TWI490974B - 基板固持裝置 - Google Patents

基板固持裝置 Download PDF

Info

Publication number
TWI490974B
TWI490974B TW101100627A TW101100627A TWI490974B TW I490974 B TWI490974 B TW I490974B TW 101100627 A TW101100627 A TW 101100627A TW 101100627 A TW101100627 A TW 101100627A TW I490974 B TWI490974 B TW I490974B
Authority
TW
Taiwan
Prior art keywords
circumferential groove
pad
substrate
holding member
radius
Prior art date
Application number
TW101100627A
Other languages
English (en)
Chinese (zh)
Other versions
TW201250916A (en
Inventor
Shinichi Hayashi
Suguru Enokida
Naruaki Iida
Hideki Kajiwara
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW201250916A publication Critical patent/TW201250916A/zh
Application granted granted Critical
Publication of TWI490974B publication Critical patent/TWI490974B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B25J15/0683—Details of suction cup structure, e.g. grooves or ridges

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
TW101100627A 2011-03-18 2012-01-06 基板固持裝置 TWI490974B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011060716A JP5345167B2 (ja) 2011-03-18 2011-03-18 基板保持装置

Publications (2)

Publication Number Publication Date
TW201250916A TW201250916A (en) 2012-12-16
TWI490974B true TWI490974B (zh) 2015-07-01

Family

ID=46827834

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101100627A TWI490974B (zh) 2011-03-18 2012-01-06 基板固持裝置

Country Status (4)

Country Link
US (1) US8720873B2 (enExample)
JP (1) JP5345167B2 (enExample)
KR (1) KR101690223B1 (enExample)
TW (1) TWI490974B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
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TWI710438B (zh) * 2017-01-27 2020-11-21 德商蘇士微科技印刷術股份有限公司 用於末端執行器之抽吸裝置、用於保持基板之末端執行器及製造末端執行器之方法

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US9364925B2 (en) * 2012-04-30 2016-06-14 Globalfoundries Inc. Assembly of electronic and optical devices
JP6186124B2 (ja) * 2012-12-14 2017-08-23 東京応化工業株式会社 搬送アーム、搬送装置および搬送方法
KR20140102782A (ko) * 2013-02-14 2014-08-25 삼성전자주식회사 웨이퍼 이송용 블레이드 및 이를 포함하는 웨이퍼 이송 장치
TWI583605B (zh) * 2013-04-16 2017-05-21 xi-cong Lin A glass panel capture device and a method of capturing a glass panel thereof
SG10201402399RA (en) * 2013-05-23 2014-12-30 Asm Tech Singapore Pte Ltd A transfer device for holding an object using a gas flow
JP6127728B2 (ja) * 2013-05-30 2017-05-17 三星ダイヤモンド工業株式会社 脆性材料基板の搬送ヘッド
JP5861677B2 (ja) * 2013-07-08 2016-02-16 株式会社安川電機 吸着構造、ロボットハンドおよびロボット
JP2015013357A (ja) * 2013-07-08 2015-01-22 株式会社安川電機 吸着構造、ロボットハンドおよびロボット
JP2015013358A (ja) * 2013-07-08 2015-01-22 株式会社安川電機 吸着構造、ロボットハンドおよびロボット
JP5929947B2 (ja) * 2014-02-28 2016-06-08 株式会社安川電機 吸着パッド、ロボットハンドおよびロボット
US9991152B2 (en) * 2014-03-06 2018-06-05 Cascade Microtech, Inc. Wafer-handling end effectors with wafer-contacting surfaces and sealing structures
JP6726473B2 (ja) * 2016-02-15 2020-07-22 株式会社ディスコ チャックテーブル機構
JP6298099B2 (ja) * 2016-05-18 2018-03-20 キヤノントッキ株式会社 基板搬送装置
CN106252058A (zh) * 2016-08-22 2016-12-21 泰州新源电工器材有限公司 一种撑条台阶的加工设备及其加工方法
CN106737619B (zh) * 2016-12-27 2023-06-13 高维智控机器人科技(苏州)有限公司 机械手爪
JP6442563B1 (ja) * 2017-05-30 2018-12-19 キヤノン株式会社 搬送ハンド、搬送装置、リソグラフィ装置、物品の製造方法及び保持機構
CN107718568A (zh) * 2017-10-19 2018-02-23 深圳市深精电科技有限公司 高周波热压自动上下料设备
CN108461574A (zh) * 2018-01-23 2018-08-28 无锡奥特维科技股份有限公司 电池片堆叠装置及方法
US11600580B2 (en) * 2019-02-27 2023-03-07 Applied Materials, Inc. Replaceable end effector contact pads, end effectors, and maintenance methods
EP3772089B1 (en) * 2019-07-30 2021-05-26 Semsysco GmbH Substrate handling device for a wafer
JP7497150B2 (ja) * 2019-12-03 2024-06-10 キヤノン株式会社 搬送装置、リソグラフィ装置及び物品の製造方法
EP3851916A1 (en) 2020-01-17 2021-07-21 ASML Netherlands B.V. Suction clamp, object handler, stage apparatus and lithographic apparatus
CN111498496A (zh) * 2020-05-07 2020-08-07 杭州赴戎科技有限公司 一种利用吸盘吸力对于主板进行出厂检测的装置
KR102826478B1 (ko) 2020-08-25 2025-06-30 주식회사 제우스 기판처리장치 및 기판처리방법
KR102556368B1 (ko) * 2020-10-30 2023-07-18 세메스 주식회사 반송 핸드 및 기판 처리 장치
CN112606031A (zh) * 2020-12-21 2021-04-06 昀智科技（北京）有限责任公司 真空吸附式环形末端夹持器
JP7720185B2 (ja) 2021-07-15 2025-08-07 東京エレクトロン株式会社 基板搬送装置及び基板搬送方法
US12337467B2 (en) 2022-12-09 2025-06-24 Formfactor, Inc. Wafer-handling end effectors configured to selectively lift a wafer from an upper surface of the wafer, probe systems that include the wafer-handling end effectors, and methods of utilizing the wafer-handling end effectors
JP7716828B2 (ja) * 2023-11-30 2025-08-01 平田機工株式会社 ハンド、搬送装置、及び被搬送物の搬送方法

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JP2001341090A (ja) * 2000-06-05 2001-12-11 Shinano Electronics:Kk 真空把持装置及びｉｃテストハンドラ
US7669903B2 (en) * 2007-10-11 2010-03-02 Crossing Automation, Inc. Ultra low contact area end effector

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JPH08143147A (ja) * 1994-11-18 1996-06-04 Metsukusu:Kk 薄板状ワークの吸着装置
JP3122590B2 (ja) 1994-12-28 2001-01-09 株式会社三協精機製作所 吸着パッド
US6652362B2 (en) * 2000-11-23 2003-11-25 Samsung Electronics Co., Ltd. Apparatus for polishing a semiconductor wafer and method therefor
US6942265B1 (en) * 2002-10-23 2005-09-13 Kla-Tencor Technologies Corporation Apparatus comprising a flexible vacuum seal pad structure capable of retaining non-planar substrates thereto
JP4655272B2 (ja) * 2005-08-19 2011-03-23 株式会社安川電機 基板吸着装置とそれを用いた基板搬送装置
JP4614455B2 (ja) * 2006-04-19 2011-01-19 東京エレクトロン株式会社 基板搬送処理装置
KR101534357B1 (ko) * 2009-03-31 2015-07-06 도쿄엘렉트론가부시키가이샤 기판 지지 장치 및 기판 지지 방법
JP5379589B2 (ja) * 2009-07-24 2013-12-25 東京エレクトロン株式会社 真空吸着パッド、搬送アーム及び基板搬送装置
JP5338777B2 (ja) * 2010-09-02 2013-11-13 東京エレクトロン株式会社 塗布、現像装置、塗布、現像方法及び記憶媒体
JP5490741B2 (ja) * 2011-03-02 2014-05-14 東京エレクトロン株式会社 基板搬送装置の位置調整方法、及び基板処理装置
USD674761S1 (en) * 2011-10-20 2013-01-22 Tokyo Electron Limited Wafer holding member

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001341090A (ja) * 2000-06-05 2001-12-11 Shinano Electronics:Kk 真空把持装置及びｉｃテストハンドラ
US7669903B2 (en) * 2007-10-11 2010-03-02 Crossing Automation, Inc. Ultra low contact area end effector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI710438B (zh) * 2017-01-27 2020-11-21 德商蘇士微科技印刷術股份有限公司 用於末端執行器之抽吸裝置、用於保持基板之末端執行器及製造末端執行器之方法

Also Published As

Publication number Publication date
US8720873B2 (en) 2014-05-13
US20120235335A1 (en) 2012-09-20
TW201250916A (en) 2012-12-16
JP5345167B2 (ja) 2013-11-20
JP2012199282A (ja) 2012-10-18
KR101690223B1 (ko) 2017-01-09
KR20120106586A (ko) 2012-09-26

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