TWI470159B - 流體控制器 - Google Patents

流體控制器 Download PDF

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Publication number
TWI470159B
TWI470159B TW99129079A TW99129079A TWI470159B TW I470159 B TWI470159 B TW I470159B TW 99129079 A TW99129079 A TW 99129079A TW 99129079 A TW99129079 A TW 99129079A TW I470159 B TWI470159 B TW I470159B
Authority
TW
Taiwan
Prior art keywords
compressed air
way valve
assembly
flow path
air introduction
Prior art date
Application number
TW99129079A
Other languages
English (en)
Chinese (zh)
Other versions
TW201115052A (en
Inventor
Hisatoshi Akamoto
Mutsunori Koyomogi
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of TW201115052A publication Critical patent/TW201115052A/zh
Application granted granted Critical
Publication of TWI470159B publication Critical patent/TWI470159B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • F16K11/22—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members with an actuating member for each valve, e.g. interconnected to form multiple-way valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0263—Construction of housing; Use of materials therefor of lift valves multiple way valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)
  • Multiple-Way Valves (AREA)
  • Valve Housings (AREA)
TW99129079A 2009-08-31 2010-08-30 流體控制器 TWI470159B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009199226 2009-08-31

Publications (2)

Publication Number Publication Date
TW201115052A TW201115052A (en) 2011-05-01
TWI470159B true TWI470159B (zh) 2015-01-21

Family

ID=43627876

Family Applications (1)

Application Number Title Priority Date Filing Date
TW99129079A TWI470159B (zh) 2009-08-31 2010-08-30 流體控制器

Country Status (5)

Country Link
JP (1) JP5560276B2 (ja)
KR (1) KR101337086B1 (ja)
CN (1) CN102483173B (ja)
TW (1) TWI470159B (ja)
WO (1) WO2011024771A1 (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013238279A (ja) * 2012-05-15 2013-11-28 Kawasaki Heavy Ind Ltd 流体制御機器用ケーシング及びこれを使用するマルチコントロール弁装置
JP6195759B2 (ja) * 2013-08-12 2017-09-13 アドバンス電気工業株式会社 定流量弁
WO2015095658A1 (en) * 2013-12-19 2015-06-25 Ge Healthcare Bio-Sciences Ab Remotely actuated valve for a biological liquid treatment system
AT517391B1 (de) * 2015-07-03 2018-11-15 Sonderhoff Eng Gmbh Ventileinrichtung
CN106704704A (zh) * 2017-01-13 2017-05-24 徐州徐工基础工程机械有限公司 一种泥水平衡顶管机用的机外旁通结构
JP7375264B2 (ja) * 2019-06-28 2023-11-08 トーステ株式会社 分岐流路切換弁
JP7425462B2 (ja) * 2019-10-31 2024-01-31 株式会社フジキン 流体制御装置および半導体製造装置
JP7389461B2 (ja) * 2019-10-31 2023-11-30 株式会社フジキン バルブ装置および流体制御装置
JP7468220B2 (ja) * 2020-07-23 2024-04-16 株式会社デンソー 流路切替装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000320700A (ja) * 1999-05-14 2000-11-24 Smc Corp ３ポート弁
JP2006511347A (ja) * 2002-12-20 2006-04-06 アプライド　マテリアルズ　インコーポレイテッド 半導体処理装置のためのマイクロ加工一体化流体配送システム

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2675204A (en) * 1948-09-30 1954-04-13 Johnson Clarence Noncorrodible fluid-pressure operated valve
JPH02118202A (ja) * 1988-10-27 1990-05-02 Nippon Pneumatic Mfg Co Ltd 分岐回路ユニット
DE4032991A1 (de) * 1990-10-15 1992-04-16 Mannesmann Ag Ventil fuer fluide, insbesondere pneumatisch betaetigbares stetigventil
US6007046A (en) * 1997-12-15 1999-12-28 Coulter International Corp. Fluid transport circuit and valve structure therefor
US6736370B1 (en) * 2002-12-20 2004-05-18 Applied Materials, Inc. Diaphragm valve with dynamic metal seat and coned disk springs
ATE475832T1 (de) * 2003-04-22 2010-08-15 Medi Physics Inc Ventil zur leitung von hyperpolarisierten gasen
JP4303177B2 (ja) * 2004-08-06 2009-07-29 シーケーディ株式会社 薬液弁
ES2392000T3 (es) * 2007-05-24 2012-12-03 Mitsubishi Gas Chemical Company, Inc. Procedimiento y aparato de producción de película de resina transparente incolora
JP5079393B2 (ja) * 2007-05-25 2012-11-21 サーパス工業株式会社 流体機器ユニット構造
JP2009127704A (ja) * 2007-11-21 2009-06-11 Alps Electric Co Ltd バルブ装置及び多層化基板

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000320700A (ja) * 1999-05-14 2000-11-24 Smc Corp ３ポート弁
JP2006511347A (ja) * 2002-12-20 2006-04-06 アプライド　マテリアルズ　インコーポレイテッド 半導体処理装置のためのマイクロ加工一体化流体配送システム

Also Published As

Publication number Publication date
JPWO2011024771A1 (ja) 2013-01-31
WO2011024771A1 (ja) 2011-03-03
JP5560276B2 (ja) 2014-07-23
CN102483173A (zh) 2012-05-30
CN102483173B (zh) 2014-08-13
KR20120031519A (ko) 2012-04-03
TW201115052A (en) 2011-05-01
KR101337086B1 (ko) 2013-12-05

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