TWI477428B - 基板傳送裝置 - Google Patents

基板傳送裝置 Download PDF

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Publication number
TWI477428B
TWI477428B TW101146342A TW101146342A TWI477428B TW I477428 B TWI477428 B TW I477428B TW 101146342 A TW101146342 A TW 101146342A TW 101146342 A TW101146342 A TW 101146342A TW I477428 B TWI477428 B TW I477428B
Authority
TW
Taiwan
Prior art keywords
plate
unit
positioning
substrate
pillar
Prior art date
Application number
TW101146342A
Other languages
English (en)
Chinese (zh)
Other versions
TW201335049A (zh
Inventor
Sang Hee Yang
Ki Ung Lee
Sung Jin Kim
Eun Hee Cha
Original Assignee
Ap Systems Inc
Samsung Display Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ap Systems Inc, Samsung Display Co Ltd filed Critical Ap Systems Inc
Publication of TW201335049A publication Critical patent/TW201335049A/zh
Application granted granted Critical
Publication of TWI477428B publication Critical patent/TWI477428B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW101146342A 2011-12-20 2012-12-10 基板傳送裝置 TWI477428B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110138695A KR101368819B1 (ko) 2011-12-20 2011-12-20 기판 이송장치

Publications (2)

Publication Number Publication Date
TW201335049A TW201335049A (zh) 2013-09-01
TWI477428B true TWI477428B (zh) 2015-03-21

Family

ID=48637763

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101146342A TWI477428B (zh) 2011-12-20 2012-12-10 基板傳送裝置

Country Status (4)

Country Link
JP (1) JP5575869B2 (ja)
KR (1) KR101368819B1 (ja)
CN (1) CN103177993B (ja)
TW (1) TWI477428B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101958694B1 (ko) 2016-03-03 2019-03-19 에이피시스템 주식회사 Ela 장치용 기판 지지모듈
TWI571420B (zh) * 2016-06-29 2017-02-21 The modified cassette support bar restructuring
CN108328506A (zh) * 2018-03-30 2018-07-27 苏州伊而雅精密部件有限公司 一种升降设备
CN108298457A (zh) * 2018-03-30 2018-07-20 苏州伊而雅精密部件有限公司 一种自动顶升设备
CN109520718A (zh) * 2018-12-25 2019-03-26 江苏省优联检测技术服务有限公司 汽车出风口耐久测试装置
KR102435298B1 (ko) * 2020-07-07 2022-08-24 디앤에이 주식회사 기판 지지장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002231792A (ja) * 2001-01-31 2002-08-16 Tokyo Electron Ltd 基板処理装置
JP2006073876A (ja) * 2004-09-03 2006-03-16 Seiko Epson Corp リフター機構、これを備えた液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置、および電子機器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4245138B2 (ja) * 2003-03-11 2009-03-25 富士通株式会社 基板貼合せ装置及び基板貼合せ方法
JP4920209B2 (ja) * 2005-07-15 2012-04-18 シーケーディ株式会社 板状ワークの移載装置
JP4692131B2 (ja) * 2005-08-04 2011-06-01 株式会社ニコン ステージ装置及び露光装置
JP2008294100A (ja) * 2007-05-23 2008-12-04 Japan Steel Works Ltd:The 基板保持装置
JP2010064159A (ja) * 2008-09-09 2010-03-25 Seiko Epson Corp 吸引保持ハンド
WO2010113486A1 (ja) * 2009-03-31 2010-10-07 株式会社アルバック 保持装置、搬送装置及び回転伝達装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002231792A (ja) * 2001-01-31 2002-08-16 Tokyo Electron Ltd 基板処理装置
JP2006073876A (ja) * 2004-09-03 2006-03-16 Seiko Epson Corp リフター機構、これを備えた液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置、および電子機器

Also Published As

Publication number Publication date
JP5575869B2 (ja) 2014-08-20
CN103177993B (zh) 2016-03-09
JP2013131759A (ja) 2013-07-04
TW201335049A (zh) 2013-09-01
CN103177993A (zh) 2013-06-26
KR101368819B1 (ko) 2014-03-06
KR20130071284A (ko) 2013-06-28

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