TWI475417B - 用於雷射加工工件的自動參數管理 - Google Patents
用於雷射加工工件的自動參數管理 Download PDFInfo
- Publication number
- TWI475417B TWI475417B TW098115987A TW98115987A TWI475417B TW I475417 B TWI475417 B TW I475417B TW 098115987 A TW098115987 A TW 098115987A TW 98115987 A TW98115987 A TW 98115987A TW I475417 B TWI475417 B TW I475417B
- Authority
- TW
- Taiwan
- Prior art keywords
- workpiece
- value
- parameter configuration
- characteristic
- laser
- Prior art date
Links
- 238000003754 machining Methods 0.000 title description 2
- 238000012545 processing Methods 0.000 claims description 82
- 238000005259 measurement Methods 0.000 claims description 49
- 238000000034 method Methods 0.000 claims description 35
- 238000005459 micromachining Methods 0.000 claims description 18
- 230000000877 morphologic effect Effects 0.000 claims description 16
- 238000005553 drilling Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 239000011159 matrix material Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000013442 quality metrics Methods 0.000 claims 4
- 230000003628 erosive effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 17
- 238000004891 communication Methods 0.000 description 14
- 230000008569 process Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 230000003014 reinforcing effect Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 238000012805 post-processing Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
- FOXXZZGDIAQPQI-XKNYDFJKSA-N Asp-Pro-Ser-Ser Chemical compound OC(=O)C[C@H](N)C(=O)N1CCC[C@H]1C(=O)N[C@@H](CO)C(=O)N[C@@H](CO)C(O)=O FOXXZZGDIAQPQI-XKNYDFJKSA-N 0.000 description 1
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229920002430 Fibre-reinforced plastic Polymers 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229920006231 aramid fiber Polymers 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000004643 cyanate ester Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 239000011151 fibre-reinforced plastic Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920003192 poly(bis maleimide) Polymers 0.000 description 1
- -1 polytetrafluorethylene Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000001303 quality assessment method Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/408—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by data handling or data format, e.g. reading, buffering or conversion of data
- G05B19/4083—Adapting programme, configuration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/36—Nc in input of data, input key till input tape
- G05B2219/36503—Adapt program to real coordinates, software orientation
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45165—Laser machining
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Laser Beam Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US6143908P | 2008-06-13 | 2008-06-13 | |
| US12/164,698 US8173931B2 (en) | 2008-06-13 | 2008-06-30 | Automatic recipe management for laser processing a work piece |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201005574A TW201005574A (en) | 2010-02-01 |
| TWI475417B true TWI475417B (zh) | 2015-03-01 |
Family
ID=41413810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098115987A TWI475417B (zh) | 2008-06-13 | 2009-05-14 | 用於雷射加工工件的自動參數管理 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8173931B2 (enExample) |
| JP (1) | JP5820270B2 (enExample) |
| KR (1) | KR101637402B1 (enExample) |
| CN (1) | CN102056705B (enExample) |
| TW (1) | TWI475417B (enExample) |
| WO (1) | WO2009151838A2 (enExample) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9029731B2 (en) | 2007-01-26 | 2015-05-12 | Electro Scientific Industries, Inc. | Methods and systems for laser processing continuously moving sheet material |
| JP2012094591A (ja) * | 2010-10-25 | 2012-05-17 | Disco Abrasive Syst Ltd | ビアホールの加工方法およびレーザー加工装置 |
| FI124538B (fi) * | 2012-12-21 | 2014-10-15 | Primoceler Oy | Menetelmä substraattia sisältävien kappaleiden hitsaamiseksi yhteen fokusoidun lasersäteen avulla |
| CN103433619B (zh) * | 2013-08-30 | 2015-10-21 | 大族激光科技产业集团股份有限公司 | 激光熔覆打印机及线路板的制作方法 |
| US11498156B2 (en) * | 2014-07-03 | 2022-11-15 | Nippon Steel Corporation | Laser processing apparatus |
| EP3256920B1 (en) * | 2015-02-12 | 2021-06-23 | Glowforge Inc. | Cloud controlled laser fabrication |
| JP6570921B2 (ja) * | 2015-03-16 | 2019-09-04 | ビアメカニクス株式会社 | レーザ穴あけ加工条件の設定方法及びレーザ加工機 |
| CN106513985B (zh) * | 2016-12-29 | 2018-08-21 | 齐齐哈尔二机床(集团)有限责任公司 | 激光诱导成型机床 |
| KR102068210B1 (ko) * | 2018-03-09 | 2020-01-20 | 주식회사 이오테크닉스 | 명령어 모드를 이용한 레이저 레시피 제어 방법 및 레이저 제어 시스템 |
| JP7283918B2 (ja) * | 2019-02-20 | 2023-05-30 | 株式会社ディスコ | 加工装置 |
| JPWO2021001905A1 (ja) * | 2019-07-01 | 2021-09-13 | 三菱電機株式会社 | レーザ加工装置、レーザ加工方法、レーザ加工装置の制御装置および機械学習装置 |
| CN113333958B (zh) * | 2020-02-17 | 2023-09-22 | Nps株式会社 | 激光加工系统及方法 |
| KR102327453B1 (ko) * | 2020-02-17 | 2021-11-17 | (주)엔피에스 | 레이저 가공 시스템 및 방법 |
| JP6818950B1 (ja) * | 2020-02-21 | 2021-01-27 | 三菱電機株式会社 | 加工エネルギーの制御方法およびレーザ加工装置 |
| US20230286035A1 (en) * | 2020-06-30 | 2023-09-14 | Canon Virginia, Inc. | Method and system for automated wax mold assembly |
| EP3984686A1 (de) | 2020-10-16 | 2022-04-20 | Bystronic Laser AG | Verfahren, regelungseinheit und laserschneidsystem für kombinierte bahn- und laserprozessplanung für hochdynamische echtzeit-systeme |
| CN115916451B (zh) * | 2020-10-16 | 2024-02-20 | 百超激光有限公司 | 用于计算空间和时间分辨的、组合的设定点数据集的方法、控制单元和激光切割系统 |
| CN113203641B (zh) * | 2021-03-25 | 2023-01-17 | 武汉钢铁有限公司 | 加工参数确定方法、样品加工方法、装置及设备 |
| CN113245560B (zh) * | 2021-06-03 | 2021-09-28 | 恒新增材制造研究中心(佛山)有限公司 | 一种快速获取选区激光熔化设备标准成形参数的方法 |
| CN113453439B (zh) * | 2021-07-15 | 2022-11-11 | 吉安满坤科技股份有限公司 | 一种传感控制Touch技术印制电路板及其制备方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| TW200402916A (en) * | 2002-06-14 | 2004-02-16 | Mitsubishi Electric Corp | Laser processing device and method for controlling the laser processing device |
| US7043330B2 (en) * | 2002-10-31 | 2006-05-09 | Ehsan Toyserkani | System and method for closed-loop control of laser cladding by powder injection |
| US7280883B2 (en) * | 2001-09-06 | 2007-10-09 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing system managing apparatus information of substrate processing apparatus |
| TW200816042A (en) * | 2006-06-02 | 2008-04-01 | Cymer Inc | High power laser flat panel workpiece treatment system controller |
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| US3131252A (en) * | 1961-06-05 | 1964-04-28 | Hazeltine Research Inc | Electronic previewer for the graphic arts |
| US4555610A (en) * | 1983-09-13 | 1985-11-26 | Data Card Corporation | Laser machining system |
| JPH0276684U (enExample) * | 1988-11-22 | 1990-06-12 | ||
| JPH04190987A (ja) * | 1990-11-26 | 1992-07-09 | Murata Mach Ltd | レーザ加工機 |
| US5319183A (en) * | 1992-02-18 | 1994-06-07 | Fujitsu Limited | Method and apparatus for cutting patterns of printed wiring boards and method and apparatus for cleaning printed wiring boards |
| GB9321866D0 (en) * | 1993-10-22 | 1993-12-15 | Kinsman Grant | Fuzzy logic control of laser welding |
| US5841099A (en) | 1994-07-18 | 1998-11-24 | Electro Scientific Industries, Inc. | Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets |
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| JPH10323783A (ja) * | 1997-05-26 | 1998-12-08 | Japan Tobacco Inc | 帯状材の開孔装置 |
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-
2008
- 2008-06-30 US US12/164,698 patent/US8173931B2/en not_active Expired - Fee Related
-
2009
- 2009-05-07 JP JP2011513523A patent/JP5820270B2/ja not_active Expired - Fee Related
- 2009-05-07 CN CN200980121875.4A patent/CN102056705B/zh not_active Expired - Fee Related
- 2009-05-07 KR KR1020107027884A patent/KR101637402B1/ko not_active Expired - Fee Related
- 2009-05-07 WO PCT/US2009/043160 patent/WO2009151838A2/en not_active Ceased
- 2009-05-14 TW TW098115987A patent/TWI475417B/zh not_active IP Right Cessation
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US7280883B2 (en) * | 2001-09-06 | 2007-10-09 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing system managing apparatus information of substrate processing apparatus |
| TW200402916A (en) * | 2002-06-14 | 2004-02-16 | Mitsubishi Electric Corp | Laser processing device and method for controlling the laser processing device |
| US7043330B2 (en) * | 2002-10-31 | 2006-05-09 | Ehsan Toyserkani | System and method for closed-loop control of laser cladding by powder injection |
| TW200816042A (en) * | 2006-06-02 | 2008-04-01 | Cymer Inc | High power laser flat panel workpiece treatment system controller |
Also Published As
| Publication number | Publication date |
|---|---|
| US20090308854A1 (en) | 2009-12-17 |
| TW201005574A (en) | 2010-02-01 |
| JP5820270B2 (ja) | 2015-11-24 |
| KR20110036533A (ko) | 2011-04-07 |
| WO2009151838A3 (en) | 2010-04-22 |
| CN102056705B (zh) | 2016-01-06 |
| CN102056705A (zh) | 2011-05-11 |
| WO2009151838A2 (en) | 2009-12-17 |
| JP2011522706A (ja) | 2011-08-04 |
| US8173931B2 (en) | 2012-05-08 |
| KR101637402B1 (ko) | 2016-07-20 |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |