TWI483831B - A manufacturing apparatus for sealing a resin sheet for sealing, and a method for producing a resin sheet for sealing - Google Patents

Description

Manufacturing apparatus for sealing resin sheet and method for producing resin sheet for sealing

The present invention relates to a manufacturing apparatus for sealing a resin sheet for insulating and sealing a plurality of electronic components mounted on a substrate, and a method for producing a resin sheet for sealing.

In an electronic component module in which a plurality of electronic components are mounted on a substrate, an insulating resin layer is formed on the substrate so as to cover the electronic components in order to protect the electronic components from moisture and external contact. This insulating resin layer is formed by embedding an electronic component in a semi-hardened sealing resin sheet and then heat-hardening the sealing resin sheet.

A method of producing the resin sheet for sealing is described in the patent document 1 (Japanese Laid-Open Patent Publication No. 2009-29930). According to the description of Patent Document 1, as shown in FIG. 19, the liquid resin composition 102 is applied onto the upper surface of the support film 103 by the coating device 101, and the release film is continuously fed from the release film roll 104. 105 is superposed on the upper surface of the resin composition 102, and the resin composition 102 is pressed by the pressing roller 106, whereby the sealing resin sheet 205 is produced.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-29930

However, in the method of manufacturing the sealing resin sheet 205 described in Patent Document 1, There is a problem that expensive equipment such as the coating device 101, the release film roll 104, and the pressing roller 106 is required, and therefore the manufacturing cost of the sealing resin sheet 205 becomes high.

Further, in the method of applying the liquid resin composition 102 to the upper surface of the support film 103 as described in Patent Document 1, the liquid resin composition 10 is wetted and diffused, so that it is difficult to produce a seal having a large thickness. Resin sheet 205.

Moreover, in the manufacturing method of the sealing resin sheet 205 of the patent document 1, it is difficult to ensure the thickness precision of the sealing resin sheet 205 in the thickness direction in the middle of shaping|molding. In recent years, in order to reduce the low-profile and thickness accuracy of the electronic component module, if the thickness of the sealing resin sheet 205 is low, the low-profile or thickness precision of the electronic component module cannot be achieved.

The problem to be solved by the present invention is to reduce the problem of the production of the above-mentioned sealing resin sheet 205.

The apparatus for producing a resin sheet for sealing according to the present invention is a manufacturing apparatus for sealing a resin sheet for insulating and sealing a plurality of electronic components mounted on a substrate, and includes a molding die, which is provided for self-contained insulation. a space for forming a resin sheet for sealing a resin body in a semi-hardened state; a heating mechanism for heating the resin body at a temperature lower than a curing temperature of the resin body; and a vacuum mechanism for forming the mold Vacuuming; and a pressing mechanism for pressing the resin body to fill the resin material in the forming mold; and the forming mold includes: a pair of pressing plates for pressing the resin body by pressing force from the pressing mechanism The resin sheet for forming and sealing; the rigid body plate disposed between the pair of pressing plates for setting the thickness of the sealing resin sheet after molding; and the elastic member for enclosing the resin body inside the rigid plate It is disposed between a pair of pressing plates, the thickness is larger than the thickness of the rigid body plate, and can be deformed by the pressing force from the pressing plate.

Preferably, the elastic member has a resin reservoir portion that is notched from the surface of the resin body toward the rigid plate.

Alternatively, the elastic member has a first resin reservoir that penetrates from the surface of the resin body to the surface of the rigid plate, and the rigid plate has a second resin reservoir that communicates with the first resin reservoir and is notched inside the rigid plate.

Alternatively, the rigid body plate has a pressure groove that is slit along the inner circumference.

Further, the pressing plate has a concave portion on the surface on which the resin body is pressed, and the elastic member is disposed in a state of being fitted into the concave portion.

The method for producing a resin sheet for sealing according to the present invention is a method for producing a resin sheet for sealing which insulates and seals a plurality of electronic components mounted on a substrate, and includes a preparation step of preparing an insulating resin material a resin body in a semi-hardened state, a pair of pressing plates for pressing the resin body to form a sealing resin sheet, a rigid body plate for setting a thickness of the sealing resin sheet after molding, and a thickness larger than a thickness of the rigid body plate And an elastic member deformed by a pressing force from the pressing plate; a space forming step of disposing the resin body between the pair of pressing plates, disposing the rigid body plate between the pair of pressing plates, and the rigid plate The elastic member is disposed between the pair of pressing plates so as to surround the resin body, and the space surrounding the resin body is formed by the pair of pressing plates and the elastic member; and the vacuuming step is performed to evacuate the space; a step of heating the resin body at a temperature lower than a curing temperature of the resin body; a pressing step of pressing the elastic member and the rigid body plate by the pressing plate, and pressing by pressing the plate Resin body; and a filling step of the resin body and extended by pressing, and the resin material is filled in the space.

Preferably, in the pressing step, the elastic member is deformed by pressing of the pressing plate, and in the filling step, the resin material is blocked between the elastic member and the pressing plate.

Furthermore, in the preparation step, a pair of protective films for protecting the main surface of the resin sheet for sealing after molding are prepared, and in the space forming step, the elastic member and the rigid plate are passed from the bottom surface of the resin body. a protective film is disposed on the upper surface, and another protective film is disposed opposite to the upper surface of the resin body and a protective film, whereby the film surrounding the resin body is formed by one and the other protective film. Area, in the decompression step, The inner region of the film is evacuated, and in the filling step, the resin body is elongated in the direction of the surface of the protective film, and the resin material is filled in the inner region of the film.

Moreover, it is preferable that the elastic member has a resin reservoir that is notched from the surface of the resin body toward the rigid plate, and that the resin material enters the resin reservoir in the filling step.

Alternatively, it is preferable that the elastic member has a first resin reservoir that penetrates from the surface on the resin body side to the surface on the rigid plate side, and the rigid plate has the second resin in communication with the first resin reservoir and is notched to the inside of the rigid plate. In the resin storage portion, the resin material enters the second resin reservoir through the first resin reservoir in the filling step.

Alternatively, it is preferable that the rigid body plate has a pressure groove which is cut along the inner circumference, and in the filling step, the elastic member is bent toward the pressure groove side by the pressure from the resin material.

Moreover, it is preferable that the pressing plate has a concave portion on the surface on which the resin body is pressed, and the elastic member is disposed in a state of being fitted into the concave portion.

According to the apparatus for producing a resin sheet for sealing of the present invention, it is possible to inexpensively produce a sealing resin sheet having a large film thickness without requiring expensive equipment. Further, it is possible to prevent the resin material from leaking outside the molding die, and it is possible to improve the thickness precision of the sealing resin sheet after molding.

According to the method for producing a resin sheet for sealing of the present invention, the resin material can be prevented from leaking outward, and the thickness precision of the resin sheet for sealing can be improved.

11‧‧‧Seal sheet for sealing

12A, 12B‧‧‧ Protective film

15‧‧‧Resin materials

20‧‧‧Cylinder mold

21‧‧‧Liquid resin

22‧‧‧ resin body

22B‧‧‧ resin body

22C‧‧‧ resin body

30‧‧‧Manufacture of equipment

31‧‧‧ under pressure plate

32‧‧‧ Pressurized plate

33A, 33B‧‧‧ heating mechanism

34‧‧‧ Pressurizing mechanism

35‧‧‧floor

36‧‧‧ top board

37‧‧‧ pillar

38‧‧‧vacuum mechanism

39‧‧‧Drive shaft

40, 50, 60, 70, 80‧‧‧ forming dies

43, 45, 81‧‧‧ Press plate

44, 62, 71‧‧‧ rigid body board

44D‧‧‧ rigid body board

46‧‧‧ Space

47‧‧‧Intramembrane area

48, 51, 83‧‧‧ elastic members

50A‧‧‧Forming mould

50C‧‧‧Forming mould

50D‧‧‧forming mould

51A‧‧‧Flexible components

51C‧‧‧Flexible components

51D‧‧‧Flexible components

52‧‧‧Resin Storage Department

52A‧‧‧ incision

52D‧‧‧ incision

53‧‧‧ remaining parts

63‧‧‧1st resin reservoir

64‧‧‧2nd resin reservoir

65‧‧‧ remaining

72‧‧‧pressure trench

73‧‧‧ protruding

81A‧‧‧ Pressing plate

82‧‧‧ recess

82A‧‧‧ recess

83A‧‧‧Flexible components

101‧‧‧ Coating device

102‧‧‧Resin composition

103‧‧‧Support film

104‧‧‧ release film roll

105‧‧‧ release film

106‧‧‧Press roller

140‧‧‧Forming mould

144‧‧‧ rigid body board

145‧‧‧ Press plate

150‧‧‧ gap

151‧‧‧Resin materials

205‧‧‧Seal sheet for sealing

Fig. 1 is a cross-sectional view of the sealing resin sheet 11 as seen from the front.

Fig. 2 is a schematic view showing a manufacturing apparatus 30 for a sealing resin sheet 11 according to the first embodiment of the present invention.

3(A) and 3(B) are views showing the state of the resin body 22 in the middle of molding in Fig. 2 .

4(A) and 4(B) are views showing a state of the resin body 22 in the case where the sealing resin sheet 11 is formed without using an elastic member, as shown in the comparative example of Fig. 3 .

(A) to (E) are views showing the steps of the method for producing the resin sheet for sealing 11 according to the first embodiment of the present invention.

6(A) to 6(E) are views for explaining the steps of manufacturing the sealing resin sheet 11 in order to explain the second embodiment of the present invention.

7(A) to 7(C) are plan views showing the third embodiment of the present invention, and showing the stages before, during, and after the molding of the resin sheet 11 for sealing.

Fig. 8 is a view showing a first modification of the molding die 50 shown in Fig. 7.

Fig. 9 is a view showing a second modification of the resin body 22 shown in Fig. 7.

Fig. 10 is a view showing a third modification of the molding die 50 and the resin body 22 shown in Fig. 7 .

Fig. 11 is a view showing a fourth modification of the molding die 50 shown in Fig. 7.

12(A) and (B) are views for explaining the fourth embodiment of the present invention, and showing the stage before the molding of the sealing resin sheet 11.

(A) and (B) are diagrams showing the stages in the middle of the molding of the resin sheet 11 for sealing from the stage shown in Fig. 12 .

(A) and (B) are diagrams showing the stages after the formation of the resin sheet 11 for sealing from the stage shown in Fig. 13 .

15(A) and 15(B) are views for explaining the fifth embodiment of the present invention, and showing a stage in the middle of molding of the sealing resin sheet 11.

16(A) and 16(B) are diagrams showing the stages after the formation of the sealing resin sheet 11 from the stage shown in Fig. 15 .

FIG. 17 is a view showing a molding die 80 for molding the resin sheet 11 for sealing, which is a sixth embodiment of the present invention.

Fig. 18 is a view showing a modification of the molding die 80 shown in Fig. 17.

Fig. 19 is a view showing a method of manufacturing the sealing resin sheet 205 of the prior art.

[First Embodiment] (sealing resin sheet)

In an electronic component module in which a plurality of electronic components are mounted on a substrate, a sealing resin sheet is used in order to insulate the electronic component. As shown in Fig. 1, the sealing resin sheet 11 is formed into a flat plate shape and has a thickness of 0.1 mm to 3.5 mm. The sealing resin sheet 11 contains an insulating resin material 15 (for example, an epoxy resin) in a semi-hardened state, and contains, for example, cerium oxide or aluminum oxide as a filler in order to improve mechanical strength.

Protective films 12A and 12B are attached to both main surfaces of the sealing resin sheet 11 in order to protect the surface of the sealing resin sheet 11. As shown in FIG. 1, the protective film 12B formed on the upper surface of the sealing resin sheet 11 is flat, and the protective film 12A formed on the lower surface is formed in a shape protruding downward along the sealing resin sheet 11. . The material of the protective films 12A and 12B is, for example, PET (polyethylene terephthalate) or PTFE (polytetrafluoroethylene). The surface of the protective films 12A and 12B is subjected to a release treatment using an oxime resin or the like. When the sealing resin sheet 11 is used in the production process of the electronic component module, the protective films 12A and 12B are peeled off and used. .

(Manufacturing device for sealing resin sheet)

As shown in FIG. 2, the manufacturing apparatus 30 for sealing resin sheets (hereinafter, it is called the manufacturing apparatus 30) is equipped with the shaping|molding die 40 for shaping the sealing resin sheet 11 from the resin body 22. The molding die 40 includes a pair of pressing plates 43 and 45, a rigid plate 44 on the side surface, and an elastic member 48 disposed on the inner side of the rigid plate 44.

The resin body 22 is disposed inside the molding die 40. The resin body 22 is a material for forming the resin sheet 11 for sealing. The resin body 22 contains an insulating resin material 15 in a semi-hardened state, and contains, for example, ceria or alumina as a filler. The shape of the resin body 22 can be various shapes such as a cylinder, a rectangular parallelepiped, and a sheet shape.

The pair of pressing plates 43, 45 are used to press the resin body 22. The pressing plates 43, 45 are formed as The flat plate shape is disposed above and below the resin body 22 so as to sandwich the resin body 22. The material of the pressing plates 43 and 45 may be any shape as long as it is pressed, and for example, stainless steel or aluminum can be used.

The rigid plate 44 is used to set the thickness of the sealing resin sheet 11 to be formed. The rigid body plate 44 is a casing and is disposed between the pair of pressing plates 43 and 45 along the outer circumference of the pressing plates 43 and 45. The material of the rigid plate 44 may be any shape as long as it is pressed, and for example, stainless steel or aluminum can be used.

The elastic member 48 is for preventing the resin body 22 from leaking out of the forming mold 40. The elastic member 48 is a casing having a thickness larger than the thickness of the rigid body plate 44, and is disposed between the pair of pressing plates 43 and 45 so as to surround the resin body 22 on the inner side of the rigid body plate 44. The elastic member 48 can be deformed by the pressing force from the pressing plates 43, 45, and the material is, for example, an fluorenone resin.

The molding die 40 is configured in the positional relationship described above, whereby the space 46 surrounding the resin body 22 by the pair of pressing plates 43, 45 and the elastic member 48 is defined.

In the sealing resin sheet 11 produced in the first embodiment, it is necessary to surface-attach the protective films 12A and 12B. Therefore, in the space 46, the pair of protective films 12A are inserted so as to surround the resin body 22. 12B. Specifically, a protective film 12A is disposed from the bottom surface of the resin body 22 through the upper surface of the elastic member 48 and the rigid body plate 44, and is opposed to the upper surface of the resin body 22 and a protective film 12A. One protective film 12B is attached to the pressing plate 45. As a result, the in-film region 47 surrounded by the resin film 22 by one and the other of the protective films 12A, 12B is defined. In this state, the space 46 and the inner region 47 of the inside of the molding die 40 are decompressed by the manufacturing apparatus 30, and the resin body 22 is heated and pressed.

The manufacturing apparatus 30 includes heating mechanisms 33A, 33B for heating the resin body 22. The heating mechanisms 33A and 33B are built in each of the pressure plate 32 provided on the upper side of the pressing plate 45 and the pressure receiving plate 31 provided on the lower side of the pressing plate 43. The resin body 22 is heated by the heating means 33A, 33B interposing the pressing plates 43, 45.

Further, the manufacturing apparatus 30 includes a vacuum mechanism 38 for decompressing the space 46 and the in-film region 47. The vacuum mechanism 38 is provided to surround the pressure plate 32 and the pressure receiving plate 31. The inside of the vacuum mechanism 38 is evacuated by a vacuum source (not shown), whereby the space 46 and the in-film region 47 are also in a reduced pressure state.

Further, the manufacturing apparatus 30 includes a pressurizing mechanism 34 for pressing the resin body 22. The pressurizing mechanism 34 is disposed at the center of the top plate 36, and the top plate 36 is fixed to the post 37 of the base 35 standing below. The drive shaft 39 of the pressurizing mechanism 34 is connected to the upper side of the pressure plate 32, and the pressurizing plate 32 and the pressing plate 45 are pressed by lowering the drive shaft 39. Thereby, the resin body 22 is extended between the pressing plates 43 and 45 along the surface direction of the pair of protective films 12A and 12B. As a result, the space 46 and the in-film region 47 defined by the molding die 40 are filled with the resin material 15, and the molding of the resin body 22 is completed.

3(A) and 3(B) are views showing the state of the resin body 22 in the molding die 40, and the plan view is shown in (A) and the front view is shown in (B). Further, Fig. 3(A) is a Z1-Z1 cross section with respect to Fig. 3(B), and Fig. 3(B) is a Y1-Y1 cross section with respect to Fig. 3(A). In FIG. 3(A), the shape of the resin body 22 is a column for easy understanding, and the protective film 12A is omitted and drawn.

In the first embodiment, the thickness of the elastic member 48 is larger than the thickness of the rigid plate 44. Therefore, as shown in FIG. 3(B), the pressing plate 45 abuts against the elastic member 48 by interposing the protective films 12A and 12B from the rigid body plate 44. Further, the elastic member 48 can be deformed by the pressing force from the pressing plate 45, and therefore, the surface of the pressing plate 45 is deformed. Therefore, as shown in FIGS. 3(A) and 3(B), the resin material 15 flowing during the molding is blocked between the elastic member 48 and the pressing plate 45. As a result, the resin material 15 is prevented from leaking out of the molding die 40, and the sealing resin sheet 11 having a desired shape is formed.

On the other hand, Fig. 4 (A) and Fig. 4 (B) show a comparative example in the case where the sealing resin sheet 11 is formed without using the elastic member 48, and the plan view is shown in (A), The view is shown in the part of (B). Furthermore, FIG. 4(A) is a Z2-Z2 cross section with respect to FIG. 4(B). Fig. 4(B) is a Y2-Y2 cross section with respect to Fig. 4(A). In FIG. 4(A), for the sake of easy understanding, the shape of the resin body 22 is also a column, and the protective film 12A is omitted and drawn.

In the comparative example, since the elastic member 48 is not present, it is difficult to prevent the resin material 15 from leaking out of the molding die 140. The reason for this is that the molding die 140 is not completely closed when the resin material 15 flowing during the forming reaches the center of the four sides of the rigid plate 144. As shown in FIG. 4(A) and FIG. 4(B), when the resin material 15 reaches the center of the four sides of the rigid plate 144, there is a gap 150 between the pressing plate 145 and the rigid plate 144, and if it is in this state, When pressed, the resin material 15 enters the gap 150. As a result, the leaked resin material 151 is interposed between the rigid plate 144 and the pressing plate 145, and it is difficult to form the sealing resin sheet 11 having the required thickness precision.

In the above description, the resin body 22 is described as a column, but the shape is not limited thereto. By arranging the position of the resin body 22 or the initial parallelism of the pressing plates 43, 45, the elongation state of the resin body 22 varies, and therefore the same problem arises even if the shape of the resin body 22 is different.

In the first embodiment, even if the shape of the resin body 22 is a rectangular parallelepiped or a sheet-like piece, the resin material 15 in the middle of molding can be blocked between the elastic member 48 and the pressing plate 45. Thereby, it is possible to suppress leakage of the resin material 15 to the outside of the molding die 40, and it is possible to form the sealing resin sheet 11 having a desired shape.

Further, according to the first embodiment, the manufacturing apparatus 30 can be prepared. Therefore, the sealing resin sheet 11 can be produced without using expensive equipment. Further, when the manufacturing apparatus 30 is used, the sealing resin sheet 11 having a relatively large film thickness can be produced by the setting of the rigid plate 44.

(Method of Manufacturing Resin Sheet for Sealing)

A method of manufacturing the resin sheet 11 for sealing will be described with reference to FIGS. 5(A) to 5(E), 3(A) and 3(B).

First, as shown in Fig. 5(A), a cylindrical mold 20 having a bottom is prepared, and the liquid resin 21 is injected into the cylindrical mold 20, and a semi-hardened state is formed by heat treatment to produce a tree. Fat body 22. The semi-hardened state refers to the state of the intermediate stage of the hardening reaction, which is also referred to as the B stage. In order to make the liquid resin 21 semi-hardened, in the case of an epoxy resin, heat treatment is performed in an oven for 5 minutes to 120 minutes at a temperature of 40 ° C to 160 ° C.

The resin body 22 can be used for a range of a viscosity of from 120 Pa s to 2,000 Pa s at a temperature of 60 ° C. The viscosity at this time is using the AR550 manufactured by TA Instruments in tool size. The value measured under conditions of 8 mm, a thickness of 550 μm, a frequency of 1 Hz, and a strain of 0.1%.

Next, as shown in FIG. 5(B), a molding die 40 for molding the sealing resin sheet 11 is prepared. The molding die 40 includes a pair of upper and lower pressing plates 43 and 45 and a rigid plate 44 on the side surface, and an elastic member 48 disposed on the inner side of the rigid plate 44. With the configuration described above, the space 46 surrounding the resin body 22 is formed by the pair of pressing plates 43, 45 and the elastic member 48. Further, in the first embodiment, the pair of protective films 12A and 12B are inserted into the space 46, and the in-film region 47 surrounded by the resin body 22 is formed.

Next, as shown in FIG. 5(C), the pair of pressing plates 43, 45 are moved in the direction in which they approach each other, and the pressing plate 45 and the elastic member 48 are in contact with each other via the protective films 12A and 12B. Thereby, the resin body 22 flows and extends between the pair of pressing plates 43 and 45.

When the resin body 22 is elongated, the resin body 22 is heated at a temperature lower than the curing temperature of the resin body 22 (for example, 40 ° C to 160 ° C). The space 46 and the intra-membrane region 47 are decompressed by evacuation, and the pressure is 5000 Pa or less.

As shown in FIG. 5(D), when the movement of the pair of pressing plates 43, 45 is further performed, the resin film 15 of the elongated resin body 22 is pressed, and the protective film 12A of the lower side is placed along the molding die 40. The way the wall expands. Thereby, the space 46 and the film inner region 47 defined by the molding die 40 are filled with the resin material 15, and the molding of the resin body 22 is completed.

3(A) and 3(B) are views showing the state of the resin material 15 in the middle of molding, and FIG. 5 is a view showing a state between FIG. 5(C) and FIG. 5(D). As shown in FIGS. 3(A) and 3(B), the resin material 15 in the middle of molding reaches the center of the four sides of the inner side of the elastic member 48. Of course On the other hand, the elastic member 48 abuts against the pressing plate 45 via the protective films 12A and 12B, and the resin material 15 is blocked at the center of the four sides of the elastic member 48. When the molding is further performed by pressing, the resin material 15 flows toward the four corners of the inner side of the elastic member 48. Thereby, the resin material 15 is formed into a rectangular shape.

After the step shown in FIG. 5(D), the pressing force generated by the pressing plates 43 and 45 is released, and the space 46 surrounded by the pressing plates 43, 45 and the elastic member 48 is opened to the atmosphere. Thereby, the sealing resin sheet 11 in which the protective films 12A and 12B are adhered to both surfaces as shown in FIG. 5(E) is produced. Further, since the heating temperature at the time of molding is lower than the curing temperature of the resin material 15, the sealing resin sheet 11 is maintained in a semi-hardened state.

According to the first embodiment, since the thickness of the elastic member 48 is larger than the thickness of the rigid plate 44, the resin material 15 in the middle of molding is blocked between the elastic member 48 and the pressing plate 45. As a result, the resin material 15 is prevented from leaking out of the molding die 40, and the sealing resin sheet 11 having a desired shape is formed.

[Second Embodiment]

In the second embodiment, the resin sheet 22 is placed between the pressing plates 43 and 45 without using the protective films 12A and 12B (see FIG. 5) shown in the first embodiment, and the sealing resin sheet 11 is produced. In addition, detailed description of the configuration common to the first embodiment will be omitted.

As shown in Fig. 6(A), a cylindrical mold 20 having a bottom is prepared, and the liquid resin 21 is injected into the cylindrical mold 20, and the resin body 22 is produced in a semi-hardened state by heat treatment.

As shown in FIG. 6(B), a molding die 40 for molding the sealing resin sheet 11 is prepared. The molding die 40 includes a pair of upper and lower pressing plates 43 and 45 and a rigid plate 44 on the side surface, and an elastic member 48 disposed on the inner side of the rigid plate 44. The material of the elastic member 48 is an fluorenone resin. The pressing plates 43 and 45 are subjected to a release treatment using an fluorenone resin or the like.

With the above-described configuration, the pair of pressing plates 43, 45 and the elastic member 48 are formed. A space 46 surrounding the resin body 22. Further, when the resin body 22 is extended, the heating temperature is lower than the curing temperature of the resin body 22, and the space 46 is evacuated.

As shown in FIG. 6(C), the pair of pressing plates 43, 45 are moved in the direction in which they approach each other, and the resin body 22 is extended between the pair of pressing plates 43, 45. At this time, the flowing resin material 15 is blocked between the elastic member 48 and the pressing plate 45. As the resin body 22 is extended, as shown in FIG. 6(D), the space 46 defined by the molding die 40 is filled with the resin material 15, and the formation of the resin body 22 is completed.

After the step shown in FIG. 6(D), the pressing force generated by the pressing plates 43, 45 is released, and the space 46 surrounded by the pressing plates 43, 45 and the rigid plate 44 is opened to the atmosphere. Thereby, the sealing resin sheet 11 shown in FIG. 6(E) was produced.

According to the second embodiment, the sealing resin sheet 11 can be produced without using the protective films 12A and 12B. Therefore, the resin sheet for sealing 11 can be manufactured more cheaply.

[Third embodiment]

The third embodiment is an embodiment in which the elastic member shown in the first embodiment is provided with a function of accumulating the remaining resin material 15. In addition, the detailed description of the configuration common to the first embodiment will be omitted.

7(A) to 7(C) are plan views showing the state of the resin body 22 in the molding die 50 in order. In addition, for the sake of easy understanding, the shape of the resin body 22 is a column, and the protective film 12A is omitted for description.

As shown in FIG. 7(A), the molding die 50 includes a pair of upper and lower pressing plates 43 and 45 (not shown in the pressing plate 45), a rigid plate 44 disposed on the outer periphery of the pressing plate 43, and a rigid plate 44. The elastic member 51 on the inner side.

In the third embodiment, the four elastic members 51 of the four-corner column are disposed so as to surround the resin body 22 with a gap therebetween. In other words, at four corners of the elastic member 51 which is a casing shape, a slit is formed in a direction from the surface of the resin body 22 toward the rigid plate 44. This slit serves as a resin reservoir 52 for accumulating the remaining resin material 15. By the resin reservoir 52 The allowable width of the amount of resin that can be put into the forming mold 50 can be expanded.

As shown in Fig. 7(B), the resin material 15 of the resin body 22 which is extended by the pressing step reaches the center of the four sides of the inner side of the elastic member 51, and is blocked by the elastic member 51. The blocked resin material 15 flows toward the four corners of the elastic member 51.

As shown in Fig. 7(C), when the pressing and filling steps of the molding die 50 are performed, the space 46 and the film inner region 47 defined by the molding die 50 are filled with the resin material 15, and the remaining resin material 15 enters into the elastic member. A resin reservoir 52 of four corners of 51. Thereby, the sealing resin sheet 11 having the remaining portions 53 of the resin material 15 at four corners is formed. Further, the sealing resin sheet 11 produced is used for the manufacture of an electronic component module after removing the remaining portion 53 by cutting.

In general, when forming the resin sheet 11 for sealing, it is necessary to sufficiently fill the resin material 15 in the molding die 50, and to set the volume of the resin body 22 to be larger than the volume in the molding die 50. Therefore, the remaining resin material 15 is generated at the time of molding. If the remaining resin material 15 does not exist, the resin material 15 may also leak out of the forming mold 50.

In the third embodiment, since the remaining resin material 15 is stored in the resin reservoir portion 52, the resin material 15 corresponding to the volume of the resin reservoir portion 52 can be additionally accommodated. Therefore, even when the volume of the resin body 22 is larger than the volume in the molding die 50, the resin sheet for sealing 11 can be formed without any problem.

Further, in the third embodiment, the position of the slit of the elastic member 51, the number of slits, the shape of the resin body 22, and the like can be arbitrarily changed. 8 to 11 are views each showing a representative variation of the equations.

FIG. 8 is a view showing a first modification of the molding die 50. As shown in Fig. 8, the elastic member 51A of the molding die 50A is integrally formed as an integral casing. At four corners of the inner side of the elastic member 51A, there is a slit 52A which cuts a part of the elastic member 51A. This slit 52A serves as a resin reservoir 52 for storing the resin material 15.

Fig. 9 is a view showing a second modification of the resin body 22. As shown in Figure 9, the resin body The shape of 22B is a rectangular parallelepiped. In this case, the gap formed between each of the elastic members 51 also becomes the resin reservoir 52.

FIG. 10 is a view showing a third modification of the molding die 50 and the resin body 22. As shown in Fig. 10, a slit 52C is provided at the center of the four sides of the elastic member 51C of the molding die 50C. This slit 52C serves as a resin reservoir 52 for storing the resin material 15. The shape of the resin body 22C is a star shape, and in the case of being pressed, the resin material 15 is first filled in the four corners of the elastic member 51C, and then the resin material 15 is filled into the slit 52C at the center of the four sides.

Fig. 11 is a view showing a fourth modification of the molding die 50. As shown in Fig. 11, the elastic member 51D and the rigid plate 44D of the molding die 50D are annular. The elastic member 51D has a slit 52D at an angle of 90°. This slit 52D serves as a resin reservoir 52 for storing the resin material 15.

[Fourth embodiment]

In the fourth embodiment, an embodiment in which the remaining resin material 15 is accumulated is provided for both the elastic member and the rigid plate shown in the first embodiment. In addition, the detailed description of the configuration common to the first embodiment will be omitted.

12 to 14 are views showing a state in which the resin body 22 in the molding die 60 is sequentially shown, and a plan view is shown in (A) and a front view is shown in (B). Further, Fig. 12(A) is a cross section of Z3-Z3 with respect to Fig. 12(B), and Fig. 12(B) is a cross section of Y3-Y3 with respect to Fig. 12(A). In FIG. 12(A), for the sake of easy understanding, the shape of the resin body 22 is a column, and the protective film 12A is omitted for drawing. Hereinafter, FIG. 13 and FIG. 14 are also the same.

As shown in FIGS. 12(A) and 12(B), the molding die 60 includes a pair of upper and lower pressing plates 43 and 45, a rigid body plate 62 disposed on the outer periphery of the pressing plate 43, and an inner side of the rigid plate 62. The elastic member 51. According to the configuration described above, the space 46 surrounding the resin body 22 is formed by the pair of pressing plates 43, 45 and the elastic member 51. Further, in the fourth embodiment, a pair of protective films 12A and 12B are also inserted into the space 46, and an in-film region 47 surrounded by the resin body 22 is formed.

In the fourth embodiment, the four elastic members 51 of the four-cornered column are disposed so as to surround the resin body 22 with a gap therebetween. In other words, at four corners of the elastic member 51 which is a casing shape, a slit penetrating from the surface of the resin body 22 toward the surface of the rigid plate 62 is formed. This slit serves as a first resin reservoir 63 for storing the remaining resin material 15.

Further, in the fourth embodiment, a slit is formed along the inner side of the rigid plate 62. This slit communicates with the first resin reservoir 63 and serves as a second resin reservoir 64 for storing the resin material 15. The first and second resin reservoirs 63 and 64 can further increase the allowable width of the amount of resin that can be supplied into the molding die 60.

As shown in FIG. 13(A) and FIG. 13(B), the resin material 15 of the resin body 22 which is extended by the pressing step reaches the center of the four sides of the inner side of the elastic member 51, and is elastically deformed by the elastic member 51. Block. The blocked resin material 15 flows toward the four corners of the elastic member 51.

As shown in FIG. 14(A) and FIG. 14(B), when the pressing and filling steps of the molding die 60 are performed, the resin material 15 enters the first resin reservoir 63 of the elastic member 51, and further passes through the first resin reservoir. 63 enters a part of the second resin reservoir 64. Thereby, the sealing resin sheet 11 having the remaining portion 65 of the resin material 15 at four corners as shown in FIG. 14(A) is formed. Further, the sealing resin sheet 11 produced is used for the manufacture of an electronic component module after removing the remaining portion 65 by cutting.

In the fourth embodiment, the remaining resin material 15 is stored in the first and second resin reservoirs 63 and 64. Therefore, the volume corresponding to the first and second resin reservoirs 63 and 64 can be additionally accommodated. Resin material 15. Therefore, even when the volume of the resin body 22 is larger than the volume in the molding die 60, the sealing resin sheet 11 can be formed without any problem.

[Fifth Embodiment]

The fifth embodiment is an embodiment in which the remaining resin material 15 can be accommodated by bending the elastic member shown in the first embodiment. In addition, the detailed description of the configuration common to the first embodiment will be omitted.

15 and FIG. 16 are views showing the state of the resin body 22 in the molding die 70, respectively. The top view is shown in (A), and the front view is shown in the part of (B). Further, Fig. 15(A) is a cross section of Z6-Z6 with respect to Fig. 15(B), and Fig. 15(B) is a cross section of Y6-Y6 with respect to Fig. 15(A). In FIG. 15(A), for the sake of easy understanding, the shape of the resin body 22 is a column, and the protective film 12A is omitted for drawing. Hereinafter, FIG. 16 is also the same.

As shown in FIGS. 15(A) and 15(B), the molding die 70 includes a pair of upper and lower pressing plates 43 and 45, a rigid plate 71 disposed on the outer periphery of the pressing plate 43, and an inner side of the rigid plate 71. Elastic member 48. With the configuration described above, the space 46 surrounding the resin body 22 is formed by the pair of pressing plates 43, 45 and the elastic member 48. Further, in the fifth embodiment, a pair of protective films 12A and 12B are also inserted into the space 46, and an in-film region 47 surrounded by the resin body 22 is formed.

The volume of the resin body 22 which becomes a material of the sealing resin sheet 11 usually has a certain degree of variation. When the volume of the resin body 22 is larger than the volume in the molding die 70 due to the deviation, the remaining resin material 15 is generated at the time of molding.

In the fifth embodiment, the rigid plate 71 is formed with a press groove 72 which is notched along the inner circumference of the rigid plate 71. By the presence of the pressure groove 72, the variation in the volume of the resin body 22 put into the molding die 70 can be tolerated.

As shown in FIGS. 16(A) and 16(B), after the formation of the sealing resin sheet 11, the remaining resin material 15 presses the elastic member 48 to the side. Therefore, the extruded elastic member 48 is bent toward the pressing groove 72 side of the rigid plate 71, and an outward projection 73 is formed on the four sides of the elastic member 48. By this, the resin material 15 corresponding to the volume of the convex portion can be additionally accommodated, and even when the volume of the resin body 22 is slightly larger than the volume in the molding die 70, the sealing resin sheet 11 can be formed without any problem. .

Moreover, although the four sides of the sealing resin sheet 11 produced are outwardly convex, they have a substantially square shape, and therefore can be used for the manufacture of the electronic component module directly in this state.

[Sixth embodiment]

In the sixth embodiment, the pressing plate shown in the first embodiment is provided with a concave portion. Implementation form. In addition, the detailed description of the configuration common to the first embodiment will be omitted.

As shown in FIG. 17, the molding die 80 includes a pair of upper and lower pressing plates 81 and 45, a rigid plate 44 on the side surface, and an elastic member 83 disposed on the inner side of the rigid plate 44.

In the sixth embodiment, the groove-shaped recessed portion 82 is formed in the lower pressing plate 81, and the elastic member 83 is placed in the recessed portion 82. If the elastic member 83 is placed on the flat pressing plate 81, the elastic member 83 may be deformed and displaced from the initial position when the pressing members 81 and 45 are pressed. In the sixth embodiment, the elastic member 83 is placed in a state of being fitted into the concave portion 82 of the pressing plate 81, whereby the positional deviation as described above can be prevented.

Fig. 18 is a modification example in which the cross section of the elastic member is an elliptical shape. The concave portion 82A of the pressing plate 81A is a wedge groove. Here, the lower half of the elliptical elastic member 83A is disposed in an embedded state. Thereby, not only the positional displacement of the elastic member 83A but also the elastic member 83A can be prevented from falling off from the concave portion 82A.

Further, the cross section of the elastic member 83A may be a circular shape instead of the elliptical shape. When the cross section of the elastic member 83A is a circular shape, a gasket made of a commercially available rubber can be used.

12A‧‧‧Protective film

12B‧‧‧Protective film

15‧‧‧Resin materials

22‧‧‧ resin body

30‧‧‧Manufacture of equipment

31‧‧‧ under pressure plate

32‧‧‧ Pressurized plate

33A‧‧‧heating mechanism

33B‧‧‧heating mechanism

34‧‧‧ Pressurizing mechanism

35‧‧‧floor

36‧‧‧ top board

37‧‧‧ pillar

38‧‧‧vacuum mechanism

39‧‧‧Drive shaft

40‧‧‧Forming mould

43‧‧‧ Press plate

44‧‧‧ rigid body board

45‧‧‧ Press plate

46‧‧‧ Space

47‧‧‧Intramembrane area

48‧‧‧Flexible components

Claims (12)

A manufacturing apparatus for a resin sheet for sealing, which is a manufacturing apparatus for sealing a resin sheet for insulating and sealing a plurality of electronic components mounted on a substrate, and includes a molding die, which is used for a space for forming a resin sheet for sealing a resin body in a semi-hardened state containing an insulating resin material; and a heating mechanism for heating the resin body at a temperature lower than a curing temperature of the resin body; a vacuum mechanism, And the pressurizing mechanism for pressing the resin body to fill the resin material in the forming mold; and the forming mold comprises: a pair of pressing plates for The resin sheet for sealing is pressed by a pressing force from the pressing mechanism, and a rigid plate is disposed between the pair of pressing plates to set a thickness of the sealing resin sheet after molding; And an elastic member disposed between the pair of pressing plates on the inner side of the rigid body plate so as to surround the resin body, and having a thickness larger than the rigid body The thickness, and is capable of being deformed by the pressing force from the pressing plate. The apparatus for producing a resin sheet for sealing according to claim 1, wherein the elastic member has a resin reservoir that is notched from the surface of the resin body toward the rigid plate. The apparatus for producing a resin sheet for sealing according to claim 1, wherein the elastic member has a first resin reservoir that penetrates from a surface of the resin body to a surface of the rigid plate. The rigid body plate has a second resin reservoir that communicates with the first resin reservoir and is notched inside the rigid plate. The apparatus for producing a resin sheet for sealing according to claim 1, wherein the rigid plate has a groove which is slit along the inner circumference. The apparatus for producing a resin sheet for sealing according to any one of claims 1 to 4, wherein the pressing plate has a concave portion on a surface on which the resin body is pressed, and the elastic member is disposed in a state of being fitted into the concave portion. A method for producing a resin sheet for sealing, which is a method for producing a resin sheet for sealing which insulates and seals a plurality of electronic components mounted on a substrate, and includes a preparation step: preparation: half a resin body in a hardened state, comprising an insulating resin material; a pair of pressing plates for pressing the resin body to form a sealing resin sheet; and a rigid body plate for setting a sealing resin sheet after molding a thickness; and an elastic member having a thickness larger than a thickness of the rigid body plate and deformable by a pressing force from the pressing plate; and a space forming step of disposing the resin body between the pair of pressing plates, The rigid body plate is disposed between the pair of pressing plates, and the elastic member is disposed between the pair of pressing plates so as to surround the resin body inside the rigid plate, and the pair of pressing plates and the The elastic member forms a space surrounding the resin body; a depressurization step of evacuating the space; and a heating step which is lower than the hardness of the resin body The temperature of the temperature is applied to the resin body; and the pressing step is performed by pressing the elastic member and the rigid plate by the pressing plate, and pressing the resin body by the pressing plate; and filling step of pressing and extending the resin body Thereby using the above resin material Filled in the above space. The method for producing a resin sheet for sealing according to claim 6, wherein in the pressing step, the elastic member is deformed by pressing of the pressing plate, and in the filling step, the elastic member and the pressing plate are The above resin material is blocked. The method for producing a resin sheet for sealing according to claim 6 or 7, wherein in the preparing step, a pair of protective films for protecting a main surface of the resin sheet for sealing after molding are prepared; and in the space forming step And arranging a protective film from the bottom surface of the resin body through the elastic member and the upper surface of the rigid plate, and arranging another protective film so as to face the upper surface of the resin body and the one protective film. Thereby, the inner region surrounding the resin body is formed by the one and the other protective film; in the depressurizing step, the inner region of the film is evacuated; and in the filling step, the surface of the protective film is The resin body is elongated in the direction, and the resin material is filled in the inner region of the film. The method for producing a resin sheet for sealing according to claim 6 or 7, wherein the elastic member has a resin reservoir that is notched from the surface of the resin body toward the rigid plate, and in the filling step, The resin material enters into the above resin reservoir. The method for producing a resin sheet for sealing according to claim 6 or 7, wherein the elastic member has a first resin reservoir that penetrates from the surface of the resin body to the surface of the rigid plate side, and the rigid plate has the above-described The first resin reservoir is connected to the second resin reservoir that is notched inside the rigid plate, and In the filling step, the resin material is passed through the first resin reservoir to the second resin reservoir. The method for producing a resin sheet for sealing according to claim 6 or 7, wherein the rigid plate has a groove which is slit along the inner circumference, and in the filling step, the elasticity is made by pressure from the resin material The member is bent toward the side of the pressure groove. The method for producing a sealing resin sheet according to claim 6 or 7, wherein the pressing plate has a concave portion on a surface on which the resin body is pressed, and the elastic member is disposed in a state of being fitted into the concave portion.