TWI474888B - Lightning scribing device - Google Patents

Description

Laser marking device

The present invention relates to a laser scribing apparatus for irradiating a brittle material substrate such as a glass substrate, a sapphire substrate, or a semiconductor substrate with a laser beam to form a scribe groove.

In general, a method is known in which a surface of a brittle material substrate is irradiated with a laser beam while being irradiated with a laser beam along a predetermined line of a scribe line, thereby forming a scribe groove. The above method has been disclosed, for example, in Patent Document 1.

In the laser scribing device, the brittle material substrate is placed on a table on an XY stage movable in the X direction and the Y direction orthogonal to each other, and the table is irradiated with the laser light in the X direction and the Y direction. Moving to form a scribe groove on the brittle material substrate. A plate that supports the X-Y platform for processing large substrates uses a stone plate having a small temperature change and excellent physical and mechanical strength. The stone plate is the same as the user in the field of precision machining. The granite is formed into a thick plate shape, and the level of the upper and lower surfaces is precisely machined.

Figure 4 is a schematic front elevational view showing a prior laser scribing apparatus incorporating a stone plate.

A metal upper frame 34 having a stone fixing plate 33 as a base is fixed to the upper surface of the lower frame 31 by a metal frame material via a height-adjustable connecting portion 32. An X-Y platform 39 including an X platform 36 and a Y platform 38 is disposed on the upper surface of the stone plate 33, and the X platform 36 is configured to be along the X The rail 35 extending in the direction (the front and rear direction of FIG. 4) is moved, and the Y platform 38 is disposed so as to be movable along the rail 37 extending in the Y direction (the left-right direction of FIG. 4) on the X platform. A table 41 is provided on the Y stage 38 via a rotating mechanism 40 that rotates about a vertical axis (vertical axis), and a brittle material substrate W to be processed is placed on the table 41.

A laser light source 42 and an observation portion (not shown) for confirming the position are attached to the uppermost portion of the upper frame 34. The inside of the laser light source 42 includes a laser oscillation source, an optical element that guides light from the laser oscillation source to the mirror of the laser light irradiation unit 43, and a collecting lens such as a collecting lens. The brittle material substrate W is placed on the table 41, and the laser beam is irradiated from the laser beam irradiation unit 43 to the brittle material substrate W, and the table 41 is moved in the X direction and the Y direction by the XY stage 39. This can process the scribe groove in the X direction and the Y direction on the brittle material substrate W.

[Advanced technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2010-089143

In the above-described laser scribing apparatus, the stone fixing plate 33 is disposed above the lower frame 31, and the upper frame 34 is assembled on the upper surface of the stone fixing plate 33. The stone fixing plate 33 is configured to be integrally assembled with the upper frame 34 and the lower frame 31, and functions as a part of the frame of the skeleton of the entire apparatus. Furthermore, the stone surface plate 33 is located between the upper and lower frame 31 and 34, the stone surface plate mounting surface configured to reach the set R from the device surface upward at a position corresponding to the date of ₁ L interval, the interval L ₁ between the lower lines The height of the frame 31 and the connecting portion 32 is combined to form a "high waist" structure in which the center of gravity of the device rises.

That is, since generally above the stone surface of the mounting platen 33 and the machine operator to use the plurality of machine, it is generally used in sets based mounting surface of the stone surface plate is set to a height L ₁ of about 800 ~ 850 mm under the frame portion 31 And the stone plate 33, so that the height of the upper surface of the stone plate 33 reaches a height that is easy for humans to operate.

However, in the laser scribing apparatus, the scribing process is continuously performed a plurality of times by repeating the reciprocating movement of the table 41 by the XY stage 39, but when the reciprocating movement is performed, the XY stage 39 is generated. It is the vibration of the vibration source. If the stone fixing plate 33 is disposed between the lower frame 31 and the upper frame 34 (having a height of about 800 mm) as in the above-described example, the vibration is transmitted from the X-Y stage 39 to the entire upper and lower frames via the stone fixing plate 33.

When the vibration generated by the movement of the table is observed, the table 41 is moved in the X direction or the Y direction by the XY stage 39, and a moment of rapid stop (inertial force) is generated at the moment of stopping to the end. Moreover, there is a sudden acceleration change due to the deceleration which is larger as the scanning speed of the table is larger, and the larger inertial force acts to increase the vibration.

The generated vibration will attenuate over time, but if the vibration generated by the previous table movement has not been completely attenuated, the next table movement will start (toward the different direction from the previous one). When moving, the vibration is still moved, and if the laser scribing is performed during the movement, the scribe groove affected by the vibration is formed, and it is difficult to improve the scribing accuracy.

Therefore, in order to improve the scribing accuracy, it is necessary to suppress the vibration so that it is smaller than The original X-Y platform can perform the reciprocating motion at the speed of the maximum moving speed, or the standby motion until the end of the vibration is completely stopped before starting the next movement.

Therefore, in terms of the necessity of suppressing the influence of vibration, the production amount of the scribing process is limited.

Further, the ambient temperature inside the factory in which the prior device of the assembled stone fixing plate 33 is provided may be changed. In this case, the upper surface of the lower frame 33 is fixed to the upper surface of the lower frame 33 of the stone fixing plate 33 because the expansion coefficient is larger than the upper surface of the metal plate 33. In contrast, the uppermost frame portion of the upper frame 34 is largely deformed by thermal expansion, resulting in deflection of the portion. Even if the above-described deflection is slightly generated, an irradiation precision of the laser light source 42 supported by the upper frame 34 or a reading accuracy of the observation machine may cause an error, so that the direction of the light beam irradiation from the laser light irradiation portion 43 is disturbed, which is difficult. Process the exact scribe groove that meets the settings.

Accordingly, it is an object of the present invention to provide a scribing apparatus capable of suppressing vibration during a scribing operation and forming a scribe groove with high precision and accuracy by laser.

The scribing apparatus of the present invention completed to solve the above problems includes: a frame which is three-dimensionally composed of a frame material, and the frame material includes at least a column frame which is erected at four corners, and between the column frames at a lower portion of the column frame a horizontally connected lower frame and a horizontal frame connected to the upper frame at an upper portion of the column frame; and a bottom support plate at an inner space surrounded by the frame The setting surface is supported by the lower horizontal frame; the stone fixing plate is placed on the bottom supporting plate; the moving platform is mounted on the upper surface of the stone fixing plate; and the table is movably moved by the moving platform Supporting and mounting a substrate of a brittle material; an upper support plate supported by the upper horizontal frame above the stone plate; a laser source supported by the upper support plate; and a laser beam irradiation portion, which will come from The laser light of the above-mentioned laser light source is irradiated onto the above-mentioned brittle material substrate.

Here, it is preferable that the height from the installation surface to the upper surface of the bottom support plate, that is, the height of the stone mounting surface L _{2 is} set to 50 mm to 400 mm.

The horizontal vibration generated by the inertial force when the table driven by the mobile platform (XY platform) is rapidly stopped is transmitted to the frame via the stone plate on which the moving platform is placed, but the height of the stone plate is away from the setting surface. The farther the vibration period is, the closer the setting surface is, the shorter the period is. In general, the longer the vibration period, the more time consuming the attenuation, so the attenuation time can be shortened by shortening the frequency of the vibration.

Therefore, in the present invention, in the structure in which the bottom support plate is disposed at a position close to the installation surface of the apparatus and the stone fixing plate is disposed thereon, it is sought to shorten the height from the installation surface to the mounting surface of the stone fixing plate. Therefore, even if the vibration occurs due to the rapid stop of the table, the vibration is short-cycle, so it will be attenuated in a short time, and the previous vibration will be completely stopped before the next stage starts moving, so that the vibration can be performed. Scribing processing with less vibration impact.

Thereby, the processing of the scribe groove can be performed with high precision, and the moving platform can also be operated at a high speed, thereby improving the performance of the device.

Here, if the height of the fixed plate mounting surface height L ₂ from the installation surface to the mounting surface of the stone plate is 50 mm to 400 mm, the vibration in the horizontal direction can be greatly attenuated, and the height is increased. Low, the more the attenuation effect can be further enhanced.

Furthermore, the stone fixing plate is supported by the lower horizontal frame (frame) via the bottom support plate, and since the stone fixing plate is not directly fixed to the frame, it is possible to suppress the difference in thermal expansion coefficient between the frame and the stone fixing plate caused by the temperature change. The effect of the deformation.

In the above invention, it is preferable that the stone fixing plate and the bottom supporting plate are supported so as to be fixed on one side and freely expandable on the other side to prevent deformation of the bottom supporting plate due to a difference in thermal expansion coefficient.

Since it includes an escape mechanism that suppresses deformation of the bottom support plate due to a difference in thermal expansion coefficient, high-precision laser scribing processing can be performed with respect to temperature changes.

Hereinafter, the laser scribing apparatus of the present invention will be described in detail with reference to Figs. 1 to 3 . BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a frame portion of a laser scribing apparatus of the present invention, and Fig. 2 is a partial cross-sectional front view showing a laser scribing apparatus of the present invention.

The frame 1 is composed of four column frames 1a standing at four corners, horizontally connecting the lower frame 1b and the upper frame 1c between the column frames 1a, and a middle frame 1d as a cube for reinforcement. Shape (can also be cuboid). The frame members 1a, 1b, 1c, and 1d are formed of an angle tube of the same metal material, for example, iron or stainless steel having a thickness of about 9 mm.

In the present embodiment, the lower horizontal frame 1b is composed of a total of five frame members, and the total of the five frame members is horizontally connected to the lowermost portion of the adjacent column frame 1a. In addition to the four frame members, there is another lower cross-sectional transverse frame 1e that horizontally connects one of the opposing faces to the center of the lower horizontal frames 1b, 1b. The adjuster 18 for height adjustment of the installation surface R is attached to the lower end surface of the column frame 1a, and the caster 19 for movement is attached to the lower horizontal frame 1b.

Further, at a position close to the setting surface R, the stone fixing plate 3 is horizontally supported via the bottom support plate 2 and by the lower horizontal frame 1b (and the lower cross-sectional horizontal frame 1e).

The upper horizontal frame 1c is formed by forming four square frames which are horizontally connected between the uppermost portions of the adjacent column frames 1a, and is fixed by placing the upper support plate 20 thereon. The laser light source 16 described below is placed on the upper support plate 20, and is further supported by the laser beam irradiation unit 17 from the opening 21 formed in the upper support plate 20 toward the lower side.

Further, the middle horizontal frame 1d is formed in a square shape by four frame members horizontally connecting the central portions of the column frame 1a.

The stone plate 3 is formed into a thick plate shape by granite having a small temperature change and excellent physical and mechanical strength, and the level of the upper and lower surfaces is precisely processed.

The bottom support plate 2 is larger than the surface (projection surface) occupied by the stone fixing plate 3 so as to be able to completely mount the bottom surface of the stone fixing plate 3, and the frame 1 and the stone fixing plate 3 are attached to the inner side surrounded by the frame 1 without being in direct contact. Within the space. Further, as shown in FIG. 2, one side of the stone fixing plate 3 is attached to the bottom support plate 2 via the angular mounting piece 4 and the bolt 5, and the side edge portion on the opposite side of the stone fixing plate 3 is not pressed. 6 is fixed and free to expand, and the upper surface is gently in contact with the pressing piece 6. Thereby, when the ambient temperature changes, the bottom support plate 2 is not restrained by the stone fixing plate 3 to allow thermal expansion, and does not expand due to thermal expansion with the stone fixing plate 3. The influence of the coefficient difference causes deformation of the bottom support plate 2, which does not cause the frame 1 to be affected by the difference in thermal expansion coefficient from the stone plate 3.

From the viewpoint of human operability, the stone mounting plate height L ₂ from the setting surface R to the lower surface of the stone fixing plate _{3 has been} set to about 800 mm in the past, but it is caused by the movement of the table as described below. oscillation frequency depends on the height from the setting surface R, it is preferably mounted to the stone surface plate height L ₂ is set to 50 mm ~ 400 mm, more preferably set to 50 mm ~ 200 mm or less in order to sufficiently increase arising The vibration frequency causes the vibration to decay in a short time.

As shown in FIG. 2 and FIG. 3, an XY stage 13 including an X platform 9 and a Y platform 12 is disposed on the upper surface of the stone plate 3, and the X platform 9 is configured to extend along the X direction by using the drive shaft 8. The set rail 7 is moved, and the Y stage 12 is disposed so as to be movable on the X platform 9 by the drive shaft 11 so as to be movable along the rail 10 extending in the Y direction orthogonal to the X direction on the plane. A table 15 is provided on the Y stage 12 via a rotating mechanism 14 that rotates about a longitudinal axis, and the table 15 is placed with a brittle material substrate W to be processed.

The laser light source 16 and the laser light irradiation portion 17 are mounted as described above on the upper support plate 20 supported by the upper horizontal frame 1c. Although not shown in the drawings, the laser light source 16 includes a laser oscillation source, and an optical system element such as a mirror for guiding the laser from the laser oscillation source to the laser beam irradiation unit 17 and a collecting lens. Further, the upper support plate 20 is also provided with an optical system observation portion (camera) for detecting a point at which the laser light is irradiated and correcting the deviation. Further, when the scribing by thermal stress is performed by heating by laser irradiation and cooling after heating, a refrigerant injection mechanism is also attached to the upper support plate 20.

Next, the operation of the scribing process of the present invention will be described. When the scribe groove is processed on the brittle material substrate W, the brittle material substrate W is placed on the table 15 by a transfer robot (not shown) or the like, and the laser light is irradiated from the laser light irradiation unit 17 to the brittleness. On the material substrate W, the table 15 is moved in the X direction and the Y direction by the XY stage 13, and the scribe groove in the X direction and the Y direction is processed on the brittle material substrate W.

In the above configuration, in the internal space surrounded by the frame 1 (the column frame 1a, the lower horizontal frame 1b, and the upper horizontal frame 1c), the stone fixing plate 3 is placed on the bottom support plate 2 close to the installation surface R of the apparatus. The frequency of the vibration generated by the movement of the table 15 by the XY stage 13 shifts to a high frequency equivalent to the amount of the height L ₂ from the set surface R to the stone plate 3 is shortened. As a result, even if vibration due to the movement of the XY stage 13 occurs, it can be attenuated in a short time, and even when the table 15 is repeatedly moved, the vibration generated when the moving direction is changed is rapidly attenuated without It accumulates, which suppresses vibration. Thereby, the processing of the scribe groove can be performed with high precision, and the high speed operation of the XY stage 13 can also be realized, thereby improving the performance of the device.

Furthermore, since the stone fixing plate 3 is not in direct contact with the frame 1, and one side of the stone fixing plate 3 is fixed to the side edges of the bottom support plate 2 and the opposite side of the stone fixing plate 3 via the mounting piece 4 and the bolt 5 The stone fixing plate 3 is held by the bottom support plate 2 in a state where the pressing piece 6 is slidably pressed from the upper surface, so that the metal bottom support plate 2 and the frame 1 holding the bottom support plate 2 are When the thermal expansion occurs due to a change in the ambient temperature, the bottom support plate 2 is freely expanded without being restrained by the stone fixing plate 3, and the frame 1 is uniformly expanded without being affected by the stone fixing plate 3, thereby suppressing the deflection of a part of the frame 1. Produce change shape. Thereby, the frame 1 can suppress the displacement of the laser light source 16 assembled to the upper portion, the optical system viewer, and the laser beam irradiation portion 17, and the high-precision scribe groove can be processed.

In the present invention, the mounting method in which the bottom support plate 2 is free from thermal expansion by the stone fixing plate 3 is not limited to the above embodiment. For example, although not shown in the drawings, a bolt insertion hole having a size of an expansion gap between the outer peripheral surface of the bolt for connection may be formed in the stone fixing plate 3, and the bolt may be screwed into the hole from the bolt insertion hole. The disk 3 is connected to the bottom plate 2 by the disk 3.

The representative embodiments of the present invention have been described above, but the present invention is not necessarily limited to the above embodiments. For example, the caster 19 and the adjuster 18 on the bottom surface of the frame shown in the embodiment may be removed to directly place the frame 1 on the installation surface R.

Moreover, the mobile platform can also be an X platform that moves in only one direction instead of the X-Y platform.

Further, in the embodiment, the upper horizontal frame 1c is provided at the uppermost portion of the column frame 1a, but if there is a sufficient space between the lower end of the laser light irradiation portion 17 supported by the upper support plate 20 and the table 15, The upper horizontal frame 1c may be horizontally joined at a position slightly downward from the uppermost portion of the column frame 1a, and the upper support plate 20 may be supported thereon. In addition, the present invention can be appropriately modified or changed without departing from the scope of the application.

[Industrial availability]

The present invention is applicable to a laser scribing apparatus for forming scribe grooves in a brittle material substrate such as a glass substrate, a semiconductor substrate, or a sapphire substrate.

1‧‧‧Frame

1a‧‧‧ column frame

1b‧‧‧lower horizontal frame

1c‧‧‧ upper horizontal frame

1d‧‧‧Central frame

1e‧‧‧lower transverse frame

2‧‧‧Bottom support board

3‧‧‧ stone plate

4‧‧‧Installation

5‧‧‧ bolt

6‧‧‧Pressing tablets

7‧‧‧ Track

8‧‧‧Drive shaft

9‧‧‧X platform

10‧‧‧ Track

11‧‧‧Drive shaft

12‧‧‧Y platform

13‧‧‧X-Y platform (mobile platform)

14‧‧‧Rotating mechanism

15‧‧‧Workbench

16‧‧‧Laser light source

17‧‧‧Laser Light Irradiation Department

18‧‧‧Regulator

19‧‧‧ casters

20‧‧‧ upper support board

21‧‧‧ openings

31‧‧‧ Lower frame

32‧‧‧Connecting Department

33‧‧‧ stone plate

34‧‧‧ upper frame

35‧‧‧ Track

36‧‧‧X platform

37‧‧‧ Track

38‧‧‧Y platform

39‧‧‧X-Y platform

40‧‧‧Rotating mechanism

41‧‧‧Workbench

42‧‧‧Laser light source

43‧‧‧Laser Light Irradiation Department

L ₁ ‧‧‧ interval

L ₂ ‧‧‧stone mounting height

R‧‧‧Setting surface

W‧‧‧Battery material substrate

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a frame portion of a scribing apparatus of the present invention.

Figure 2 is a partial cross-sectional front elevational view of the scribing device of the present invention.

Fig. 3 is a schematic plan view showing an X-Y platform portion of the scribing device.

Figure 4 is a front view of a prior scribing device.

1‧‧‧Frame

1a‧‧‧ column frame

1b‧‧‧lower horizontal frame

1c‧‧‧ upper horizontal frame

1d‧‧‧Central frame

1e‧‧‧lower transverse frame

2‧‧‧Bottom support board

3‧‧‧ stone plate

4‧‧‧Installation

5‧‧‧ bolt

6‧‧‧Pressing tablets

7‧‧‧ Track

8‧‧‧Drive shaft

9‧‧‧X platform

10‧‧‧ Track

11‧‧‧Drive shaft

12‧‧‧Y platform

13‧‧‧X-Y platform (mobile platform)

14‧‧‧Rotating mechanism

15‧‧‧Workbench

16‧‧‧Laser light source

17‧‧‧Laser Light Irradiation Department

18‧‧‧Regulator

19‧‧‧ casters

20‧‧‧ upper support board

L ₂ ‧‧‧stone mounting height

R‧‧‧Setting surface

W‧‧‧Battery material substrate

Claims (3)

A laser scribing device, comprising: a frame, which is formed by a frame material, wherein the frame material comprises at least a column frame that is erected at four corners, and the column frame is horizontally connected to the lower portion of the column frame. a lower horizontal frame and an upper horizontal frame connecting the column frames to the upper frame frame; and a bottom support plate supported by the lower horizontal frame near the installation surface of the inner space surrounded by the frame; a fixed plate placed on the bottom support plate; a moving platform mounted on the upper surface of the stone plate; a table supported by the moving platform and carrying a substrate of a brittle material; an upper support plate; The upper horizontal frame is supported above the stone plate; the laser light source is supported by the upper support plate; and the laser light irradiation portion irradiates the laser light from the laser light source to the brittle material Substrate. The laser scribing device of claim 1, wherein the height from the setting surface to the upper surface of the bottom support plate is a stone mounting height L ₂ of 50 mm to 400 mm. The laser marking apparatus of claim 1 or 2, wherein the stone fixing plate and the bottom supporting plate are fixed on one side, and the other side is freely expandable to avoid deformation of the bottom support plate due to a difference in thermal expansion coefficient. stand by.