JP4471944B2 - 塗布装置 - Google Patents
塗布装置 Download PDFInfo
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- JP4471944B2 JP4471944B2 JP2006048988A JP2006048988A JP4471944B2 JP 4471944 B2 JP4471944 B2 JP 4471944B2 JP 2006048988 A JP2006048988 A JP 2006048988A JP 2006048988 A JP2006048988 A JP 2006048988A JP 4471944 B2 JP4471944 B2 JP 4471944B2
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- unit
- liquid
- wafer
- transfer
- heating
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- 238000000576 coating method Methods 0.000 title claims description 61
- 239000011248 coating agent Substances 0.000 title claims description 59
- 238000012545 processing Methods 0.000 claims description 125
- 238000010438 heat treatment Methods 0.000 claims description 113
- 238000012546 transfer Methods 0.000 claims description 91
- 239000007788 liquid Substances 0.000 claims description 79
- 239000000758 substrate Substances 0.000 claims description 34
- 238000001816 cooling Methods 0.000 claims description 23
- 239000000126 substance Substances 0.000 claims description 16
- 238000003860 storage Methods 0.000 claims description 12
- 238000002955 isolation Methods 0.000 claims description 6
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 4
- 239000004917 carbon fiber Substances 0.000 claims description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 4
- 239000011208 reinforced composite material Substances 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims description 2
- 239000000110 cooling liquid Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 84
- 239000000498 cooling water Substances 0.000 description 14
- 230000007246 mechanism Effects 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 101150075071 TRS1 gene Proteins 0.000 description 7
- 230000032258 transport Effects 0.000 description 7
- 238000011161 development Methods 0.000 description 6
- 238000005192 partition Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 230000007723 transport mechanism Effects 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
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- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
さらにこの塗布、現像装置の実稼動時において未使用の加熱ユニット41aの熱板45を加熱させた場合と加熱させない場合とで他の各処理ユニット41の位置が変動することが抑えられるため、未使用の加熱ユニット41aの熱板45を加熱させる必要がなくなる結果として消費電力を抑えることができる。また支持枠部5を構成する仕切り用横板51及び支持板53の内部には夫々冷却水の流路61,62,63が設けられ、ウエハWの加熱処理時にはこれら流路61,62,63に冷却水が供給されるため、これら横板51及び支持板53の熱による変形がより確実に抑えられる。
S2 処理ブロック
S3 インターフェイスブロック
S4 露光装置
A1〜A5 メインアーム
R1 搬送用通路
T,T2 加熱処理タワー
3 液処理タワー
41 処理ユニット
41a 加熱ユニット
5 支持枠部
Claims (6)
- 基板に薬液を供給して液処理を行う液処理ユニットと、
前記液処理ユニットにより液処理される前あるいは液処理された後の基板を加熱処理するための加熱ユニットを複数段に積み重ねて構成されたタワーと、
加熱ユニットと液処理ユニットとの間で基板の受け渡しを行う搬送手段と、
前記タワーを構成すると共に加熱ユニットが装着されて支持され、炭素繊維強化複合材により構成された支持枠部と、
を備えたことを特徴とする塗布装置。 - 支持枠部は、垂直に伸びる縦部材と、縦部材の間に設けられる横部材とを含み、縦部材は、液体が収容される液体収容部を備えていることを特徴とする請求項1記載の塗布装置。
- 液体収容部は、支持枠部の外部からの液体が流通する流路である請求項2記載の塗布装置。
- 前記液体は、縦部材を冷却する冷却液であることを特徴とする請求項3記載の塗布装置。
- 横部材は、冷却液が流通する流路を備えていることを特徴とする請求項2記載の塗布装置。
- 加熱ユニットは防振部材を介して支持枠部に取り付けられていることを特徴とする請求項1ないし5のいずれか一に記載の塗布装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006048988A JP4471944B2 (ja) | 2006-02-24 | 2006-02-24 | 塗布装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006048988A JP4471944B2 (ja) | 2006-02-24 | 2006-02-24 | 塗布装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007227792A JP2007227792A (ja) | 2007-09-06 |
JP4471944B2 true JP4471944B2 (ja) | 2010-06-02 |
Family
ID=38549274
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006048988A Active JP4471944B2 (ja) | 2006-02-24 | 2006-02-24 | 塗布装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4471944B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5104821B2 (ja) * | 2009-07-21 | 2012-12-19 | 東京エレクトロン株式会社 | 塗布、現像装置 |
JP5348083B2 (ja) * | 2010-07-16 | 2013-11-20 | 東京エレクトロン株式会社 | 塗布、現像装置、塗布、現像方法及び記憶媒体 |
-
2006
- 2006-02-24 JP JP2006048988A patent/JP4471944B2/ja active Active
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Publication number | Publication date |
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JP2007227792A (ja) | 2007-09-06 |
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