由擴大腔尺寸而使用更大之天線元件,如第9-12圖所示。
根據第7圖-第18圖之描述,應瞭解,大體而言,一具有N個積體式孔徑耦合微帶天線之射頻積體電路晶片封裝(其中N至少為2)包括N個大致平面之微帶104以及至少一大致平面之接地平面110,該至少一大致平面之接地平面110自該等N個大致平面之微帶向內間隔開且大體上平行於該等N個大致平面之微帶。該接地平面中形成有N個耦合孔徑狹槽113,且該等狹槽大體上與微帶104相對(在某些情形中,例如在第18圖中,可存在多於N個狹槽-例如2N個狹槽,其中每一微帶2個狹槽)。N條饋線114自接地平面110向內間隔開且大體上平行於接地平面110。至少一射頻晶片162自饋線114向內間隔開且耦接至饋線114及接地平面110。應注意,參照第1圖-第6圖所述之通孔、焊墊及隔離焊墊亦可用於第7圖-第18圖之具體實施例中。該等N個微帶104可經排列形成一平面相控陣列。
一第一基板層,例如由結合薄膜126及基板128所形成者,向內與饋線114間隔開且形成有一晶片容置腔160,其中晶片162位於晶片容置腔中。一第二基板層,例如由薄膜106、109及基板108所形成者,置於接地平面110與一由微帶104所界定之平面間之一區域中。微帶104形成於一第一金屬層中,接地平面110形成於一第二金屬層中,且第二基板層界定一天線腔750,其中該等N個大致平面之微帶104位於天線腔750中。
在某些實例中,在腔750內、第二基板層中形成一島702、1702,藉此界定該腔之一環形形狀,且該等N個大致平面之微帶104位於該環形形狀中,其中島702、1702大體上與晶片容置腔160相對。本文所述「大體上相對」旨在描述一種如下組態:其中當在剖面圖中觀察時,島至少部分地交疊晶片容置腔,以幫助支撐因將晶片162插入腔160中而引起之插入負載。島及空腔可具有各種形狀,且在任一特定實例中可具有相同或不同之形狀。在某些例示性、非限定性情形中,當在剖面圖中觀察時,二者皆為大體上矩形(矩形囊括但不限於正方形),而在其他例示性、非限定性情形中,當在剖面圖中觀察時,二者皆為大體上圓形的。
在某些實例中,一第三基板層,例如由基板112所形成者,置於接地平面110與饋線114間之一區域中,且饋線114形成於一第三金屬層中。在一或多個具體實施例中,N個反射器144向內與第三基板層間隔開且大致與耦合孔徑狹槽113相對。反射器144可例如位於第一基板層之一內表面上。此外,在某些實例中,一第四基板層,例如由結合薄膜170及基板172所形成者,向內與反射器144間隔開,其中反射器144嵌於第一與第四基板層之間。
在例如第15圖及第16圖所示之其他情形中,當在剖面圖中觀察時,天線腔750與晶片容置腔160間隔開,進而在將晶片162插入晶片容置腔160內時所引起之負載實質上遠離天線腔而被支撐(例如,藉由緊位於晶片162上方之層102、108、106、109、110、112中之壓擠而被支撐)。
在某些實例中,一罩(例如層102)緊固於天線腔750上方,且至少部分地由島702支撐。
在另一態樣中,一種製造上述種類之一射頻積體電路晶片封裝之方法包括:提供上述種類之一封裝,其未插入晶片162,且具有上述之島702;以及將至少一射頻晶片162插入腔160中,其中島702支撐因將晶片插入腔內而引起之負載。
在又一態樣中,一種製造上述種類之一射頻積體電路晶片封裝之方法包括:提供上述種類之一封裝,其未插入晶片162,且具有天線腔,當在平面圖中觀察時,該天線腔與晶片容置腔間隔開(例如在第15圖及第16圖中所示);以及將至少一個射頻晶片162插入腔160中,進而在將晶片162插入晶片容置腔160內時所引起之負載實質上遠離天線腔而被支撐(例如,藉由緊位於晶片162上方之層102、108、106、109、110、112中之壓擠而被支撐)。
應瞭解且應理解,上述本發明之例示性具體實施例可按諸多不同之方式構建。根據本文所提供之本發明之教示,相關領域中之一般技術者將能夠設想出本發明之其他實施方案。
儘管上文係參照附圖描述本發明之例示性具體實施例,然而應理解,本發明並非僅限於彼等確切之具體實施例,且熟習此項技術者可作出各種其他變化及改動,此並不背離本發明之精神範圍。
100...例示性封裝
102...基板
104...微帶天線
106...結合薄膜層
108...基板層
109...結合薄膜層
110...接地平面
112...基板層
113...狹槽
114...天線饋線
116...焊墊
118...焊墊
120...焊墊
122...互連線
124...通孔
126...結合薄膜層
128...基板
130...接地焊墊
132...焊墊
134...封裝焊墊
140...通孔
142...隔離焊墊
144...反射器
150...腔
152...孔
160...腔
162...晶片
170...結合薄膜層
172...基板
190...通孔
200...具體實施例
300...具體實施例
352...通氣孔
400...仰視圖
402...封裝材料
404...外側焊墊
406...內側焊墊
500...視圖
600...例示性封裝
602...微帶
604...微帶
606...微帶
608...饋線
610...饋線
612...饋線
702...中央島
750...環形腔
1702...島
1704...外部
1902...過渡區
第1圖以剖面圖形式顯示根據本發明之一態樣之封裝之一例示性具體實施例;
第2圖以剖面圖形式顯示根據本發明之另一態樣之另一封裝之一例示性具體實施例;
第3圖以剖面圖形式顯示根據本發明之再一態樣之再一封裝之一例示性具體實施例;
第4圖係不具有反射器或具有嵌入式反射器之一例示性封裝之仰視圖;
第5圖係具有可見反射器之一例示性封裝之仰視圖;
第6圖係一例示性平面相控陣列具體實施例之仰視圖;
第7圖係根據本發明又一態樣之一矩形環形腔封裝之下視圖(請注意本文之術語「下視圖」與「平面圖」係通用的);
第8圖係沿第7圖之線VIII-VIII截取之剖面圖;
第9圖係第7圖之封裝之更大版本;
第10圖係沿第9圖之線X-X截取之剖面圖;
第11圖係根據本發明又一態樣之一圓形環形腔封裝之下視圖;
第12圖係沿第11圖之線XII-XII截取之剖面圖;
第13圖係第11圖之封裝之更小版本;
第14圖係沿第13圖之線XIV-XIV截取之剖面圖;
第15圖係根據本發明再一態樣之一偏置(並列)腔封裝之下視圖;
第16圖係沿第15圖之線XVI-XVI截取之剖面圖;
第17圖係根據本發明又一態樣之一例示性十六天線相控陣列組態之下視圖;
第18圖係根據本發明之一額外態樣之另一例示性十六天線相控陣列組態之下視圖。
100...例示性封裝
102...基板
104...微帶天線
106...結合薄膜層
108...基板層
109...結合薄膜層
110...接地平面
112...基板層
113...狹槽
114...天線饋線
116...焊墊
118...焊墊
120...焊墊
122...互連線
124...通孔
126...結合薄膜層
128...基板
130...接地焊墊
132...焊墊
134...封裝焊墊
140...通孔
142...隔離焊墊
144...反射器
150...腔
152...孔
160...腔
162...晶片
190...通孔

Claims (15)

  1. 一種射頻積體電路晶片封裝,具有N個積體式孔徑耦合微帶天線,N至少為2,該封裝包括:N個大致平面之微帶;至少一大致平面之接地平面,其向內與該等N個大致平面之微帶間隔開且大體上平行於該等N個大致平面之微帶,該接地平面中形成有至少N個耦合孔徑狹槽,該等狹槽大體上與該等微帶相對;N條饋線,其向內與該接地平面間隔開且大體上平行於該接地平面;至少一射頻晶片,其向內與該等饋線間隔開且耦接至該等饋線及該接地平面;一第一基板層,其向內與該等饋線間隔開,該第一基板層形成有一晶片容置腔,該晶片位於該晶片容置腔中;以及一第二基板層,其置於該接地平面與一由該微帶所界定之平面間之一區域中,其中:該微帶形成於一第一金屬層中;該接地平面形成於一第二金屬層中;以及該第二基板層界定一天線腔,該等N個大致平面之微帶位於該天線腔中。
  2. 如申請專利範圍第1項所述之封裝,更包括一在該天線腔內形成於該第二基板層中之島,藉此界定該腔之一環形形狀,該島大體上與該晶片容置腔相對。
  3. 如申請專利範圍第2項所述之封裝,其中當在平面圖中觀察時,該島及該天線腔大體上為矩形。
  4. 如申請專利範圍第2項所述之封裝,其中當在平面圖中觀察時,該島及該天線腔大體上為圓形。
  5. 如申請專利範圍第2項所述之封裝,更包括一第三基板層,該第三基板層置於該接地平面與該等饋線間之一區域中,其中該等饋線形成於一第三金屬層中。
  6. 如申請專利範圍第5項所述之封裝,更包括N個反射器,該等N個反射器向內與該第三基板層間隔開且大致與該等耦合孔徑狹槽相對。
  7. 如申請專利範圍第6項所述之封裝,其中該等反射器位於該第一基板層之一內表面上。
  8. 如申請專利範圍第7項所述之封裝,更包括一第四基板層,該第四基板層向內與該等反射器間隔開,該等反射器嵌於該第一與該第四基板層之間。
  9. 如申請專利範圍第2項所述之封裝,更包括一罩,其中該島經配置(configured)以支撐該罩。
  10. 如申請專利範圍第1項所述之封裝,其中該等N個微帶經排列形成一平面相控陣列。
  11. 如申請專利範圍第1項所述之封裝,其中當在平面圖中觀察時,該天線腔與該晶片容置腔間隔開,以便在將該晶片插入該晶片容置腔內期間所引起之負載遠離該天線腔而被支撐。
  12. 如申請專利範圍第1項所述之封裝,其中該接地平面中形成有該等至少2N個耦合孔徑狹槽,該等微帶中之每一者皆對應於該等耦合孔徑狹槽其中之二。
  13. 一種製造一射頻積體電路晶片封裝之方法,該射頻積體電路晶片封裝具有N個積體式孔徑耦合微帶天線,N至少為2,該方法包括以下步驟:提供一封裝,該封裝包括:N個大致平面之微帶;至少一大致平面之接地平面,其向內與該等N個大致平面之微帶間隔開且大體上平行於該等N個大致平面之微帶,該接地平面中形成有至少N個耦合孔徑狹槽,該等狹槽大體上與該等微帶相對;N條饋線,其向內與該接地平面間隔開且大體上平行於該接地平面;一第一基板層,其向內與該等饋線間隔開,該第一基板層形成有一晶片容置腔;一第二基板層,其置於該接地平面與一由該微帶所界定之平面間之一區域中,其中:該微帶形成於一第一金屬層中;該接地平面形成於一第二金屬層中;以及該第二基板層界定一天線腔,該等N個大致平面之微帶係位於該天線腔中;以及一島,其在該天線腔內形成於該第二基板層中,藉此界定該腔之一環形形狀,該島大體上與該晶片容置腔相對;以及将至少一射頻晶片插入該晶片容置腔內,其中該島支撐因該晶片向該晶片容置腔內之該插入所引起之負載。
  14. 如申請專利範圍第13項所述之方法,更包括以下額外步驟:將一罩緊固於該天線腔上方,其中該罩至少部分由該島支撐。
  15. 一種製造一射頻積體電路晶片封裝之方法,該射頻積體電路晶片封裝具有N個積體式孔徑耦合微帶天線,N至少為2,該方法包括以下步驟:提供一封裝,該封裝包括:N個大致平面之微帶;至少一個大致平面之接地平面,其向內與該等N個大致平面之微帶間隔開且大體上平行於該等N個大致平面之微帶,該接地平面中形成有至少N個耦合孔徑狹槽,該等狹槽大體上與該等微帶相對;N條饋線,其向內與該接地平面間隔開且大體上平行於該接地平面;一第一基板層,其向內與該等饋線間隔開,該第一基板層形成有一晶片容置腔;一第二基板層,其置於該接地平面與一由該微帶所界定之平面間之一區域中,其中:該微帶形成於一第一金屬層中;該接地平面形成於一第二金屬層中;以及該第二基板層界定一天線腔,該等N個大致平面之微帶係位於該天線腔中;以及當在平面圖中觀察時,該天線腔係與該晶片容置腔間隔開;以及將至少一個射頻晶片插入該晶片容置腔內,以便在將該晶片插入該晶片容置腔內期間所引起之負載遠離該天線腔而被支撐。
TW098111568A 2008-04-14 2009-04-07 具有環形腔及/或偏置腔中之積體式孔徑耦合微帶天線的射頻積體電路封裝 TWI497828B (zh)

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Families Citing this family (135)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011051456A1 (de) * 2009-10-29 2011-05-05 Technische Universität Dresden Antennenanordnung zur übertragung von signalen
US8558637B2 (en) 2010-05-12 2013-10-15 Mediatek Inc. Circuit device with signal line transition element
US8325092B2 (en) 2010-07-22 2012-12-04 Toyota Motor Engineering & Manufacturing North America, Inc. Microwave antenna
US8923528B2 (en) 2010-08-30 2014-12-30 Microsoft Corporation Hearing aid-compatible apparatus for wireless communication devices
US8587482B2 (en) 2011-01-21 2013-11-19 International Business Machines Corporation Laminated antenna structures for package applications
US8988299B2 (en) 2011-02-17 2015-03-24 International Business Machines Corporation Integrated antenna for RFIC package applications
US20120319295A1 (en) * 2011-06-17 2012-12-20 Chi Heejo Integrated circuit packaging system with pads and method of manufacture thereof
US9203159B2 (en) * 2011-09-16 2015-12-01 International Business Machines Corporation Phased-array transceiver
KR101722018B1 (ko) 2011-10-19 2017-04-03 삼성전자주식회사 다층회로형 안테나 패키지
US9825674B1 (en) 2014-05-23 2017-11-21 Energous Corporation Enhanced transmitter that selects configurations of antenna elements for performing wireless power transmission and receiving functions
US9876394B1 (en) 2014-05-07 2018-01-23 Energous Corporation Boost-charger-boost system for enhanced power delivery
US9787103B1 (en) 2013-08-06 2017-10-10 Energous Corporation Systems and methods for wirelessly delivering power to electronic devices that are unable to communicate with a transmitter
US11502551B2 (en) 2012-07-06 2022-11-15 Energous Corporation Wirelessly charging multiple wireless-power receivers using different subsets of an antenna array to focus energy at different locations
US10256657B2 (en) 2015-12-24 2019-04-09 Energous Corporation Antenna having coaxial structure for near field wireless power charging
US10992185B2 (en) 2012-07-06 2021-04-27 Energous Corporation Systems and methods of using electromagnetic waves to wirelessly deliver power to game controllers
US9867062B1 (en) 2014-07-21 2018-01-09 Energous Corporation System and methods for using a remote server to authorize a receiving device that has requested wireless power and to determine whether another receiving device should request wireless power in a wireless power transmission system
US10063105B2 (en) 2013-07-11 2018-08-28 Energous Corporation Proximity transmitters for wireless power charging systems
US10992187B2 (en) 2012-07-06 2021-04-27 Energous Corporation System and methods of using electromagnetic waves to wirelessly deliver power to electronic devices
US10312715B2 (en) 2015-09-16 2019-06-04 Energous Corporation Systems and methods for wireless power charging
US10965164B2 (en) 2012-07-06 2021-03-30 Energous Corporation Systems and methods of wirelessly delivering power to a receiver device
US12057715B2 (en) 2012-07-06 2024-08-06 Energous Corporation Systems and methods of wirelessly delivering power to a wireless-power receiver device in response to a change of orientation of the wireless-power receiver device
US9721920B2 (en) * 2012-10-19 2017-08-01 Infineon Technologies Ag Embedded chip packages and methods for manufacturing an embedded chip package
US9252491B2 (en) 2012-11-30 2016-02-02 Taiwan Semiconductor Manufacturing Company, Ltd. Embedding low-k materials in antennas
US9917372B2 (en) * 2014-06-13 2018-03-13 Nxp Usa, Inc. Integrated circuit package with radio frequency coupling arrangement
US10103447B2 (en) 2014-06-13 2018-10-16 Nxp Usa, Inc. Integrated circuit package with radio frequency coupling structure
US9652649B2 (en) * 2014-07-02 2017-05-16 Auden Techno Corp. Chip-type antenna device and chip structure
US9620464B2 (en) * 2014-08-13 2017-04-11 International Business Machines Corporation Wireless communications package with integrated antennas and air cavity
US10225925B2 (en) 2014-08-29 2019-03-05 Nxp Usa, Inc. Radio frequency coupling and transition structure
US11264708B2 (en) * 2015-01-27 2022-03-01 At&S Austria Technologie & Systemtechnik Aktiengesellschaft Component carrier with integrated antenna structure
FR3032556B1 (fr) 2015-02-11 2017-03-17 Commissariat Energie Atomique Dispositif de transmission rf a reflecteur d'ondes electromagnetiques integre
JP6429680B2 (ja) * 2015-03-03 2018-11-28 パナソニック株式会社 アンテナ一体型モジュール及びレーダ装置
US11710321B2 (en) 2015-09-16 2023-07-25 Energous Corporation Systems and methods of object detection in wireless power charging systems
US10778041B2 (en) 2015-09-16 2020-09-15 Energous Corporation Systems and methods for generating power waves in a wireless power transmission system
WO2017078851A2 (en) * 2015-09-18 2017-05-11 Corman David W Laminar phased array
US10734717B2 (en) 2015-10-13 2020-08-04 Energous Corporation 3D ceramic mold antenna
US10063108B1 (en) 2015-11-02 2018-08-28 Energous Corporation Stamped three-dimensional antenna
US10038332B1 (en) 2015-12-24 2018-07-31 Energous Corporation Systems and methods of wireless power charging through multiple receiving devices
US10079515B2 (en) 2016-12-12 2018-09-18 Energous Corporation Near-field RF charging pad with multi-band antenna element with adaptive loading to efficiently charge an electronic device at any position on the pad
WO2017112949A1 (en) 2015-12-24 2017-06-29 Energous Corporation Systems and methods of wireless power charging through multiple receiving devices
US11863001B2 (en) 2015-12-24 2024-01-02 Energous Corporation Near-field antenna for wireless power transmission with antenna elements that follow meandering patterns
EP3907856A1 (en) * 2015-12-24 2021-11-10 Energous Corporation Systems and methods of wireless power charging through multiple receiving devices
CN110611160B (zh) * 2016-01-30 2021-08-03 华为技术有限公司 一种贴片天线单元及天线
JP2017157961A (ja) * 2016-02-29 2017-09-07 パナソニック株式会社 アンテナ基板
WO2017209761A1 (en) * 2016-06-03 2017-12-07 Intel IP Corporation Wireless module with antenna package and cap package
CN107645033B (zh) * 2016-07-21 2020-10-02 环旭电子股份有限公司 电子模块
US10290951B2 (en) 2016-08-18 2019-05-14 Anokiwave, Inc. Hybrid laminated phased array
CN106207492B (zh) * 2016-08-28 2019-06-28 中国电子科技集团公司第十研究所 高密度集成一体化瓦式有源相控阵天线架构
US10320093B2 (en) 2016-08-31 2019-06-11 Anokiwave, Inc. Phased array control circuit
US10587044B2 (en) 2016-10-24 2020-03-10 Anokiwave, Inc. Flip-chip beamforming integrated circuit with integral thermal mass
US10923954B2 (en) 2016-11-03 2021-02-16 Energous Corporation Wireless power receiver with a synchronous rectifier
US10594019B2 (en) * 2016-12-03 2020-03-17 International Business Machines Corporation Wireless communications package with integrated antenna array
CN116455101A (zh) * 2016-12-12 2023-07-18 艾诺格思公司 发射器集成电路
US10439442B2 (en) 2017-01-24 2019-10-08 Energous Corporation Microstrip antennas for wireless power transmitters
US10680319B2 (en) 2017-01-06 2020-06-09 Energous Corporation Devices and methods for reducing mutual coupling effects in wireless power transmission systems
JP6602324B2 (ja) * 2017-01-17 2019-11-06 株式会社東芝 無線装置
US10396432B2 (en) * 2017-01-23 2019-08-27 Samsung Electro-Mechanics Co., Ltd. Antenna-integrated radio frequency module
JP6602326B2 (ja) 2017-02-06 2019-11-06 株式会社東芝 無線装置
US10580713B2 (en) 2017-02-08 2020-03-03 Advanced Semiconductor Engineering, Inc. Semiconductor package device and method of manufacturing the same
NO345389B1 (en) * 2017-03-15 2021-01-11 Norbit Its Patch antenna feed
CN110506367B (zh) * 2017-03-21 2021-08-03 株式会社村田制作所 天线模块和通信装置
WO2018183892A1 (en) 2017-03-30 2018-10-04 Energous Corporation Flat antennas having two or more resonant frequencies for use in wireless power transmission systems
US10382010B2 (en) 2017-03-31 2019-08-13 Anokiwave, Inc. Attenuation circuit and method of controlling an attenuation circuit
CN110574235B (zh) * 2017-04-26 2021-05-14 株式会社村田制作所 天线模块和通信装置
US11239561B2 (en) 2017-05-15 2022-02-01 Sony Group Corporation Patch antenna for millimeter wave communications
US12074460B2 (en) 2017-05-16 2024-08-27 Wireless Electrical Grid Lan, Wigl Inc. Rechargeable wireless power bank and method of using
US12074452B2 (en) 2017-05-16 2024-08-27 Wireless Electrical Grid Lan, Wigl Inc. Networked wireless charging system
US11462949B2 (en) 2017-05-16 2022-10-04 Wireless electrical Grid LAN, WiGL Inc Wireless charging method and system
US10848853B2 (en) 2017-06-23 2020-11-24 Energous Corporation Systems, methods, and devices for utilizing a wire of a sound-producing device as an antenna for receipt of wirelessly delivered power
US11394103B2 (en) * 2017-07-18 2022-07-19 Samsung Electro-Mechanics Co., Ltd. Antenna module and manufacturing method thereof
US10355370B2 (en) 2017-08-04 2019-07-16 Anokiwave, Inc. Dual phased array with single polarity beam steering integrated circuits
US10700410B2 (en) 2017-10-27 2020-06-30 Mediatek Inc. Antenna-in-package with better antenna performance
US11342798B2 (en) 2017-10-30 2022-05-24 Energous Corporation Systems and methods for managing coexistence of wireless-power signals and data signals operating in a same frequency band
US10993315B2 (en) * 2017-10-31 2021-04-27 Avl Technologies, Inc. Printed circuit via for KA satcom circuit boards
KR20190050155A (ko) * 2017-11-02 2019-05-10 삼성전기주식회사 반도체 패키지와 그 제조 방법
WO2019126826A1 (en) 2017-12-24 2019-06-27 Anokiwave, Inc. Beamforming integrated circuit, aesa system and method
KR101962821B1 (ko) * 2018-01-18 2019-07-31 동우 화인켐 주식회사 필름 안테나 및 이를 포함하는 디스플레이 장치
KR102022353B1 (ko) * 2018-01-18 2019-09-18 삼성전기주식회사 안테나 모듈
US10833414B2 (en) * 2018-03-02 2020-11-10 Samsung Electro-Mechanics Co., Ltd. Antenna apparatus and antenna module
WO2019173622A1 (en) 2018-03-07 2019-09-12 Anokiwave, Inc. Phased array with low-latency control interface
US11336015B2 (en) * 2018-03-28 2022-05-17 Intel Corporation Antenna boards and communication devices
US11380979B2 (en) 2018-03-29 2022-07-05 Intel Corporation Antenna modules and communication devices
US11063336B2 (en) 2018-04-05 2021-07-13 Anokiwave, Inc. Phased array architecture with distributed temperature compensation and integrated up/down conversion
CN110349931B (zh) * 2018-04-08 2021-04-09 华为技术有限公司 封装结构、电子装置及封装方法
US11189905B2 (en) * 2018-04-13 2021-11-30 International Business Machines Corporation Integrated antenna array packaging structures and methods
US10854978B2 (en) * 2018-04-23 2020-12-01 Samsung Electro-Mechanics Co., Ltd. Antenna apparatus and antenna module
US10957982B2 (en) * 2018-04-23 2021-03-23 Samsung Electro-Mechanics Co., Ltd. Antenna module formed of an antenna package and a connection member
KR102085791B1 (ko) * 2018-04-23 2020-03-06 삼성전기주식회사 안테나 장치 및 안테나 모듈
CN110401005B (zh) * 2018-04-24 2021-01-29 华为技术有限公司 封装天线及其制备方法、和移动通信终端
CN110400779B (zh) 2018-04-25 2022-01-11 华为技术有限公司 封装结构
CN110401008B (zh) * 2018-04-25 2022-02-25 华为技术有限公司 带有封装天线的封装架构及通信设备
US11011827B2 (en) 2018-05-11 2021-05-18 Intel IP Corporation Antenna boards and communication devices
CA3096346C (en) * 2018-05-15 2021-02-16 Mitsubishi Electric Corporation Array antenna apparatus and communication device
US10998640B2 (en) 2018-05-15 2021-05-04 Anokiwave, Inc. Cross-polarized time division duplexed antenna
US11509037B2 (en) 2018-05-29 2022-11-22 Intel Corporation Integrated circuit packages, antenna modules, and communication devices
US10797394B2 (en) 2018-06-05 2020-10-06 Intel Corporation Antenna modules and communication devices
KR102565703B1 (ko) * 2018-07-18 2023-08-10 삼성전기주식회사 패키지 기판 및 이를 포함하는 칩 패키지
AU2019344542B2 (en) * 2018-09-17 2022-02-24 3D Glass Solutions, Inc. High efficiency compact slotted antenna with a ground plane
US11205858B1 (en) 2018-10-16 2021-12-21 Anokiwave, Inc. Element-level self-calculation of phased array vectors using direct calculation
US10985819B1 (en) 2018-10-16 2021-04-20 Anokiwave, Inc. Element-level self-calculation of phased array vectors using interpolation
US11437735B2 (en) 2018-11-14 2022-09-06 Energous Corporation Systems for receiving electromagnetic energy using antennas that are minimally affected by the presence of the human body
WO2020137240A1 (ja) * 2018-12-26 2020-07-02 日本電気株式会社 無線通信装置
KR102557031B1 (ko) * 2018-12-28 2023-07-19 삼성전자주식회사 금속 베젤을 이용하는 안테나 모듈 및 그것을 포함하는 전자 장치
WO2020160015A1 (en) 2019-01-28 2020-08-06 Energous Corporation Systems and methods for miniaturized antenna for wireless power transmissions
US11018779B2 (en) 2019-02-06 2021-05-25 Energous Corporation Systems and methods of estimating optimal phases to use for individual antennas in an antenna array
CN111755812A (zh) * 2019-03-28 2020-10-09 电连技术股份有限公司 天线模组及终端
CN109979922A (zh) * 2019-04-02 2019-07-05 中芯长电半导体(江阴)有限公司 天线封装结构及封装方法
US11784143B2 (en) * 2019-05-23 2023-10-10 Intel Corporation Single metal cavity antenna in package connected to an integrated transceiver front-end
US11430750B2 (en) 2019-05-29 2022-08-30 Advanced Semiconductor Engineering, Inc. Semiconductor device package having an antenna formed over a foaming agent filled cavity in a support layer
KR102461628B1 (ko) * 2019-06-26 2022-11-01 삼성전기주식회사 안테나 장치
KR102207150B1 (ko) 2019-06-26 2021-01-25 삼성전기주식회사 안테나 장치
CN112242612A (zh) * 2019-07-19 2021-01-19 康普技术有限责任公司 贴片天线
US11004801B2 (en) 2019-08-28 2021-05-11 Amkor Technology Singapore Holding Pte. Ltd. Semiconductor devices and methods of manufacturing semiconductor devices
US11355451B2 (en) 2019-08-28 2022-06-07 Amkor Technology Singapore Holding Pte. Ltd. Semiconductor devices and methods of manufacturing semiconductor devices
WO2021055898A1 (en) 2019-09-20 2021-03-25 Energous Corporation Systems and methods for machine learning based foreign object detection for wireless power transmission
US11381118B2 (en) 2019-09-20 2022-07-05 Energous Corporation Systems and methods for machine learning based foreign object detection for wireless power transmission
CN115104234A (zh) 2019-09-20 2022-09-23 艾诺格思公司 使用多个整流器保护无线电力接收器以及使用多个整流器建立带内通信的系统和方法
EP4032169A4 (en) 2019-09-20 2023-12-06 Energous Corporation CLASSIFICATION AND DETECTION OF FOREIGN OBJECTS USING POWER AMPLIFIER CONTROLLER INTEGRATED CIRCUIT IN WIRELESS POWER TRANSMISSION SYSTEMS
EP4073905A4 (en) 2019-12-13 2024-01-03 Energous Corporation CHARGING PAD WITH GUIDING CONTOURS FOR ALIGNING AN ELECTRONIC DEVICE ON THE CHARGING PAD AND FOR EFFICIENTLY TRANSMITTING NEAR FIELD HIGH FREQUENCY ENERGY TO THE ELECTRONIC DEVICE
CN110890357A (zh) * 2019-12-24 2020-03-17 华进半导体封装先导技术研发中心有限公司 一种基于金属基底的集成天线和射频前端的埋入封装结构
US10985617B1 (en) 2019-12-31 2021-04-20 Energous Corporation System for wirelessly transmitting energy at a near-field distance without using beam-forming control
DE102020200974A1 (de) * 2020-01-28 2021-07-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Antennenmodul
CN113517545B (zh) * 2020-04-10 2022-11-25 华为技术有限公司 一种天线模块及其制造方法和电子设备
US11799324B2 (en) 2020-04-13 2023-10-24 Energous Corporation Wireless-power transmitting device for creating a uniform near-field charging area
CN111564373A (zh) * 2020-05-20 2020-08-21 甬矽电子(宁波)股份有限公司 具有天线的基板的制作方法、封装天线结构和电子设备
CN111653527B (zh) * 2020-06-15 2023-03-28 华进半导体封装先导技术研发中心有限公司 封装天线及其制造方法
CN112467397B (zh) * 2020-11-19 2022-06-24 成都天锐星通科技有限公司 一种相控阵天线单元及模组
CN113013611A (zh) * 2021-05-18 2021-06-22 成都天锐星通科技有限公司 天线板及天线系统
US20220407215A1 (en) * 2021-06-17 2022-12-22 Advanced Semiconductor Engineering, Inc. Semiconductor device package and method of manufacturing the same
US20230018781A1 (en) * 2021-07-15 2023-01-19 Dell Products L.P. Information handling system docking station glass housing having an integrated antenna
CN113571872A (zh) * 2021-07-27 2021-10-29 安徽安努奇科技有限公司 一种内匹配芯片天线及其制造方法
KR20240036137A (ko) * 2021-08-13 2024-03-19 교세라 에이브이엑스 컴포넌츠(샌디에고)인코포레이티드 곡면 및 평면 기판의 안테나 어레이
WO2023049662A1 (en) * 2021-09-22 2023-03-30 Jabil Inc. Double back drill via for low cost pcb mmwave phased array antennas
US11916398B2 (en) 2021-12-29 2024-02-27 Energous Corporation Small form-factor devices with integrated and modular harvesting receivers, and shelving-mounted wireless-power transmitters for use therewith
TWI819923B (zh) * 2022-06-14 2023-10-21 創未來科技股份有限公司 天線封裝結構
KR20240127705A (ko) 2023-02-16 2024-08-23 한국전자기술연구원 안테나가 집적된 고주파 반도체 패키지 및 그 제조방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135105A (ja) * 1987-11-20 1989-05-26 Fujitsu Ltd パッチアンテナ
US20040113840A1 (en) * 2000-12-20 2004-06-17 Frank Gottwald Antenna assembly
US6982480B2 (en) * 2003-07-31 2006-01-03 The Boeing Company Near hermetic packaging of gallium arsenide semiconductor devices and manufacturing method therefor
US20070026567A1 (en) * 2005-06-01 2007-02-01 Gottfried Beer Semiconductor module comprising components for microwave engineering in plastic casing and method for the production thereof

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3141692B2 (ja) * 1994-08-11 2001-03-05 松下電器産業株式会社 ミリ波用検波器
JP3194468B2 (ja) * 1995-05-29 2001-07-30 日本電信電話株式会社 マイクロストリップアンテナ
JP3427040B2 (ja) * 1996-02-29 2003-07-14 京セラ株式会社 高周波用パッケージ
JP2957463B2 (ja) * 1996-03-11 1999-10-04 日本電気株式会社 パッチアンテナおよびその製造方法
JP3373753B2 (ja) * 1997-03-28 2003-02-04 株式会社東芝 超高周波帯無線通信装置
US6854069B2 (en) 2000-05-02 2005-02-08 Sun Microsystems Inc. Method and system for achieving high availability in a networked computer system
EP1304766A4 (en) * 2000-06-30 2009-05-13 Sharp Kk RADIO COMMUNICATION DEVICE WITH INTEGRATED ANTENNA, INTEGRATED TRANSMITTER AND INTEGRATED RECEIVER
WO2004042868A1 (en) 2002-11-07 2004-05-21 Fractus, S.A. Integrated circuit package including miniature antenna
US6906668B2 (en) 2003-06-11 2005-06-14 Harris Corporation Dynamically reconfigurable aperture coupled antenna
US7084828B2 (en) 2003-08-27 2006-08-01 Harris Corporation Shaped ground plane for dynamically reconfigurable aperture coupled antenna
US7119745B2 (en) 2004-06-30 2006-10-10 International Business Machines Corporation Apparatus and method for constructing and packaging printed antenna devices
US7312763B2 (en) * 2004-07-23 2007-12-25 Farrokh Mohamadi Wafer scale beam forming antenna module with distributed amplification
ES2307056T3 (es) * 2004-09-24 2008-11-16 Jast Sa Antena plana para aplicaciones moviles por satelite.
US7812729B2 (en) 2004-11-15 2010-10-12 Sensormatic Electronics, LLC Combination EAS and RFID label or tag with controllable read range using a hybrid RFID antenna
US7321339B2 (en) * 2005-01-14 2008-01-22 Farrokh Mohamadi Phase shifters for beamforming applications
JP4541922B2 (ja) * 2005-02-21 2010-09-08 三菱電機株式会社 アンテナ装置
US7605706B2 (en) 2005-05-13 2009-10-20 The Kennedy Group, Inc. Patch antenna for RFID tag
US7333059B2 (en) * 2005-07-27 2008-02-19 Agc Automotive Americas R&D, Inc. Compact circularly-polarized patch antenna
US7453363B2 (en) 2005-08-19 2008-11-18 Thingmagic, Inc. RFID reader system incorporating antenna orientation sensing
CN101385202A (zh) 2005-12-14 2009-03-11 堪萨斯州立大学 射频识别装置用的微带天线
US7518229B2 (en) 2006-08-03 2009-04-14 International Business Machines Corporation Versatile Si-based packaging with integrated passive components for mmWave applications

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135105A (ja) * 1987-11-20 1989-05-26 Fujitsu Ltd パッチアンテナ
US20040113840A1 (en) * 2000-12-20 2004-06-17 Frank Gottwald Antenna assembly
US6982480B2 (en) * 2003-07-31 2006-01-03 The Boeing Company Near hermetic packaging of gallium arsenide semiconductor devices and manufacturing method therefor
US20070026567A1 (en) * 2005-06-01 2007-02-01 Gottfried Beer Semiconductor module comprising components for microwave engineering in plastic casing and method for the production thereof

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