TWI476157B - - Google Patents

Info

Publication number
TWI476157B
TWI476157B TW101138460A TW101138460A TWI476157B TW I476157 B TWI476157 B TW I476157B TW 101138460 A TW101138460 A TW 101138460A TW 101138460 A TW101138460 A TW 101138460A TW I476157 B TWI476157 B TW I476157B
Authority
TW
Taiwan
Application number
TW101138460A
Other languages
Chinese (zh)
Other versions
TW201416323A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW101138460A priority Critical patent/TW201416323A/zh
Priority to JP2013210783A priority patent/JP5769776B2/ja
Publication of TW201416323A publication Critical patent/TW201416323A/zh
Application granted granted Critical
Publication of TWI476157B publication Critical patent/TWI476157B/zh

Links

TW101138460A 2012-10-18 2012-10-18 氧化鎵粉末及其製作方法 TW201416323A (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW101138460A TW201416323A (zh) 2012-10-18 2012-10-18 氧化鎵粉末及其製作方法
JP2013210783A JP5769776B2 (ja) 2012-10-18 2013-10-08 酸化ガリウム粉末及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW101138460A TW201416323A (zh) 2012-10-18 2012-10-18 氧化鎵粉末及其製作方法

Publications (2)

Publication Number Publication Date
TW201416323A TW201416323A (zh) 2014-05-01
TWI476157B true TWI476157B (ja) 2015-03-11

Family

ID=50787680

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101138460A TW201416323A (zh) 2012-10-18 2012-10-18 氧化鎵粉末及其製作方法

Country Status (2)

Country Link
JP (1) JP5769776B2 (ja)
TW (1) TW201416323A (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101514945B1 (ko) * 2014-07-07 2015-04-28 (주)티에스엠 디에틸렌글리콜을 사용한 산화갈륨 나노입자의 제조방법 및 이로부터 제조된 산화갈륨
JP7170617B2 (ja) * 2019-10-24 2022-11-14 信越化学工業株式会社 ガリウム前駆体の製造方法およびこれを用いた積層体の製造方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4351821A (en) * 1980-06-27 1982-09-28 Rhone-Poulenc Industries Preparation of gallium oxide
JP2006335616A (ja) * 2005-06-03 2006-12-14 Nippon Light Metal Co Ltd 酸化ガリウム単結晶
JP2011157266A (ja) * 2010-01-07 2011-08-18 Sumitomo Chemical Co Ltd 酸化ガリウム及びその製造方法
JP2011162429A (ja) * 2010-01-15 2011-08-25 Sumitomo Chemical Co Ltd 酸化ガリウムの製造方法
JP2011256088A (ja) * 2010-06-11 2011-12-22 Mitsui Mining & Smelting Co Ltd 酸化ガリウム粉末
JP2012158483A (ja) * 2011-01-31 2012-08-23 Sumitomo Chemical Co Ltd 顆粒状酸化ガリウムの製造方法
JP2012162432A (ja) * 2011-02-09 2012-08-30 Jx Nippon Mining & Metals Corp 酸化ガリウム粉末及びその製造方法並びに酸化物焼結体スパッタリングターゲット及びその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10273318A (ja) * 1997-03-28 1998-10-13 Mitsubishi Materials Corp 酸化ガリウム粉末の製造方法
JP2002020122A (ja) * 2000-06-30 2002-01-23 Tosoh Corp ガリウム化合物粉末、酸化ガリウム粉末及びこれらの製造方法
JP4257959B2 (ja) * 2002-10-22 2009-04-30 Ｄｏｗａエレクトロニクス株式会社 酸化ガリウムの製造方法
JP5588815B2 (ja) * 2010-10-06 2014-09-10 三井金属鉱業株式会社 酸化ガリウム粉末

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4351821A (en) * 1980-06-27 1982-09-28 Rhone-Poulenc Industries Preparation of gallium oxide
JP2006335616A (ja) * 2005-06-03 2006-12-14 Nippon Light Metal Co Ltd 酸化ガリウム単結晶
JP2011157266A (ja) * 2010-01-07 2011-08-18 Sumitomo Chemical Co Ltd 酸化ガリウム及びその製造方法
JP2011162429A (ja) * 2010-01-15 2011-08-25 Sumitomo Chemical Co Ltd 酸化ガリウムの製造方法
JP2011256088A (ja) * 2010-06-11 2011-12-22 Mitsui Mining & Smelting Co Ltd 酸化ガリウム粉末
JP2012158483A (ja) * 2011-01-31 2012-08-23 Sumitomo Chemical Co Ltd 顆粒状酸化ガリウムの製造方法
JP2012162432A (ja) * 2011-02-09 2012-08-30 Jx Nippon Mining & Metals Corp 酸化ガリウム粉末及びその製造方法並びに酸化物焼結体スパッタリングターゲット及びその製造方法

Also Published As

Publication number Publication date
JP5769776B2 (ja) 2015-08-26
JP2014084270A (ja) 2014-05-12
TW201416323A (zh) 2014-05-01

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